Research Group: Transducers Science and Technology (TST)

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Number of items: 1420.

2014

Alveringh, D. and Brookhuis, R.A. and Wiegerink, R.J. and Krijnen, G.J.M. (2014) A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 Jan 2014, San Francisco, USA (pp. pp. 680-683).

Yagubizade, Hadi and Darvishi, Milad and Elwenspoek, Miko C. and Tas, Niels R. (2014) A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 January 2014, San Francisco, CA, USA (pp. pp. 1237-1240).

Droogendijk, H. and Boer, M.J. de and Sanders, R.G.P. and Krijnen, G.J.M. (2014) A biomimetic accelerometer inspired by the cricket's clavate hair. Journal of the Royal Society interface, 11 (97). p. 20140438. ISSN 1742-5689

Abelmann, Leon (2014) A bit more across the border. [Lecture]

Groenesteijn, J. and Droogendijk, H. and Boer, M.J. de and Sanders, R.G.P. and Wiegerink, R.J. and Krijnen, G.J.M. (2014) An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 January 2014, San Francisco, CA, USA (pp. pp. 696-699).

Hatakeyama, Kodai and Vermeer, Rolf and Siekman, Martin and Sarajlic, Edin and Tas, Niels and Abelmann, Leon (2014) Batch fabricated scanning Hall probes for quantitative imaging of magnetic stray fields. In: IEEE International Magnetics Conference, INTERMAG 2014, 4-8 May 2014, Dresden, Germany (pp. pp. 1741-1742).

Droogendijk, Harmen (2014) Bio-inspired MEMS flow and inertial sensors. thesis.

Droogendijk, H. and Dagamseh, A.M.K. and Sanders, R.G.P. and Yntema, D.R. and Krijnen, G.J.M. (2014) Characterization of bio-inspired hair flow sensors for oscillatory airflows: techniques to measure the response for both flow and pressure. Measurement science and technology, 25 . 095005. ISSN 0957-0233

Legrain, A. and Janson, T.G. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2014) Controllable elastocapillary folding of three-dimensional micro-objects by through-wafer filling. Journal of applied physics, 115 . p. 214905. ISSN 0021-8979

Krijnen, Gijs J.M. and Droogendijk, Harmen and Dagamseh, Ahmad M.K. and Jaganatharaja, Ram K. and Casas, Jerome (2014) Crickets as bio-inspiration for MEMS-based flow-sensing. In: Flow sensing in air and water: behavioral, neural and engineering principles of operation. Springer, London, UK, pp. 459-488. ISBN 9783642414466

Geerlings, J. and Sarajlic, E. and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. (2014) Electrospray deposition from AFM probes with nanoscale apertures. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 January 2014, San Francisco, CA, USA (pp. pp. 100-103).

Abelmann, Leon and Vries, Jeroen de and Bolhuis, Thijs and Kikuchi, Nobuaki (2014) Energy barriers in nanometer sized magnetic islands prepared from alloyed and multilayered Co/Pt films. In: IEEE International Magnetics Conference, INTERMAG 2014, 4-8 May 2014, Dresden, Germany (pp. pp. 1013-1014).

Dagamseh, A.M.K. (2014) Estimation of squeeze film damping in artificial hair-sensor towards the detection-limit of crickets' hairs. Microsystem technologies, 20 (4-5). pp. 963-970. ISSN 0946-7076

Gauer, Markus and Telitschkin, Dimitri and Gotzig, Ulrich and Batonneau, Yann and Johansson, Hakan and Ivanov, Mikhail and Palmer, Phil and Wiegerink, Remco (2014) First results of PRECISE—Development of a MEMS-based monopropellant micro chemical propulsion system. Acta astronautica, 93 . pp. 77-83. ISSN 0094-5765

Lötters, J.C. and Wouden, E.J. van der and Groenesteijn, J. and Sparreboom, W. and Lammerink, T.S.J. and Wiegerink, R.J. (2014) Integrated multi-parameter flow measurement system. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 January 2014, San Francisco, CA, USA (pp. pp. 975-978).

Groenesteijn, J. and Droogendijk, H. and Wiegerink, R.J. and Lammerink, T.S.J. and Lötters, J.C. and Sanders, R.G.P. and Krijnen, G.J.M. (2014) Parametric amplification in a micro Coriolis mass flow sensor. Journal of applied physics, 115 (19). p. 194503. ISSN 0021-8979

Alink, Laurens and Siekman, Martin and Groenland, J.P.J. (Hans) and Abelmann, Leon (2014) Remarkable difference in reversal mechanism between identically patterned thin film Co/Pt elements of 70 nm diameter in an array. In: IEEE International Magnetics Conference, INTERMAG 2014, 4-8 May 2014, Dresden, Germany (pp. pp. 1059-1060).

Droogendijk, H. and Brookhuis, R.A. and Boer, M.J. de and Sanders, R.G.P. and Krijnen, G.J.M. (2014) Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology. Journal of the Royal Society interface, 11 . p. 20140573. ISSN 1742-5689

Hatakeyama, K. and Sarajlic, E. and Siekman, M.H. and Jalabert, L. and Fujita, H. and Tas, N. and Abelmann, L. (2014) Wafer-scale fabrication of scanning thermal probes with integrated metal nanowire resistive elements for sensing and heating. In: IEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 January 2014, San Francisco, CA, USA (pp. pp. 1111-1114).

2013

Yagubizade, Hadi and Darvishi, Milad and Elwenspoek, Miko C. and Tas, Niels R. (2013) A 4th-order band-pass filter using differential readout of two in-phase actuated contour-mode resonators. Applied physics letters, 103 (17). 173517. ISSN 0003-6951

Pjetri, O. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2013) A crossed-wire 2-dimensional acoustic particle velocity sensor. In: IEEE Sensors 2013, 3-6 November 2013, Baltimore, MD, USA (pp. pp. 1-4).

Groen, M.S. and Brookhuis, R.A. and Houwelingen, M.J. van and Brouwer, D.M. and Lötters, J.C. and Wiegerink, R.J. (2013) A micro control valve with integrated capacitive sensing for ambulant blood pressure waveform monitoring. In: 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013, 27-31 October 2013, Freiburg, Germany (pp. pp. 1469-1471).

Pjetri, Olti and Wiegerink, Remco J. and Lammerink, Theo S. and Krijnen, Gijs J. (2013) A novel two dimensional particle velocity sensor. Proceedings of meetings on acoustics (POMA), 19 (030035). ISSN 1939-800X

Schön, Peter and Geerlings, Joël and Tas, Niels and Sarajlic, Edin (2013) AFM cantilever with in situ renewable mercury microelectrode. Analytical chemistry, 85 (19). pp. 8937-8942. ISSN 0003-2700

Krijnen, Gijs J. and Dagamseh, Ahmad (2013) Biomimetic flow sensors for environmental awareness. In: International Congress on Acoustics, ICA 2013, 2-7 June 2013, Montreal, Canada (pp. 2aEA2).

Khalil, I.S.M. and Pichek, M.P. and Zondervan, L. and Abelmann, L. and Misra, S. (2013) Characterization and control of biological microrobots. In: Experimental robotics. Springer tracts in advanced robotics, 88 . Springer, Bern, Switzerland, pp. 617-631. ISBN 9783319000657

Khalil, I.S.M. and Pichel, M.P. and Abelmann, L. and Misra, S. (2013) Closed-loop control of magnetotactic bacteria. The international journal of robotics research, 32 (6). pp. 637-649. ISSN 0920-4741

Sparreboom, Wouter and Geest, Jan van de and Katerberg, Marcel and Postma, Ferry and Haneveld, Jeroen and Groenesteijn, Jarno and Lammerink, Theo and Wiegerink, Remco J. and Lötters, Joost (2013) Compact mass flow meter based on a micro coriolis flow sensor. Micromachines, 4 (1). pp. 22-33. ISSN 2072-666X

Khalil, I.S.M. and Pichel, M.P. and Reefman, B.A. and Sardan Sukas, Ö. and Abelmann, L. and Misra, S. (2013) Control of magnetotactic bacterium in a micro-fabricated maze. In: IEEE International Conference on Robotics and Automation, ICRA 2013, 6-10 May 2013, Karlsruhe, Germany (pp. pp. 5488-5493).

Legrain, A. and Janson, T.G. and Berenschot, J.W. and Krijnen, G.J.M. and Abelmann, L. and Tas, N.R. (2013) Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. In: 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, 7-10 April 2013, Suzhou, China (pp. pp. 538-541).

Droogendijk, H. and Brookhuis, R.A. and Boer, M.J. de and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Design and fabrication of a biomimetic gyroscope inspired by the fly’s haltere. In: Sense of Contact 15, 10 April 2013, Soesterberg, The Netherlands.

Porter, Benjamin F. and Abelmann, Leon and Bhaskaran, Harish (2013) Design parameters for voltage-controllable directed assembly of single nanoparticles. Nanotechnology, 24 (40). p. 405304. ISSN 0957-4484

Droogendijk, Harmen and Boer, Meint J. de and Sanders, Remco G.P. and Krijnen, Gijs J.M. (2013) Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket's clavate hair. In: IEEE Sensors 2013, 3-6 November 2013, Baltimore, MD, USA (pp. pp. 167-170).

Syed Nawazuddin, M.B. and Boer, M.J. de and Berenschot, J.W. and Ma, K.C. and Elwenspoek, M. and Wiegerink, R.J. (2013) Design, fabrication and characterization of a suspended plate mechano-optical modulator. In: 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 20-24 January 2013, Taipeh, Taiwan (pp. pp. 560-563).

Groenesteijn, J. and Zhang, H. and Tiggelaar, R.M. and Lammerink, T.S.J. and Lötters, J.C. and Gardeniers, J.G.E. and Wiegerink, R.J. (2013) Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system. In: MicroTAS 2013, 27-31 October 2013, Freiburg, Germany.

Zhang, Yang and Meratnia, Nirvana and Havinga, Paul J.M. (2013) Distributed online outlier detection in wireless sensor networks using ellipsoidal support vector machine. Ad hoc networks, 11 (3). pp. 1062-1074. ISSN 1570-8705

Vermeer, R. and Sarajlic, E. and Siekman, M.H. and Kawakatsu, H. and Fujita, H. and Tas, N.R. and Jansen, H.V. (2013) Electrostatically actuated double cantileverl AFM probe for high speed imaging. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII, 16-20 June 2013, Barcelona, Spain (pp. pp. 912-915).

Vries, Jeroen de and Bolhuis, Thijs and Abelmann, Leon (2013) Energy barrier versus switching field for patterned $Co_{80}Pt_{20}$ alloy and Co/Pt multilayer films. Journal of applied physics, 17 (17B910). pp. 1-3. ISSN 0021-8979

Vries, Jeroen de (2013) Energy barriers in patterned media. thesis.

Berenschot, Erwin J.W. and Jansen, Henri V. and Tas, Niels R. (2013) Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon. Journal of micromechanics and microengineering, 23 (5). p. 10. ISSN 0960-1317

Dagamseh, Ahmad and Wiegerink, Remco and Lammerink, Theo and Krijnen, Gijs (2013) Imaging dipole flow sources using an artificial lateral-line system made of biomimetic hair flow sensors. Journal of the Royal Society interface, 10 (83). p. 20130162. ISSN 1742-5662

Krijnen, Gijs and Droogendijk, Harmen and Dagamseh, Ahmad and Jaganatharaja, Ram and Casas, Jerome (2013) Imitating the cricket cercal system: The beauty of the beast with a twist of the engineer. Advances in science and technology, 84 . pp. 19-28. ISSN 1662-0356

Lötters, J.C. and Lammerink, T.S.J. and Pap, M.G. and Sanders, R.G.P. and Boer, M.J. de and Mouris, A.J. and Wiegerink, R.J. (2013) Integrated micro Wobbe index meter towards on-chip energy content measurement. In: IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, 20-24 January 2013, Taipei, Taiwan (pp. pp. 965-968).

Dagamseh, A.M.K. and Bruinink, C.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Droogendijk, H. and Krijnen, G.J.M. (2013) Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity. Journal of micromechanics and microengineering, 23 (3). 035010. ISSN 0960-1317

Brookhuis, R.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Ma, K. and Krijnen, G.J.M. (2013) Large range multi-axis fingertip force sensor. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII, 16-20 June 2013, Barcelona, Spain (pp. pp. 2737-2740).

Khalil, I.S.M. and Magdanz, V. and Sanchez, S. and Schmidt, O.G. and Abelmann, L. and Misra, S. (2013) Magnetic control of potential microrobotic drug delivery systems: nanoparticles, magnetotactic bacteria and self-propelled microjets. In: 35th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2013, 3-7 July 2013, Osaka, Japan (pp. pp. 5299-5302).

Lötters, J.C. and Groenesteijn, J. and Dijkstra, M.A. and Droogendijk, H. and Lammerink, T.S.J. and Wiegerink, R.J. (2013) Micro Coriolis mass flow censor with extended range for a monopropellant micro propulsion system. In: Sensor 2013, 14-16 May 2013, Nürnberg, Germany (pp. pp. 508-512).

Syed Nawazuddin, Mubassira Banu (2013) Micromachined parallel plate structures for Casimir force measurement and optical modulation. thesis.

Engelen, J.B.C. and Khatib, M.G. and Abelmann, L. and Elwenspoek, M.C. (2013) Nanopositioner actuator energy cost and performance. Sensors and actuators A: Physical, 199 (1). pp. 353-365. ISSN 0924-4247

Yagubizade, Hadi (2013) PZT-on-silicon RF-MEMS Lamb wave resonators and filters. thesis.

Groenesteijn, Jarno and Droogendijk, Harmen and Wiegerink, Remco J. and Lammerink, Theo S.J. and Lötters, Joost C. and Sanders, Remco G.P. and Krijnen, Gijs J.M. (2013) Parametric amplification in a micro Coriolis mass flow sensor: reduction of power dissipation without loss of sensitivity. In: IEEE Sensors 2013, 4-6 November 2013, Baltimore, MD, USA (pp. pp. 1626-1629).

Ridder, L. van de and Hakvoort, W.B.J. and Dijk, J. van and Lötters, J.C. and Boer, A. de (2013) Quantitative estimation of the influence of external vibrations on the measurement error of a coriolis mass-flow meter. In: 11th International Conference on Vibration Problems, ICOVP 2013), 9-12 September 2013, Lisbon, Portugal.

Droogendijk, H. and Boer, M.J. de and Brookhuis, R.A. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 16-20 June 2013, Barcelona, Spain (pp. pp. 1707-1710).

Brookhuis, Robert A. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. (2013) Three-axial force sensor with capacitive read-out using a differential relaxation oscillator. In: IEEE Sensors 2013, 3-6 November 2013, Baltimore, MD, USA.

Svetovoy, Vitaly B. and Sanders, Remco G.P. and Elwenspoek, Miko (2013) Transient nanobubbles in short-time electrolysis. Journal of Physics: Condensed matter, 25 (18). p. 184002. ISSN 0953-8984

Droogendijk, Harmen and Bruinink, Christiaan M. and Sanders, Remco G.P. and Krijnen, Gijs J.M. (2013) Tunable sensor response by voltage-control in biomimetic hair flow sensors. Micromachines, 4 (1). pp. 116-127. ISSN 2072-666X

Kokorian, J. and Engelen, J.B.C. and Vries, J. de and Nazeer, H. and Woldering, L.A. and Abelmann, L. (2013) Ultra-flat bismuth films for diamagnetic levitation by template-stripping. Thin solid films, 550 . pp. 298-304. ISSN 0040-6090

Droogendijk, H. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Uncovering signals from measurement noise by electro mechanical amplitude modulation. New journal of physics, 15 (5). 053029. ISSN 1367-2630

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Sarajlic, Edin and Leussink, Pele and Tas, Niels (2013) Wafer-scale fabrication of nanoapertures using corner lithography. Nanotechnology, 24 (28). p. 10. ISSN 0957-4484

2012

Berenschot, Erwin J.W. and Burouni, Narges and Schurink, B. and Honschoten, Joost W. van and Sanders, Remco G.P. and Truckenmuller, Roman and Jansen, Henri V. and Elwenspoek, Miko C. and Apeldoorn, Aart A. van and Tas, Niels R. (2012) 3D Nanofabrication of Fluidic Components by Corner Lithography. Small, 8 (24). pp. 3823-3831. ISSN 1613-6810

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Tas, Niels (2012) 3D Nanofabrication of components by repeated corner lithography: Self Aligned sub-50nm apertures. In: 12th IEEE International Conference on Nanotechnology, IEEE- NANO 2012, 20-23 August 2012, Birmingham, UK.

Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Boer, M.J. de and Elwenspoek, M.C. (2012) 3D force sensor for biomechanical applications. Sensors and actuators A: Physical, 182 . pp. 28-33. ISSN 0924-4247

Shao, X. and Alink, L. and Groenland, J.P.J. and Abelmann, L. and Slump, C.H. (2012) A novel decoding scheme for product codes in bit patterned media. In: IEEE International Magnetics Conference, INTERMAG 2012, 7-11 May 2012, Vancouver, Canada (pp. HT_15).

Abdulla, S.M.C. and Yagubizade, H. and Krijnen, G.J.M. (2012) Analysis of resonance frequency and pull-in voltages of curled micro-bimorph cantilevers. Journal of Micromechanics and Microengineering, 22 (3). 035014. ISSN 0960-1317

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2012) Application of electro mechanical stiffness modulation in biomimetic hair flow sensors. In: IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, 29 January - 2 February 2012, Paris, France (pp. pp. 531-534).

Casas, J. and Liu, Chang and Krijnen, G.J.M. (2012) Biomimetic Flow Sensors. In: Encyclopedia of Nanotechnology. Springer Verlag, Netherlands, pp. 264-276. ISBN 9789048197507

Koelmans, W.W. and Peters, T. and Berenschot, J.W. and Boer, M.J. de and Siekman, M.H. and Abelmann, L. (2012) Cantilever arrays with self-aligned nanotips of uniform height. Nanotechnology, 23 (13). pp. 135301-135309. ISSN 0957-4484

Chinthaginjala, J.K. and Unnikrishnan, S. and Smithers, M.A. and Kip, G.A.M. and Lefferts, L. (2012) Carbon nanofiber growth on thin rhodium layers. Carbon, 50 (3). 1434 - 1437. ISSN 0008-6223

Torrichelli, G. and Zwol, P.J. van and Shpak, O. and Palasantzas, G. and Svetovoy, V.B. and Binns, C. and Kooi, B.J. and Jost, P. and Wittig, M. (2012) Casimir Force Contrast Between Amorphous and Crystalline Phases of AIST. Advanced Functional Materials, 22 (17). pp. 3729-3736. ISSN 1616-301X

Khalil, I.S.M. and Pichel, M.P. and Zondervan, L. and Abelmann, L. and Misra, S. (2012) Characterization and control of biological microrobots. In: 13th International Symposium on Experimental Robotics, June 2012, Quebec, Canada.

Sardan Sukas, Ö. and Yagubizade, H. and Berenschot, J.W. and Boer, M.J. de and Nguyen, M.D. and Abelmann, L. (2012) Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)$O_3$ thin film membranes. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany (pp. C9).

Svetovoy, V.B. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M.C. (2012) Combustion of hydrogen-oxygen mixture in nanobubbles. In: Nonequilibrium processes in plasma, combustion, and atmosphere. Torus Press, Moscow, pp. 201-208. ISBN 9785945881211

Sparreboom, W. and Katerberg, M.R. and Lammerink, T.S.J. and Postma, F.M. and Haneveld, J. and Groenesteijn, J. and Wiegerink, R.J. and Lötters, J.C. (2012) Compact mass flow meter based on a micro Coriolis flow sensor. In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 October 2012, Enschede, The Netherlands (pp. pp. 30-33).

Khalil, I.S.M. and Abelmann, L. and Misra, S. (2012) Control System Design for Wireless Electromagnetic-Based Micromanipulation System. In: 31st Benelux meeting on Systems and Control 2012, 29-29 May 2012, Heijen, The Netherlands (pp. p. 39).

Droogendijk, H. and Brookhuis, R.A. and Boer, M.J. de and Sanders, R.G.P. and Krijnen, G.J.M. (2012) Design and fabrication of a biomimetic gyroscope inspired by the fly's haltere. In: IEEE Sensors 2012, 28-31 October 2012, Taipei, Taiwan (pp. pp. 1400-1403).

Groen, Maarten S. and Brouwer, Dannis M. and Wiegerink, Remco J. and Lötters, Joost C. (2012) Design considerations for a micromachined proportional control valve. Micromachines, 3 (2). pp. 396-412. ISSN 2072-666X

Alink, Laurens and Groenland, Hans (J.P.J.) and Abelmann, Leon (2012) Determination of bit patterned media noise based on island perimeter fluctuations. In: IEEE International Magnetics Conference, INTERMAG 2012, 7-11 May 2012, Vancouver, Canada.

Alink, L. and Groenland, J.P.J. and Vries, J. de and Abelmann, L. (2012) Determination of bit patterned media noise based on island perimeter fluctuations. IEEE Transactions on Magnetics, 48 (11). pp. 4574-4577. ISSN 0018-9464

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. and Khan, M.R.H. and Roeloffzen, C.G.H. (2012) Dual-wavelength $Al_2O_3:Yb^{3+}$ distributed feedback waveguide laser for microwave signal generation. In: 16th European Conference on Integrated Optics, ECIO 2012, 18-20 April 2012, Sitges-Barcelona, Spain.

Been, A.J. and Vermeer, R. and Woldering, L.A. and Abelmann, L. (2012) Effects on imaging by tilting electrostatic actuators in electron microscopy. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany (pp. B14).

Geerlings, J. and Sarajlic, E. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2012) Electrospray deposition from fountain pen AFM probes. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany (pp. C19).

Kozhummal, Rajeevan and Berenschot, Erwin and Jansen, Henri and Tas, Niels and Zacharias, Margit and Elwenspoek, Miko (2012) Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography. Journal of micromechanics and microengineering, 22 (8). 085032. ISSN 0960-1317

Hatakeyama, K. and Sarajlic, E. and Siekman, M.H. and Huijink, R. and Abelmann, L. (2012) Full silicon-nitride probes with corner lithography wireframes for scanning Hall probe microscopy. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany (pp. A13).

Lötters, Joost C. and Lammerink, Theo S. and Haneveld, Jeroen and Hageman, Tijmen A.G. and Wiegerink, Remco J. (2012) Fully integrated micro coriolis mass flow sensor operating at atmospheric pressure. Technisches Messen, 79 (1). pp. 4-9. ISSN 0171-8096

Kozhummal, Rajeevan and Yang, Yang and Güder, Firat and Hartel, Andreas and Lu, Xiaoli and Kücükbayrak, Umut M. and Mateo-Alonso, Aurelio and Elwenspoek, Miko and Zacharias, Margit (2012) Homoepitaxial branching: an unusual polymorph of zinc oxide derived from seeded solution growth. ACS nano, 6 (8). pp. 7133-7141. ISSN 1936-0851

Vries, J. de and Abelmann, L. and Manz, A. and Elwenspoek, M.C. (2012) Human Document Project. In: Jaarboek E.T.S.V. Scintilla, Memories 2010-2011. E.T.S.V. Scintilla, Enschede, Netherlands, pp. 64-66.

Pjetri, O. and Wiegerink, R.J. and Jansen, H.V. and Krijnen, G.J.M. (2012) Improved dicing method for the microflown particle velocity sensor. In: 23rd Micromechanics And Microsystems Europe Workshop, 2012, 9-12 Sep 2012, Ilmenau, Germany.

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Dagamseh, A.M.K. and Wiegerink, R.J. and Krijnen, G.J.M. (2012) Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening. Journal of Micromechanics and Microengineering, 22 (6). 065026. ISSN 0960-1317

Ridder, L. van de and Dijk, J. van and Hakvoort, W.B.J. and Lötters, J.C. (2012) Influence of external damping on phase difference measurement of a Coriolis mass-flow meter. In: EUROMECH Colloquium 524, 27-29 February 2012, Enschede (pp. pp. 44-45).

Lötters, Joost C. and Lammerink, Theo S.J. and Groenesteijn, Jarno and Haneveld, Jeroen and Wiegerink, Remco J. (2012) Integrated thermal and microcoriolis flow sensing system with a dynamic flow range of more than five decades. Micromachines, 3 (1). pp. 194-203. ISSN 2072-666X

Groenesteijn, J. and Boer, M.J. de and Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. (2012) Integrated wafer-through fluidic connection for surface channel technology. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany.

Khalil, I.S.M. and Metz, R.M.P. and Abelmann, L. and Misra, S. (2012) Interaction Force Estimation During Manipulation of Microparticles. In: IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2012, 7-11 October 2012, Vilamoura, Portugal (pp. pp. 950-956).

Janssen, Kjeld G.H. and Li, Jiajie and Hoang, Hanh T. and Vulto, Paul and Berg, Richard J.B.H.N. van den and Overkleeft, Herman S. and Eijkel, Jan C.T. and Tas, Niels R. and Linden, Heiko J. van der and Hankemeier, Thomas (2012) Limits of miniaturization: Assessing ITP performance in sub-micron and nanochannels. Lab on a Chip, 12 (16). pp. 2888-2893. ISSN 1473-0197

Hoang, Hanh Thi (2012) Machining technologies for silicon-based nanochannels and some properties of aqueous solutions confined in these channels. thesis.

Delalande, M. and Vries, J. de and Abelmann, L. and Lodder, J.C. (2012) Measurement of the nucleation and domain depinning field in a single Co/Pt multilayer dot by anomalous Hall effect. Journal of Magnetism and Magnetic Materials, 324 (7). pp. 1277-1280. ISSN 0304-8853

Abdulla, Shahina M.C. and Kauppinen, Lasse J. and Krijnen, Gijs J.M. and Ridder, R.M. de (2012) Mechano-optical wavelength tuning in a photonic crystal microcavity with sub-1 V drive voltage. Optics Letters, 37 (11). pp. 2010-2012. ISSN 0146-9592

Wiegerink, R.J. and Lammerink, T.S.J. and Groenesteijn, J. and Dijkstra, P.J. and Lötters, J.C. (2012) Micro Coriolis mass flow sensor for chemical micropropulsion systems. In: 8th ESA Round Table on Micro and Nano Technologies for Space Applications, 15-18 October 2012, Noordwijk, The Netherlands.

Wiegerink, R.J. and Lammerink, T.S.J. and Groenesteijn, J. and Dijkstra, M. and Lötters, J.C. (2012) Micro Coriolis mass flow sensor for chemical micropropulsion systems. In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 October 2012, Enschede, The Netherlands (pp. pp. 107-110).

Sebastian, A. and Shamsudhin, N. and Rothuizen, H. and Drechsler, U. and Koelmans, W.W. and Bhaskaran, H. and Quenzer, H.J. and Wagner, B. and Despont, M. (2012) Micro-cantilevers with AIN actuators and PtSi tips for multi-frequency atomic force microscopy. Review of Scientific Instruments, 83 (9). 096107. ISSN 0034-6748

Beld, W.T.E. van den and Weerd, E.L. de and Abelmann, L. and Bomer, J.G. and Berg, A. van den and Eijkel, J.C.T. (2012) Microfluidic pump based on arrays of rotating magnetic microspheres. In: MicroTAS 2012, 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, October 28 - November 1, 2012, Okinawa, Japan (pp. pp. 1453-1455).

Dijkstra, M. and Berenschot, J.W. and Boer, M.J. de and Linden, H.J. van der and Hankemeier, T. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. and Tas, N.R. (2012) Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology. Microfluidics and nanofluidics, 13 (1). pp. 29-35. ISSN 1613-4982

Bernhardi, E.H. and Khan, M.R.H. and Roeloffzen, C.G.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2012) Optical Generation of Microwave Signals with a Dual-Phase-Shifted Al2O3:Yb3+ Distributed-Feedback Laser. In: Conference on Lasers and Electro-Optics: Science and Innovations, CLEO: S and I, 6-11 May 2012, San Jose, CA, USA (pp. JW2A.36).

Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2012) Optimization of a micro Coriolis mass flow sensor using Lorentz force actuation. Sensors and Actuators A: Physical, 186 . pp. 48-53. ISSN 0924-4247

Droogendijk, H. and Groenesteijn, J. and Haneveld, J. and Sanders, R.G.P. and Wiegerink, R.J. and Lammerink, T.S.J. and Lötters, J.C. and Krijnen, G.J.M. (2012) Parametric excitation of a micro Coriolis mass flow sensor. Applied physics letters, 101 (22). p. 223511. ISSN 0003-6951

Bernhardi, E.H. and Khan, M.R.H. and Roeloffzen, C.G.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2012) Photonic generation of stable microwave signals from a dual-wavelength $Al_2O_3:Yb^{3+}$ distributed-feedback waveguide laser. Optics Letters, 37 (2). pp. 181-183. ISSN 0146-9592

Svetovoy, V.B. and Zwol, P.J. van and Chevrier, J. (2012) Plasmon enhanced near-field radiative heat transfer for graphene covered dielectrics. Physical Review B: Condensed matter and materials physics, 85 (15). p. 155418. ISSN 1098-0121

Burouni, Narges and Sarajlic, Edin and Siekman, Martin and Abelmann, Leon and Tas, Niels (2012) Pyramidal nanowire tip for atomic force microscopy and thermal imaging. In: 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, 5-8 March 2012, Kyoto, Japan (pp. pp. 86-89).

Broer, W. and Palasantzas, G. and Knoester, J. and Svetovoy, V.B. (2012) Roughness correction to the Casimir force at short separations: Contact distance and extreme value statistics. Physical Review B: Condensed matter and materials physics, 85 (15). p. 155410. ISSN 1098-0121

Brookhuis, R.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Boer, M.J. de (2012) Scalable six-axis force-torque sensor with a large range for biomechanical applications. In: 25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012, 29 January - 2 February 2012, Paris, France (pp. pp. 595-598).

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2012) Stable microwave generation in a dual-phase-shifted $Al_2O_3:Yb^{3+}$ distributed-feedback waveguide laser. In: Advanced Solid-State Photonics, ASSP 2012 - Semiconductor and Waveguide Lasers, 29 January - 3 February 2012, San Diego, CA, USA (pp. AM5A.6).

Yamahata, Christophe and Stranczl, Marc and Sarajlic, Edin and Krijnen, Gijs J.M. and Gijs, Martin A.M. (2012) Temporally aliased video microscopy: an undersampling method for in-plane modal analysis of microelectromechanical systems. Journal of microelectromechanical systems, 21 (4). pp. 934-944. ISSN 1057-7157

Yagubizade, Hadi and Younis, Mohammad I. (2012) The Effect of Squeeze-Film Damping on the Shock Response of Clamped-Clamped Microbeams. Journal of Dynamic Systems, Measurement and Control, 134 (1). 011017. ISSN 0022-0434

Engelen, Johan B.C. and Boer, Hylco de and Beekman, Jethro G. and Fortgens, Laurens C. and Graaf, Derk B. de and Vocke, Sander and Abelmann, Leon (2012) The Micronium-A Musical MEMS instrument. Journal of Microelectromechanical Systems, 21 (2). pp. 262-269. ISSN 1057-7157

Wiegerink, R.J. and Lötters, J.C. and Lammerink, T.S.J. and Pap, M.G. and Mouris, A.J. (2012) The application of micro- and nanofluidics in Wobbe index meters. In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 October 2012, Enschede, The Netherlands (pp. pp. 166-167).

Dekkers, M. and Boschker, H. and van Zalk, M. and Nazeer, H. and Houwman, E. and Rijnders, G. (2012) The significance of the piezoelectric coefficient d31,eff determined from cantilever structures. Journal of micromechanics and microengineering, 23 (2). 025008. ISSN 0960-1317

Vries, J. de and Bolhuis, T. and Wolferen, H.A.G.M. van and Siekman, M.H. and Abelmann, L. (2012) Thermally induced switching field distribution of sub-micron CoPt alloy and Co/Pt multilayer islands. In: IEEE International Magnetics Conference, INTERMAG 2012, 7-11 May 2012, Vancouver, Canada.

Nazeer, Hammad (2012) Thin films on cantilevers. thesis.

Syed Nawazuddin, M.B. and Lammerink, Theo S.J. and Berenschot, Erwin and Boer, Meint de and Ma, Ke-Chun and Elwenspoek, Miko C. and Wiegerink, Remco J. (2012) Towards a Casimir force measurement between micromachined parallel plate structures. Challenges, 3 (2). pp. 261-277. ISSN 2078-1547

Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2012) Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations. Bioinspiration & Biomimetics, 7 (4). 046009. ISSN 1748-3182

Groen, M.S. and Brouwer, D.M. and Lötters, J.C. and Wiegerink, R.J. (2012) Towards a microvalve for proportional control of mass flow. In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 October 2012, Enschede, The Netherlands (pp. pp. 148-151).

Dalfsen, K. van and Wolferen, H.A.G.M. van and Dijkstra, M. and Aravazhi, S. and Bernhardi, E.H. and Garcia Blanco, S.M. and Pollnau, M. (2012) Towards integrated channel waveguide lasers in monoclinic double tungstates. In: Europhoton Conference, 26-31 August 2012, Stockholm, Sweden (pp. ThP.30).

Droogendijk, H. and Krijnen, G.J.M. (2012) Tunable sensor response by voltage-control in biomimetic hair flow sensors. In: 1st International Conference on Microfluidic Handling Systems, 10-12 October 2012, Enschede, The Netherlands (pp. pp. 26-29).

Droogendijk, H. and Krijnen, G.J.M. (2012) Tunable sensor response by voltage-control in biomimetic hair flow sensors. In: ICT.OPEN 2012, 22-23 October 2012, Rotterdam, The Netherlands.

Vries, J. de and Abelmann, L. and Manz, A. and Elwenspoek, M.C. (2012) Tungsten-siliconnitride medium for Mega- to Gigayear data storage. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany.

Groenesteijn, J. and Boer, M.J. de and Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. (2012) Wafer-through access trenches for surface channel technology. In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 October 2012, Enschede, The Netherlands.

David, C. and Claudel, P. and Lötters, J.C. (2012) Water flow calibration facility in France (1 ml/h to 10 000 ml/h). In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 October 2012, Enschede, The Netherlands (pp. pp. 68-71).

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2012) Waveguide Bragg gratings for the realization of high-quality monolithic cavities. In: Conference on Bragg Gratings, Photosensitivity and Poling in Glass Waveguides, BGPP, June 17-21, 2012, Colorado Springs, CO, USA (pp. BM3D.1).

Khalil, I.S.M. and Keuning, J.D. and Abelmann, L. and Misra, S. (2012) Wireless magnetic-based control of paramagnetic microparticles. In: Fourth IEEE RAS/EMBS International Conference on Biomedical Robotics and Biomechatronics, NioRob 2012, 24-27 June 2012, Rome, Italy (pp. pp. 460-466).

2011

Pham, S.V. and Dijkstra, M. and Wolferen, H.A.G.M. van and Pollnau, M. and Krijnen, G.J.M. and Hoekstra, H.J.W.M. (2011) A Novel Mechano-Optical Sensor based on Read-out with a Si3N4 Grated Waveguide. In: Conference on Lasers and Electro-Optics, CLEO 2011, 1-6 May 2011, Baltimore, Maryland, USA (pp. CThQ4).

Shao, Xiaoying and Alink, Laurens and Groenland, J.P.J. and Abelmann, Leon and Slump, Cornelis H. (2011) A Simple Two-Dimensional Coding Scheme for Bit Patterned Media. IEEE Transactions on Magnetics, 47 (10). pp. 2559-2562. ISSN 0018-9464

Shao, X. and Alink, L. and Groenland, J.P.J. and Abelmann, L. and Slump, C.H. (2011) A Simple Two-Dimensional Coding Scheme for Bit Patterned Media. In: IEEE International Magnetics Conference, INTERMAG 2011, 25-29 April 2011, Taipei, Taiwan.

Krijnen, Bram and Hogervorst, Richard and Dijkstra, Jan Willem and Engelen, Johan and Woldering, Léon and Brouwer, Dannis and Abelmann, Leon and Soemers, Herman (2011) A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]. Mikroniek, 51 (4). pp. 5-11. ISSN 0026-3699

Sarajlic, E. and Siekman, M.H. and Fujita, H. and Abelmann, L. and Tas, N.R. (2011) A novel electrostatically actuated AFM probe for vibro-flexural mode operation. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico.

Krijnen, B. and Hogervorst, R.P. and Dijk, J.W. van and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R. (2011) A single-mask thermal displacement sensor in MEMS. Journal of Micromechanics and Microengineering, 21 (7). 074007-074019. ISSN 0960-1317

Stuurman, Gijs and Kurtev, Ivan (2011) Action semantics for defining dynamic semantics of modeling languages. In: Third Workshop on Behavioural Modelling, BM-FA 2011, 6 June 2011, Birmingham, UK (pp. pp. 64-71).

Dagamseh, A.M.K. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2011) Advancements in Biomimetic Hair Flow-Sensor Arrays. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 182-185).

Hoang, H.T. and Segers-Nolten, I.M. and Tas, N.R. and Honschoten, J.W. van and Subramaniam, V. and Elwenspoek, M.C. (2011) Analysis of single quantum-dot mobility inside 1D nanochannel devices. Nanotechnology, 22 (27). p. 275201. ISSN 0957-4484

Dagamseh, A.M.K. and Krijnen, G.J.M. (2011) Arrays of biomimetic hair flow-sensor dedicated for measuring flow patterns. In: International Congress on Flow Sensing in Air and Water, 17-20 July 2011, Bonn, Germany.

Dagamseh, Ahmad and Wiegerink, Remco and Lammerink, Theo and Krijnen, Gijs (2011) Artificial lateral-line system for imaging dipole sources using Beamforming techniques. Procedia Engineering, 25 . pp. 779-782. ISSN 1877-7058

Izadi, Nima (2011) Bio-inspired MEMS aquatic flow sensor arrays. thesis.

Dagamseh, Ahmad Mohammad Khalaf (2011) Bio-inspired hair flow-sensor arrays : from nature to MEMS. thesis.

Khatib, Mohammed G. and Abelmann, Leon (2011) Buffering Implications for the Design Space of Streaming MEMS Storage. In: Design, Automation & Test in Europe, DATE 2011, 14-18 March 2011, Grenoble, France (pp. pp. 253-256).

Zwol, P.J. van and Svetovoy, V.B. and Palasantzas, G. (2011) Characterization of optical properties and surface roughness profiles: The casimir force between real materials. In: Casimir Physics. Lecture Notes in Physics, 834 . Springer Verlag, London, pp. 311-343. ISBN 9783642202889

Svetovoy, Vitaly B. and Sanders, Remco G.P. and Lammerink, Theo S.J. and Elwenspoek, Miko (2011) Combustion of hydrogen-oxygen mixture in electrochemically generated nanobubbles. Physical Review E: Statistical, nonlinear, and soft matter physics, 84 (3). 035302. ISSN 1539-3755

Nazeer, H. and Nguyen, M.D. and Woldering, L.A. and Rijnders, G. and Elwenspoek, M.C. and Abelmann, L. (2011) Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O$_{3}$ thin films. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 238-241).

Elwenspoek, Miko (2011) Counterfactual thinking in physics. In: Counterfactual thinking - counterfactual writing. Linguae & Litterae, 12 . De Gruyter, Berlin, Germany, pp. 62-80. ISBN 9783110268669

Jaganatharaja, Ramasubramanian Kottumakulal (2011) Cricket inspired flow-sensor arrays. thesis.

Izadi, Nima and Krijnen, Gijs J.M. (2011) Design and fabrication process for artificial lateral line sensors. In: Frontiers in Sensing : From Biology to Engineering. Springer Verlag, Wien, pp. 405-421. ISBN 9783211997482

Nazeer, H. and Nguyen, M.D. and Woldering, L.A. and Abelmann, L. and Rijnders, G. and Elwenspoek, M.C. (2011) Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films. Journal of Micromechanics and Microengineering, 21 (0960-1). 074008-074014. ISSN 0960-1317

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Tas, Niels (2011) Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures. In: 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, 20-23 Feb 2011, Kaohsiung, Taiwan (pp. pp. 940-943).

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2011) Distributed Bragg reflector high-Q cavities and lasers in Al2O3 on silicon. In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany (pp. Paper CE5.2).

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2011) Distributed feedback channel waveguide lasers in erbium- and ytterbium-doped Al2O3:Er3 on silicon. In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany (pp. Paper CJ10.4).

Vermeer, R. and Woldering, L.A. and Abelmann, L. (2011) Effect of electric fields generated by microactuators on the imaging in electron microscopy. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 222-225).

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2011) Efficient and ultra-narrow-linewidth integrated waveguide lasers in Al2O3:Yb and Al2O3:Er. In: International Laser Physics Workshop, LPHYS 2011, 11-15 July 2011, Sarajevo, Bosnia and Herzegovina (pp. Paper 4.5.3).

Legrain, A. and Berenschot, J.W. and Sanders, R.G.P. and Ma, K. and Tas, N.R. and Abelmann, L. (2011) Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 250-253).

Kauppinen, Lasse J. and Abdulla, Shahina M.C. and Krijnen, Gijs J.M. and Pollnau, Markus and Ridder, René M. de (2011) Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever. In: Conference on Lasers and Electro-Optics, CLEO/Europe, 22-26 May 2011, Munich, Germany (pp. Paper CE5.1).

Lammerink, Theodorus Simon Josef and Dijkstra, Marcel and Haneveld, Jeroen and Wiegerink, Remco John (2011) Flowmeter. Patent.

Volker, Arno Willem Frederik and Blokland, Huibert and Velthuis, Johannes Fransiscus Maria and Lötters, Joost Conrad (2011) Fluid flow meter using thermal tracers. Patent.

Volker, Arno Willem Frederik and Blokland, Huibert and Velthuis, Johannes Fransiscus Maria and Lötters, Joost Conrad (2011) Fluid flow meter using thermal tracers. Patent.

Koelmans, W.W. and Sebastian, A. and Abelmann, L. and Despont, M. and Pozidis, H. (2011) Force modulation for enhanced nanoscale electrical sensing. Nanotechnology, 22 (25). ISSN 0957-4484

Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Boer, M.J. de and Elwenspoek, M.C. (2011) Force sensor for measuring power transfer between the human body and the environment. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 2042-2045).

Wiegerink, R.J. and Lammerink, T.S.J. and Haneveld, J. and Hageman, T.A.G. and Lötters, J.C. (2011) Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 1135-1138).

Pham, S.V. and Dijkstra, M. and Hollink, A.J.F. and Ridder, R.M. de and Wolferen, H.A.G.M. van and Krijnen, G.J.M. and Pollnau, M. and Hoekstra, H.J.W.M. (2011) Grated waveguide cavity for label-free protein and mechano-optical gas sensing. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia (pp. Paper 2250-CT).

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2011) High-Q Monolithic Distributed Bragg Reflector Cavities in Al2O3 Channel Waveguides. In: Conference on Lasers and Electro-Optics, CLEO 2011, 1-6 May 2011, Baltimore, Maryland, USA (pp. CME4).

Keuning, Jasper D. and Vries, Jeroen de and Abelmann, Leon and Misra, Sarthak (2011) Image-based magnetic control of paramagnetic microparticles in water. In: IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2011, 25-30 September 2011, San Francisco, CA, USA (pp. pp. 421-426).

Vries, J. de and Keuning, J. and Zondervan, L. and Misra, S. and Abelmann, L. (2011) Image-based magnetic control of self-propelling catalytic micro motors. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 234-237).

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, M.D. and Rijnders, G. and Elwenspoek, M.C. (2011) Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films. Microelectronic Engineering, 88 (8). pp. 2345-2348. ISSN 0167-9317

Honschoten, Joost W. van and Jong, Henri W. de and Koelmans, Wabe W. and Parnell, Thomas P. and Zaboronski, Oleg (2011) Information storage and retrieval for probe storage using optical diffraction patterns. Journal of Applied Physics, 110 (10). p. 104309. ISSN 0021-8979

Agazzi, L. and Bradley, J.D.B. and Wörhoff, K. and Pollnau, M. (2011) Integrated Al2O3:Er3+ amplifiers: The impact of fast spectroscopic quenching processes. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia (pp. Paper 5420).

Pham, So V. and Dijkstra, Meindert and Wolferen, Henk A.G.M. van and Pollnau, Markus and Krijnen, Gijs J.M. and Hoekstra, Hugo J.W.M. (2011) Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide. Optics Letters, 36 (15). pp. 3003-3005. ISSN 0146-9592

Abdulla, S.M.C. and Kauppinen, L.J. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Integrated self-aligned tips for dispersion tuning in a photonic crystal micro-cavity. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing. China (pp. pp. 2534-2537).

Lötters, J.C. and Lammerink, T.S.J. and Groenesteijn, J. and Haneveld, J. and Wiegerink, R.J. (2011) Integrated thermal and micro Coriolis flow sensing system with a dynamic flow range of more than 4 decades. In: Netherlands MicroNano Conference 2011, 15-16 November 2011, Ede, The Netherlands.

Chakkalakkal Abdulla, Shahina Mumthaz (2011) Integration of microcantilevers with photonic structures for mechano-optical wavelength selective devices. thesis.

Nguyen, Minh and Dekkers, Matthijn and Zalk, Maarten van and Broekmaat, Joska and Janssens, Arjen and Nazeer, Hammad and Blank, Dave and Rijnders, Guus (2011) Large-area pulsed laser deposition and assembly processes for pierzoelectric MEMS devices based on all-oxide $LaNiO_3/Pb(Zr,Ti)O_3/LaNiO_3$ thin films. In: International Conference on Materials for Advanced Tehcnologies, ICMAT 2011, 26 June - 1 July 2011, Suntec, Singapore.

Wolferen, Henk van and Abelmann, Leon (2011) Laser Interference Lithography. In: Lithography: Principles, Processes and Materials. Nova Publishers, Hauppauge NY, USA, pp. 133-148. ISBN 9781611221237

Elwenspoek, Miko C. (2011) Long-time data storage: relevant time scales. Challanges, 2 (1). pp. 19-36. ISSN 2078-1547

Droogendijk, Harmen and Bruinink, Christiaan M. and Sanders, Remco G.P. and Siebelder, Ortwin G. and Krijnen, Gijs J.M. (2011) Lowering the sensory threshold and enhancing the responsivity of biomimetic hair flow sensors by electrostatic spring softening. In: IEEE Sensors 2011, 28-31 October 2011, Limerick, Ireland (pp. pp. 829-832).

Vries, J. de and Delalande, M.Y. and Abelmann, L. and Lodder, J.C. (2011) Measurement of the nucleation and propagation field in a single Co/Pt multilayer dot by anomalous Hall effect. In: IEEE International Magnetics Conference, INTERMAG 2012, 7-11 May 2012, Vancouver, Canada.

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M.A. and Berenschot, J.W. and Boer, M.J. de and Ridder, R.M. de and Krijnen, G.J.M. (2011) Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 9-12).

Honschoten, J.W. van and Legrain, A. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2011) Micro-assembly of three dimensional tetrahedra by capillary forces. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 288-291).

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning. Journal of Micromechanics and Microengineering, 21 (12). p. 125010. ISSN 0960-1317

Kauppinen, Lasse J. and Abdulla, Shahina M.C. and Dijkstra, Meindert and Boer, Meint J. de and Berenschot, Erwin and Krijnen, Gijs J.M. and Pollnau, Markus and Ridder, René M. de (2011) Micromechanically tuned ring resonator in silicon on insulator. Optics Letters, 36 (7). pp. 1047-1049. ISSN 0146-9592

Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and Ridder, R.M. de (2011) Micromechanically tuned ring resonator in silicon on insulator. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia (pp. Paper 4240-IT).

Groenesteijn, J. and Lammerink, T.S.J. and Lötters, J.C. and Haneveld, J. and Wiegerink, R.J. (2011) Miniaturization of a micro coriolis mass flow sensor with lorentz actuation. In: Micromechanics and Micro systems Europe Workshop, MME 2011, June 19-22, 2011, Toensberg, Norway.

Stranczl, M. and Sarajlic, E. and Krijnen, G.J.M. and Fujita, H. and Gijs, M.A.M. and Yamahata, C. (2011) Modal analysis and modeling of a frictionless electrostatic rotary stepper micromotor. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 1257-1260).

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2011) Monolithic Distributed Bragg Reflector Cavities in Al2O3 with Quality Factors Exceeding One Million. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia (pp. Paper 4240-CT).

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter. Journal of Micromechanics and Microengineering, 21 (7). 0740041. ISSN 0960-1317

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) Non-degenerate parametric amplification and filtering in biomimetic hair flow sensors. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2011, 5-9 June 2011, Beijing, China (pp. pp. 2038-2041).

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) Non-resonant parametric amplification in biomimetic hair flow sensors: Selective gain and tunable filtering. Applied Physics Letters, 99 (21). p. 213503. ISSN 0003-6951

Droogendijk, H. and Dagamseh, A.M.K. and Yntema, D.R. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) On the Use of Various Oscillatory Air Flow Fields for Characterization of Biomimetic Hair Flow Sensors. In: ICT.OPEN 2011, 14-15 Nov 2011, Veldhoven, The Netherlands.

Droogendijk, H. and Dagamseh, A.M.K. and Yntema, D.R. and Sanders, R.G.P. and Krijnen, G.J.M. (2011) On the use of various oscillatory air flow fields for characterization of biomimetic hair flow sensors. In: Flow Sensing in Air and Water, 17-21 July 2011, Bonn, Germany (pp. p. 62).

Iannuzzi, Davide and Deladi, Szabolcs and Elwenspoek, Michael Curt (2011) Optical device comprising a cantilever and method of fabrication and use thereof. Patent.

Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2011) Optimization of a micro Coriolis mass flow sensor. Procedia Engineering, 25 . pp. 783-786. ISSN 1877-7058

Engelen, Johannes Bernardus Charles (2011) Optimization of comb-drive actuators : nanopositioners for probe-based data storage and musical MEMS. thesis.

Groenesteijn, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Haneveld, J. and Lötters, J.C. (2011) Optimization of the Lorentz Force Actuation for a micro Coriolis mass flow sensor. In: Netherlands MicroNano Conference 2011, 15-16 November 2011, Ede, The Netherlands.

Sengo, G. and Wolferen, H.A.G.M. van and Driessen, A. (2011) Optimized Deep UV Curing Process for Metal-Free Dry-Etching of Critical Integrated Optical Devices. Journal of the Electrochemical Society, 158 (10). H1084-H1089. ISSN 0013-4651

Koelmans, Wabe Watze (2011) Parallel probe readout for data storage. thesis.

Khatib, Mohammed G. (2011) Performance Evaluation of Three Architectural Variants for Multi-sled MEMS Storage. In: IEEE 19th International Symposium on Modeling, Analysis & Simulation of Computer and Telecommunication Systems, MASCOTS 2011, 25-27 July 2011, Singapore (pp. pp. 217-226).

Chapuis, Y.-A. and Jalabert, L. and Sarajlic, E. and Vermeer, R. and Collard, D. and Fujita, H. (2011) Polymer membrane-based thermo-pneumatic actuation for distributed air-jet planar micromanipulator. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 141-144).

Woldering, Léon A. and Abelmann, Leon and Elwenspoek, Miko C. (2011) Predicted photonic band gaps in diamond-lattice crystals built from silicon truncated tetrahedrons. Journal of Applied Physics, 110 (4). 043107-043114. ISSN 0021-8979

Gemelli, Marcellino and Abelmann, Leon and Engelen, Johan B.C. and Khatib, Mohammed G. and Koelmans, Wabe W. and Zaboronski, Olog (2011) Probe Storage. In: Memory mass storage. Springer Verlag, Berlin Heidelberg, pp. 99-167. ISBN 9783642147517

Nazeer, H. and Nguyen, M.D. and Rijnders, G. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2011) Pulsed laser deposited $Pb(Zr,Ti)O_3$ thin films with excellent piezoelectric and mechanical properties. In: 20th IEEE International Symposium on Applications of Ferroelectrics, International Symposium on Piezoresponse Force Microscopy & Nanoscale Phenomena in Polar Materials, 24-27 July 2011, Vancouver Canada.

Broer, Wijnand and Palasantzas, George and Knoester, Jasper and Svetovoy, Vitaly B. (2011) Roughness correction to the Casimir force beyond perturbation theory. EPL: A Letters Journal Exploring the Frontiers of Physics, 95 (3). pp. 1-6. ISSN 0295-5075

Alink, Laurens and Marsman, G.H. (Mathijs) and Woldering, Léon A. and Abelmann, Leon (2011) Simulating three dimensional self-assembly of shape modified particles using magnetic dipolar forces. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 254-257).

Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. and Groenesteijn, J. and Haneveld, J. (2011) Single chip flow sensing system with a dynamic flow range of more than 4 decades. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 890-893).

Droogendijk, H. and Boer, M.J. de and Krijnen, G.J.M. (2011) Stochastic Resonance in an Electrostatically Controlled MEMS-slider. In: Sense of Contact 13, April 7, 2011, Zeist, the Netherlands.

Yamahata, C. and Sarajlic, E. and Stranczl, M. and Krijnen, G.J.M. and Gijs, M.A.M. (2011) Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images. In: 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11, 5-9 June 2011, Beijing. China (pp. pp. 1697-1700).

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2011) Switchable capacitor. Patent.

Svetovoy, V. and Moktadir, Z. and Elwenspoek, M. and Mizuta, H. (2011) Tailoring the thermal Casimir force with graphene. EPL: A Letters Journal Exploring the Frontiers of Physics, 96 (1). p. 14006. ISSN 0295-5075

Abelmann, Leon (2011) The 21st MicroMechanics Europe Workshop (MME 2010). Journal of Micromechanics and Microengineering, 21 (7). 070201-070202. ISSN 0960-1317

Dagamseh, A.M.K. and Lammerink, T.S.J. and Sanders, R.G.P. and Wiegerink, R.J. and Krijnen, G.J.M. (2011) Towards high-resolution flow cameras made of artificial hair flow-sensors for flow pattern recognition. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 648-651).

Sardan Sukas, Ö. and Berenschot, J.W. and Boer, M.J. de and Nguyen, M.D. and Zalk, M. van and Abelmann, L. (2011) Towards in-situ tem analysis of PLD Pb(Zr,Ti)O$_{3}$ thin film membranes. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 287-290).

Nawazuddin, M.B.S. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and Boer, M. de and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 434-437).

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Jansen, H.V. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics Express, 19 (17). pp. 15864-15878. ISSN 1094-4087

Bernhardi, E.H. and Wolferen, H.A.G.M. van and Wörhoff, K. and Ridder, R.M. de and Pollnau, M. (2011) Ultra-narrow-linewidth distributed feedback lasers in Al2O3:Er3+ and Al2O3:Yb3+. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia (pp. Paper 5420).

Jaganatharaja, R.K. and Droogendijk, H. and Vats, S. and Hagedoorn, B. and Bruinink, C.M. and Krijnen, G.J.M. (2011) Unraveling the viscosity-mediated coupling effect in biomimetic hair sensor arrays. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MS 2011, 23-27 Jan 2011, Cancun, Mexico (pp. pp. 644-647).

Pjetri, O. and Koelmans, W.W. and Abelmann, L. and Siekman, M.H. and Elwenspoek, M.C. (2011) Using diffraction to detect deflection of the cantilevers in an array. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 278-281).

2010

Engelen, J.B.C. and Boer, H. de and Beekman, J.G. and Been, A.J. and Folkertsma, G.A. and Fortgens, L. and Graaf, D. de and Vocke, S. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) A Musical instrument in MEMS. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 193-196).

Brookhuis, R.A. and Boer, M.J. de and Dijkstra, M. and Kuijpers, A.A. and Lierop, D. van and Wiegerink, R.J. (2010) A micromirror for optical projection displays. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Louwerse, Marcus and Jansen, Henri and Elwenspoek, Miko (2010) A modular assembly method of a feed and thruster system for Cubesats. Journal of Micromechanics and Microengineering, 20 (11). p. 115011. ISSN 0960-1317

Hogervorst, R.P. and Krijnen, B. and Brouwer, D.M. and Engelen, J.B.C. and Staufer, U. (2010) A single-mask thermal displacement sensor in MEMS. In: Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, May 31 - June 4, 2010, Delft, the Netherlands (pp. pp. 462-465).

Droogendijk, H. and Krijnen, G.J.M. (2010) A study on performance improvement of MEMS hair flow sensors by parametric amplification. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010, 18-19 Nov 2010, Veldhoven, The Netherlands.

Dao, Dzung V. and Izadi, Nima and Ho, V. Anh and Sugiyama, S. and Hirai, S. (2010) A three sensing points tactile finger tip. In: 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology 2010, 6-9 July 2010, Perth, Western Australia (pp. p. 91).

Albrechts, Björn and Hautzinger, Daniel S. and Krüger, Michael and Elwenspoek, Miko and Müller, Kristian M. and Korvink, Jan G. (2010) Adsorption studies of DNA origami on silicon dioxide. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Yntema, D.R. and Honschoten, J.W. van and Wiegerink, R.J. (2010) An integrated 3D sound intensity sensor using four-wire particle velocity sensors: I. Design and characterization. Journal of Micromechanics and Microengineering, 20 (1). pp. 1-7. ISSN 0960-1317

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. (2010) An integrated 3D sound intensity sensor using four-wire particle velocity sensors: II. Modelling. Journal of Micromechanics and Microengineering, 20 (1). pp. 1-11. ISSN 0960-1317

Dagamseh, Ahmad and Bruinink, Christiaan and Kolster, Marcel and Wiegerink, Remco and Lammerink, Theo and Krijnen, Gijs (2010) Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition. In: Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, DTIP 2010, 5-7 May 2010, Seville, Spain (pp. pp. 48-51).

Sarajlic, E. and Vermeer, R. and Delalande, M.Y. and Siekman, M.H. and Huijink, R. and Fujita, H. and Abelmann, L. (2010) Batch fabrication of scanning microscopy probes for thermal and magnetic imaging using standard micromachining. In: 23rd IEEE International Conference on Micro Electro Mechanical Systemes, MEMS 2010, 24-28 Jan 2010, Wanchai, Hong Kong (pp. pp. 328-331).

Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2010) Biomimetic Hair Sensor Arrays: From Inspiration To Implementation. In: The Sense of Contact 12, 8 Apr 2010, Zeist, The Netherlands.

Jansen, H.V. and Boer, M.J. de and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). 075027. ISSN 0960-1317

Jansen, H.V. and Boer, M.J. de and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). pp. 1-12. ISSN 0960-1317

Honschoten, Joost W. van and Brunets, Nataliya and Tas, Niels R. (2010) Capillarity at the nanoscale. Chemical Society Reviews, 39 (3). pp. 1096-1114. ISSN 0306-0012

Tas, Niels R. and Escalante, Maryana and Honschoten, Joost W. van and Jansen, Henri V. and Elwenspoek, M. (2010) Capillary Negative Pressure Measured by Nanochannel Collapse. Langmuir, 26 (3). pp. 1473-1476. ISSN 0743-7463

Nguyen, M.D. and Nazeer, H. and Karakaya, K. and Pham, S.V. and Steenwelle, R. and Dekkers, M. and Abelmann, L. and Blank, D.H.A. (2010) Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers. Journal of Micromechanics and Microengineering, 20 (8). 085022. ISSN 0960-1317

Zhao, Yiping and Jansen, Henri and Boer, Meint de and Berenschot, Erwin and Bouwes, Dominique and Girones, Miriam and Huskens, Jurriaan and Tas, Niels (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of Micromechanics and Microengineering, 20 (9). 095022. ISSN 0960-1317

Zhao, Yiping and Jansen, Henri and Boer, Meint de and Berenschot, Erwin and Bouwes, Dominique and Girones, Miriam and Huskens, Jurriaan and Tas, Niels (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of Micromechanics and Microengineering, 20 (9). pp. 1-13. ISSN 0960-1317

Jong, Boudewijn R. de and Brouwer, Dannis M. and Boer, Meint J. de and Jansen, Henri V. and Soemers, Herman M.J.R. and Krijnen, Gijs J.M. (2010) Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator. Journal of Microelectromechanical Systems, 19 (5). pp. 1116-1130. ISSN 1057-7157

Sarajlic, E. and Geerlings, J. and Berenschot, J.W. and Siekman, M.H. and Tas, N.R. and Abelmann, L. (2010) Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 24-27).

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) Determination of young's modulus of PZT-influence of cantilever orientation. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 257-260).

Dagamseh, A.M.K. and Lammerink, T.S.J. and Kolster, M.L. and Bruinink, C.M. and Wiegerink, R.J. and Krijnen, G.J.M. (2010) Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system. Sensors and Actuators A: Physical, 162 (2). pp. 355-360. ISSN 0924-4247

Engelen, Johan (2010) Een klok doet geen "pok". In: Jaarboek E.T.S.V. Scintilla 2008-2009. Debakel . University of Twente, Enschede, The Netherlands, pp. 159-167.

Honschoten, J.W. van and Berenschot, J.W. and Ondarcuhu, T. and Sanders, R.G.P. and Sundaram, J. and Elwenspoek, M. and Tas, N.R. (2010) Elastocapillary fabrication of three-dimensional microstructures. Applied Physics Letters, 97 . 014103-1-014103-3. ISSN 0003-6951

Krishnamoorthy, Ganeshram and Carlen, Edwin T. and Boer, Hans L. de and Berg, Albert van den and Schasfoort, Richard B.M. (2010) Electrokinetic Lab-on-a-BioChip for Multi-ligand/Multi-analyte Biosensing. Analytical Chemistry, 82 (10). pp. 4145-4150. ISSN 0003-2700

Krishnamoorthy, Ganeshram and Carlen, Edwin T. and Bomer, Johan G. and Wijnperle, Daniël and Boer, Hans L. de and Berg, Albert van den and Schasfoort, Richard B.M. (2010) Electrokinetic label-free screening chip: a marriage of multiplexing and high throughput analysis using surface plasmon resonance imaging. Lab on a Chip, 10 (8). pp. 986-990. ISSN 1473-0197

Dagamseh, A.M.K. and Bruinink, C.M. and Droogendijk, H. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2010) Engineering of Biomimetic Hair-Flow Sensor Arrays Dedicated to High-Resolution Flow Field Measurements. In: IEEE Sensors 2010 conference, 1-4 November 2010, Hawaii, USA (pp. pp. 2251-2254).

Koelmans, W.W. and Peters, T. and Abelmann, L. and Elwenspoek, M.C. (2010) Fabrication of cantilever arrays with tips for parallel optical readout. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 277-280).

Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Ridder, R.M. de and Krijnen, G.J.M. (2010) Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-d photonic crystal waveguides. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Sinno, I. and Sanz-Velasco, A. and Kang, S. and Jansen, H. and Olsson, E. and Enoksson, P. and Svensson, K. (2010) Fabrication of nanoscale electrostatic lenses. Journal of Micromechanics and Microengineering, 20 (9). 095031. ISSN 0960-1317

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Krijnen, G.J.M. (2010) Fabrication of superficial neuromast inspired capacitive flow sensors. Journal of Micromechanics and Microengineering, 20 (8). 085041. ISSN 0960-1317

Mehendale, Aditya and Lötters, Joost Conrad (2010) Flowmeter of the Coriolis type. Patent.

Koelmans, Wabe W. and Sebastian, Abu and Despont, Michel and Pozidis, Haris (2010) Force modulation for improved conductive-mode atomic force microscopy. In: 10th IEEE Conference on Nanotechnology, IEEE-NANO 2010, 17-20 August 2010, Seoul, South-Korea (pp. pp. 875-878).

Sarajlic, Edin and Yamahata, Christophe and Berenschot, Erwin and Tas, Niels and Fujita, Hiroyuki and Krijnen, Gijs (2010) High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines, 1 (2). pp. 48-67. ISSN 2072-666X

Zhao, Yiping (2010) High-resolution stamp fabrication by edge lithography. thesis.

Mogulkoc, B. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2010) Incorporation of in-plane electrical internonnects to the reflow bonding. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, M.D. and Rijnders, G. and Elwenspoek, M.C. (2010) Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT. In: 36th International Micro & Nano Engineering Conference, MNE 2010, 19-22 Sept 2010, Genoa, Italy.

Krishnamoorthy, G. and Carlen, E.T. and Schasfoort, R.B.M. and Berg, A. van den (2010) Integrated electrokinetic Lab-on-a-chip based biosensor- a tool for drug screening applications. In: 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2010, 3-7 October 2010, Groningen, the Netherlands (pp. pp. 581-583).

Krishnamoorthy, Ganeshram (2010) Lab-on-a-chip surface plasmon resonance biosensor for multiplex bioassays. thesis.

Duan, Xuexin and Zhao, Yiping and Berenschot, Erwin and Tas, Niels R. and Reinhoudt, David N. and Huskens, Jurriaan (2010) Large-Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries. Advanced Materials, 20 (15). pp. 2519-2526. ISSN 0935-9648

Krijnen, Gijs J.M. and Lammerink, Theo and Wiegerink, Remco (2010) Learning from Crickets: Artificial Hair-Sensor Array Developments. In: IEEE Sensors 2010 Conference, 1-4 November 2010, Waikoloa, HI, USA (pp. pp. 2218-2223).

Yntema, D.R. and Haneveld, J. and Engelen, J.B.C. and Brookhuis, R.A. and Sanders, R.G.P. and Wiegerink, R.J. and Elwenspoek, M. (2010) Listening to MEMS: An acoustic vibrometer. In: IEEE 23rd International Conference on Micro Electro Mechanical Systems, MEMS 2010, 24-28 Jan 2010, Hong Kong (pp. pp. 663-666).

Escalantet, Maryana and Lenferink, Aufried and Zhao, Yiping and Tas, Niels and Huskens, Jurriaan and Hunter, C. Neil and Subramaniam, Vinod and Otto, Cees (2010) Long-Range Energy Propagation in Nanometer Arrays of Light Harvesting Antenna Complexes. Nano Letters, 10 (4). pp. 1450-1457. ISSN 1530-6984

Brouwer, D.M. and Otten, A. and Engelen, J.B.C. and Krijnen, B. and Soemers, H.M.J.R. (2010) Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In: Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, May 31 - June 4, 2010, Delft, the Netherlands (pp. pp. 47-50).

Abelmann, Leon and Groenland, Hans and Honschoten, Joost van and Verputten, Hein (2010) MME2010 21st Micromechanics and Micro systems Europe Workshop : Abstracts. University of Twente, Transducers Science and Technology, Enschede, The Netherlands. ISBN 9789081673716

Abelmann, Leon (2010) Magnetic Force Microscopy. In: Encyclopedia of Spectroscopy and Spectrometry. Elsevier, Amsterdam, pp. 1415-1425. ISBN 9780123744173

Dagamseh, A.M.K. and Krijnen, G.J.M. (2010) Map estimation of air-flow dipole source positions using array signal processing. In: Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2010, 18-19 Nov 2010, Veldhoven, The Netherlands.

Nawazuddin, M.B.S. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance. Journal of micromechanics and microengineering, 20 (6). 064005. ISSN 0960-1317

Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Ridder, R.M. de and Krijnen, G.J.M. (2010) Mechanical tuning of optical race-track ring resonators. Procedia Engineering, 5 . pp. 424-427. ISSN 1877-7058

Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Ridder, R.M. de and Krijnen, G.J.M. (2010) Micro bimorph cantilever switches for tuning integrated optical systems. In: The Sense of Contact 12, April 8, 2010, Zeist, The Netherlands.

Haneveld, J. and Lammerink, T.S.J. and Boer, M.J. de and Sanders, R.G.P. and Mehendale, Aditya and Lotters, J.C. and Dijkstra, M.A. and Wiegerink, R.J. (2010) Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor. Journal of Micromechanics and Microengineering, 20 (6). p. 125001. ISSN 0960-1317

Palasantzas, G. and Svetovoy, V.B. and Zwol, P.J. van (2010) Optical properties and kinetic roughening influence on dispersive casimir and van der Waals forces. International Journal of Modern Physics B, 24 (31). pp. 6013-6024. ISSN 0217-9792

Engelen, Johan B.C. and Abelmann, Leon and Elwenspoek, Miko C. (2010) Optimized comb drive finger shape for shock-resistant actuation. In: 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 , 24-28 Jan 2010 , Wanchai, Hong Kong (pp. pp. 1147-1150).

Engelen, Johan B.C. and Abelmann, Leon and Elwenspoek, Miko C. (2010) Optimized comb-drive finger shape for shock-resistant actuation. Journal of Micromechanics and Microengineering, 20 (10). p. 105003. ISSN 0960-1317

Khatib, Mohammed G. and Hartel, Pieter H. (2010) Optimizing MEMS-Based Storage Devices for Mobile Battery-Powered Systems. ACM Transactions on Storage, 6 (1). pp. 1-37. ISSN 1553-3077

Koelmans, W.W. and Honschoten, J. van and Vries, J. de and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2010) Parallel optical readout of cantilever arrays in dynamic mode. Nanotechnology, 21 (39). p. 395503. ISSN 0957-4484

Droogendijk, H. and Krijnen, G.J.M. (2010) Parametric amplification and stochastic resonance in bio-inspired hair flow sensors. In: Sense of Contact 12, April 8, 2010, Zeist, The Netherlands.

Mogulkoc, Berker (2010) Reflow bonding of borosilicate glass tubes to silicon substrates as fluidic interconnects. thesis.

Abelmann, Leon and Tas, Niels and Berenschot, Erwin and Elwenspoek, Miko (2010) Self-assembled three-dimensional non-volatile memories. Micromachines, 1 (1). pp. 1-18. ISSN 2072-666X

Elwenspoek, Miko and Abelmann, Leon and Berenschot, Erwin and Honschoten, Joost van and Jansen, Henri and Tas, Niels (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of Micromechanics and Microengineering, 20 (6). pp. 1-28. ISSN 0960-1317

Yagubizade, Hadi and Berenschot, Erwin and Jansen, Henri V. and Elwenspoek, Miko and Tas, Niels R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA (pp. pp. 128-131).

Vries, Jeroen de and Delalande, Michael and Abelmann, Leon and Alexandrou, Marios and Schedin, Fred and Nutter, Paul and Hill, Ernie and Thomson, Thomas (2010) Simulation of position sensitivity of the anomalous Hall effect on a single magnetic dot. In: International Symposium on Advanced Magnetic Materials and Applications, ISAMMA 2010, 12-16 July 2010, Sendai, Japan.

Droogendijk, H. and Krijnen, G.J.M. (2010) Simulation studies of parametric amplification in bio-inspired flow sensors. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 149-152).

Krijnen, B. and Hogervorst, R.P. and Engelen, J.B.C. and Dijk, J.W. van and Brouwer, D.M. and Abelmann, L. (2010) Single-mask thermal displacement sensor in MEMS. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 52-55).

Alexandrou, M. and Nutter, P.W. and Delalande, M.Y. and Vries, J. de and Hill, E.W. and Schedin, F. and Abelmann, L. and Thomson, T. (2010) Spatial sensitivity mapping of Hall crosses using patterned magnetic nanostructures. Journal of Applied Physics, 108 (4). 043920. ISSN 0021-8979

Yamahata, Christophe and Sarajlic, Edin and Krijnen, Gijs J.M. and Gijs, Martin A.M. (2010) Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images. Journal of Microelectromechanical Systems, 19 (5). pp. 1273-1275. ISSN 1057-7157

Mogulkoc, Berker and Knowles, Kevin M. and Jansen, Henri V. and Brake, Marcel ter and Elwenspoek, Miko C. (2010) Surface Devitrification and the Growth of Cristobalite in Borofloat® (Borosilicate 8330) Glass. Journal of the American Ceramic Society, 93 (9). pp. 2713-2719. ISSN 0002-7820

Krishnamoorthy, Ganeshram and Carlen, Edwin T. and Berg, Albert van den and Schasfoort, Richard B.M. (2010) Surface plasmon resonance imaging based multiplex biosensor: Integration of biomolecular screening, detection and kinetics estimation. Sensors and Actuators B: Chemical, 148 (2). pp. 511-521. ISSN 0925-4005

Torricelli, G. and Zwol, P.J. van and Shpak, O. and Binns, C. and Palasantzas, G. and Kooi, B.J. and Svetovoy, V.B. and Wuttig, M. (2010) Switching Casimir forces with phase-change materials. Physical review A: Atomic, molecular, and optical physics, 82 (1). 010101R. ISSN 1050-2947

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Honschoten, J.W. van and Tas, N.R. and Elwenspoek, M. (2010) The profile of a capillary liquid bridge between solid surfaces. American Journal of Physics, 78 (3). pp. 277-287. ISSN 0002-9505

Engelen, J.B.C. and Delalande, M. and Febre, A.J. le and Bolhuis, T. and Kikuchi, N. and Abelmann, L. and Lodder, J.C. and Shimatsu, T. (2010) Thermally induced switching field distribution of a single CoPt dot in a large array. Nanotechnology, 21 (3). 035703-035709. ISSN 0957-4484

Mehendale, Aditya and Hagedoorn, Wouter and Lötters, Joost Conrad (2010) Transformer core. Patent.

Vries, Jeroen de and Abelmann, Leon and Manz, Andreas and Elwenspoek, Miko (2010) Tungsten-siliconnitride medium for mega- to gigayear data storage. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 261-264).

Brunets, Nataliya and Haneveld, Jeroen and Jansen, Henri and Tas, Niels (2010) Viscosity of Water in Nano-Confinement. In: Micro- and Nanofluidics for Cell Biology, 18-22 January 2010, Leiden, The Netherlands (pp. p. 1).

Casas, Jerome and Steinmann, Thomas and Krijnen, Gijs (2010) Why do insects have such a high density of flow-sensing hairs? Insights from the hydromechanics of biomimetic MEMS sensors. Journal of the Royal Society Interface, 7 . pp. 1487-1495. ISSN 1742-5689

2009

Flokstra, J. and Cupurus, R. and Wiegerink, R.J. and Essen, M.C. van (2009) A MEMS-based gravity gradiometer for future planetary missions. Cryogenics, 49 (11). pp. 665-668. ISSN 0011-2275

Engelen, J.B.C. and Rothuizen, H.E. and Drechsler, U. and Stutz, R. and Despont, M. and Abelmann, L. and Lantz, M.A. (2009) A Mass-balanced through-wafer electrostatic x/y-scanner for probe data storage. Microelectronic Engineering, 86 (4-6). pp. 1230-1233. ISSN 0167-9317

Izadi, N. and Boer, M. de and Berenschot, E. and Wiegerink, R. and Krijnen, G.J.M. (2009) A fabrication scheme for biomimetic aquatic hair sensors. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany (pp. p. 66).

Rich, Rebecca L. and Papalia, Giusseppe A. and Krishnamoorthy, Ganeshram and Beusink, Bianca and Pak, Brian J. and Myszka, David G. and more, more (2009) A global benchmark study using affinity-based biosensors. Analytical Biochemistry, 386 (2). pp. 194-216. ISSN 0003-2697

Berenschot, Johan Willem and Tas, Niels Roelof (2009) A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method. Patent.

Berenschot, Johan Willem and Tas, Niels Roelof (2009) A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanovires obtainable by this method. Patent.

Unnikrishnan, Sandeep and Jansen, Henricus Venantius and Berenschot, Johan Willem and Fazal, Imran and Louwerse, Marcus Cornelis and Sanders, Remco and Boer, Meint Jelle de and Elwenspoek, Miko Curt (2009) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent.

Dagamseh, A.M.K. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) A simulation study of the dipole source localisation applied on bio-mimetic flow-sensor linear array. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands.

Delft, K.M. van and Eijkel, J.C.T. and Mijatovic, D. and Druzhinina, T.S. and Rathgen, H. and Tas, N.R. and Berg, A. van den and Mugele, F. (2009) Additions and Corrections: Micromachined Fabry-Pérot Interferometer with Embedded Nanochannels for Nanoscale Fluid Dynamics. Nano Letters, 9 (8). pp. 1-2. ISSN 1530-6984

Bruinink, C.M. and Jaganatharaja, R.K. and Boer, M.J. de and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Advancements in technology and design of biomimetic flow-sensor arrays. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, 25-29 January 2009, Sorrento, Italy (pp. pp. 152-155).

Dijkstra, M. and Lammerink, T.S.J. and Boer, M.J. de and Wiegerink, R.J. and Elwenspoek, M. (2009) Ambient temperature-gradient compensated low-drift thermopile flow sensor. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 479-482).

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Biomimetic aquatic hair sensors fabrication. In: The Sense of Contact 11, 8 April 2009, Zeist, The Netherlands.

Jansen, H.V. and Boer, M.J. de and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2009) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment. Journal of Micromechanics and Microengineering, 19 (3). ISSN 0960-1317

Tas, Niels and Haneveld, Jeroen and Jansen, Henri and Brunets, Nataliya and Honschoten, Joost van (2009) Capillarity effect in silicon based nanochannels. In: Second International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam.

Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and Brake, H.J.M. ter and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of Micromechanics and Microengineering, 19 (085027). 085027. ISSN 0960-1317

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). p. 475302. ISSN 0957-4484

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Corrigendum to “Formation of liquid menisci in flexible anochannels" [J. Colloid Interface Sci. 329 (2009) 133–139]. Journal of Colloid and Interface Science, 332 (2). p. 520. ISSN 0021-9797

Nazeer, H. and Abelmann, L. and Tas, N.R. and Honschoten, J.W. van and Siekman, M.H. and Elwenspoek, M.C. (2009) Determination of young's modulus of PZT and Co80Ni20 thin films by means of micromachined cantilevers. In: MME 2009, The 20th Micromechanics Europe Workshop, September 20-22, 2009, Toulouse, France (pp. pp. 278-281).

Bruinink, C.M. and Jaganatharaja, R.K. and Boer, M.J. de and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Developing the ultimate biomimetic flow-sensor array. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany (pp. p. 65).

Dagamseh, A.M.K. and Lammerink, T.S.J. and Bruinink, C.M. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Dipole source localisation using bio-mimetic flow-sensor arrays. Procedia Chemistry, 1 (1). pp. 891-894. ISSN 1876-6196

Zwol, P.J. van and Svetovoy, V.B. and Palasantzas, G. (2009) Distance upon contact: Determination from roughness profile. Physical Review B: Condensed matter and materials physics, 80 (23). p. 235401. ISSN 1098-0121

Broek, D.M. van den and Elwenspoek, M. (2009) Effect of cavity pressure on the performance of the explosive micro-bubble actuator. Microelectronic Engineering, 86 (4-6). pp. 1271-1273. ISSN 0167-9317

Hoang, T.H. and Segers-Nolten, I.M. and Berenschot, J.W. and Boer, M.J. de and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of Micromechanics and Microengineering, 19 (065017). 065017. ISSN 0960-1317

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2009, 21-25 June 2009, Denver, CO, USA (pp. pp. 1075-1078).

Honschoten, J.W. van and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. and Elwenspoek, M. (2009) Fabrication of three-dimensional microstructures using capillary forces. In: MME 2009, The 20th Micromechanics Europe Workshop, September 20-22, 2009, Toulouse, France.

Khatib, Mohammed G. and Dijk, Hylke W. van (2009) Fast Configuration of MEMS-Based Storage Devices for Streaming Applications. In: 2009 IEEE/ACM/IFIP 7th Workshop on Embedded Systems for Real-Time Multimedia, 15-16 Oct 2009, Grenoble (pp. pp. 55-63).

Alberts, C.J. and Man, S. de and Berenschot, J.W. and Gadgil, V.J. and Elwenspoek, M.C. and Iannuzzi, D. (2009) Fiber-top refractometer. Measurement Science and Technology, 20 (3). 034005. ISSN 0957-0233

Lammerink, Theodorus Simon Josef and Dijkstra, Marcel and Haneveld, Jeroen and Wiegerink, Remco John (2009) Flowmeter. Patent.

Mehendale, Aditya and Lötters, Joost Conrad (2009) Flowmeter of the Coriolis type. Patent.

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Formation of liquid menisci in flexible nanochannels. Journal of Colloid and Interface Science, 329 (1). pp. 133-139. ISSN 0021-9797

Cuperus, R. and Flokstra, F.F. and Droogendijk, H. and Wiegerink, R.J. and Flokstra, J. (2009) Gravity gradiometer system for Earth Exploration. In: MicroNanoConference 2009, 5-6 Nov 2009, Delft, The Netherlands.

Duan, Xuexin and Zhao, Yiping and Perl, András and Berenschot, Erwin and Reinhoudt, David N. and Huskens, Jurriaan (2009) High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography. Advanced Materials, 21 (27). pp. 2798-2802. ISSN 0935-9648

Jaganatharaja, R.K. and Bruinink, C.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Highly sensitive biomimetic flow sensor arrays. In: The Sense of Contact 11, 8 April 2009, Zeist, The Netherlands.

Jaganatharaja, R.K. and Bruinink, C.M. and Hagedoorn, B.M. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Highly sensitive, biomimetic hair sensor arrays for sensing low-frequency air flows. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2009, 21-25 June 2009, Denver, CO, USA (pp. pp. 1541-1544).

Engelen, J.B.C. and Lantz, M.A. and Rothuizen, H.E. and Abelmann, L. and Elwenspoek, M.C. (2009) Improved performance of large stroke comb-drive actuators by using a stepped finger shape. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21-25 June 2009, Denver, Colorado, USA (pp. pp. 1762-1765).

Palasantzas, G. and Svetovoy, V.B. and Zwol, P.J. van (2009) Influence of ultrathin water layer on the van der Waals/Casimir force between gold surfaces. Physical Review B: Condensed matter and materials physics, 79 (23). p. 235434. ISSN 1098-0121

Krishnamoorthy, Ganeshram and Carlen, Edwin T. and Kohlheyer, Dietrich and Schasfoort, Richard B.M. and Berg, Albert van den (2009) Integrated Electrokinetic Sample Focusing and Surface Plasmon Resonance Imaging System for Measuring Biomolecular Interactions. Analytical Chemistry, 81 (5). pp. 1957-1963. ISSN 0003-2700

Dagamseh, A.M.K. and Bruinink, C.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2009) Interfacing and processing artificial hairs array for flow pattern recognition. In: The Sense of Contact 11, 8 April 2009, Zeist, The Netherlands.

Krijnen, Gijs and Wiegerink, Remco (2009) Lifelike MEMS en wat krekels ons influisteren. De Vonk, 27 (3). pp. 4-12. ISSN 0925-5427

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a Chip, 9 (13). pp. 1966-1969. ISSN 1473-0197

Brouwer, D.M. and Jong, B.R. de and Boer, M.J. de and Jansen, H.V. and Dijk, J. van and Krijnen, G.J.M. and Soemers, H.M.J.R. (2009) MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators. Journal of Micromechanics and Microengineering, 19 (6). 065027. ISSN 0960-1317

Khatib, Mohammed Ghiath (2009) MEMS-based storage devices : integration in energy-constrained mobile systems. thesis.

Husken, B.H. and Woldering, L.A. and Blum, C. and Vos, W.L. (2009) Method to deterministically study photonic nanostructures in different experimental instruments. Journal of Microscopy, 233 (1). pp. 18-23. ISSN 0022-2720

Haneveld, J. and Lammerink, T.S.J. and Boer, M.J. de and Wiegerink, R.J. (2009) Micro coriolis mass flow sensor with integrated capacitive readout. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 463-466).

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 1-4).

Berenschot, Johan Willem and Wissink, Jeroen Mathijn and Tas, Niels Roelof and Boer, Meint Jelle de (2009) Microneedle, Microneedle array and production method therefor. Patent.

Berenschot, Johan Willem and Wissink, Jeroen Mathijn and Tas, Niels Roelof and Boer, Meint Jelle de (2009) Microneedle, microneedle array and production method therefor. Patent.

Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Model-based optimization of tunable, biomimetic hair sensor arrays. In: The Sense of Contact 10, April 9, 2008, Zeist, the Netherlands.

Zhao, Y. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). p. 315305. ISSN 0957-4484

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2009) Nozzle fabrication for micropropulsion of a microsatellite. Journal of Micromechanics and Microengineering, 19 (4). pp. 1-9. ISSN 0960-1317

Iannuzzi, Davide and Deladi, Szabolcs and Elwenspoek, Michael Curt (2009) Optical device comprising a cantilever and method of fabrication and use thereof. Patent.

Chakkalakkal Abdulla, S. and Berenschot, E. and Boer, M.J. de and Kauppinen, L.J. and Ridder, R.M. de and Krijnen, G.J.M. (2009) Optimisation study of micro cantilevers for switching of photonic band gap crystals. In: International Conference on Photonics in Switching, PS 2009, 15-19 September 2009, Pisa, Italy.

Jaganatharaja, R. Kottumakulal and Bruinink, C. and Kolster, M. and Lammerink, T. and Wiegerink, R. and Krijnen, G. (2009) Optimized biomimetic hair sensor arrays for sensing oscillating air flows. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany (pp. p. 16).

Koelmans, W.W. and Honschoten, J.W. van and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2009) Parallel optical readout of a cantilever array in dynamic mode. In: International Workshop on Nanomechanical Cantilever Sensors 2009, 20-22 May 2009, Jeju, South Korea.

Nawaz, Mubassira and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko (2009) Parallel plate structures for optical modulation and casimir force measurement. In: 20th MicroMechanics Europe Workshop, MME, 20-22 September 2009, Toulouse, France (pp. pp. 1-4).

Khatib, M.G. and Hartel, P.H. (2009) Policies for Probe-Wear Leveling in MEMS-Based Storage Devices. In: Proceedings of the 17th Annual Meeting of the IEEE/ACM International Symposium on Modeling, Analysis & Simulation of Computer and Telecommunication Systems (MASCOTS), 21-23 Sep 2009, London, UK (pp. pp. 152-161).

Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam .

Been, A.J. and Folkertsma, G.A. and Verputten, H.H.J. and Bolhuis, T. and Abelmann, L. (2009) Reduction of time-varying nanotesla magnetic fields from electric power lines by twisting. Journal of Electron Microscopy, 58 (4). pp. 251-252. ISSN 1477-9986

Honschoten, Joost van (2009) Ruis bij de MicMec. In: Scintilla's jaarboek 2007-2008 Ruis. E.T.S.V. Scintilla, Enschede, pp. 83-94.

Abelmann, Leon and Tas, Niels and Berenschot, Erwin and Elwenspoek, Miko (2009) Self assembled three-dimensional nonvolatile memories. [Report]

Krishnamoorthy, Ganeshram and Carlen, Edwin T. and Beusink, J. Bianca and Schasfoort, Richard B.M. and Berg, Albert van den (2009) Single injection microarray-based biosensor kinetics. Analytical Methods, 1 (3). 162 - 169. ISSN 1759-9660

Krishnamoorthy, Ganeshram and Carlen, Edwin T. and Beusink, J. Bianca and Schasfoort, Richard B.M. and Berg, Albert van den (2009) Single injection microarray-based biosensor kinetics. Analytical Methods, 1 (3). pp. 162-169. ISSN 1759-9660

Profijt, H.B. and Pigot, C. and Reyne, G. and Grechishkin, R.M. and Cugat, O. (2009) Stable diamagnetic self-levitation of a micro-magnet by improvement of its magnetic gradients. Journal of Magnetism and Magnetic Materials, 321 (4). pp. 259-262. ISSN 0304-8853

Brombacher, C. and Saitner, M. and Pfahler, C. and Plettl, A. and Ziemann, P. and Makarov, D. and Assmann, D. and Siekman, M.H. and Abelmann, L. and Albrecht, M. (2009) Tailoring particle arrays by isotropic plasma etching: an approach towards percolated perpendicular media. Nanotechnology, 20 (10). pp. 105304-105308. ISSN 0957-4484

Woldering, Leon A. and Mosk, Allard P. and Tjerkstra, R. Willem and Vos, Willem L. (2009) The influence of fabrication deviations on the photonic band gap of three-dimensional inverse woodpile nanostructures. Journal of Applied Physics, 105 (9). 093108. ISSN 0021-8979

Wiegerink, R.J. and Lammerink, T.S.J. and Dijkstra, M. and Haneveld, J. (2009) Thermal and Coriolis type micro flow sensors based on surface channel technology. Procedia Chemistry, 1 (1). pp. 1455-1458. ISSN 1876-6196

Dagamseh, A. and Krijnen, G. (2009) Thermal noise estimation in bio-inspired hair flow sensor. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany (pp. p. 64).

Delalande, Michael and Engelen, Johan B.C. and Febre, A.J. le and Abelmann, L. and Lodder, J.C. (2009) Thermally induced switching field distribution of individual single nanomagnets in a large assembly. In: European Workshop on Self-Organized Nanomagnets, 29 March- 3 April 2009, Aussois, France (pp. p. 30).

Kuijpers, A.A. and Lierop, D. and Sanders, R.H.M. and Tangenberg, J. and Moddejonge, H. and Eikenbroek, J.W.Th. and Lammerink, T.S.J. and Wiegerink, R.J. (2009) Towards embedded control for resonant scanning MEMS micromirror. Procedia Chemistry, 1 (1). pp. 1307-1310. ISSN 1876-6196

Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and Wolferen, H.A.G.M. van and Boer, M.J. de and Sanders, R.G.P. and Elwenspoek, M.C. (2009) Transition flow through an ultra-thin nanosieve. Nanotechnology, 20 (305304). pp. 1-6. ISSN 0957-4484

2008

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China (pp. pp. 729-732).

Yntema, D.R. and Honschoten, J.W. van and Wiegerink, R.J. and Elwenspoek, M. (2008) A complete three-dimensional sound intensity sensor integrated on a single chip. Journal of Micromechanics and Microengineering, 18 (11). pp. 1-9. ISSN 0960-1317

Engelen, Johan B.C. and Khatib, Mohammed G. (2008) A ’Millipede’ scanner model - Energy consumption and performance. [Report]

Yntema, Doekle Reinder (2008) An integrated three-dimensional sound-intensity-probe. thesis.

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2008) Analysis of the angular sensitivity of an innovative particle velocity sensor. In: IEEE Sensors 2008, 26-29 Oct. 2008, Lecce, Italy.

Svetovoy, Vitaly B. (2008) Application of the Lifshitz Theory to Poor Conductors. Physical Review Letters, 101 (163603). ISSN 0031-9007

Wissink, J. and Berenschot, J.W. and Tas, N.R. (2008) Atom sharp needles, the missing link in microneedle drug delivery. In: Proceedings of Medical Devices Conference, 6-October-2008, Kopenhagen (pp. pp. 23-26).

Izadi, N. and Krijnen, G.J.M. and Wiegerink, R.J. (2008) Biomimetic aquatic hair sensors design. In: The Sense of Contact 10, April 9, 2008, Zeist, the Netherlands.

Mogulkoc, B. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2008) Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In: Proceedings of the 19th micromechanics Europe conference, 28-30 Sept 2008, Aachen, Germany.

Broek, D.M. van den and Elwenspoek, M.C. (2008) Bubble nucleation in an explosive micro-bubble actuator. Journal of Micromechanics and Microengineering, 18 . ISSN 0960-1317

Haneveld, J. and Tas, N.R. and Brunets, N. and Jansen, H.V. and Elwenspoek, M.C. (2008) Capillary filling of sub- 10 nm nanochannels. Journal of applied physics, 104 (1). p. 14309. ISSN 0021-8979

Antezza, M. and Pitaevskii, L.P. and Stringari, S. and Svetovoy, V. (2008) Casimir-Lifshitz force out of thermal equilibrium. Physical Review A: Atomic, molecular, and optical physics, 77 (2). 022901. ISSN 1050-2947

Izadi, Nima and Verlaat, Bas and Berenschot, Erwin and Wiegerink, Remco and Boer, Meint de and Mogdans, Joachim and Krijnen, Gijs (2008) Design and fabrication process for artificial lateral line flow sensors. In: International Conference on Sensor and Sensing in Biology and Engineering, 12-16 October 2008, Cetraro, Italy.

Abelmann, L. and Febre, A.J. le (2008) Doorslaan in veld emissie. In: Doorgeslagen. Jaarboek E.T.S.V. Scintilla 2007-2008 . University of Twente, Enschede, pp. 116-128.

Khatib, Mohammed G. and Hartel, Pieter H. and Dijk, Hylke W. van (2008) Energy-Efficient Streaming Using Non-volatile Memory. Journal of Signal Processing Systems . ISSN 1939-8018

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M. (2008) Erratum: “Elastocapillary filling of deformable nanochannels” [J. Appl. Phys. 101, 094310 (2007)]. Journal of Applied Physics, 103 (2). 029901. ISSN 0021-8979

Broek, Dennis Micha van den (2008) Explosive micro-bubble actuator. thesis.

Broek, D.M. van den and Elwenspoek, M. (2008) Explosive micro-bubble actuator. Sensors and Actuators A: Physical, 145-14 (1-2). pp. 387-393. ISSN 0924-4247

Zhao, Y. and Berenschot, J.W. and Boer, M.J. de and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of Micromechanics and Microengineering, 18 (18). 064013. ISSN 0960-1317

Pham, Van So and Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and Wolferen, H.A.G.M. van and Krijnen, G.J.M. and Ridder, R.M. de (2008) Fabrication of microcantilever-based IO grated waveguide sensors for detection of nano-displacements. In: IEEE/LEOS Benelux Chapter 2008 Annual Symposium, 27-28 November 2008, Enschede, The Netherlands (pp. pp. 155-158).

Woldering, Léon Alexis (2008) Fabrication of photonic crystals and nanocavities. thesis.

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Eurosensors XXII, European Conference on Solid-State Transducers, 7-10 September 2008, Dresden, Germany (pp. pp. 912-915).

Iannuzzi, D. and De Man, S. and Alberts, C.J. and Berenschot, J.W. and Elwenspoek, M.C. and Said, A.A. and Dugan, M. (2008) Fiber-top micromachined devices. In: 19th International Conference on Optical Fibre Sensors, 15-18 April 2008, Perth, WA, Australia (pp. p. 700403).

Yang, C.K. and Febre, A.J. le and Pandraud, G. and Drift, E. van der and French, P.J. (2008) Field emission for cantilever sensors. Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 26 (3). pp. 927-933. ISSN 1071-1023

Febre, Alexander Jonathan le (2008) Field emission sensing for non-contact probe recording. thesis.

Febre, A.J. le and Abelmann, L. and Lodder, J.C. (2008) Field emisssion at nanometer distances for high-resolution positioning. Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 26 (2). pp. 724-729. ISSN 1071-1023

Bos, Jeroen Wouter and Hoitink, Ronald Wilhelmus Johannes and Besseling, Johannes Henricus and Lötters, Joost Conrad (2008) Flow sensor of the thermal type. Patent.

Lammerink, Theodorus Simon Josef and Dijkstra, Marcel and Haneveld, Jeroen and Lötters, Joost Conrad (2008) Flowmeter with silicon flow tube. Patent.

Honschoten, J.W. van and Tas, N.R. and Svetovoy, V. and Escalante, M. and Elwenspoek, M. (2008) Formation of liquid menisci in flexible nanochannels. In: MicroTas 2008, 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, October 12-16, 2008, San Diego, California, USA (pp. pp. 1504-1506).

Fazal, I. and Elwenspoek, M.C. (2008) Fusion-bonded fluidic interconnects. Journal of micromechanics and microengineering, 18 (5). 055011. ISSN 0960-1317

Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and Ridder, R.M. de and Krijnen, G.J.M. (2008) Grated waveguide optical cavity as a compact sensor for sub-nanometre cantilever deflections. In: 14th European Conference on Integrated Optics, ECIO, 11-13 June 2008, Eindhoven, The Netherlands (pp. pp. 111-114).

Kauppinen, L.J. and Hoekstra, H.J.W.M. and Dijkstra, M. and Ridder, R.M. de and Krijnen, G.J.M. (2008) Grated waveguide-based optical cavities as compact sensors for sub-nanometre cantilever deflections, and small refractive-index changes. In: 9th European Conference on Optical Chemical Sensors and Biosensors, Europtrode IX, March 30 - April 2, 2008, Dublin, Ireland (pp. P084).

Onoue, T. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2008) Heat assisted magnetic probe recording onto a thin film with perpendicular magnetic anisotropy. Journal of physics D: applied physics, 41 (15). p. 155008. ISSN 0022-3727

Vanapalli, S. and Brake, H.J.M. ter and Jansen, H.V. and Zhao, Y. and Holland, H.J. and Burger, J.F. and Elwenspoek, M.C. (2008) High frequency pressure oscillator for microcryocoolers. Review of Scientific Instruments, 79 (4). 045103. ISSN 0034-6748

Vanapalli, Srinivas (2008) High-frequency operation and miniaturization aspects of pulse-tube cryocoolers. thesis.

Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Droogendijk, H. and Boer, M.J. de and Wiegerink, R.J. (2008) Highly sensitive micro coriolis mass flow sensor. In: MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, United States (pp. pp. 920-923).

Krijnen, Gijs J.M. and Casas, Jerome (2008) Imitating cricket mechanosensory hairs: dream or reality? In: International Conference on Sensor and Sensing in Biology and Engineering, 12-16 October 2008, Cetraro, Italy (pp. pp. 26-27).

Yntema, D.R. and Honschoten, J.W. van and Wiegerink, R.J. (2008) Integrated 3D sound intensity sensor with four-wire particle velocity sensors. In: DTIP 2008, Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 9-11 April 2008, Nice, France.

Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2008) Interfacing of artificial hairs array for complex flow pattern recognition. In: MicroMechanics Europe Workshop, MME 2008, 28-30 September 2008, Aachen, Germany (pp. pp. 129-132).

Dijkstra, M.A. and Lammerink, T.S.J. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift U-Shaped Thermopile Flow Sensor. In: Sensors, 2008 IEEE, 26-29 Oct 2008, Lecce, Italy (pp. pp. 66-69).

Dijkstra, M.A. and Lammerink, T.S.J. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift flow sensor with zero-offset thermopile-based power feedback. In: Proceedings of DTIP, 9-11 Apr 2008, Nice (pp. p. 4).

Haneveld, J. and Brouwer, D.M. and Mehendale, A. and Zwikker, R. and Lammerink, T.S.J. and Boer, M.J. de and Wiegerink, R.J. (2008) MEMS-based Micro Coriolis mass flow sensor. In: 10th Anniversary International EUSPEN Conference, 18-22 May 2008, Wein (pp. pp. 560-564).

Delalande, M.Y. and le Fèbre, A.J. and van Wolferen, H.A.G.M. and Abelmann, L. and Lodder, J.C. (2008) Magnetic properties of CoPt thin films and nanosized dots patterned by Laser Interference Lithography (LIL). In: Proceedings of the 12eme Colloque Louis Neel, 30 Sept - 3 Oct 2008, La grande Motte, France.

Okamoto, S. and Kikuchi, N. and Kato, T. and Kitakami, O. and Mitsuzuka, K. and Shimatsu, T. and Muraoka, H. and Aoi, H. and Lodder, J.C. (2008) Magnetization behavior of nanomagnets for patterned media application. Journal of Magnetism and Magnetic Materials, 320 (22). pp. 2874-2879. ISSN 0304-8853

Mehendale, Aditya and Lötters, Joost Conrad and Zwikker, Jan Marinus (2008) Mass flowmeter of the Coriolis type. Patent.

Mehendale, Aditya and Lötters, Joost Conrad and Zwikker, Jan Marinus (2008) Mass flowmeter of the Coriolis type. Patent.

Engelen, Johan B.C. and Rothuizen, Hugo E. and Drechsler, Ute and Stutz, Richard and Despont, Michel and Lantz, Mark A. (2008) Mass-balanced through-wafer electrostatic x/y-scanner for parallel probe data storage. In: 34th International Conference on Micro & Nano Engineering, 15-19 September 2008, Athens, Greece (pp. p. 92).

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2008) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Lerou, P.P.P.M. and Brake, H.J.M. ter and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Rogalla, H. (2008) Micromachined Joule-Thomson coolers. In: Cryogenic Engineering Conference, CEC 2007, 16-20 July 2007, Chattanooga, Tennessee, USA (pp. pp. 614-621).

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and Actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2008) Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany.

Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2008) Modular Thruster and Feeding System for Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany (pp. pp. 17-20).

Zhao, Y. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece (pp. p. 221).

Moktadir, Z. and Kraft, M. and Wensink, H. (2008) Multifractal properties of Pyrex and silicon surfaces blasted with sharp particles. Physica A: Statistical mechanics and its applications, 387 (8-9). pp. 2083-2090. ISSN 0378-4371

Bruinink, Christiaan M. and Burresi, Matteo and Boer, Meint J. de and Segerink, Frans B. and Jansen, Henri V. and Berenschot, E. and Reinhoudt, David N. and Huskens, Jurriaan and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984

Escalante, Maryana and Zhao, Yiping and Ludden, Manon J.W. and Vermeij, Rolf and Olsen, John D. and Berenschot, Erwin and Hunter, C. Neil and Huskens, Jurriaan and Subramaniam, Vinod and Otto, Cees (2008) Nanometer arrays of functional light harvesting antenna complexes by nanoimprint lithography and host-guest interactions. Journal of the American Chemical Society, 130 (28). pp. 8892-8893. ISSN 0002-7863

Honschoten, J.W. van and Koelmans, W.W. and Konings, S.M. and Abelmann, L. and Elwenspoek, M. (2008) Nanotesla torque magnetometry using a microcantilever. In: Eurosensors XXII, European Conference on Solid-State Transducers, 7 - 10 Sept 2008, Dresden, Germany (pp. pp. 597-600).

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2008) Nozzle fabrication for Micro Propulsion of a Micro-Satellite. In: 19th MicroMechanics Europe Workshop, MME 2008, 28-30 September 2008, Aachen, Germany (pp. pp. 45-48).

Krishnamoorthy, Ganeshram and Carlen, Edwin T. and Kohlheyer, Dietrich and Schasfoort, Richard and Berg, Albert van den (2008) On-chip electrokinetic sample focusing for microarray-based biomolecular interaction assays. In: 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 12-16 October 2008, San Diego, California (pp. pp. 311-313).

Svetovoy, V.B. and Zwol, P.J. van and Palasantzas, G. and Hosson, J.Th.M. de (2008) Optical properties of gold films and the Casimir force. Physical review B: Condensed matter and materials physics, 77 (3). 035439. ISSN 1098-0121

Jaganatharaja, R.K. and Bruinink, C.M. and Izadi, N. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. and Krijnen, G.J.M. (2008) Optimization Of Bio-inspired Hair Sensor Arrays. In: 34th International Conference on Micro & Nano Engineering, MNE 2008, 15-19 September 2008, Athens, Greece.

Jaganatharaja, R.K. and Bruinink, C.M. and Izadi, N. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. and Krijnen, G.J.M. (2008) Optimization Of Bio-inspired Hair Sensor Arrays. In: International Conference on Sensor and Sensing in Biology and Engineering, 12-16 October 2008, Cetraro, Italy.

Woldering, Léon A. and Tjerkstra, R. Willem and Jansen, Henri V. and Setija, Irwan D. and Vos, Willem L. (2008) Periodic arrays of deep nanopores made in silicon with reactive ion etching and deep UV lithography. Nanotechnology, 19 (14). pp. 1-11. ISSN 0957-4484

Fazal, I. and Elwenspoek, M.C. (2008) Piezoelectric microvalve for precise control of gas flow at high pressure. In: 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007, 4-7 Sept 2007, Las Vegas, NV, United States (pp. pp. 841-844).

Khatib, M.G. and Hartel, P.H. (2008) Power Management of MEMS-Based Storage Devices for Mobile Systems. In: Proceedings of the 8th ACM & IEEE International Conference on Compilers, Architecture, and Synthesis for Embedded Systems (CASES '08), 19-24 Oct 2008, Atlanta, USA (pp. pp. 245-254).

Janssen, Kjeld G.H. and Hoang, Hanh T. and Floris, Jan and Vries, Jeroen de and Tas, Niels R. and Eijkel, Jan C.T. and Hankemeier, Thomas (2008) Solution titration by wall deprotonation during capillary filling of silicon oxide nanochannels. Analytical Chemistry, 80 (21). pp. 8095-8101. ISSN 0003-2700

Zhao, Yiping and Berenschot, Erwin and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2008) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic Engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317

Delalande, M. and Engelen, J.B.C. and Febre, A.J. le and Abelmann, L. and Lodder, J.C. (2008) Switching field distribution of arrays of Co-Pt Nanodots determined by anomalous hall effect measurements. In: Asian Magnetics Conference 2008, 10-13 Dec 2008, Busan, Korea.

Hartel, P.H. and Abelmann, L. and Khatib, M.G. (2008) Towards Tamper-Evident Storage on Patterned Media. In: 6th USENIX Conference on File and Storage Technologies, FAST 2008, February 26-29, 2008, San Jose, CA, USA (pp. pp. 283-296).

Mehendale, Aditya and Hagedoorn, Wouter and Lötters, Joost Conrad (2008) Transformer core. Patent.

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317

Khatib, M.G. and Miller, E.L. and Hartel, P.H. (2008) Workload-Based Configuration of MEMS-Based Storage Devices for Mobile Systems. In: Proceedings of the 8th ACM & IEEE International Conference on Embedded Software (EMSOFT '08), 19-24 Oct 2008, Atlanta, USA (pp. pp. 41-50).

2007

Vanapalli, Srinivas and Lewis, Michal and Gan, Zhihua and Radebaugh, Ray (2007) 120 Hz pulse tube cryocooler for fast cooldown to 50 K. Applied physics letters, 90 . 072504-3. ISSN 0003-6951

Iannuzzi, D. and Slaman, M. and Rector, J.H. and Schreuders, H. and Deladi, S. and Elwenspoek, M.C. (2007) A fiber-top cantilever for hydrogen detection. Sensors and Actuators B: Chemical, 121 (2). pp. 706-708. ISSN 0925-4005

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2007) A versatile surface channel concept for microfluidic applications. Journal of Micromechanics and Microengineering, 17 (10). pp. 1971-1977. ISSN 0960-1317

Floris, J. and Izadi, N. and Jaganatharaja, R.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Adaptation for frequency focusing and increased sensitivity in biomimetic flow sensors using electrostatic spring softening. In: 14th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2007, 10-14 June 2007, Lyon, France (pp. pp. 1267-1270).

Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2007) Adaptive, cricket-inspired artificial hair sensor arrays. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007, 29-30 November 2007, Veldhoven, The Netherlands (pp. pp. 589-593).

Lerou, P.P.P.M. and Venhorst, G.C.F. and Veenstra, T.T. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Brake, H.J.M. ter and Rogalla, H. (2007) All-Micromachined Joule-Thomson Cold Stage. In: 14th International Cryocooler Conference, 16-20 July 2007, Annapolis, MD, USA (pp. pp. 437-441).

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2007) Analysis of a three-dimensional particle velocity sensor for design optimization. Journal of Micromechanics and Microengineering, 17 (7). S137-S146. ISSN 0960-1317

Honschoten, J.W. van and Yntema, D.R. and Svetovoy, V. and Dijkstra, M.A. and Wiegerink, R.J. and Elwenspoek, M. (2007) Analysis of the performance of a particle velocity sensor between two cylindrical obstructions. Journal of the Acoustical Society of America, 121 (5). pp. 2711-2722. ISSN 0001-4966

Chakkalakkal Abdulla, S.M. and Krijnen, G.J.M. (2007) Bimorph based Active Joints for Nanometre scale Actuation. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007, 29-30 November 2007, Veldhoven, The Netherlands (pp. pp. 568-571).

Wiegerink, R.J. and Floris, J. and Jaganatharaja, R.K. and Izadi, N. and Lammerink, T.S.J. and Krijnen, G.J.M. (2007) Biomimetic flow-sensor arrays based on the filiform hairs on the cerci of crickets. In: IEEE Sensors 2007, 28-31 October 2007, Atlanta, GA, USA (pp. pp. 1073-1076).

Krijnen, Gijs and Floris, Arjan and Dijkstra, Marcel and Lammerink, Theo and Wiegerink, Remco (2007) Biomimetic micromechanical adaptive flow-sensor arrays. In: Bioengineered and Bioinspired Systems III, 2-4 May 2007, Maspalomas, Gran Canaria, Spain (pp. 65920F).

Yntema, D.R. and Druyvesteyn, W.F. and Wiegerink, R.J. (2007) Choosing the most appropriate sensor for acoustic measurements. In: 19th International Congress on Acoustics, ICA 2007, 2-7 September 2007, Madrid, Spain (pp. pp. 1-6).

Krijnen, G.J.M. and Lammerink, T.S.J. and Wiegerink, R.J. and Casas, J. (2007) Cricket inspired flow-sensor arrays. In: IEEE Sensors 2007, 28-31 October 2007, Atlanta, GA, USA (pp. pp. 539-546).

Fazal, I. and Elwenspoek, M.C. (2007) Design and analysis of a high pressure piezoelectric actuated microvalve. Journal of micromechanics and microengineering, 17 (11). pp. 2366-2379. ISSN 0960-1317

Fazal, I. and Elwenspoek, M.C. (2007) Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In: 18th Workshop on MicroMechanics Europe MME 2007, 16-18 September 2007, Guimaraes, Portugal (pp. pp. 219-222).

Fazal, Imran (2007) Development of a gas microvalve based on fine- and micromachining. thesis.

Koelmans, Wabe and Bruin, Gart de (2007) Diamagnetische levitatie. De Vonk, 25 (4). pp. 4-6. ISSN 0925-5427

Febre, A.J. le and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2007) Displacement sensing by field emission with nanometer resolution. In: Transducers 2007 & Eurosensors XXI Digest of Technical Papers, 10 June - 14 June 2007, Lyon, France (pp. pp. 2361-2364).

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2007) Elastocapillary filling of deformable nanochannels. Journal of Applied Physics, 101 . 094310. ISSN 0021-8979

Nguyen, Quoc Duy (2007) Electrochemistry in anisotropic etching of silicon in alkaline solutions : a kinetic wave analysis. thesis.

Svetovoy, Vitaly B. (2007) Evanescent character of the repulsive thermal Casimir force. Physical Review A: Atomic, molecular, and optical physics, 76 (6). 062102. ISSN 1050-2947

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Experimental investigation of anisotropy in isotropic silicon etching. Journal of micromechanics and microengineering, 17 (11). pp. 2344-2351. ISSN 0960-1317

Broek, D.M. van den and Elwenspoek, M.C. (2007) Explosive micro-bubble actuator. In: International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, 10-14 June 2007, Paris, France (pp. pp. 2441-2444).

Hoang, T.H. and Segers-Nolten, I. and Tas, N.R. and Boer, M.J. de and Subramaniam, V. and Elwenspoek, M.C. (2007) Fabrication of 1d nanochannels with thin glass wafers for single molecule studies. In: Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, 20-24 May 2007, Santa Clara, Californië USA (pp. pp. 260-263).

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2007) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Iannuzzi, D. and Heeck, K. and Slaman, M. and Man, S. de and Rector, J.H. and Schreuders, H. and Berenschot, J.W. and Gadgil, V.J. and Sanders, R.G.P. and Elwenspoek, M.C. and Deladi, S. (2007) Fibre-top cantilevers: design, fabrication and applications. Measurement Science and Technology, 18 (10). pp. 3247-3252. ISSN 0957-0233

Yang, C.K. and Febre, A.J. le and Pandraud, G. and Drift, D. van der and French, P.J. (2007) Field Emission for resonance sensing in MEMS/NEMS. In: IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007, 8-12 July 2007, Chicago, IL, USA (pp. pp. 72-73).

Febre, Alexander le and Abelmann, L. and Lodder, J.C. (2007) Field Emission to control nanometer tip-medium distances in probe storage. In: IEEE 20th International Vacuum Nanoelectronics Conference, IVNC 2007, 8-12 July 2007, Chicago, IL, USA (pp. pp. 223-224).

Febre, A.J. le and Lüttge, R. and Abelmann, L. and Lodder, J.C. (2007) Field emission to control tip-sample distance in magnetic probe recording. Journal of Physics: Conference Series, 61 . pp. 673-677. ISSN 1742-6588

Febre, A.J. le and Luttge, R. and Abelmann, L. and Lodder, J.C. (2007) Field emission to control tip-sample distance in magnetic probe recording. In: International Conference on Nanoscience and Technology 2006, 30 July - 4 Aug 2006, Basel, Switzerland (pp. pp. 673-677).

Bos, Jeroen Wouter and Hoitink, Ronald Wilhelmus Johannes and Besseling, Johannes Henricus and Lötters, Joost Conrad (2007) Flow sensor of the thermal type. Patent.

Yntema, D.R. and Wiegerink, R.J. and Honschoten, J.W. van and Elwenspoek, M. (2007) Fully integrated three dimensional sound intensity sensor. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan (pp. pp. 51-54).

Zwaag, Berend Jan van der and Khatib, Mohammed G. and Hartel, Pieter H. (2007) How migrating 0.0001% of address space saves 12% of energy in hybrid storage. [Report]

Nguyen, Q.D. and Elwenspoek, M. (2007) Influence of Applied Potentials on Anisotropic Etching of Silicon Described Using Kinematic Wave Etch Model. Journal of the Electrochemical Society, 154 (12). D684-D691. ISSN 0013-4651

Lüttge, Regina and Berenschot, Erwin J.W. and Boer, Meint J. de and Altpeter, Dominique M. and Vrouwe, Elwin X. and Berg, Albert van den and Elwenspoek, Miko (2007) Integrated Lithographic Molding for Microneedle-Based Devices. Journal of Microelectromechanical Systems, 16 (4). pp. 872-884. ISSN 1057-7157

Khatib, M.G. and Zwaag, B.J. van der and Hartel, P.H. and Smit, G.J.M. (2007) Interposing Flash between Disk and DRAM to Save Energy for Streaming Workloads. [Report]

Khatib, M.G. and Zwaag, B.J. van der and Hartel, P.H. and Smit, G.J.M. (2007) Interposing Flash between Disk and DRAM to Save Energy for Streaming Workloads. In: IEE/ACM/IFIP Workshop on Embedded Systems for Real-Time Multimedia, ESTImedia 2207, 4-5 Oct 2007, Salzburg, Austria (pp. pp. 7-12).

Luttge, R. and Wolferen, H.A.G.M. van and Abelmann, L. (2007) Laser interferometric nanolithography using a new positive chemical amplified resist. Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 25 (6). pp. 2476-2480. ISSN 1071-1023

Moktadir, Z. and Honschoten, J.W. van and Elwenspoek, M. (2007) Long range diffusion noise in platinum microwires with metallic adhesion layers. Applied Physics Letters, 90 (23). p. 233506. ISSN 0003-6951

Thomson, Thomas and Abelmann, Leon and Groenland, Hans (2007) Magnetic data storage: past, present and future. In: Magnetic Nanostructures in Modern Technology. NATO Science for Peace and Security Series, Series B: Physics and Biophysics . Springer Verlag, Berlin, Germany, pp. 237-306. ISBN 9781402063367

Groenland, J.P.J. (2007) Magnetische registratie. In: Poly-elektronica zakboek. Reed Business, Doetinchem, D4/2-D4/22, D4/31. ISBN 9789062284849

Gielens, F.C. and Tong, D.H. and Vorstman, M.A.G. and Keurentjes, J.T.F. (2007) Measurement and modeling of hydrogen transport through high-flux Pd membranes. Journal of Membrane Science, 289 (1-2). pp. 15-25. ISSN 0376-7388

Delft, Koen M. van and Eijkel, Jan C.T. and Mijatovic, Dragana and Druzhinina, Tamara S. and Rathgen, Helmut and Tas, Niels R. and Berg, Albert van den and Mugele, Frieder (2007) Micromachined Fabry-Pérot Interferometer with Embedded Nanochannels for Nanoscale Fluid Dynamics. Nano Letters, 7 (2). pp. 345-350. ISSN 1530-6984

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan (pp. pp. 123-126).

Jaganatharaja, R.K. and Izadi, N. and Floris, J. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2007) Model-based optimization and adaptivity of cricket-inspired biomimetic artificial hair sensor arrays. In: MicroMechanics Europe Workshop, MME 2007, 16-18 September 2007, Guimarães, Portugal (pp. pp. 203-206).

Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2007) Modular Micro Propulsion System. In: National MicroNano Conference 2007, 15-16 November 2007, Wageningen, Netherlands (pp. p. 22).

Patrascu, Mihail and Stramigioli, Stefano and Boer, Meint de and Krijnen, Gijs (2007) Nanometer range closed-loop control of a stepper micro-motor for data storage. In: ASME 2007 International Mechanical Engineering Congress and Exposition, IMECE 2007, 11-15 November 2007, Seattle, WA, USA.

Alonso-González, Pablo and González, Luisa and González, Yolanda and Fuster, David and Fernández-Martinez, Ivan and Martin-Sánchez, Javier and Abelmann, Leon (2007) New process for high optical quality InAs quantum dots grown on patterned GaAs(001) substrates. Nanotechnology, 18 (35). p. 355302. ISSN 0957-4484

Chakkalakkal Abdulla, S.M. and Krijnen, G.J.M. (2007) Optimised Frequency Range of Active Joints for Nanometre Range Stroke. In: MicroMechanics Europe Workshop, MME 2007, 16-18 September 2007, Guimarães, Portugal (pp. pp. 211-214).

Izadi, N. and Jaganatharaja, R.K. and Floris, J. and Krijnen, G.J.M. (2007) Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing. In: Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS 2007, 25-27 April 2007, Stresa, Italy (pp. pp. 112-115).

Izadi, N. and Jaganatharaja, R.K. and Krijnen, G.J.M. (2007) Optimization of biomimetic hair sensors. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007, 29-30 November 2007, Veldhoven, The Netherlands (pp. pp. 584-588).

Banerjee, T. and Lodder, J.C. and Jansen, R. (2007) Origin of the spin-asymmetry of hot-electron transmission in Fe. Physical Review B: Condensed matter and materials physics, 76 (14). p. 140407. ISSN 1098-0121

Vanapalli, S. and Brake, H.J.M. ter and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of Micromechanics and Microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317

Jansen, R. and Banerjee, T. and Park, B.G. and Lodder, J.C. (2007) Probing momentum distributions in magnetic tunnel junctions via hot-electron decay. Applied physics letters, 90 (19). pp. 1-3. ISSN 0003-6951

Lisfi, A. and Williams, C.M. and Nguyen, L.T. and Lodder, J.C. and Coleman, A. and Corcoran, H. and Johnson, A. and Chang, P. and Kumar, A. and Morgan, W. (2007) Reorientation of magnetic anisotropy in epitaxial cobalt ferrite thin films. Physical Review B: Condensed matter and materials physics, 76 (5). 054405. ISSN 1098-0121

Zhao, Yiping and Berenschot, Erwin and Boer, Meint de and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: MicroMechanics Europe Workshop, MME 2007, 16-18 Sep 2007, Guimarães, Portugal (pp. pp. 253-256).

Tong, H.D. and Jansen, H.V. and Tas, N.R. and Gadgil, V.J. and Carlen, E.T. and Berg, A. van den (2007) Simple technique for direct patterning of nanowires using a nanoslit shadow-mask. In: International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, 10-14 June 2007, Paris, France (pp. pp. 191-194).

Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R. (2007) Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110). Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 25 (4). pp. 1207-1216. ISSN 1071-1023

Mitsuzuka, K. and Kikuchi, N. and Shimatsu, T. and Kitakami, O. and Aoi, H. and Muraoka, H. and Lodder, J.C. (2007) Switching field and thermal stability of CoPt/Ru dot arrays with various thicknesses. IEEE Transactions on Magnetics, 43 (6). pp. 2160-2162. ISSN 0018-9464

Zhang, Li and Bain, James A. and Zhu, Jian-Gang and Abelmann, Leon and Onoue, Takahiro (2007) The role of MFM signal in mark size measurement in probe-based magnetic recording on CoNi/Pt multilayers. Physica B: Condensed matter, 387 (1-2). pp. 328-332. ISSN 0921-4526

Murillo Vallejo, R. and Siekman, M.H. and Bolhuis, T. and Abelmann, L. and Lodder, J.C. (2007) Thermal stability and switching field distribution of CoNi/Pt patterned media. Microsystem technologies, 13 (2). pp. 177-180. ISSN 0946-7076

Hartel, P.H. and Abelmann, L. (2007) Towards compliant data retention with probe storage on patterned media. [Report]

Groenland, J.P.J. and Abelmann, L. (2007) Two-dimensional coding for probe recording on magnetic patterned media. IEEE Transactions on Magnetics, 43 (6). pp. 2307-2309. ISSN 0018-9464

Groenland, J.P.J. and Abelmann, L. (2007) Two-dimensional data detection for probe recording on patterned media. In: 10th Joint MMM/Intermag Conference 2007, 7-11 January 2007, Baltimore, MD, USA (pp. p. 428).

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal (pp. pp. 127-130).

2006

Yntema, D.R. and Honschoten, J.W. van and Bree, H-E. de and Wiegerink, R.J. and Elwenspoek, M.C. (2006) A Three Dimensional Microflown. In: IEEE 19th annual International Conference on Micro Electro Mechanical Systems, MEMS, 22-26 January 2006, Istanbul, Turkey (pp. pp. 654-657).

Fernandez, L.J. and Wiegerink, R.J. and Flokstra, J. and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of Micromechanics and Microengineering, 16 . S1099-S1107. ISSN 0960-1317

Yntema, D.R. and Druyvesteyn, W.F. and Elwenspoek, M. (2006) A four particle velocity sensor device. Journal of the Acoustical Society of America, 119 (2). pp. 943-951. ISSN 00014966

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 1. Analysis and simulations. Journal of Micromechanics and Microengineering, 16 (6). S116-S124. ISSN 0960-1317

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M. (2006) A micromachined capacitive incremental position sensor: part 2. Experimental assessment. Journal of Micromechanics and Microengineering, 16 (6). pp. 125-134. ISSN 0960-1317

Zhang, Li and Bain, James A. and Zhu, Jian-Gang and Abelmann, Leon and Onoue, Takahiro (2006) A model of heat transfer in STM-based magnetic recording on CoNi/Pt multilayers. Physica B: Condensed Matter, 381 (1-2). pp. 204-208. ISSN 0921-4526

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and Actuators A: Physical, 130-13 . pp. 340-345. ISSN 0924-4247

Jong, B.R. de and Brouwer, D.M. and Jansen, H.V. and Boer, M.J. de and Lammertink, T.G. and Stramigioli, S. and Krijnen, G.J.M. (2006) A planar 3 DOF sample manipulator for nano-scale characterization. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 750-753).

Steinmann, T. and Casas, J. and Krijnen, G.J.M. and Dangles, O. (2006) Air-flow sensitive hairs: boundary layers in oscillatory flows around arthropod appendages. The Journal of Experimental Biology, 209 . pp. 4398-4408. ISSN 0022-0949

Honschoten, J.W. van and Yntema, D.R. and Dijkstra, M.A. and Svetovoy, V. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Analysis of packaging effects on the performance of the microflown. In: DTIP of MEMS & MOEMS 2006, 26-28 April 2006, Stresa, Italy.

Krijnen, Gijs and Dijkstra, Marcel and Baar, John van and Lammerink, Theo and Wiegerink, Remco (2006) Biomimetic, distributed micromechanical flow-sensing. In: 20th Eurosensors Conference, 17-20 September 2006, Göteborg, Sweden (pp. pp. 1-2).

Deladi, S. and Iannuzzi, D. and Gadgil, V.J. and Schreuders, H. and Elwenspoek, M.C. (2006) Carving fiber-top optomechanical transducers from an optical fiber. Journal of micromechanics and microengineering, 16 . pp. 886-889. ISSN 0960-1317

Antezza, Mauro and Pitaevskii, Lev P. and Stringari, Sandro and Svetovoy, Vitaly B. (2006) Casimir-Lifshitz Force Out of Thermal Equilibrium and Asymptotic Nonadditivity. Physical Review Letters, 97 (22). p. 223203. ISSN 0031-9007

Nguyen, Q.D. and Elwenspoek, M. (2006) Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties. Journal of Physics: Conference Series, 34 . pp. 1038-1043. ISSN 1742-6596

Zhang, Li and Bain, James A. and Zhu, Jian-Gang and Abelmann, Leon and Onoue, Takahiro (2006) Characterization of heat-assisted magnetic probe recording on CoNi/Pt multilayers. Journal of Magnetism and Magnetic Materials, 305 (1). pp. 16-23. ISSN 0304-8853

Min, B.C. and Lodder, J.C. and Jansen, R. and Motohashi, K. (2006) Cobalt-Al2O3-silicon tunnel contacts for electrical spin injection into silicon. Journal of applied physics, 99 (08S701). ISSN 0021-8979

Davelaar, B.J. and Abelmann, L. (2006) Comment on Y. Wang, D. Liui, Y. Wang, "Discovering the capacity of Human memory" Brain and Mind 4 (2003). Synthese, 153 (3). pp. 457-458. ISSN 0039-7857

Brouwer, D.M. and Jong, B.R. de and Soemers, H.M.J.R. (2006) Design and modeling of a precision 6 DOF MEMS-based parallel kinematic TEM sample manipulator. In: Philips Precision Technology Conference, October 2006, Groenendael, Hilvarenbeek.

Brouwer, D.M. and Jong, B.R. de and Soemers, H.M.J.R. (2006) Design and modeling of a precision 6 DOF MEMS-based parallel kinematic TEM sample manipulator. In: 21st Annual Meeting of the American Society of Precision Engineering (ASPE), 15-20 October 2006, Monterey, CA (pp. pp. 115-118).

Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2006) Design of a cold gas micro thruster. In: NanoNed/MicroNed Symposium II, 16-17 Nov 2006, Eindhoven, The Netherlands (pp. p. 180).

Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining. Journal of Micromechanics and Microengineering, 16 . pp. 1207-1214. ISSN 0960-1317

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2006) Directional sensitivity of a three dimensional particle velocity sensor. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME, 3-5 Sept 2006, Southampton, England (pp. pp. 201-204).

Kuipers, W.J. and Baar, J.J.J. van and Dijkstra, M.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Boer, J.H. de and Krijnen, G.J.M. (2006) Drag force actuated bistable microswitches for flow sensing. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 658-661).

Zhang, L. and Bain, J.A. and Zhu, J.G. and Abelmann, L. and Onoue, T. (2006) Dynamic domain motion of thermal-magnetically formed marks on CoNi/Pt multilayers. Journal of applied physics, 100 (053901). 053901. ISSN 0021-8979

Park, B.G. and Haq, E. and Banerjee, T. and Min, B.C. and Lodder, J.C. and Jansen, R. (2006) Excitation and transport of hot holes in a magnetic tunnel transistor. Journal of applied physics, 99 . 08S703. ISSN 0021-8979

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Experimental verification of the diffusion theory for wet isotropic etching of si via circular mask openings. In: Fifth International Workshop on Physical Chemistry of Wet Etching of Semiconductors, 19-21 June 2006, Saarbrücken, Germany.

Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven (pp. p. 192).

Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 814-817).

Fernandez, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of Micromechanics and Microengineering, 16 (4). pp. 862-868. ISSN 0960-1317

Iannuzzi, D. and Deladi, S. and Berenschot, J.W. and Man, S. de and Heeck, K. and Elwenspoek, M.C. (2006) Fiber-top atomic force microscope. Review of Scientific Instruments, 77 (10). pp. 106105-1. ISSN 0034-6748

Iannuzzi, D. and Deladi, S. and Schreuders, H. and Slaman, M. and Rector, J.H. and Elwenspoek, M.C. (2006) Fiber-top cantilever: a new generation of micromachined sensors for multipurpose applications. Journal of the Optical Society of America B: Optical Physics . pp. 1-4. ISSN 0740-3224

Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2006) Fiber-top cantilevers: a new sensor on the tip of a fiber. Optics and Photonics News, 17 (12). p. 39. ISSN 1047-6938

Woldering, Leon A. and Otter, A.M.(Bert) and Husken, Bart H. and Vos, Willem L. (2006) Focused ion beam milling of nanocavities in single colloidal particles and self-assembled opals. Nanotechnology, 17 (23). pp. 5717-5721. ISSN 0957-4484

Zhang, L. and Bain, J.A. and Zhu, J.G. and Abelmann, L. and Onoue, T. (2006) Heat-assisted magnetic probe recording on a granular CoNi/Pt multilayered film. Journal of Physics D: Applied Physics, 39 . pp. 2485-2487. ISSN 0022-3727

Gielens, F.C. and Knibbeler, R.J.J. and Duysinx, P.F.J. and Tong, H.D. and Vorstman, M.A.G. and Keurentjes, J.T.F. (2006) Influence of steam and carbon dioxide on the hydrogen flux through thin Pd/Ag and Pd membranes. Journal of Membrane Science, 279 (1-2). pp. 176-185. ISSN 0376-7388

Brouwer, D.M. and Jong, B.R. de and Soemers, H.M.J.R. (2006) MEMS based 6 degrees-of-freedom parallel kinematic precision micro manipulator. In: 6th EUSPEN international conference, May 2006, Baden bei Wien.

Mitsuzuka, K. and Shimatsu, T. and Muraoka, H. and Kikuchi, N. and Lodder, J.C. (2006) Magnetization reversal and switching field of CoPt/Ru patterned films. Journal of the Magnetics Society of Japan, 30 (2). pp. 100-107. ISSN 0285-0192

Lötters, Joost Conrad (2006) Mass flowmeter. Patent.

Besseling, Johannes Henricus and Lötters, Joost Conrad (2006) Mass flowmeter for measuring by the CT method. Patent.

Mehendale, Aditya and Lötters, Joost Conrad and Zwikker, Jan Marinus (2006) Mass flowmeter of the coriolis type. Patent.

Mehendale, Aditya and Lötters, Joost Conrad and Zwikker, Jan Marinus (2006) Mass flowmeter of the coriolis type. Patent.

Krijnen, Gijs J.M. and Dijkstra, Marcel and Baar, John J. van and Shankar, Siripurapu S. and Kuipers, Winfred J. and Boer, Rik J.H. de and Altpeter, Dominique and Lammerink, Theo S.J. and Wiegerink, Remco (2006) Mems based hair flow-sensors as model systems for acoustic perception studies. Nanotechnology, 17 . S84-S89. ISSN 0957-4484

Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Wiegerink, R.J. (2006) Micro coriolis flow sensor. In: Proceedings of the NanoNed / MicroNed Symposium II, 16-17 Nov 2006, Eindhoven (pp. p. 174).

Lerou, P.P.P.M. and Vanapalli, S. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and Brake, H.J.M. ter and Rogalla, H. (2006) Microcooling Developments at the University of Twente. In: Advances in cryogenic engineering: transactions of the cryogenic engineering. AIP Conference Proceedings, 823 . American Institute of Physics, pp. 977-984. ISBN 9780735403178

Louwerse, Marcus and Sanders, Berry and Jansen, Henry (2006) Microsysteemtechnologie verpakt in een buisje. Ruimtevaart . pp. 11-15. ISSN 1382-2446

Iannuzzi, D. and Deladi, S. and Gadgil, V.J. and Sanders, R.G.P. and Schreuders, H. and Elwenspoek, M.C. (2006) Monolithic fiber-top sensor for critical environments and standard applications. Applied Physics Letters, 88 (5). ISSN 0003-6951

Dijkstra, M. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2006) Nano-flow thermal sensor applying dymamic w-2w sensing method. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 September 2006, Southampton, England.

Haneveld, Jeroen and Berenschot, Erwin and Maury, Pascale and Jansen, Henri (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of Micromechanics and Microengineering, 16 (6). S24-S28. ISSN 0960-1317

Eijkel, J.C.T. and Delft, K.M. van and Mijatovic, D. and Rathgen, H. and Tas, N.R. and Mugele, F.G. and Berg, A. van den (2006) Nanochannels with integrated Fabry-Perot interferometry: a new tool for nanofluidics. In: MicroTAS 2006 Conference, 5-9 Nov 2006, Tokyo, Japan (pp. pp. 615-617).

Gironès, M. and Akbarsyah, I.J. and Nijdam, W. and Rijn, C.J.M. van and Jansen, H.V. and Lammertink, R.G.H. and Wessling, M. (2006) Polymeric microsieves produced by phase separation micromolding. Journal of Membrane Science, 283 (1-2). pp. 411-424. ISSN 0376-7388

Svetovoy, V.B. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Precise Test of the Diffusion-Controlled Wet Isotropic Etching of Silicon via Circular Mask Openings. Journal of the Electrochemical Society, 153 (9). C641-C647. ISSN 0013-4651

Mitsuzuka, K. and Kikuchi, N. and Shimatsu, T. and Kitakami, O. and Aoi, H. and Muraoka, H. and Lodder, J.C. (2006) Pt content dependence of magnetic properties of CoPt/Ru patterned films. IEEE Transactions on Magnetics, 42 (12). pp. 3883-3885. ISSN 0018-9464

Brouwer, Dannis M. and Jong, B.R. de and Boer, M.J. de and Soemers, H.M.J.R. (2006) Rotational precision MEMS-based clamping mechanism for stable fixation of elastic mechanisms. In: Philips Precision Technology Conference, October 2006, Groenendael, Hilvarenbeek.

Pirozhenko, I. and Lambrecht, A. and Svetovoy, V.B. (2006) Sample dependence of the Casimir force. New Journal of Physics, 8 . p. 238. ISSN 1367-2630

Vargas llona, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2006) Seedless electroplating on patterned silicon. Journal of Micromechanics and Microengineering, 16 (6). pp. 1-6. ISSN 0960-1317

Timmer, Björn H. and Delft, Koen M. van and Koelmans, W.W. and Olthuis, Wouter and Berg, Albert van den (2006) Selective low concentration ammonia sensing in a microfluidic lab-on-a-chip. IEEE Sensors Journal, 6 (3). pp. 829-835. ISSN 1530-437X

Esquivel-Sirvent, R. and Villarreal, C. and Mochan, W.L. and Contreras-Reyes, A.M. and Svetovoy, V.B. (2006) Spatial dispersion in Casimir forces: a brief review. Journal of physics A: mathematical and general, 39 . pp. 6323-6331. ISSN 0305-4470

Fazal, Imran and Louwerse, Marcus and Jansen, Henri and Elwenspoek, Miko (2006) Stepper Motor Actuated Microvalve. Journal of Physics: Conference Series, 34 . pp. 1032-1037. ISSN 1742-6596

Khatib, M.G. and Zwaag, B.J. van der and Viegen, F and Smit, G.J.M. (2006) Striping Policy as a Design Parameter for MEMS-based Storage Systems. In: Second International Workshop on Software Support for Portable Storage, IWSSPS 2006, October 26, 2006, Seoul, Korea.

Brouwer, D.M. and Jong, B.R. de and Soemers, H.M.J.R. and Dijk, J. van (2006) Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application. Journal of Micromechanics and Microengineering, 16 (6). S7-S12. ISSN 0960-1317

Tas, Niels R. and Haneveld, Jeroen and Jansen, Henri V. and Elwenspoek, Miko (2006) Surface Tension Effects in Nanochannels: Capillary Filling and Negative Pressure. In: 210th ECS Meeting, E6-Bioelectronics, Biointerfaces, and Biomedical Applications, 29 Oct - 3 Nov 2006, Cancun, Mexico.

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2006) Switchable capacitor and method of making the same. Patent.

Svetovoy, V. and Esquivel, R. (2006) The casimir free energy in high- and low-temperature limits. Journal of physics A: mathematical and general, 39 . pp. 6777-6784. ISSN 0305-4470

Zhang, L. and Bain, J.A. and Zhu, J.G. and Abelmann, L. and Onoue, T. (2006) The effect of external magnetic field on mark size in heat-assisted probe recording on CoNi/Pt multilayers. Journal of applied physics, 99 (023902). 023902. ISSN 0021-8979

le Fèbre, A.J. and Lodder, J.C. and Abelmann, L. (2006) Tip-sample distance control for magnetic probe recording. In: Proceedings of the 2006 Joint European Workshop IMST 2006 and E*PCOS 2006, 29 May - 31 May 2006, Grenoble, France (pp. pp. 253-254).

Min, B.C. and Motohashi, K. and Lodder, J.C. and Jansen, R. (2006) Tunable spin-tunnel contacts to silicon using low-work-function ferromagnets. Nature materials, 5 . pp. 817-822. ISSN 1476-1122

Park, B.G. and Banerjee, T. and Min, B.C. and Lodder, J.C. and Jansen, R. (2006) Tunnel spin polarization of Ni80Fe20/SiO2 probed with a magnetic tunnel transistor. Physical Review B: Condensed matter and materials physics, 73 (17). p. 172402. ISSN 1098-0121

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2006) Versatile surface channel concept for microfluidic applications. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 September 2006, Southampton, England (pp. pp. 37-40).

2005

Fernandez, Luis J. and Arz, Uwe and Schubert, Dirk and Berenschot, E. and Wiegerink, Remco and Flokstra, J. (2005) A CMOS compatible Process for Improved RF Performance on Highly Doped Substrates. In: 9th IEEE Workshop on Signal Propagation on Interconnects, 2005, 10-13 May 2005, Garmisch-Partenkirchen, Germany (pp. pp. 167-170).

Brivio, Monica and Tas, Niels R. and Goedbloed, Martijn H. and Gardeniers, Han J.G.E. and Verboom, Willem and Berg, Albert van den and Reinhoudt, David N. (2005) A MALDI-chip integrated system with a monitoring window. Lab on a Chip, 5 (4). pp. 378-381. ISSN 1473-0197

Yntema, Doekle R. and Bree, Hans-Elias de (2005) A Microflown based sound pressure microphone suitable for harsh environments. In: National Conference on Noise Control Engineering, NOISE-CON 2005, 17-19 October 2005, Minneapolis, MI, USA.

Blom, Marko T. and Chmela, Emil and Heyden, Frank H.J. van der and Oosterbroek, R. Edwin and Tijssen, Robert and Elwenspoek, Miko and Berg, Albert van den (2005) A differential viscosity detector for use in miniaturized chemical separation systems. Journal of Microelectromechanical Systems, 14 (1). pp. 70-80. ISSN 1057-7157

Blom, M.T. and Oever, R. van 't and Claes, P. and Verboom, W. and O'Donohue, S. and van den Berg, A. and Reinhoudt, D.N. (2005) A micro differential viscosity detector for polymer separation system. In: MicroTAS 2005 Conference -9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 9-13 October 2005, Boston, MA, USA (pp. pp. 988-990).

Yntema, Doekle R. and Bree, Hans-Elias de (2005) A microflown based sound presure microphone suitable for harsh environments. In: NOISE-CON 2005, October 17-19, 2005, Minneapolis, Minnesota, USA.

Craus, C.B. and Onoue, T. and Ramstöck, K. and Geerts, W.J.M.A. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2005) A read and write element for magnetic probe recording. Journal of Physics D: Applied Physics, 38 (3). pp. 363-370. ISSN 0022-3727

Kikuchi, N. and Murillo, R. and Lodder, J.C. (2005) AHE measurements of very thin films and nanosized dots. Journal of Magnetism and Magnetic Materials, 287 . pp. 320-324. ISSN 0304-8853

Saravanan, S. and Dijkstra, M. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden (pp. pp. 320-323).

Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AlN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden (pp. pp. 320-323).

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2005) Analysis Of Micromachined Capacitive Incremental Position Sensor. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Lisfi, A. and Nguyen, L.T. and Lodder, J.C. and Williams, C.M. and Corcoran, H. and Chang, P. and Johnson, A. and Morgan, W. (2005) Analysis and contribution of stress anisotropy in epitaxial hard ferrite thin films. Journal of Magnetism and Magnetic Materials, 290-29 (Part 1). pp. 219-222. ISSN 0304-8853

Moktadir, Z. and Wensink, H. and Kraft, M. (2005) Analytical model of micromachining of brittle materials with sharp particles. Microelectronics Journal, 36 (3-6). pp. 608-611. ISSN 0026-2692

Kikuchi, N. and Murillo, R. and Lodder, J.C. (2005) Anomalous Hall-effect measurement study on Co/Pt nanosized dot. Journal of Applied Physics, 97 . 10J713-1. ISSN 0021-8979

Deladi, S. and Sarajlic, E. and Kuijpers, A.A. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Applications of the Microelectromechanical Systems in Nanoscience. In: II Eccomas Thematic Conference on Smart Structures and Materials, 18-21 July, 2005, Lisboa, Portugal.

Baar, J. van and Dijkstra, M. and Wiegerink, R. and Lammerink, T. and Boer, R. de and Krijnen, G. (2005) Arrays of cricket-inspired sensory hairs with capacitive motion detection. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS, Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 646-649).

Dijkstra, M. and Baar, J.J. van and Wiegerink, R.J. and Lammerink, T.S.J. and Boer, J.H. de and Krijnen, G.J.M. (2005) Artificial sensory hairs based on the flow sensitive receptor hairs of crickets. Journal of Micromechanics and Microengineering, 15 (7). S132-S138. ISSN 0960-1317

Sarajlic, E. and Berenschot, E. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) Bidirectional electrostatic linear shuffle motor with two degrees of freedom. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 391-394).

Fazal, I. and Berenschot, J.W. and Boer, J.H. de and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond Strength Tests Between Silicon Wafers and Duran Tubes (Fusion Bonded Fluidic Interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (pp. pp. 936-939).

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2005) Bulk Micromachining Technology for Fabrication of two-level MEMS in Standard Silicon Substrate. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 1404-1405).

Wiegerink, R.J. and Baar, J.J. van and Boer, J.H. de and Ridder, M.L. and Bruijn, M.P. and Germeau, A. and Hoevers, H.F.C. (2005) Cryogenic imaging X-ray spectrometer. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 56-59).

Vargas llona, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2005) Direct Electroplating on Highly Doped Patterned Silicon Wafers. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Postma, Ferry Michael (2005) Epitaxial oxide spintronic structures: ferromagnets and semiconductors. thesis.

Vanapalli, S.A. and Lerou, P.P.M. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Venhorst, G.C.F. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2005) Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 354-357).

Tiggelaar, R.M. and Berenschot, J.W. and Boer, J.H. de and Sanders, R.G.P. and Gardeniers, J.G.E. and Oosterbroek, R.E. and Berg, A. van den and Elwenspoek, M.C. (2005) Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silion nitride tubes. Lab on a Chip, 5 (3). pp. 325-336. ISSN 1473-0197

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Fabrication of 3D Nanowire Frames by Conventional Micromachining Technology. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 27-30).

Saravanan, S. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Fabrication of Surface Micromachined AlN Piezoelectric Microstructures and its Potential Apllication to RF Resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland.

Tiggelaar, R.M. and Male, P. van and Berenschot, J.W. and Gardeniers, J.G.E. and Oosterbroek, R.E. and Croon, M.H.J.M. de and Schouten, J.C. and Berg, A. van den and Elwenspoek, M.C. (2005) Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane. Sensors and Actuators A: Physical, 119 . pp. 196-205. ISSN 0924-4247

Hoang, Thi Hanh and Berenschot, J.W. and Tas, Niels R. and Elwenspoek, Miko C. (2005) Fabrication of access holes to 2D nanochannels for single molecules experiment [poster]. In: NanoTech Montreux, November 15-17, 2005, Montreux, Switzerland.

Deladi, S. and Berenschot, J.W. and Tas, N.R. and Boer, J.H. de and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of micromachined Foutain Pen with in-situ characterization possibility of nanoscale surface modification. Journal of Micromechanics and Microengineering, 15 (3). pp. 528-534. ISSN 0960-1317

Murillo, R. and Wolferen, H.A. and Abelmann, L. and Lodder, J.C. (2005) Fabrication of patterned magnetic nanodots by laser interference lithography. Microelectronic Engineering, 78-79 . pp. 260-265. ISSN 0167-9317

Fernandez, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of RF devices. Electronics Letters, 41 (3). pp. 124-125. ISSN 0013-5194

Lodder, J.C. and Nguyen, L.T. (2005) FePt Thin Films: Fundamentals and Applications. In: Encyclopedia of Materials: Science and Technology. Elsevier, Amsterdam, pp. 1-10. ISBN 9780080431529

Valero, A. and Lüttge, R. and Nieuwkasteele, J.W. van and Andersson, S.M.H. and Berg, A. van den (2005) Flow-through microfluidic chip for cell transfection by electropermeabilization. In: MicroTAS 2005 Conference, October 9-13, 2005, Boston, MA, USA (pp. pp. 1395-1397).

Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates. In: Microscopy of Semiconducting Materials. Springer Proceedings in Physics, 107 . Springer, pp. 75-78. ISBN 9783540319146

Nguyen, L.T. and Tichelaar, F.D. and Lodder, J.C. (2005) Growth of oblique sputtered Co and CoCrPt thin films for high-density tape recording. Journal of Magnetism and Magnetic Materials, 290-29 (Part 2). pp. 1294-1297. ISSN 0304-8853

Onoue, T. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2005) Heat-assisted magnetic probe recording on a CoNi/Pt multilayered film. Journal of Magnetism and Magnetic Materials, 287 . pp. 501-506. ISSN 0304-8853

Sarajlic, E. and Berenschot, E. and Tas, N. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) High Performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 53-56).

Deladi, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2005) In situ characterization technique for nanotribological investigations. Review of Scientific Instruments, 76 (1). 016102. ISSN 0034-6748

Nguyen, Q.D. and Elwenspoek, M. (2005) Influence of an Applied Potential on the Anisotropic Etch rates of Silicon in KOH. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 45-48).

Brivio, M. and Liesner, A. and Oosterbroek, R.E. and Verboom, W. and Karst, U. and Berg, A. van den and Reinhoudt, D.N. (2005) Kinetic study of an on-chip isocyanate derivatization reaction by on-line nano-esi ms. In: MicroTAS 2005 Conference, October 9-13, 2005, Boston, MA, USA (pp. pp. 927-929).

Brouwer, D.M. and Jong, B.R. de and Soemers, H.M.J.R. (2005) MEMS 6 degrees of freedom parallel micro manipulator for TEM sample manipulation. In: Philips Precision Technology Conference, April 2005, Groenendael.

Krijnen, Gijs J.M. and Dijkstra, M. and Baar, J.J. van and Boer, J.H. de and Lammerink, T.S.J. and Wiegerink, R.J. (2005) MEMS based hair flow-sensors as model systems for acoustic perception studies. In: International Conference on Bio-Nano-Information Fusion, 20-22 July 2005, Marina del Rey, CA, USA.

Abelmann, Leon and Bos, Arnout van den and Lodder, Cock (2005) Magnetic Force Microscopy - Towards higher resolution. In: Magnetic Microscopy of Nanostructures. NanoScience and Technology . Springer Verlag, Berlin, pp. 253-283. ISBN 9783540401865

Kikuchi, N. and Murillo, R. and Lodder, J.C. and Mitsuzuka, K. and Shimatsu, T. (2005) Magnetization Process of High Anisotropy Copt Nanosized Dots. In: IEEE International Magnetics Conference, INTERMAG 2005, 4-8 April 2005, Nagoya, Japan (pp. pp. 1519-1520).

Kikuchi, N. and Murillo, R. and Lodder, J.C. and Mitsuzuka, K. and Shimatsu, T. (2005) Magnetization Process of High Anisotropy Copt Nanosized Dots. IEEE Transactions on Magnetics, 41 (10). pp. 3613-3615. ISSN 0018-9464

Okamoto, S. and Kikuchi, N. and Kitakami, O. and Shimada, Y. (2005) Magnetization reversal process in FePt L10 nanoparticles. Journal of Magnetism and Magnetic Materials, 53 (4). pp. 395-401. ISSN 0304-8853

Lötters, Joost Conrad (2005) Mass flowmeter. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2005) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2005) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Sarajlic, Edin and Berenschot, Johan Willem (2005) Method for manufacturing a nanstructure. Patent.

Vanapalli, S. and Lerou, P. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and Brake, H.J.M. ter and Rogalla, H. (2005) Microcooling developments at the University of Twente [Presentation]. In: 5th Round Table on Micro/Nano Technologies for Space : Session 11: Interface, Thermal Management and Fluidics, 3-5 October, 2005, Noordwijk, The Netherlands .

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. and Boer, J.H. de (2005) Micromachined Foutain Pen as a tool for Atomic Force Microscopebased nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 564-567).

Kuijpers, Toon A.A. and Krijnen, Gijs J.M. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko C. (2005) Micromachined capacitive displacement sensor for long-range nano-positioning. In: International Probe Storage Workshop III , Feb. 28 - Mar. 1, 2005, Zürich, Switzerland.

Dao, T.N.N and Kikuchi, N. and Abelmann, L. and Lodder, J.C. (2005) Micromagnetic Simulation of Non Uniform Nanodots with Perpendicular Anisotropy. In: IEEE International Magnetics Conference, INTERMAG 2005, 4-8 April 2005, Nagoya, Japan (pp. pp. 1847-1848).

Tong, Hien Duy and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, Henri V. and Berenschot, J.W. and Boer, Meint J. de and Boer, J.H. de and Rijn, Cees J.M. van and Elwenspoek, Miko C. (2005) Microsieve supporting palladium-silver alloy membranes and application to hydrogen separation. Journal of Microelectromechanical Systems, 14 . pp. 113-123. ISSN 1057-7157

Deladi, S. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Multifunctional Tool for Expanding AFM-Based Applications. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 159-162).

Haneveld, Jeroen and Berenschot, Erwin and Maury, Pascale and Jansen, Henri (2005) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 72-75).

Jong, B.R. de and Brouwer, D.M. and Jansen, H.V. and Boer, M.J. de and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: 19th European Conference on Solid-State Transducers, EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain.

Svetovoy, V.B. and Esquivel, R. (2005) Nonlocal impedances and the Casimir entropy at low temeratures. Physical Review E: Statistical, nonlinear, and soft matter physics, 72 (3, Par). 036113. ISSN 1539-3755

Esquivel-Sirvent, R. and Svetovoy, V.B. (2005) Nonlocal thin films in calculations of the Casimir force. Physical Review B: Condensed matter and materials physics, 72 (4). 045443. ISSN 1098-0121

Honschoten, Joost van and Svetovoy, Vitaly B. and Krijnen, Gijs J.M. and Elwenspoek, Miko C. (2005) Optimization of a Thermal Flow Sensor for Acoustic Particle Velocity Measurements. Journal of Microelectromechanical Systems, 14 (3). pp. 436-443. ISSN 1057-7157

Yeshurun, Yehoshua and Hefetz, Meir and Berenschot, Erwin and Boer, Meint de and Altpeter, Dominique and Boom, Garrit (2005) Polymer Microneedles. Patent.

Tong, H.D. and Berg, A.H.J. van den and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver aloy films by a dual sputtering technique and its application in hydrogen separation membrane. Thin Solid Films, 479 . pp. 89-94. ISSN 0040-6090

Park, B.G. and Banerjee, T. and Min, B.C. and Sanderink, J.G.M. and Lodder, J.C. and Jansen, R. (2005) Probing spin-polarized tunneling at high bias and temperature with a Magnetic Tunnel Transistor. In: IEEE International Magnetics Conference, INTERMAG Asia, 4-8 April 2005, Nagoya, Japan (pp. pp. 1199-1200).

Lerou, P.P.M. and Jansen, H.V. and Venhorst, G.C.F. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Brake, H.J.M. ter and Elwenspoek, M.C. and Rogalla, H. (2005) Progress in Micro Joule-Thomson Cooling at Twente University. In: 13th International Cryocooler Conference, March 29 - April 1, 2004, New Orleans, Louisiana (pp. pp. 489-496).

Vrouwe, Elwin Xander (2005) Quantitative microchip capillary electrophoresis for inorganic ion analysis at the point of care. thesis.

Hoevers, H.F.C. and Ridder, M.L. and Germeau, A. and Bruijn, M.P. and Korte, P.A.J. de and Wiegerink, R.J. (2005) Radiative ballistic phonon transport in silicon-nitride membranes at low temperatures. Applied Physics Letters, 86 . p. 251903. ISSN 0003-6951

Fernandez, Luis and Sesé, J. and Wiegerink, Remco and Flokstra, Jaap and Jansen, Henri and Elwenspoek, Miko (2005) Radio frequency power sensor based on MEMS technology with ultra low losses. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 191-194).

Banerjee, T. and Ul Haq, E. and Siekman, M.H. and Lodder, J.C. and Jansen, R. (2005) Spin-filtering of hot holes in a metallic ferromagnet. Physical Review Letters, 94 (2). 027204. ISSN 0031-9007

Haq, E. and Banerjee, T. and Siekman, M.H. and Lodder, J.C. and Jansen, R. (2005) Spin-filtering of non-equilibrium holes in semiconductor-ferromagnet hybrid structure. In: IEEE International Magnetics Conference - INTERMAG Asia, 4-8 April 2005, Nagoya, Japan (pp. pp. 1201-1202).

Ul Haq, E. and Banerjee, T. and Siekman, M.H. and Lodder, J.C. and Jansen, R. (2005) Spin-filtering of non-equlibrium holes in a semiconductor-ferromagnet hybrid structure. In: IEEE International Magnetics Conference, INTERMAG Asia, 4-8 April 2005, Nagoya, Japan (pp. pp. 1201-1202).

Saravanan, S. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Surface Micromachined Fabrication of Piezoelectric AlN Unimorph Suspension Devices for RF Resonator Applications. In: 13th International Conference on Solid-StateSensors, Actuators and Microsystems, Transducers 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 1362-1365).

Jong, B.R. de and Jansen, H.V. and Boer, M.J. de and Krijnen, G.J.M. (2005) Tailored Etch-Profiles of high aspect ratio trenches to prevent voids after refill with LPCVD sirn. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Hoang Thi Hanh, H.T.H. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2005) The microfabrication of and fluid study on nanochannels. In: Proceedings of the 1st International Nanofluidics Workshop (pp. pp. 62-63).

2004

Eijkel, Jan C.T. and Bomer, Johan and Tas, Niels R. and Berg, Albert van den (2004) 1-D nanochannels fabricated in polyimide. Lab on a Chip, 4 (3). pp. 161-163. ISSN 1473-0197

Zhang, L. and Bain, J.A. and Zhu, J.G. and Abelmann, L. and Onoue, T. (2004) A model for mark size dependence on field emission voltage in heat-assisted magnetic probe recording on CoNi/Pt multilayers. IEEE Transactions on Magnetics, 40 (4). pp. 2549-2551. ISSN 0018-9464

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2004) Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers. Journal of Micromechanics and Microengineering, 14 (9). S70-S75. ISSN 0960-1317

Deladi, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) An AFM-based device for in-situ characterization of nano-wear. In: 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, January 25-29, 2004, Maastricht, the Netherlands (pp. pp. 181-184).

Honschoten, J.W. van and Krijnen, G.J.M. and Svetovoy, V.B. and Bree, H.E. de and Elwenspoek, M.C. (2004) Analytic model of a two wire thermal sensor for flow and sound measurements. Journal of Micromechanics and Microengineering, 14 (11). pp. 1468-1477. ISSN 0960-1317

Kuijpers, A.A. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2004) Capacitive long-range position sensor for microactuators. In: 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, January 25-29 , 2004, Maastricht, The Netherlands (pp. pp. 544-546).

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M. and Berg, A. van den (2004) Capillary filling speed of water in nanochannels. Applied Physics Letters, 85 (15). pp. 3274-3276. ISSN 0003-6951

Svetovoy, V.B. (2004) Comment on "Surface impedance approach solves problems with the thermal casimir force between real metals". Physical review A: Atomic, molecular, and optical physics, 70 (1). 016101. ISSN 1050-2947

Esquivel, R. and Svetovoy, V.B. (2004) Correction to the casimir force due to the anomalous skin effect. Physical Review Letters, 69 (6). 062102. ISSN 0031-9007

Baar, J.J. van and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2004) Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 726-729).

Honschoten, J.W. van and Svetovoy, V.B. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Determination of the sensitivity behavior of an acoustic thermal flow sensor by electronic characterization. Sensors and Actuators A: Physical, 112 (1). pp. 1-9. ISSN 0924-4247

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements, 2004, 27 June - 2 July 2004, London, UK (pp. pp. 117-118).

Bruijn, Marcel P. and Baars, Norman H.R. and Bergmann Tiest, Wouter M. and Germeau, Alexander and Hoevers, Henk F.C. and Korte, Piet A.J. de and Mels, Wim A. and Ridder, Marcel L. and Krouwer, Eric and Baar, John J. van and Wiegerink, Remco J. (2004) Development of an array of transition edge sensors for application in X-ray astronomy. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 520 (1-3). pp. 443-445. ISSN 0168-9002

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based electrothermal actuators. Journal of Micromechanics and Microengineering, 14 (9). S31-S36. ISSN 0960-1317

Nguyen, L.T. and Lisfi, A. and Lodder, J.C. (2004) Effect of gas pressure on properties of FePt film sputtered on polymer substrate. Journal of Applied Physics, 95 (11). pp. 7492-7494. ISSN 0021-8979

Lim, Woo Chang and Park, Byong Guk and Bae, Ji Young and Lee, Taek Dong (2004) Effects of free layer materials and thickness on TMR behaviour in magnetic tunnel junctions. Physica Status Solidi A: Applied research, 201 (8). pp. 1696-1699. ISSN 0031-8965

Mela, Petra and Tas, Niels R. and Berenschot, Erwin J.W. and Nieuwkasteele, Jan van and Berg, Albert van den (2004) Electrokinetic pumping and detection of low-volume flows in nanochannels. Electrophoresis, 25 (21-22). pp. 3687-3693. ISSN 0173-0835

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Electrostatic stepping motion microactuator with high-resolution and large force for micro Scanning Probe Array Memory (µSPAM). In: 4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004, 28-29 September 2004, Aachen, Germany.

Hoang, H.T. and Tong, H.D. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2004) Fabrication and characterization of dual sputtered Pd-Cu alloy films for hydrogen separation membranes. Materials Letters, 3-4 (58). pp. 525-528. ISSN 0167-577X

Deladi, S. and Svetovoy, V. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Flash-release - an alternative for releasing complex MEMS devices. Journal of Micromechanics and Microengineering, 14 (12). pp. 1659-1664. ISSN 0960-1317

Ferret, C. and Falk, L. and d'Ortona, U. and Chenu, A. and Veenstra, T.T. (2004) Introduction of image analysis for the quantification of the boiling flow heat transfer. Chemical Engineering Journal, 101 (1-3). pp. 357-365. ISSN 0300-9467

Lisfi, A. and Nguyen, L.T. and Lodder, J.C. and Williams, C.M. (2004) Investigation of magnetic anisotropy and role of underlayer in obliquely sputtered metallic thin films. Journal of Magnetism and Magnetic Materials, 272-27 (Suppl.). e797-e799. ISSN 0304-8853

Honschoten, J.W. van and Svetovoy, V.B. and Krijnen, G.J.M. and Kuipers, H. and Elwenspoek, M.C. (2004) Investigation of the low-frequency noise of an acoustic thermal flow sensor. In: Eurosensors Conference XVIII, 12-15 September, 2004, Rome, Italy.

Lötters, Joost Conrad (2004) Mass flowmeter. Patent.

Kuijpers, Toon A.A. and Krijnen, Gijs J.M. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko C. (2004) Measurements for a capacitive incremental position sensor for microactuators. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 760-763).

Lodder, J.C. (2004) Methods for preparing patterned media for high-density recording. Journal of Magnetism and Magnetic Materials, 272-27 (Part 3). pp. 1692-1697. ISSN 0304-8853

Tong, Duy Hien (2004) Microfabricated palladium-based membranes for hydrogen separation. thesis.

Tong, H.D. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Rijn, C.J.M. van and Elwenspoek, M.C. and Nijdam, W. (2004) Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Industrial and Engineering Chemistry Research, 43 . pp. 4182-4187. ISSN 0888-5885

Kuijpers, Anton Adriaan (2004) Micromachined Capacitive Long-Range Displacement Sensor for Nano-Positioning of Microactuator systems. thesis.

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and Boer, M.J. de and Boer, J.H. de and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope based nanopatterning. Applied Physics Letters, 85 (22). pp. 5361-5363. ISSN 0003-6951

Gielens, F.C. and Tong, H.D. and Rijn, C.J.M. van and Vorstman, M.A.G. and Keurentjes, J.T.F. (2004) Microsystem technology for high-flux hydrogen separation membranes. Journal of Membrane Science, 243 (1-2). pp. 203-213. ISSN 0376-7388

Timmer, B.H. and Koelmans, W.W. and Delft, K.M. van and Olthuis, W. and Berg, A. van den (2004) Miniaturized measurement system for low ammonia concentrations. In: The Sense of Contact 2004: where Industry meets Science, workshop Sensortechnology, March 23, 2004, Wageningen, Netherlands.

Honschoten, Johannes Wilhelmus van (2004) Modelling and optimisation of the microflown. thesis.

Mela, P. and Tas, N.R. and Berg, A. van den and Elshof, J.E. ten (2004) Nanofluidics. In: Encyclopedia of Nanoscience and Nanotechnology. American Scientific Publishers, pp. 739-755. ISBN 9781588830623

Haq, E. and Gokcan, H. and Banerjee, T. and Postma, F.M. and Siekman, M.H. and Jansen, R. and Lodder, J.C. (2004) Nanoscale magnetic hysteresis of Ni80Fe20/Au/Co trilayers using ballistic electron magnetic microscopy. Journal of Applied Physics, 95 (11). pp. 6930-6932. ISSN 0021-8979

Tong, D.H. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2004) Nanosieves membranes. In: Proceedings of The Second International Workshop on Nanophysics and Nanotechnology, IWONN, October 22-23, 2004, Hanoi, Vietnam (pp. pp. 107-115).

Honschoten, J.W. van and Druyvesteyn, W.F. and Kuipers, H. and Raangs, R. and Krijnen, G.J.M. (2004) Noise reduction in acoustic measurements with a particle velocity sensor by means of a cross-correlation technique. Acta Acustica United with Acustica, 90 (2). pp. 349-355. ISSN 1610-1928

Hoexum, Mink (2004) One step beyond. De Vonk, 22 (6). pp. 5-11. ISSN 0925-5427

Fernandez, Luis J. and Sesé, Javier and Jansen, Henri and Wiegerink, Remco and Flokstra, Jaap (2004) Optimization of a capacitive MEMS power sensor for radio frequency applications. In: MicroMechanics Europe Workshop, MME, September 5 - 7, 2004, Leuven, Belgium (pp. pp. 257-260).

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Parallel beams/lever electrothermal our-of-plane actuator. Microsystem Technologies, 10 (5). pp. 393-399. ISSN 0946-7076

Onoue, T. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2004) Probe recording on CoNi/Pt multilayered thin films by using an MFM tip. Journal of Magnetism and Magnetic Materials, 272-27 (Part 3). pp. 2317-2318. ISSN 0304-8853

Nguyen, L.T. and Lodder, J.C. (2004) Properties of obliquely sputtered Co on different underlayers on polymer substrate. Journal of Magnetism and Magnetic Materials, 272-27 (Part 3). pp. 2171-2172. ISSN 0304-8853

Ferret, C. and Falk, L. and Chenu, A. and d'Ortona, U. and Veenstra, T.T. (2004) Quantification of the water boiling heat transfer in micro-structures by image analysis. Superlattices and Microstructures, 35 (3-6). pp. 657-668. ISSN 0749-6036

Rusu, C. and Jansen, H. and Gunn, R. and Witvrouw, A. (2004) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. Microsystem Technologies, 10 (5). pp. 364-371. ISSN 0946-7076

Tong, Hien D. and Jansen, Henri V. and Gadgil, Vishwas J. and Bostan, Cazimir G. and Berenschot, Erwin and Rijn, Cees J.M. van and Elwenspoek, Miko (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984

Tiggelaar, Roald Michel (2004) Silicon-technology based microreactors for high-temperature heterogeneous partial oxidation reactions. thesis.

Jansen, R. and Gokcan, H. and Erve, O.M.J. van 't and Postma, F.M. and Lodder, J.C. (2004) Spin-valve transistors with high magnetocurrent and 40 μA output current. Journal of Applied Physics, 95 (11). pp. 6927-6929. ISSN 0021-8979

Saravanan, S. and Berenschot, Erwin and Krijnen, Gijs and Elwenspoek, Miko (2004) Surface Micromachining Process for the Integration of AlN Piezoelectric Microstructures. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 676-681).

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2004) Switchable capacitor and method of making the same. Patent.

Tiggelaar, R.M. and Loeters, P.W.H. and Male, P. van and Oosterbroek, R.E. and Gardeniers, J.G.E. and Croon, M.H.J.M. de and Schouten, J.C. and Elwenspoek, M.C. and Berg, A. van den (2004) Thermal and mechanical analysis of a microreactor for high-temperature catalytic gas phase reactions. Sensors and Actuators A: Physical, 112 (2-3). pp. 267-277. ISSN 0924-4247

2003

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M. (2003) 2D-finite-element simulations for long-range capacitive position sensor. Journal of Micromechanics and Microengineering, 13 (4). S183-S189. ISSN 0960-1317

Tong, H.D. and Gielens, F.C. and Hoang, H.T. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, MA, USA (pp. pp. 1742-1745).

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2003) A low electrostatic inchworm microactuator with high-resolution and large force. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 323-326).

Heyden, F.H.J. van der and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M. and Tijssen, R.P. and Berg, A. van den (2003) A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. Sensors and Actuators B: Chemical, 92 (1-2). pp. 102-109. ISSN 0925-4005

Bree, Hans-Elias de (2003) An overview of microflown technologies. Acta Acustica United with Acustica, 89 (1). pp. 163-172. ISSN 1610-1928

Hozoi, A. and Groenland, J.P.J. and Albertini, J.B. and Lodder, J.C. (2003) Analysis of side writing asymmetry. In: IEEE International Magnetics Conference, INTERMAG 2003, 28 March - 3 April 2003, Boston, MA, USA (pp. DS-03).

Tiggelaar, Roald M. and Veenstra, Theo T. and Sanders, Remco G.P. and Berenschot, Erwin and Gardeniers, Han and Elwenspoek, Miko and Prak, Albert and Mateman, Richard and Wissink, Jeroen M. and Berg, Albert van den (2003) Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach. Sensors and Actuators B: Chemical, 92 (1-2). pp. 25-36. ISSN 0925-4005

Bos, Arnout Gerbrand van den (2003) CantiClever planar fabrication of probes for magnetic imaging. thesis.

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2003) Capacitance measurements for micromachined capacitive long-range position sensor. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.

Tas, Niels R. and Mela, Petra and Kramer, Tobias and Berenschot, J.W. and Berg, Albert van den (2003) Capillarity Induced Negative Pressure of Water Plugs in Nanochannels. Nano Letters, 3 (11). pp. 1537-1540. ISSN 1530-6984

Burger, J.F. and Holland, H.J. and Brake, H.J.M. ter and Elwenspoek, M.C. and Rogalla, H. (2003) Construction and Operation of a 165K Microcooler with a Sorption Compressor and a Micromachined Cold Stage. In: 12th International Cryocooler Conference, June 18-20, 2002, Cambridge, Massachusetts (pp. pp. 643-649).

Tas, N.R. and Sonnenberg, T. and Molenaar, R. and Elwenspoek, M. (2003) Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. Journal of Micromechanics and Microengineering, 13 (1). N6-N15. ISSN 0960-1317

Bruijn, Marcel P. and Bergmann Tiest, Wouter M. and Hoevers, Henk F.C. and Krouwer, Eric and Kuur, Jan van der and Ridder, Marcel L. and Moktadir, Zakaria and Wiegerink, Remco and Gelder, Dick van and Elwenspoek, Miko (2003) Development of arrays of transition edge sensors for application in X-ray astronomy. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 513 (1-2). pp. 143-146. ISSN 0168-9002

Bruijn, Marcel P. and Ridder, Marcel L. and Krouwer, Eric and Hoevers, Henk F.C. and Wiegerink, Remco and Baar, John J. van and Elwenspoek, Miko (2003) Development of cryogenic microcalorimeter array for application in X-ray astronomy. In: 4th Round Table on Micro/Nano Technologies for Space, 20-22 May 2003, ESTEC, Noordwijk.

Lisfi, A. and Lodder, J.C. and Keim, E.G. and Williams, C.M. (2003) Evidence of stress anisotropy and role of oxygen pressure in growth of pulsed-laser-deposited hexaferrite films. Applied Physics Letters, 82 (1). pp. 76-78. ISSN 0003-6951

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M. (2003) FEM Assisted design and simulation of novel electrochemical actuators. In: Nanotech 2003 Nanotechnology Conference and Trade Show, Februari 23-28, 2003, San Francisco, Los Angeles, Boston (pp. pp. 400-403).

Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, K.C. and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, June 8-12, 2003, Boston, USA (pp. pp. 1651-1654).

Baar, J.J. van and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2003) Fabrication of arrays of artificial hairs for complex flow pattern recognition. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada (pp. pp. 332-336).

Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C. (2003) Fabrication of functional structures on thin silicon nitride membranes. Microelectronic Engineering, 67-68 . pp. 422-429. ISSN 0167-9317

Honschoten, J.W. van and Ekkels, P. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Geometrical optimization of an acoustic thermal flow sensor. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 508-511).

Damean, Nicolae and Regtien, Paul P.L. and Elwenspoek, Miko (2003) Heat transfer in a MEMS for microfluidics. Sensors and Actuators A: Physical, A105 . pp. 137-149. ISSN 0924-4247

Saito, Hitoshi and Bos, Arnout van den and Abelmann, Leon and Lodder, J. Cock (2003) High resolution MFM: Simulation of tip sharpening. IEEE Transactions on Magnetics, 39 (5). pp. 3447-3449. ISSN 0018-9464

Saito, H. and Bos, A.G. van den and Abelmann, L. and Lodder, J.C. (2003) High resolution MFM: simulation of tip sharpening. In: IEEE International Magnetics Conference, INTERMAG 2003, 28 March - 3 April 2003, Boston, MA, USA.

Deladi, S. and Boer, M.J. de and Krijnen, G.J.M. and Rosén, D. and Elwenspoek, M.C. (2003) Innovative process development for a new micro-tribosensor using surface micromachining. Journal of Micromechanics and Microengineering, 13 (4). S17-S22. ISSN 0960-1317

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2003) Integration of trench isolation technolgy and plasma release for advanced MEMS design on standard silicon wafers. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 123-126).

Abelmann, L. and Bolhuis, T. and Hoexum, A.M. and Krijnen, G.J.M. and Lodder, J.C. (2003) Large capacity probe recording using storage robots. IEE Proceedings-Science Measurement and Technology, 150 . pp. 218-221. ISSN 1350-2344

Lazarenko, S.V. and Kirilyuk, A. and Rasing, Th. and Lodder, J.C. (2003) Linear and nonlinear magneto-optical diffraction from one-dimensional periodic structures. Journal of Applied Physics, 93 (10). pp. 7903-7905. ISSN 0021-8979

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In: Nanotech 2003 Nanotechnology Conference and Trade Show, Februari 23-28, 2003, San Francisco, Los Angeles, Boston (pp. pp. 392-395).

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2003) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tong, Hien Duy and Berenschot, J.W. (Erwin) and Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Wensink, Henk and Jansen, Henri V. and Nijdam, Wietze and Elwenspoek, Miko C. and Gielens, F.C. (Frank) and Rijn, Cees J.M. van (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of Microelectromechanical Systems, 12 (5). pp. 622-629. ISSN 1057-7157

Kuijpers, Toon A.A. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Wiegerink, Remco J. and Elwenspoek, Miko C. (2003) Micromachined capacitive long-range displacement sensor. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 330-331).

Baar, J.J. van and Verwey, W.B. and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2003) Micromachined two dimensional resistor arrays for determination of gas parameters. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 8-12 June 2003, Boston, MA, USA (pp. pp. 1606-1609).

Olthuis, W. and Tas, N.R. and Eijkel, J.C.T. and Berg, A. van den (2003) Nanochannels and nanofluidics - approaching nature. In: 9th International Micromachine/Nanotech Symposium, November 13, 2003, Kitanomaru Park, Tokyo (pp. pp. 59-65).

LeMinh, P. and Holleman, J. and Wallinga, H. and Berenschot, J.W. and Tas, N.R. and Berg, A. van den (2003) Novel integration of a microchannel with a silicon light emitting diode antifuse. Journal of Micromechanics and Microengineering, 13 (3). pp. 425-429. ISSN 0960-1317

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Jansen, Henri and Wiegerink, Remco and Flokstra, Jaap (2003) Novel rf power sensor based on capacitive MEMS technology. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 41-44).

Nguyen, L.T. and Lisfi, A. and Lodder, J.C. (2003) Obliquely sputtered Co/Cr thin film tape for bidirectional recording. Journal of Applied Physics, 93 (10). pp. 7786-7788. ISSN 0021-8979

Eijkel, J.C.T. and Bomer, J.G. and Tas, N.R. and Berg, A. van den (2003) Physicochemical phenomena in nanochannels. In: 7th Annual European Conference on Micro & Nanoscale Technologies for the Biosciences , 25-27 November, 2003, Montreux, Switzerland.

Jong, B.R. de and Bula, W.P. and Zalewski, D.R. and Baar, J.J. van and Wiegerink, R.J. (2003) Pirani pressure sensor with distributed temperature measurement. In: IEEE Sensors 2003 Conference, 22-24 Oct. 2003, Toronto, Canada (pp. pp. 718-722).

Tong, H.D. and Hoang Thi Hanh, H.T.H. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2003) Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation. In: 14th MicroMechanics Europe Workshop, MME 2003, Nov. 2-4, 2003, Delft, The Netherlands (pp. pp. 127-130).

Bos, Arnout Gerbrand van den and Abelmann, Leon and Lodder, Jacobus Christiaan (2003) Probe en werkwijze voor de vervaardiging van een dergelijke probe. Patent.

Phillips, Gavin Nicholas and Abelmann, Leon and Lodder, Jacobus Christiaan (2003) Probe voor magnetische kracht microscopie, en werkwijze voor het vervaardigen van een dergelijke probe. Patent.

Krijnen, G. and Haanstra, R. and Potters, E. and Berenschot, J.W. and Harrach, S. von and Elwenspoek, M. (2003) Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, June 8-12, 2003, Boston, USA (pp. pp. 268-271).

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2003) Radio frequency power sensor based on MEMS technology. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada (pp. pp. 549-552).

Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2003) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. In: Symposium on design, test, integration and packaging of MEMS 2003, 5-7 May 2003, Mandelieu-La Napoule, France (pp. pp. 245-250).

Tas, N.R. and Gui, C. and Elwenspoek, M. (2003) Static friction in elastic adhesion contacts in MEMS. Journal of Adhesion Science and Technology, 17 (4). pp. 547-561. ISSN 0169-4243

Saravanan, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Studies of AIN growth on various substrates by RF reactive sputtering techniques. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 163-166).

Saravanan, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.

Lisfi, A. and Lodder, J.C. (2003) Systematic analyses of anomalous torque curves in granular BaFe12O19/SiO2/Si thin films. Applied Physics Letters, 83 (4). pp. 719-721. ISSN 0003-6951

Minh, P.T.L. and Van, N.D. and Thuy, N.P. and Nguyen, L.T. and Lodder, J.C. and Thang, T.D. and Chan, N.T.N. (2003) The effect of Ag-additive on structural and magnetic properties of Fe-Pt alloy thin films. Physica B: Condensed Matter, 327 (2-4). pp. 360-365. ISSN 0921-4526

Jansen, R. (2003) The spin-valve transistor: a preview and outlook. Journal of Physics D: Applied Physics, 36 (19). R289-R308. ISSN 0022-3727

Ridder, M.L. and Bruijn, M.P. and Hoevers, H.F.C. and Germeau, A. and Baars, N.H.R. and Krouwer, E. and Baar, J.J.J. van and Wiegerink, R.J. (2003) Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. In: IEEE Sensors 2003 Conference, 22-24 October 2003, Toronto, Canada (pp. pp. 353-357).

Tong, D.H. and Gielens, F.C. and Hoang, H.T. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2003) Thin, strong and defect free microfabricated palladium composite membranes for hydrogen separation. In: 7th International Conference on Microreaction Technology, IMRET 7, September 7-10, 2003, Lausanne, Switzerland (pp. pp. 343-345).

Hebbink, Gerald A. and Grave, Lennart and Woldering, Leon A. and Reinhoudt, David N. and Veggel, Frank C.J.M. van (2003) Unexpected sensitization effeciency of the near-infrared Nd3+, Er3+ and Yb3+ emission by fluorescein compared to eosin and erythrosin. Journal of physical chemistry A, 107 (14). pp. 2483-2491. ISSN 10895639

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2003) Versatile trench isolation technology for the fabrication of microactuators. Microelectronic Engineering, 67-68 . pp. 430-437. ISSN 0167-9317

Tas, N.R. and Mela, P. and Kramer, E. and Berenschot, J.W. and Berg, A. van den (2003) Water plugs in nanochannels under negative pressure. In: MicroTAS 2003: Seventh International Conference on Micro Total Analysis Systems, 5-9 October 2003 , Squaw Valley, CA, USA (pp. pp. 13-16).

Haneveld, Jeroen and Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2003) Wet anisotropic etching for fluidic 1D nanochannels. Journal of Micromechanics and Microengineering, 13 (4). S62-S66. ISSN 0960-1317

2002

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2002) 2D finite element simulations for long range capacitive position sensor. In: MME 2002, The 13th Micromechanics Europe Workshop, 6-8 October 2002, Sinaia, Romania (pp. pp. 181-184).

Tas, N.R. and Lammerink, T.S.J. and Mela, P. and Jansen, H.V. and Elwenspoek, M. and Berg, A. van den (2002) 2D-confined nanochannels fabricated by conventional micromachining. Nano Letters, 2 (9). pp. 1031-1032. ISSN 1530-6984

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2002) 2D-finite element simulations for long range capacitive position sensor. In: SESENS 2002, November 29-30, 2002, Veldhoven, The Netherlands.

De Korte, P.A.J. and Hoevers, H.F.C. and Den Herder, J.W.A. and Bleeker, J.A.M. and Bergmann Tiest, W.M. and Bruijn, M.P. and Ridder, M.L. and Wiegerink, R.J. and Kaastra, J.S. and Van der Kuur, J. and Mels, W.A. (2002) A TES X-ray microcalorimeter-array for imaging spectroscopy. In: Proceedings of SPIE - The International Society for Optical Engineering, 24-28 Aug 2002, Waikoloa, HI, United States (pp. pp. 779-789).

Wensink, Henk and Elwenspoek, Miko C. (2002) A closer look at the ductile brittle transition in solid particle erosion. Wear, 253 (9-10). pp. 1035-1043. ISSN 0043-1648

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2002) A light detection cell to be used in a micro analysis system for ammonia. Talanta, 56 (2). pp. 331-339. ISSN 0039-9140

Blom, M.T. and Chmela, E. and Heyden, F.H.J. van der and Oosterbroek, R.E. and Tijssen, R.P. and Elwenspoek, M.C. and Berg, A. van den (2002) A micro viscosity detector for use in miniaturized chemical separation systems. In: MicroTAS 2002 Symposium, 3-7 November 2002, Nara, Japan (pp. pp. 639-641).

Kim, Phan Le and Lodder, Cock (2002) A new method for intrinsic viscosity measurements on perpendicular recording media. In: IEEE International Magnetics Conference, INTERMAG Europe 2002, 28 April-2 May 2002, Amsterdam, The Netherlands.

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2002) Advanced sacrificial poly-Si technology for fluidic sytems. Journal of Micromechanics and Microengineering, 12 (5). pp. 621-624. ISSN 0960-1317

Phillips, G.N. and O'Grady, K. and El-Hilo, M. (2002) An investigation of time-dependent domain wall pinning effects in Tb/Fe multilayer thin flms. Journal of Magnetism and Magnetic Materials, 248 (3). pp. 418-422. ISSN 0304-8853

LeClair, P. and Kohlhepp, J.T. and Vin, C.H. van de and Wieldraaijer, H. and Swagten, H.J.M. and Jonge, W.J.M. de and Davis, A.H. and MacLaren, J.M. and Moodera, J.S. and Jansen, R. (2002) Band Structure and Density of States Effects in Co-Based Magnetic Tunnel Junctions. Physical Review Letters, 88 (10). 107201-1-107201-4. ISSN 0031-9007

Kuiper, S. and Brink, R. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Ceramic microsieves: influence of perforation shape and distribution on flow resistance and membrane strength. Journal of Membrane Science, 196 (2). pp. 149-157. ISSN 0376-7388

Krijnen, G.J.M. and Kuijpers, A.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2002) Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In: Proceedings of SPIE - The International Society for Optical Engineering, 21 - 23 May 2002, Presquile de Giens, France (pp. pp. 201-206).

Baar, J.J. van and Wiegerink, R.J. and Lammerink, T.S.J. and Berenschot, E. and Krijnen, G.J.M. and Elwenspoek, M. (2002) Combined -pirani/bending- membrane-pressure sensor. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, January 20-24, 2002, Las Vegas, Nevada, USA (pp. pp. 328-331).

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R. and Elwenspoek, M. and Berg, A. van den (2002) Design and fabrication of a hydrodynamic chromatography chip. Sensors and Actuators B: Chemical, 82 (1). pp. 111-116. ISSN 0925-4005

Abelmann, Leon and Chong, Jordan and Hartel, Pieter and Lodder, Cock (2002) Design rationale for secure probe storage based on patterned magnetic media. [Report]

Honschoten, J.W. van and Svetovoy, V.B. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Determination of the sensitivity behaviour of an acoustic and thermal flow sensor by electronic characterisation. In: IEEE Sensors Conference 2002, 12-14 June 2002 , Orlando, USA (pp. pp. 1298-1303).

Erve, Olaf Martinus Johannes van 't (2002) Device properties of the spin-valve transistor and the magnetic tunnel transistor. thesis.

Nguyen, L.T. and Lisfi, A. and Kim, P.L. and Lodder, J.C. and Keim, E.G. (2002) Effect of Cr underlayer on obliquely sputtered Co on PET substrate. In: IEEE International Magnetics Conference, INTERMAG Europe 2002, 28 April-2 May 2002, Amsterdam, The Netherlands.

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer scale palladium silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, January 20-24, 2002, Las Vegas, Nevada, USA (pp. pp. 264-268).

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2002) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Kuiper, Stein and Rijn, Cees van and Nijdam, Wietze and Raspe, Onno and Wolferen, Henk van and Krijnen, Gijs and Elwenspoek, Miko (2002) Filtration of lager beer with microsieves: flux, permeate, haze and in-line microscope observations. Journal of Membrane Science, 196 (2). pp. 159-170. ISSN 0376-7388

Wensink, Henk and Schlautmann, Stefan and Goedbloed, Martijn H. and Elwenspoek, Miko C. (2002) Fine tuning the roughness of powder blasted surfaces. Journal of Micromechanics and Microengineering, 12 (5). pp. 616-620. ISSN 0960-1317

Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Jansen, Henri V. and Gilde, Melis-Jan and Roelofs, Gerard and Sasserath, Jay N. and Elwenspoek, Miko (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of Microelectromechanical Systems, 11 (4). pp. 385-401. ISSN 1057-7157

Phillips, G.N. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2002) High resolution magnetic force microscopy using focused ion beam modified tips. Applied Physics Letters, 81 (5). pp. 865-867. ISSN 0003-6951

Phillips, G.N. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2002) High resolution magnetic force microscopy using focussed ion beam modified tips. In: IEEE International Magnetics Conference, INTERMAG Europe 2002, April 28 - May 2, 2002, Amsterdam, The Netherlands.

Gielens, F.C. and Tong, H.D. and Rijn, C.J.M. van and Vorstman, M.A.G. and Keurentjes, J.T.F. (2002) High-flux palladium-silver alloy membranes fabricated by microsystem technology. Desalination, 147 (1-3). pp. 417-423. ISSN 0011-9164

Brivio, Monica and Fokkens, Roel H. and Verboom, Willem and Reinhoudt, David N. and Tas, Niels R. and Goedbloed, Martijn and Berg, Albert van den (2002) Integrated microfluidic system enabling (bio)chemical reactions with on-line MALDI-TOF mass spectrometry. Analytical Chemistry, 74 (16). pp. 3972-3976. ISSN 0003-2700

LeMinh, P. and Holleman, J. and Berenschot, J.W. and Tas, N.R. and Berg, A. van den (2002) Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector. In: SeSens 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 644-648).

Vlutters, R. and Erve, O.M.J. van 't and Kim, S.D. and Jansen, R. and Lodder, J.C. (2002) Interface, Volume, and Thermal Attenuation of Hot Electron Spins in Ni80Fe20 and Co. Physical Review Letters, 88 (2). 027202-1-027202-4. ISSN 0031-9007

Moktadir, Z. and Bruijn, M.P. and Wiegerink, R. and Elwenspoek, M. and Ridder, M. and Mels, W.A. (2002) Limitations of heat conductivity in cryogenic sensors due to surface roughness. In: IEEE Sensors 2002, 12 - 14 June 2002, Orlando, Florida (pp. pp. 1024-1027).

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Micromachined palladium silver alloy membranes for hydrogen separation. In: SESENS 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 688-691).

Sindhu, S. and Haast, M.A.M. and Ramstöck, K. and Abelmann, L. and Lodder, J.C. (2002) Micromagnetic simulations of the domain structure and the magnetization reversal of Co50Ni50/Pt multilayer dots. Journal of Magnetism and Magnetic Materials, 238 (2-3). pp. 246-251. ISSN 0304-8853

Lisfi, A. and Lodder, J.C. (2002) Microstructural and magnetic properties of metallic thin films obliquely sputtered on polymer. Journal of Magnetism and Magnetic Materials, 242-24 (Part 1). pp. 370-373. ISSN 0304-8853

Vlutters, R. and Erve, O.M.J. van 't and Jansen, R. and Kim, S.D. and Lodder, J.C. and Vedyayev, A. and Dieny, B. (2002) Modeling of spin dependent hot-electron transport in the spin-valve transistor. Physical Review B: Condensed matter and materials physics, 65 (2). 024416-1. ISSN 1098-0121

LeMinh, P. and Holleman, J. and Berenschot, J.W. and Tas, N.R. and Berg, A. van den (2002) Monolithic Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector. In: 32nd European Solid-State Device Research Conference, ESSDERC, 24-26 September 2002, Firenze, Italy (pp. pp. 451-454).

Tas, N.R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2002) Nanofluidic bubble pump using surface tension directed gas injection. Analytical Chemistry, 74 (9). pp. 2224-2228. ISSN 0003-2700

Kim, Phan Le and Thuy, Nguyen Phu and Le Minh, Phuong and Manh, Dinh Hung (2002) Narrow-range angle sensor based on wiggles in angular dependence of pseudo-Hall effect. Sensors and Actuators A: Physical, 97-98 . pp. 308-317. ISSN 0924-4247

Rottenberg, X. and Jansen, H. and Fiorini, P. and De Raedt, W. and Tilmans, H.A.C. (2002) Novel RF-MEMS capacitive switching structures. In: 32nd European Microwave Conference, EuMC 2002, 23-26 Sept 2002, Milan, Italy.

Phillips, Gavin N. and Eisenberg, Martin and Draaisma, Eddie A. and Abelmann, Leon and Lodder, J. Cock (2002) Performance of Focused Ion Beam Trimmed Yoke-Type Magnetoresistive Heads for Magnetic Microscopy. IEEE Transactions on Magnetics, 38 (5). pp. 3528-3535. ISSN 0018-9464

Baar, J.J. van and Wiegerink, R.J. and Berenschot, J.W. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2002) Pressure sensor based on distributed temperature sensing. In: IEEE Sensors Conference 2002, 12-14 June 2002 , Orlando, USA (pp. pp. 964-968).

Wensink, Henk and Elwenspoek, Miko C. (2002) Reduction of sidewall inclination and blast lag of powder blasted channels. Sensors and Actuators A: Physical, 102 (1-2). pp. 157-164. ISSN 0924-4247

Tas, N.R. and Lammerink, T.S.J. and Berenschot, J.W. and Elwenspoek, M.C. and Berg, A. van den (2002) Scaling behaviour of pressure driven micro hydraulic systems. In: International Conference on Modeling and Simulation of Microsystems, MSM, April 22-25, 2002, Puerto Rico, USA (pp. pp. 174-177).

Honschoten, J.W. van and Druyvesteyn, W.F. and Raangs, R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Selfnoise Reduction in Acoustic Measurements with a Particle Velocity Sensor by Means of a Cross-Correlation Technique. In: Forum Acusticum, September 16-20, 2002, Sevilla, Spain.

Veenendaal, E. van and Nijdam, A.J. and Suchtelen, J. van (2002) Simulation of crystal shape evolution in two dimensions. Journal of Crystal Growth, 235 (1-4). pp. 603-618. ISSN 0022-0248

Veenendaal, E. van and Theije, F.K. de and Suchtelen, J. van and Enckevort, W.J.P. van (2002) Simulation of step patterns on natural diamond {111} surfaces. Diamond and Related Materials, 11 (2). pp. 145-152. ISSN 0925-9635

Kim, Sungdong and Erve, O.M.J. van 't and Vlutters, R. and Jansen, R. and Lodder, J.C. (2002) Size Dependence of the Magnetic and Electrical Properties of the Spin-Valve Transistor. IEEE Transactions on Electron Devices, 49 (5). pp. 847-851. ISSN 0018-9383

Craus, C.B. and Chezan, A.R. and Siekman, M.H. and Lodder, J.C. and Boerma, D.O. and Niesen, L. (2002) Stripe domains in Fe-Zr-N nanocrystalline films. Journal of Magnetism and Magnetic Materials, 240 . pp. 423-426. ISSN 0304-8853

Bartic, Carmen and Jansen, H. and Campitelli, Andrew and Borghs, Staf (2002) Ta2O5 as gate dielectric material for low-voltage organic thin-film transistors. Organic Electronics, 3 (2). pp. 65-72. ISSN 1566-1199

Bos, A.G. van den and Heskamp, I.R. and Siekman, M.H. and Abelmann, L. and Lodder, J.C. (2002) The CantiClever. A dedicated probe for magnetic force microscopy. In: IEEE International Magnetics Conference, INTERMAG Europe 2002, 28 April-2 May 2002, Amsterdam, The Netherlands.

Veenstra, T.T. and Sharma, N.R. and Forster, F.K. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2002) The design of an in-plane compliance structure for microfluidical systems. Sensors and Actuators B: Chemical, 81 (2-3). pp. 377-383. ISSN 0925-4005

Nguyen, L.T. and Lisfi, A. and Lodder, J.C. (2002) The effects of metallic underlayers on magnetic properties of obliquely sputtered Co thin films. Journal of Magnetism and Magnetic Materials, 242-24 (Part 1). pp. 374-377. ISSN 0304-8853

Lalbahadoersing, S. and Groenland, J.P.J. and Luitjens, S.B. and Lodder, J.C. (2002) The recording characteristics of particulate double layers with hard-magnetic and soft-magnetic underlayers. Journal of Magnetism and Magnetic Materials, 242-24 (Part 1). pp. 348-351. ISSN 0304-8853

Kim, P.L. and Lodder, J.C. (2002) Thickness dependence of structural,magnetic properties and reversal mechanism of Co Cr Ta/Cr longitudinal recording media. Journal of Magnetism and Magnetic Materials, 242-24 (Part 1). pp. 395-397. ISSN 0304-8853

Deladi, S. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2002) Three dimensional adhesion model for arbitrary rough surfaces. In: International Conference on Computational Nanoscience and Nanotechnology, ICCN, April 22-25, 2002, San Juan, Puerto Rico, USA (pp. pp. 326-329).

Erve, O.M.J. van 't and Jansen, R. and Postma, F.M. and Lodder, J.C. (2002) Three routes to increase the output current of the spin-valve transistor. In: IEEE International Magnetics Conference, INTERMAG Europe 2002, 28 April-2 May 2002, Amsterdam, The Netherlands.

Elwenspoek, M.C. (2002) Transducers science and technology. In: Impuls 2001-2002, Jaarboek Scintilla. Scintilla, Enschede, pp. 137-144.

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania (pp. pp. 47-50).

Hozoi, A. and Groenland, J.P.J. and Lodder, J.C. and Albertini, J.B. (2002) μtrack profiles for investigating side effects of advanced silicon heads for helical scan tape systems. In: IEEE International Magnetics Conference, INTERMAG Europe 2002, 28 April-2 May 2002, Amsterdam, The Netherlands.

2001

Burger, J.F. and Holland, H.J. and Seppenwoolde, J.H. and Berenschot, E. and Brake, H.J.M. ter and Gardeniers, J.G.E. and Elwenspoek, M. and Rogalla, H. (2001) 165 k microcooler operating with a sorption compressor and a micromachined cold stage. In: 11th International Cryocooler Conference, June 20-22, 2000, Keystone, Colorado, USA (pp. pp. 551-560).

Burger, Johannes and Holland, Harry and Berenschot, Erwin and Seppenwolde, Jan-Henry and Brake, Marcel ter and Gardeniers, Han and Elwenspoek, Miko (2001) 169 kelvin cryogenic microcooler empoying a condenser, evaporator, flow restriction and counterflow heat exchangers. In: 14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 21-25 Jan. 2001, Interlaken, Switzerland (pp. pp. 418-421).

Anil Kumar, P.S. and Jansen, R. and Erve, O.M.J. van 't and Vlutters, R. and Kim, S.D. and Lodder, J.C. (2001) 300% magnetocurrent in a room temperature operating spin-valve transistor. Physica C: Superconductivity, 350 (3-4). pp. 166-170. ISSN 0921-4534

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2001) A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 137-142).

Veenendaal, E. van and Cuppen, H.M. and Enckevort, W.J.P. van and Suchtelen, J. van and Nijdam, A.J. and Elwenspoek, M. and Vlieg, E. (2001) A monte carlo study of etching in the presence of a mask junction. Journal of Micromechanics and Microengineering, 11 (4). pp. 409-415. ISSN 0960-1317

Bos, A.G. van den and Dijk, A.C.J. van and Heskamp, I.R. and Abelmann, L. and Lodder, J.C. (2001) A new concept in magnetic force microscope cantilevers. In: Magnetic Storage Systems beyond 2000. NATO SCIENCE SERIES, II: Ma (41). Kluwer Academic Publishers, pp. 307-312. ISBN 9781402001178

Veenstra, T.T. and Berenschot, J.W. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2001) A simple selfpriming bubble-tolerant peristaltic micropump. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 125-129).

Lammerink, T.S.J. and Tas, N.R. and Honschoten, J.W. van and Krijnen, G.J.M. and Baar, J.J. van and Elwenspoek, M.C. (2001) AC-driven thermal-balance flow sensor. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 1448-1451).

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (2001) Advanced sacrificial poly-Si technology for fluidic systems. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 624-627).

Honschoten, J.W. van and Lammerink, T.S.J. and Bree, H.E. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) An electronical characterisation method for an acoustic and thermal flow sensor. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 1480-1483).

Jansen, R. and Kim, S.D. and Vlutters, R. and Erve, O.M.J. van 't and Lodder, J.C. (2001) Anisotropic Spin-Orbit Scattering of Hot-Electron Spins Injected into Ferromagnetic Thin-Films. Physical Review Letters, 87 (16). p. 166601. ISSN 0031-9007

Nijdam, Arend Jasper (2001) Anisotropic wet-chemical etching of silicon pits, peaks, principles, pyramids and particles. thesis.

Tas, N.R. and Berenschot, J.W. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2001) Bubble pump for integrated nanofluidics. In: 1st IEEE Conference on Nanotechnology 2001, IEEE-NANO, October 28–30, 2001, Maui, Hawaii, USA (pp. pp. 454-458).

Musa, S. and Lagali, N.S. and Sengo, G. and Krijnen, G.J.M. and Driessen, A. (2001) Design and fabrication of 1xN and NxN planar waveguide couplers for multimode fiber-based local area networks. In: IEEE/LEOS Benelux Chapter 2001 Annual Symposium, December 3, 2001, Brussels, Belgium.

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and Berg, A. van den (2001) Design and fabrication of a hydrodynamic chromatography chip. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 794-797).

Groenland, J.P.J. and Lodder, J.C. (2001) Developments in research on tape media. Datatech, 6 . pp. 119-123. ISSN 1464-6021

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint J. de and Jansen, Henri V. and Berenschot, J.W. and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Elwenspoek, Miko and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2001) Direct Integration of Micromachined Pipettes in a Flow Channel for Single DNA Molecule Study by Optical Tweezers. Journal of Microelectromechanical Systems, 10 (2). pp. 238-246. ISSN 1057-7157

Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2001) Electrostatic microactuators. In: International Conference on SMART Technology Demonstrators & Devices, 12-14 December 2001, Edinburgh, UK.

Musa, S. and Lagali, N.S. and Sengo, G. and Krijnen, G.J.M. and Driessen, A. (2001) Fabrication and characterisation of planar waveguide couplers for multimode fiber-based local area networks. In: 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS, November 11-15 , 2001, San Diego, California, USA (pp. pp. 234-236).

Kuiper, Stein and Wolferen, Henk van and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (2001) Fabrication of microsieves with sub-micron pore size by laser interference lithography. Journal of Micromechanics and Microengineering, 11 (1). pp. 33-37. ISSN 0960-1317

Blom, M.T. and Tas, Niels R. and Pandraud, Gregory and Chmela, Emil and Gardeniers, J.G.E. and Tijssen, Robert and Elwenspoek, Miko and Berg, Albert van den (2001) Failure mechanisms of pressurized microchannels, model and experiments. Journal of Microelectromechanical Systems, 10 (1). pp. 158-164. ISSN 1057-7157

Wensink, H. and Schlautmann, S. and Goedbloed, M.H. and Elwenspoek, M.C. (2001) Fine tuning the surface roughness of powder blasting glass surfaces. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 101-106).

Baar, J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2001) Flow sensing using the temperature distribution along a heated microbeam. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 13-18).

Nijdam, A.J. and Veenendaal, E. van and Cuppen, H.M. and Suchtelen, J. van and Reed, M.L. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Vlieg, E. and Elwenspoek, M. (2001) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation. Journal of Applied Physics, 89 (7). pp. 4113-4116. ISSN 0021-8979

Abelmann, L. (2001) Harde schijf door geluidsbarrire. Natuur & Techniek, 2001 . pp. 30-35.

Veen, Niels J. van der and Rozniecka, Ewa and Woldering, Leon A. and Chudy, Michael and Huskens, Jurriaan and Veggel, Frank C.J.M. van and Reinhoudt, David N. (2001) Highly selective optical-sensing membranes, containing calix[4]arene chromoionophores, for Pb2+ ions. Chemistry: a European Journal, 7 (22). pp. 4878-4886. ISSN 0947-6539

Vlutters, Ruud (2001) Hot-electron transport in the spin-valve transistor. thesis.

Vlutters, R. and Jansen, R. and Erve, O.M.J. van 't and Kim, S.D. and Lodder, J.C. (2001) Hot-electron transport through Ni80Fe20 in a spin-valve transistor. Journal of Applied Physics, 89 (11). pp. 7305-7307. ISSN 0021-8979

Dessein, K. and Anil Kumar, P.S. and Lagae, L. and De Boeck, J. and Delaey, L. and Borghs, G. (2001) Improvement of the transfer coefficient of GaAs/Si spin-valve transistors. Journal of Magnetism and Magnetic Materials, 226-23 (Part 2). pp. 2081-2083. ISSN 0304-8853

Nijdam, A.J. and Gardeniers, J.G.E. and Berenschot, J.W. and Veenendaal, E. van and Suchtelen, J. van and Elwenspoek, M. (2001) Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon. Journal of Micromechanics and Microengineering, 11 (5). pp. 499-503. ISSN 0960-1317

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M. and Tijssen, R. and Berg, A. van den (2001) Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections. Journal of Micromechanics and Microengineering, 11 (4). pp. 382-385. ISSN 0960-1317

Lisfi, A. and Lodder, J.C. (2001) Magnetic domains in Co thin films obliquely sputtered on a polymer substrate. Physical Review B: Condensed matter and materials physics, 63 (17). p. 174441. ISSN 1098-0121

Wensink, Henk and Jansen, Henri V. and Berenschot, J.W. and Elwenspoek, Miko C. (2001) Mask materials for powder blasting. Journal of Micromechanics and Microengineering, 10 (2). pp. 175-180. ISSN 0960-1317

Lötters, Joost Conrad and Boer, Hendrik Jan and Jouwsma, Wybren (2001) Mass flowmeter. Patent.

Elwenspoek, M. and Wiegerink, R. (2001) Mechanical microsensors. Microtechnology and MEMS, ISSN 1615-8326 . Springer Verlag, Berlin, Germany. ISBN 9783540675822

Abelmann, Leon (2001) Meer, meer, meer. De Vonk, 19 (5). pp. 1-8. ISSN 0925-5427

Abelmann, Leon (2001) Meer, meer, meer (2). De Vonk, 20 . pp. 1-8. ISSN 0925-5427

Bolks, Mathieu and Hanssen, Ferdy and Abelmann, Leon and Havinga, Paul and Hartel, Pieter and Jansen, Pierre and Lodder, Cock and Smit, Gerard (2001) Micro Scanning Probe Array Memory. [Report]

Bolks, Mathieu and Hanssen, Ferdy and Abelmann, Leon and Havinga, Paul and Hartel, Pieter and Jansen, Pierre and Lodder, Cock and Smit, Gerard (2001) Micro Scanning Probe Array memory (µSPAM). In: PROGRESS 2001 2nd Workshop on Embedded Systems, October 18, 2001, Veldhoven, the Netherlands (pp. pp. 17-26).

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: case studies. In: SMART structures: applications and related technologies. CISM International Centre for Mechanical Sciences (429). Springer Wien New York. ISBN 9783211836811

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: microelectromechanical systems. In: SMART structures, applications and related technologies. CISM International Centre for Mechanical Sciences (429). Springer Wien New York. ISBN 9783211836811

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: principles of measurement mechanical quantities: transduction of deformation. In: SMART structures: applications and related technologies. Springer Wien New York, Italy. ISBN 9783211836811

Elwenspoek, M.C. and Wiegerink, R.W. (2001) Micro electro mechanical systems: silicon micromachining. In: SMART structures: applications and related technologies. Springer Wien New York, Italy. ISBN 9783211836811

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: small and large, scaling. In: SMART structures: applications and related technologies. Springer Wien New York, Italy. ISBN 9783211836811

Bruijn, M.P. and Ridder, M. and Hoevers, H.F.C. and Bergmann, W.M. and Korte, P.A.J. de and Moktadir, Z. and Wiegerink, R.J. and Berenschot, J.W. and Elwenspoek, M.C. (2001) Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 179-184).

Veenendaal, E. van and Sato, K. and Shikida, M. and Nijdam, A.J. and Suchtelen, J. van (2001) Micro-morphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH: velocity source forests. Sensors and Actuators A: Physical, 93 (3). pp. 232-242. ISSN 0924-4247

Baar, J.J. van and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2001) Micromachined structures for thermal measurements of fluid and flow parameters. Journal of Micromechanics and Microengineering, 11 (4). pp. 311-318. ISSN 0960-1317

Veenendaal, E. van and Sato, K. and Shikida, M. and Suchtelen, J. van (2001) Micromorphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH and TMAH. Sensors and Actuators A: Physical, 93 (3). pp. 219-231. ISSN 0924-4247

Veenstra, T.T. and Tiggelaar, R.M. and Sanders, R.G.P. and Berenschot, J.W. and Gardeniers, J.G.E. and Wissink, J. and Mateman, R. and Elwenspoek, M.C. and Berg, A. van den (2001) Monolithic versus modular integration of a micro-fia system for ammonium determination. In: MicroTAS 2001 Symposium, October 21–25, 2001, Monterey, CA, USA (pp. pp. 664-666).

Veenendaal, Erik van and Suchtelen, Jaap van and Beurden, Paul van and Cuppen, Herma M. and Enckevort, Willem J.P. van and Nijdam, A. Jasper and Elwenspoek, Miko and Vlieg, Elias (2001) Monte carlo simulation of wet chemical etching of silicon. Sensors and Materials, 13 (6). pp. 343-350. ISSN 0914-4935

Wensink, H. and Elwenspoek, M.C. (2001) New developments in bulk micromachining by powder blasting. In: MicroTAS 2001 Symposium, October 21–25, 2001, Monterey, CA, USA (pp. pp. 393-394).

Honschoten, J.W. van and Krijnen, G.J.M. and Svetovoy, V.B. and Bree, H.E. de and Elwenspoek, M.C. (2001) Optimisation of a two-wire thermal sensor for flow and sound measurements. In: 14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 21-25 Jan. 2001, Interlaken, Switzerland (pp. pp. 523-526).

Abelmann, L. (2001) Opvolgers gezocht voor de harde schijf. Natuur & Techniek, 2001 . pp. 23-29.

Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (2001) Packaged stainless steel flowsensor. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 173-178).

Lodder, J.C. and Haast, M.A.M. and Abelmann, L. (2001) Patterned magnetic thin films for ultra high density recording. In: Magnetic Storage Systems beyond 2000. NATO SCIENCE SERIES, II: Ma (41). Kluwer Academic Publishers, Dordrecht, pp. 117-143. ISBN 9781402001178

Baar, J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2001) Pirani pressure sensor with distributed temperature sensing. In: ASME International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York .

Tong, D.H. and Zwijze, R.A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and Materials, 13 (4). pp. 235-246. ISSN 0914-4935

Schlautmann, Stefan and Wensink, Henk and Schasfoort, Richard and Elwenspoek, Miko and Berg, Albert van den (2001) Powder-blasting technology as an alternative tool for micro-fabrication of CE-chip with integrated conductivity sensors. Journal of Micromechanics and Microengineering, 11 (4). pp. 386-389. ISSN 0960-1317

Schlautmann, Stefan and Wensink, Henk and Schasfoort, Richard and Elwenspoek, Miko and Berg, Albert van den (2001) Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors. Journal of Micromechanics and Microengineering, 11 (4). pp. 386-389. ISSN 0960-1317

Keim, Enrico G. and Bijker, Martin D. and Lodder, J. Cock (2001) Preparation of cross-sectional transmission electron microscopy specimens of obliquely deposited magnetic thin films on a flexible tape. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 19 (4). pp. 1191-1194. ISSN 0734-2101

Wensink, H. and Elwenspoek, M.C. (2001) Radial oblique powder blasting. In: MME 2001, The 12th Micromechanics Europe Workshop, 16–18th September 2001, Cork, Ireland (pp. pp. 50-53).

Hollander, F.F.A. and Stasse, O. and Suchtelen, J. van and Enckevort, W.J.P. van (2001) Recrystallization phenomena of solution grown paraffin dendrites. Journal of Crystal Growth, 233 (4). pp. 868-880. ISSN 0022-0248

Phillips, G.N. and Eisenberg, M. and Persat, N. and Draaisma, E.A. and Abelmann, L. and Lodder, J.C. (2001) Scanning magneto-resistance microscopy with FIB trimmed yoke-type magneto-resistive tape heads. Sensors and Actuators A: Physical, 91 (1-2). pp. 34-38. ISSN 0924-4247

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (2001) Selective wafer bonding by surface roughness control. Journal of the Electrochemical Society, 148 (4). G225-G228. ISSN 0013-4651

Baar, J.J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2001) Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array. In: 11th International Conference on Solid-State Sensors and Actuators, Transducers 2001, 10-14 June 2001, Munich, Germany (pp. pp. 1436-1439).

Elwenspoek, M.C. (2001) Sensor Technology 2001. Kluwer Academic Publishers, Dordrecht, The Netherlands. ISBN 9780792370123

Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2001) Temperature balance micro flow sensor system based on a free oscillating differential power controller. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 19-24).

Jansen, R. and Vlutters, R. and Anil Kumar, P.S. and Erve, O.M.J. van 't and Kim, S.D. and Lodder, J.C. (2001) Temperature dependence of magnetocurrent of hot electrons in a spin-valve transistor. Journal of Magnetism and Magnetic Materials, 226-23 (Part 1). pp. 658-660. ISSN 0304-8853

Jansen, Henri and Boer, Meint de and Wensink, Henk and Kloeck, Ben and Elwenspoek, Miko (2001) The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. Microelectronics Journal, 32 (9). pp. 769-777. ISSN 0026-2692

Lisfi, A. and Lodder, J.C. (2001) The effects of ZnO underlayer on microstructural and magnetic properties of BaFe12O19 thin films. Journal of Physics: Condensed matter, 13 (26). pp. 5917-5922. ISSN 0953-8984

Jansen, R. and Erve, O.M.J. van 't and Kim, S.D. and Vlutters, R. and Anil Kumar, P.S. and Lodder, J.C. (2001) The spin-valve transistor: fabrication, characterization and physics. Journal of Applied Physics, 89 (11). pp. 7431-7436. ISSN 0021-8979

Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and Berg, A. van den (2001) Use of selective anodic bonding to create micropump chambers with virtually no dead volume. Journal of the Electrochemical Society, 148 (2). G68-G72. ISSN 0013-4651

2000

Nijdam, A.J. and Veenendaal, E. van and Gardeniers, J.G.E. and Kentgens, A.P.M. and Nachtegaal, G.H. and Elwenspoek, M. (2000) 29 Si-Nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. Journal of the Electrochemical Society, 147 (6). pp. 2195-2198. ISSN 0013-4651

Cuppen, H.M. and Veenendaal, E. van and Suchtelen, J. van and Enckevort, W.J.P. van and Vlieg, E. (2000) A Monte Carlo study of dislocation growth and etching of crystals. Journal of Crystal Growth, 219 (1-2). pp. 165-175. ISSN 0022-0248

Veenendaal, E. van and Cuppen, H. and Enckevort, W.J.P. van and Suchtelen, J. van and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2000) A Monte Carlo study of etching in the presence of a mask junction. In: MicroMechanics Europe (MME) 2000, October 1-3, 2000, Uppsala, Sweden .

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2000) A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

Heyden, F.H.J. van der and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M.C. and Berg, A. van den and Tijssen, R.P. (2000) A micro viscosity detector for a planar hydrodynamic chromatography (HDC) system. In: MicroTAS 2000 conference, May 14-18, 2000, Enschede, The Netherlands (pp. pp. 595-598).

Lammerink, T.S.J. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M. (2000) A new class of thermal flow sensors using ΔT=0 as a control signal. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000, 23-27 January 2000, Miyazaki, Japan (pp. pp. 525-530).

Bree, H-E. de and Eerden, F.J.M. van der and Honschoten, J.W. van (2000) A novel technique for measuring the reflection coefficient of sound absorbing materials. In: International Conference on Noise and Vibration, ISMA 25, September 13-15, 2000, Leuven, Belgium.

Veenstra, T.T. and Berenschot, J.W. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2000) A simple selfpriming bubble tolerant peristaltic micropump. In: Eurosensors XIV Conference, August 27-31, 2000, Copenhagen, Denmark (pp. pp. 371-372).

Honschoten, J. van and Baar, J. van and Bree, H.E. de and Lammerink, T. and Krijnen, G. and Elwenspoek, M. (2000) Application of a microflown as a low-cost level-sensor. Journal of Micromechanics and Microengineering, 10 (2). pp. 250-253. ISSN 0960-1317

Oosterbroek, R.E. and Gui, C. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (2000) Bonding and etching techniques for precision frabrication of reliable microvalves. In: MicroTAS 2000 Conference, May 14-18, 2000, Enschede, The Netherlands (pp. pp. 179-182).

Tong, H.D. and Zwijze, R.A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Characterization of platinum lift-off technique. In: SeSens workshop on Semiconductor Sensor and Actuator Technology, Nov. 30 - Dec. 1, 2000, Veldhoven, The Netherlands.

Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Hien, T. and Elwenspoek, M.C. (2000) Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. In: Micro-Electro-Mechanical Systems, MEMS 2000, November 5-10, 2000, Orlando, USA.

Tas, N.R. and Molenaar, R. and Sonnenberg, T. and Koster, M.P. and Elwenspoek, M.C. (2000) Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. In: 2000 International Mechanical Engineering Congress & Exposition, IMECE, November 5-10, 2000, Orlando, FL, USA.

Baar, J.J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Determination of fluid and flow parameters using heat transfer. In: Eurosensors XIV Conference, 14th European Conference on Solid-State Transducers, August 27-30, 2000, Copenhagen, Denmark (pp. pp. 375-376).

Kuiper, S. and Rijn, C.J.M. van and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Determination of particle-release conditions in microfiltration: a simple single-particle model rested on a model membrane. Journal of Membrane Science, 180 (1). pp. 15-28. ISSN 0376-7388

Kuiper, Stein (2000) Development and application of microsieves. thesis.

Tas, Niels Roelof (2000) Electrostatic micro walkers : micro electromechanics and micro tribology. thesis.

Oosterbroek, R.E. and Berenschot, J.W. and Jansen, H.V. and Nijdam, A.J. and Pandraud, G. and Berg, A. van den and Elwenspoek, M.C. (2000) Etching methodologies in <111>-oriented silicon wafers. Journal of Microelectromechanical Systems, 9 (3). pp. 390-396. ISSN 1057-7157

Nijdam, A.J. and Gardeniers, J.G.E. and Gui, C. and Elwenspoek, M. (2000) Etching pits and dislocations in Si{111}. Sensors and Actuators A: Physical, 86 (3). pp. 238-247. ISSN 0924-4247

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Bennink, M.L. and Kanger, J.S. and Grooth, B.G. de and Elwenspoek, Miko and Greve, J. and Berg, A. van den and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 429-434).

Blom, M.T. and Tas, N.R. and Pandraud, G. and Chmela, E. and Gardeniers, J.G.E. and Elwenspoek, M. and Berg, A. van den and Tijssen, R.P. (2000) Failure mechanisms of pressurized microchannels, model and experiments. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 199-204).

Nijdam, A.J. and Veenendaal, E. van and Cuppen, H. and Suchtelen, J. van and Reed, M.L. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Vlieg, E. and Elwenspoek, M.C. (2000) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation. In: MicroMechanics Europe (MME) 2000, October 1-3, 2000, Uppsala, Sweden .

Zwijze, R.A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and Boer, M.J. de and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Micromachining and Microfabrication 2000, 18 September 2000, Santa Clara, CA, USA (pp. pp. 47-58).

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Berg, A. van den and Tijssen, R.P. (2000) High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (2000) High resolution powder blast micromachining. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 769-774).

Musa, S. and Lagali, N.S. and Krijnen, G.J.M. and Driessen, A. (2000) Low-cost multimode waveguide couplers for multimode fiber-based local area networks. In: IEEE 13th Annual Meeting Lasers and Electro-Optics Society, LEOS 2000, November 13-16, 2000, Rio Grande, Puerto Rico (pp. pp. 468-469).

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (2000) Low-cost piezoresistive silicon load cell independent of force ditribution. Journal of Micromechanics and Microengineering, 10 (2). pp. 200-203. ISSN 0960-1317

Anil Kumar, P.S. and Jansen, R. and Erve, O.M.J. van 't and Vlutters, R. and Haan, P. de and Lodder, J.C. (2000) Low-field magnetocurrent above 200% in a spin-valve transistor at room temperature. Journal of Magnetism and Magnetic Materials, 214 (1-2). pp. 1-6. ISSN 0304-8853

Veenstra, T.T. and Tiggelaar, R.M. and Mateman, R. and Sanders, R.G.P. and Wissink, J. and Prak, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) MAFIAS in modules. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

Zwijze, Albert Ferdinand (2000) Micro-machined high capacity silicon load cells. thesis.

Baar, J.J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Micro-machined structures for thermal measurement of fluid and flow parameters. In: MicroMechanics Europe Conference, MME 2000, October 1-3, 2000, Uppsala, Sweden.

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Elwenspoek, Miko and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Micro- and Nanotechnology for Biomedical and Environmental Applications, 26-27 January 2000, San Jose, California, USA (pp. pp. 41-49).

Boer, Meint J. de and Tjerkstra, R. Willem and Berenschot, J.W. (Erwin) and Jansen, Henri V. and Burger, G.J. and Gardeniers, J.G.E. (Han) and Elwenspoek, Miko and Berg, Albert van den (2000) Micromachining of buried micro channels in silicon. Journal of Microelectromechanical Systems, 9 (1). pp. 94-103. ISSN 1057-7157

Abelmann, Leon and Zhu, Jian-Gang and Bain, James A. and Ramstöck, Klaus and Lodder, Cock (2000) Micromagnetic simulation of a flux guide for a read head with sub-100 nm resolution. Journal of Applied Physics, 87 (9). pp. 5538-5540. ISSN 0021-8979

Abelmann, Leon and Khizroev, Sakhrat K. and Litvinov, Dmitri and Zhu, Jian-Gang and Bain, James A. and Kryder, Mark H. and Ramstöck, Klaus and Lodder, Cock (2000) Micromagnetic simulation of an ultrasmall single-pole perpendicular write head. Journal of Applied Physics, 87 (9). pp. 6636-6638. ISSN 0021-8979

Litvinov, Dmitri and Chomko, Roman M. and Abelmann, Leon and Ramstöck, Klaus and Chen, GaLane and Khizroev, Sakhrat (2000) Micromagnetics of a soft underlayer. IEEE Transactions on Magnetics, 36 . pp. 2483-2485. ISSN 0018-9464

Kuiper, S. and Brink, R. and Rijn, C.J.M. van and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Microsieves: influence of perforations on flow resistance and membrane strength. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

Nguyen, Viet H. and Velden, Peter van der and Daamen, Roel and Kranenburg, Herma van and Woerlee, Pierre H. (2000) Modelling of dishing for metal chemical mechanical polishing. In: International Electron Devices Meeting, 2000. IEDM Technical Digest, December 11 to 13, 2000, San Francisco, USA (pp. pp. 499-502).

Veenendaal, E. van and Beurden, P. van and Enckevort, W.J.P. van and Vlieg, E. and Suchtelen, J. van and Elwenspoek, M. (2000) Monte Carlo study of kinetic smoothing during dissolution and etching of the Kossel (100) and silicon (111) surfaces. Journal of Applied Physics, 88 (8). pp. 4595-4604. ISSN 0021-8979

Lammerink, T.S.J. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) New class of thermal flow sensors using \[\Delta\]T = 0 as a control signal. In: 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), 23 - 27 Jan 2000, Miyazaki, Japan (pp. pp. 525-530).

Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (2000) New: MST stainless steel flowsensor. In: Eurosensors XIV Conference, August 27-30, 2000, Copenhagen, Denmark (pp. pp. 325-326).

Schlautmann, S. and Wensink, H. and Schasfoort, R.B.M. and Elwenspoek, M.C. and Berg, A. van den (2000) Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

Wiegerink, Remco and Zwijze, Robert and Krijnen, Gijs and Lammerink, Theo and Elwenspoek, Miko (2000) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. Sensors and Actuators A: Physical, A80 (2). pp. 189-196. ISSN 0924-4247

Baar, J.J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Resistive actuator sensor structures for the determination of fluid and flow parameters - first results. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

Brugger, J. and Berenschot, J.W. and Kuiper, S. and Nijdam, W. and Otter, B. and Elwenspoek, M. (2000) Resistless patterning of sub-micron structures by evaporation through nanostencils. Microelectronic Engineering, 53 (1). pp. 403-405. ISSN 0167-9317

Veenendaal, E. van and Nijdam, A.J. and Suchtelen, J. van and Sato, K. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Elwenspoek, M. (2000) Simulation of anisotropic wet chemical etching using a physical model. Sensors and Actuators A: Physical, 84 (3). pp. 324-329. ISSN 0924-4247

Carley, L. Richard and Bain, James A. and Fedder, Gary K. and Greve, David W. and Guillou, David F. and Lu, Michael S.C. and Mukherjee, Tamal and Santhanam, Suresh and Abelmann, Leon and Min, Seungook (2000) Single-chip computers with microelectromechanical systems-based magnetic memory (invited). Journal of Applied Physics, 87 (9). pp. 6680-6685. ISSN 0021-8979

Tas, N.R. and Gui, C. and Elwenspoek, M. (2000) Static friction in elastic adhesive MEMS contacts, models and experiment. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 193-198).

Evers, L. and Bree, H-E. de and Haak, H.W. and Koers, A.A. (2000) The Deelen infrasound array for recording sonic booms and events of CTBT interest. In: 9th International Meeting on Low Frequency Noise and Vibration, May 17-19th 2000, Aalborg, Denmark.

Honschoten, J.W. van and Bree, H.E. de and Eerden, F.J.M. van der and Krijnen, G.J.M. (2000) The Influence of Viscothermal Effects on Calibration Measurements in a Tube. In: AES Convention, September 22-25, 2000, Los Angeles, USA.

Veenendaal, E. van and Suchtelen, J. van and Enckevort, W.J.P. van and Sato, K. and Nijdam, A.J. and Gardeniers, J.G.E. and Elwenspoek, M. (2000) The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide. Journal of Applied Physics, 87 (12). pp. 8732-8740. ISSN 0021-8979

Neagu, Cristina and Jansen, Henri and Gardeniers, Han and Elwenspoek, Miko (2000) The electrolysis of water: an actuation principle for MEMS with a big opportunity. Mechatronics, 10 (4). pp. 571-582. ISSN 0957-4158

Anil Kumar, P.S. and Lodder, J.C. (2000) The spin-valve transistor. Journal of Physics D: Applied Physics, 33 (22). pp. 2911-2920. ISSN 0022-3727

Jansen, R. and Anil Kumar, P.S. and Erve, O.M.J. van 't and Vlutters, R. and Haan, P. de and Lodder, J.C. (2000) Thermal Spin-Wave Scattering in Hot-Electron Magnetotransport Across a Spin Valve. Physical Review Letters, 85 (15). pp. 3277-3288. ISSN 0031-9007

Tas, N.R. and Lammerink, T.S.J. and Leussink, P.J. and Berenschot, J.W. and Bree, H-E. de and Elwenspoek, M. (2000) Towards thermal flowsensing with pL/s resolution. In: Micromachining and Microfabrication 2000, 18 September 2000, Santa Clara, CA, USA (pp. pp. 106-121).

Lalbahadoersing, S. and Siekman, M.H. and Groenland, J.P.J. and Luitjens, S.B. and Lodder, J.C. (2000) Track edges in metal-evaporated tape and thin metal-particle tape. Journal of Magnetism and Magnetic Materials, 219 (2). pp. 248-251. ISSN 0304-8853

Kuiper, Stein and Boer, Meint de and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (2000) Wet and dry etching techniques for the release of sub-micrometre perforated membranes. Journal of Micromechanics and Microengineering, 10 (2). pp. 171-174. ISSN 0960-1317

Gardeniers, J.G.E. and Burger, J.F. and Egmond, H.J. van and Holland, H.J. and Brake, H.J.M. ter and Elwenspoek, M.C. (2000) ZrNi thin films for fast reversible hydrogen pressure actuation. In: Actuator 2000, 7th International Conference on New Actuators, 19-21 June 2000, Bremen, Germany (pp. pp. 208-211).

1999

Bree, H-E. de and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) A low noise microphone based on the microflown technology. In: Transducers '99, 10th International Conference on Solid-State Sensors and Actuators, June 7-10, 1999, Sendai, Japan.

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. and Berg, A. van den (1999) A micromachined pressure/flow sensor. Sensors and Actuators A: Physical, 77 (3). pp. 167-177. ISSN 0924-4247

Druyvesteyn, W.F. and Bree, H-E. de and Elwenspoek, M.C. (1999) A new acoustic measurement probe The Microflown. In: Proceedings of the Institute of Acoustics (pp. pp. 140-147).

Honschoten, J. van and Baar, J. van and Bree, H.E. de and Lammerink, T. and Krijnen, G. and Elwenspoek, M. (1999) Application of a microflown as a low-cost level-sensor. In: Micromechanics Europe Workshop, MME '99, 27-28 September 1999, Gif sûr Yvette, France (pp. pp. 124-127).

Bree, Hans-Elias de and Jansen, Henri V. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. and Elwenspoek, Miko (1999) Bi-directional fast flow sensor with a large dynamic range. Journal of Micromechanics and Microengineering, 9 (2). pp. 186-189. ISSN 0960-1317

Vellekoop, S.J.L. and Abelmann, L. and Porthun, S. and Lodder, J.C. and Miles, J.J. (1999) Calculation of playback signals from MFM images using transfer functions. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 474-478. ISSN 0304-8853

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. and Berg, A. van den (1999) Characterization and optimization of mono-crystalline in-plane operating check valves. In: IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99, 7-10 June 1999, Sendai, Japan (pp. pp. 1816-1819).

Veenstra, T.T. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (1999) Characterization method for a new diffusion mixer applicable in micro flow analysis systems. Journal of Micromechanics and Microengineering, 9 (2). pp. 199-202. ISSN 0960-1317

Kim, Phan Le (1999) CoCrTa thin films for magnetic recording media: structure, magnetic properties and time-dependence effect. thesis.

Beelen, G. and Leijtens, X.J.M. and Linders, P. and Krijnen, G.J.M. and Driessen, A. and Diemeer, M.B.J. and Bakker, A.F. and Krijger, A.J.T. de and Ridder, R.M. de (1999) Compact polymer components for an integrated add-drop multiplexer. In: 12th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS '99, 8-11 Nov 1999, San Francisco, CA (pp. pp. 545-546).

Klootwijk, Johan H. and Kranenburg, Herma van and Woerlee, Pierre H. and Wallinga, Hans (1999) Deposited Inter-Polysilicon Dielectrics for Nonvolatile Memories. IEEE Transactions on Electron Devices, 1999 (7). pp. 1435-1445. ISSN 0018-9383

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (1999) Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of Micromechanics and Microengineering, 9 (2). pp. 194-198. ISSN 0960-1317

Vedyayev, A. and Ryzhanova, N. and Vlutters, R. and Dieny, B. (1999) Effect of interfacial scattering on the magnetoresistance of magnetic tunnel junctions. Europhysics Letters, 46 (6). pp. 808-814. ISSN 0295-5075

Veldhuis, G.J. and Nauta, T. and Gui, C. and Berenschot, J.W. and Lambeck, P.V. (1999) Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage. IEEE Journal of Selected Topics in Quantum Electronics, 5 (1). pp. 60-66. ISSN 1077-260X

Nijdam, A.J. and Suchtelen, J. van and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Etching of silicon in alkaline solutions: a critical look at the {111} minimum. Journal of Crystal Growth, 198-19 (Part 1). pp. 430-434. ISSN 0022-0248

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem Technologies, 5 (3). pp. 138-143. ISSN 0946-7076

Burger, J.F. and Holland, H.J. and Elwenspoek, M. and Brake, H.J.M. ter and Rogalla, H. (1999) Fast Gas-gap heat switch for a microcooler. In: 10th International Cryocooler Conference, May 26-28, 1998, Monterey, California (pp. pp. 565-574).

Kim, Phan Le and Lodder, Cock and Popma, Th.J.A. (1999) Field dependence of magnetic viscosity of CoCrTa in-plane media. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 249-252. ISSN 0304-8853

Burger, J.F. and Wekken, M.C. van der and Berenschot, E. and Holland, H.J. and Brake, H.J.M. ter and Rogalla, H. and Gardeniers, J.G.E. and Elwenspoek, M. (1999) High pressure check valve for application in a miniature cryogenic scorption cooler. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 183-188).

Nivelle, M.J.M.E. de and Bruijn, M.P. and Korte, P.A.J. de and Sanchez, S. and Elwenspoek, M. and Heidenblut, T. and Schwierzi, B. (1999) High-Tc bolometers with silicon-nitride spiderwebsuspension for far-infrared detection. IEEE Transactions on Applied Superconductivity, 9 (2, Par). pp. 3350-3353. ISSN 1051-8223

Bree, H.E. de and Elwenspoek, M.C. (1999) Improving the signal to noise ratio of resistive sensors. In: Proceedings of Micromechanics Europe '99 Conference (pp. pp. 128-131).

Tjerkstra, Rint Willem (1999) Isotropic etching of silicon in fluoride containing solutions as a tool for micromachining. thesis.

Veenendaal, E. van and Hoof, P.J.C.M. van and Suchtelen, J. van and Enckevort, W.J.P. van and Bennema, P. (1999) Kinetic roughening of the Kossel (1 0 0) surface. Journal of Crystal Growth, 198-19 (Part 1). pp. 22-26. ISSN 0022-0248

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (1999) Low creep and hysteresis load cell based on a force to fluid pressure transformation. Sensors and Actuators A: Physical, 78 (2). pp. 74-80. ISSN 0924-4247

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (1999) Low-cost piezoresistive silicon load cell independent of force distribution. In: Micromechanics Europe Conference, MME 1999, September 27-28, 1999, Gif-sur-Yvette, France.

Haast, M.A.M. and Heskamp, I.R. and Abelmann, L. and Lodder, J.C. and Popma, Th.J.A. (1999) Magnetic characterization of large area arrays of single and multi domain CoNi/Pt multilayer dots. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 511-514. ISSN 0304-8853

Lisfi, A. and Lodder, J.C. and Haan, P. de and Bolhuis, T. and Roesthuis, F.J.G. (1999) Magnetic relaxation in Barium ferrite films with perpendicular anisotropy. Journal of Magnetism and Magnetic Materials, 193 . pp. 258-261. ISSN 0304-8853

Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 September 1999, Gif sûr Yvette, France (pp. pp. 199-202).

Elwenspoek, Miko and Wiegerink, Remco J. (1999) Mechanical microsensors. Microtechnoloy and Mems . Swiss Foundation for Research in Microtechnology (FSRM), Neuchatel, Zwitserland. ISBN 9783540675822

Leussink, P.J. and Jansen, H.V. and Krijnen, G.J.M. and Elwenspoek, M. (1999) Metal thin film thermocouples for use in MST. In: Eurosensors XIII, European Conference on Solid-State Transducers, September 12-15, 1999, The Hague, the Netherlands (pp. pp. 205-206).

Rijn, Cees J.M. van and Nijdam, Wietze and Kuiper, Stein and Veldhuis, Gert J. and Wolferen, Henk van and Elwenspoek, Miko (1999) Microsieves made with laser interference lithography for micro-filtration applications. Journal of Micromechanics and Microengineering, 9 (2). pp. 170-172. ISSN 0960-1317

Lalbahadoersing, S. and Groenland, J.P.J. and Luitjens, S.B. and Lodder, J.C. (1999) Modeling and analysis of overwrite behavior versus increasing head field in thin MP tape. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 444-447. ISSN 0304-8853

Oosterbroek, Rijk Edwin (1999) Modeling, design and realization of microfluidic components. thesis.

Oosterbroek, R.E. and Berenschot, J.W. and Nijdam, A.J. and Pandraud, G. and Elwenspoek, M.C. and Berg, A. van den (1999) New design methodologies in <111>-oriented silicon wafers. In: Micromachining and Microfabrication 1999, 20 September 1999, Santa Clara, CA, USA (pp. pp. 384-394).

Bolhuis, T. and Abelmann, L. and Lodder, J.C. and Samwel, E.O. (1999) On the vectorial calibration of a vibrating sample magnetometer for thin film measurements. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 332-336. ISSN 0304-8853

Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Lambeck, Paul V. and Elwenspoek, Miko (1999) Optical devices based on fluidic controlled two-mode interference. Journal of Micromechanics and Microengineering, 9 (2). pp. 203-205. ISSN 0960-1317

Bijker, M.D. and Visser, E.M. and Lodder, J.C. and Popma, Th.J.A. (1999) Optimisation of oblique sputter deposited media. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 352-356. ISSN 0304-8853

Haast, Marc Antonius Maria (1999) Patterned magnetic thin films for ultra high density recording. thesis.

Wiegerink, R.J. and Zwijze, A.F. and Mateman, R. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands.

Wiegerink, Remco and Zwijze, Robert and Krijnen, Gijs and Lammerink, Theo and Elwenspoek, Miko (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogenous load distributions. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, January 17-21, 1999, Orlando, FL, USA (pp. pp. 558-563).

Lalbahadoersing, S. and Groenland, J.P.J. and Luitjens, S.B. and Lodder, J.C. (1999) Recording characteristics as a result of the special morphology of ME tape. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 345-348. ISSN 0304-8853

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1999) Selective fusion bonding by surface roughness control. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

Elwenspoek, M.C. and Jansen, H.V. (1999) Silicon micromachining. Cambridge University Press, United Kingdom. ISBN 9780521590549

Suchtelen, J. van and Sato, K. and Veenendaal, E. van and Nijdam, A.J. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Elwenspoek, M. (1999) Simulation of anisotropic wet-chemical etching using a physical model. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 332-337).

Gierkink, S.L.J. and Holzmann, Peter J. and Wiegerink, R.J. and Wassenaar, R.F. (1999) Some design aspects of a two-stage rail-to-rail CMOS op amp. Analog Integrated Circuits and Signal Processing, 21 (2). pp. 143-152. ISSN 0925-1030

Elwenspoek, M. (1999) Stationary hillocks on etching silicon. Journal of Micromechanics and Microengineering, 9 (2). pp. 180-185. ISSN 0960-1317

Gui, C. and Elwenspoek, M. and Tas, N. and Gardeniers, J.G.E. (1999) The effect of surface roughness on direct wafer bonding. Journal of Applied Physics, 85 (10). pp. 7448-7454. ISSN 0021-8979

Bree, Hans-Elias de and Elwenspoek, Miko (1999) The microflown, from die to product. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands (pp. pp. 459-460).

Papusoi Jr, C. (1999) The particle interaction effects in the field-cooled and zero-field-cooled magnetization processes. Journal of Magnetism and Magnetic Materials, 195 (3). pp. 708-732. ISSN 0304-8853

Bijker, M.D. and Abelmann, L. and Lodder, J.C. and Popma, Th.J.A. (1999) The role of oxygen in obliquely deposited tapes. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 357-361. ISSN 0304-8853

Lodder, J.C. and Monsma, D.J. and Vlutters, R. and Shimatsu, T. (1999) The spinvalve transistor: technologies and progress. Journal of Magnetism and Magnetic Materials, 198-19 . pp. 119-124. ISSN 0304-8853

Gui, C. and Elwenspoek, M. and Tas, N. and Gardeniers, J.G.E. (1999) The surface adhesion parameter: a measure for wafer bondability. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 290-295).

Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and Berg, A. van den (1999) The use of selective anodic bonding to create near-zero dead volume membranes. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

Suchtelen, J. van and Nijdam, A.J. and Veenendaal, E. van (1999) The velocity source concept. Journal of Crystal Growth, 198-19 (Part 1). pp. 17-21. ISSN 0022-0248

Elwenspoek, M.C. and Lammerink, T.S.J. (1999) Theory of thermal flow sensors. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands (pp. pp. 157-158).

Elwenspoek, M. (1999) Thermal flow micro sensors. In: International Semiconductor Conference, CAS 1999, 5-9 October 1999, Sinaia, Romania (pp. pp. 423-435).

Bree, Hans-Elias de and Druyvesteyn, W.F. and Berenschot, E. and Elwenspoek, M. (1999) Three-dimensional sound intensity measurements using microflown particle velocity sensors. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 124-129).

Nguyen Hoang, V. and Timmer, B. and Kranenburg, H. van and Woerlee, P.H. (1999) Time Dependency of the Planarization Process in Copper Chemical Mechanical Polishing. In: 29th European Solid-State Device Research Conference, ESSDERC, September 13-15, 1999, Leuven, Belgium (pp. pp. 260-263).

Kim, Phan Le and Lodder, Cock (1999) Time-Dependence effect in alumite recording media with perpendicular anisotropy. IEICE Transactions on Electronics, E82-C (12). pp. 2176-2183. ISSN 0916-8524

Lalbahadoersing, S. and Siekman, M.H. and Groenland, J.P.J. and Luitjens, S.B. and Lodder, J.C. (1999) Track edges in metal-evaporated tape and thin metal-particle tape. In: IEEE International Magnetics Conference, INTERMAG 1999, 18-21 May 1999, Kyongju, Korea (pp. AT13).

Valkering, Theo P. and Honschoten, Joost van and Hoekstra, Hugo J.W.M. (1999) Ultra-sharp soliton switching in a directional coupler. Optics Communications, 159 (4-6). pp. 215-220. ISSN 0030-4018

Samwel, E.O. and Bolhuis, T. and Speliotis, D. and Lodder, J.C. (1999) Vectorial measurements of the angular coercive field. Journal of Magnetism and Magnetic Materials, 193 (1-3). pp. 337-341. ISSN 0304-8853

Nijdam, A.J. and Berenschot, J.W. and Suchtelen, J. van and Gardeniers, J.G.E. and Elwenspoek, M. (1999) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. Journal of Micromechanics and Microengineering, 9 (2). pp. 135-138. ISSN 0960-1317

Kuiper, Stein and Boer, Meint de and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (1999) Wet and dry etching techniques for the release of submicron perforated membranes. In: 10th Micromechanics Europe Workshop, MME 1999, 27-28 September 1999, Gif-sur-Yvette, France (pp. pp. 168-171).

1998

Sanchez, Stefan and Elwenspoek, Miko and Gui, Chengqun and Nivelle, Martin J.M.E. de and Vries, Robert de and Korte, Piet A.J. de and Bruijn, Marcel P. and Wijnbergen, Jan J. and Michalke, Wolfgang and Steinbeiss, Erwin and Heidenblut, Torsten and Schwierzi, Bernard (1998) A high Tc superconductor bolometer on a silicon nitride membrane. Journal of Microelectromechanical Systems, 7 (1). pp. 62-69. ISSN 1057-7157

Neagu, Cristina Rodica (1998) A medical microactuator based on an electrochemical principle. thesis.

Veenstra, T.T. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) A mixer based on diffusion mixing designed for the MAFIAS-project. In: Dutch Sensor Conference, 2-3 March 1998, Enschede, The Netherlands (pp. pp. 263-267).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) A new fabrication method for in-plane micro fluid handling components and analysis systems. In: Sensor technology in the Netherlands : state of the art : proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2-3 March 1998. Kluwer Academic, Dordrecht, pp. 85-90. ISBN 9780792350101

Samwel, E.O. and Bolhuis, T. and Lodder, J.C. (1998) An alternative approach to vector vibrating sample magnetometer detection coil setup. Review of Scientific Instruments, 69 (9). pp. 3204-3209. ISSN 0034-6748

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: design and modeling. Journal of Microelectromechanical Systems, 7 (1). pp. 79-86. ISSN 1057-7157

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: fabrication and performance. Journal of Microelectromechanical Systems, 7 (1). pp. 87-93. ISSN 1057-7157

Lisfi, A. and Lodder, J.C. and Haan, P. de and Smithers, M.A. and Roesthuis, F.J.G. (1998) Barium Ferrite Films Grown by Laser Ablation. IEEE Transactions on Magnetics, 34 (4). pp. 1654-1656. ISSN 0018-9464

Bree, Hans-Elias de and Jansen, Henri V. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. and Elwenspoek, Miko (1998) Bi-directional fast flow sensor with a large dynamic range. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 194-197).

Hoekstra, H.J.W.M. and Lambeck, P.V. and Krijnen, G.J.M. and Ctyroky, J. and De minicis, M. and Sibilia, C. and Conradi, O. and Helfert, S. and Pregla, R. (1998) COST 240 benchmark test for beam, propagation methods applied to an electrooptical modulator based on surface plasmons. Journal of Lightwave Technology, 16 (10). pp. 1921-1927. ISSN 0733-8724

Veenstra, T.T. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Characterisation method for a new diffusion-mixer applicable in micro flow injection analysis system. In: Micromechanics Europe Workshop, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 186-189).

Abelmann, Leon and Porthun, Steffen and Haast, Marc and Lodder, Cock and Moser, Andreas and Best, Margaret E. and Schendel, Pieter J.A. van and Stiefel, Bruno and Hug, Hans J. and Heydon, Greg P. and Farley, Andrew and Hoon, Steve R. and Pfaffelhuber, Thomas and Proksch, Roger and Babcock, Ken (1998) Comparing the resolution of magnetic force microscopes using the CAMST reference samples. Journal of Magnetism and Magnetic Materials, 190 (1-2). pp. 135-147. ISSN 0304-8853

Rave, W. and Ramstöck, K. and Hubert, A. (1998) Corners and nucleation in Micromagnetics. Journal of Magnetism and Magnetic Materials, 183 (3). pp. 329-333. ISSN 0304-8853

Veen, D.T and Rikkers, E. and Krommendijk, F. and Sikken, B. and Krijnen, G.J.M. and Linders, P.W.C. and Bakker, A.F. and Joppe, J.L. and Diemeer, M.B.J. and Driessen, A. and Koonen, A.M.J. and Smit, M.K. (1998) Design and investigation of an all-optical WDM ring-network. In: 1998 International Conference on Applications of Photonic Technology III, 27 July 1998, Ottawa, Canada (pp. pp. 605-610).

Wensink, H. and Wiegerink, R.J. and Zwijze, A.F. and Boer, M.J. de and Elwenspoek, M.C. (1998) Design and realisation of a quasi monolithic silicon load cell. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 190-193).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM'98, 6-8 April, 1998, Santa Clara, CA, USA.

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 104-107).

Kuiper, S. and Rijn, C.J.M. van and Nijdam, W. and Elwenspoek, M.C. (1998) Development and applications of very high flux microfiltration membranes. Journal of Membrane Science, 150 (1). pp. 1-8. ISSN 0376-7388

Burger, J.F. and Holland, H.J. and Wekken, M. van der and Brake, H.J.M. ter and Wade, L. and Elwenspoek, M.C. and Rogalla, H. (1998) Development of a microminiature sorption cooler. In: Seventeenth International Cryogenic Engineering Conference, ICEC 17, 14-17 July 1998, Bournemouth, UK (pp. pp. 123-126).

Gardeniers, J.G.E. and Verholen, A.G.B.J. and Tas, N.R. and Elwenspoek, M.C. (1998) Direct measurement of piezoelectric properties of Sol-Gel PZT films. Journal of the Korean Physical Society (32). S1573-S1577. ISSN 0374-4884

Tjerkstra, R.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (1998) Electrochemical fabrication of multi walled microchannels. In: Micro Total Analysis Systems '98, 13-16 October 1998, Banff, Canada (pp. pp. 133-136).

Driessen, A. and Hoekstra, H.J.W.M. and Blom, F.C. and Horst, F. and Krijnen, G.J.M. and Schoot, J.B.P. van and Lambeck, P.V. and Popma, Th.J.A. and Diemeer, M.B.J. (1998) Evaluation of polymer based third order nonlinear integrated optics devices. Optical Materials, 9 (1-4). pp. 329-333. ISSN 0925-3467

Gui, C. and Boer, M. de and Gardeniers, J.G.E. and Jansen, H. and Berenschot, J.W. and Elwenspoek, M. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and Actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247

Wensink, H. and Boer, M.J. de and Wiegerink, R.J. and Zwijze, R.A.F. and Elwenspoek, M.C. (1998) First micromachined silicon load cell for loads up to 1000 kg. In: Micromachined Devices and Components IV, 21-22 Sept. 1998, Santa Clara, USA (pp. pp. 424-430).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) In-plane oriented fluid control components, fabricated with new etching techniques. In: Actuator 98, 6th international conference on new actuators, 17-19 June 1998, Bremen, Germany (pp. pp. 43-46).

Veenendaal, E. van and Hoof, P.J.C.M. van and Suchtelen, J. van and Enckevort, W.J.P. van and Bennema, P. (1998) Kinetic roughening of the Kossel (100) surface: comparison of classical criteria with Monte Carlo results. Surface Science, 417 (1). pp. 121-138. ISSN 0039-6028

Zwijze, Robert A.F. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko (1998) Low creep and hysteresis load cell based on a force to liquid pressure transformation. In: Dutch National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 287-292).

Zwijze, Robert A.F. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko (1998) Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 260-263).

Bruijn, M.P. and Nivelle, M.J.M.E. de and Korte, P.A.J. de and Sanchez, S. and Elwenspoek, M. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1998) Low noise far-infrared detection at 90 K using high-Tc superconducting bolometers with silicon-nitride beam suspension. In: 32nd ESLAB Symposium on Remote Sensing Methodology for Earth Observation and Planetary Exploration, 15-18 September 1998, Noordwijk, The Netherlands (pp. pp. 101-106).

Porthun, Steffen and Abelmann, Leon and Lodder, Cock (1998) Magnetic force microscopy of thin film media for high density magnetic recording. Journal of Magnetism and Magnetic Materials, 182 . pp. 238-273. ISSN 0304-8853

Haast, M.A.M. and Schuurhuis, J.R. and Abelmann, L. and Lodder, J.C. and Popma, Th.J.A. (1998) Magnetic properties of 60 nm dots prepared with laser interference lithography. In: 7th Joint MMM-Intermag Conference, 1998, January 6-9, 1998, San Francisco, California, U.S.A. (pp. p. 304).

Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592

Shimatsu, T. and Mollema, R.H. and Monsma, D.J. and Keim, E.G. and Lodder, J.C. (1998) Metal bonding during sputter film deposition. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 16 (4). pp. 2125-2131. ISSN 0734-2101

Berenschot, J.W. and Oosterbroek, R.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1998) Micromachining of \lbrace111\rbrace plates in <001> oriented silicon. Journal of Micromechanics and Microengineering, 8 (2). pp. 104-107. ISSN 0960-1317

Rijn, C.J.M. van and Nijdam, W. and Kuiper, S. and Veldhuis, G.J. and Wolferen, H.A.G.M. van and Elwenspoek, M.C. (1998) Microsieves made with laser interference lithography for micro filtration applications. In: Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. pp. 100-103).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves. In: MSM International Conference on Modeling and Simulation of Microsystems, April 6-8, 1998, Santa Clara, CA, USA (pp. pp. 528-533).

Tas, Niels and Wissink, Jeroen and Sander, Louis and Lammerink, Theo and Elwenspoek, Miko (1998) Modeling, design and testing of the electrostatic shuffle motor. Sensors and Actuators A: Physical, 1998 (70). pp. 171-178. ISSN 0924-4247

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 1998, Heidelberg, Germany (pp. pp. 482-487).

Elwenspoek, M.C. and Gui, C. (1998) New developments in wet chemical etching and fusion bonding. In: Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting (pp. pp. 192-205).

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of Microelectromechanical Systems, 7 (1). pp. 122-127. ISSN 1057-7157

Bijker, M.D. and Visser, E.M. and Lodder, J.C. (1998) Oblique metal deposited thin films for magnetic recording. Tribology International, 31 (9). pp. 553-560. ISSN 0301-679X

Bijker, Martin D. (1998) Oblique sputtered and evaporated magnetic thin films for tape recording. thesis.

Vellekoop, S.J.L. and Abelmann, L. and Porthun, S. and Lodder, J.C. (1998) On the determination of the internal magnetic structure by magnetic force microscope. Journal of Magnetism and Magnetic Materials, 190 (1-2). pp. 148-151. ISSN 0304-8853

Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Lambeck, Paul V. and Elwenspoek, Miko (1998) Optical devices based on fluidic controlled two mode interference. In: 9th European Workshop on Micromechanics, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 203-205).

Porthun, S. and Abelmann, L. and Vellekoop, S.J.L. and Lodder, J.C. and Hug, H.J. (1998) Optimization of lateral resolution in magnetic force microscopy. Applied physics A: Materials science & processing, 66 (1, Suppl.). pp. 1185-1189. ISSN 0947-8396

Burger, Johannes and Berenschot, Erwin and Burger, Gert-Jan and Visscher, Harm and Elwenspoek, Miko (1998) Piezoresistive friction force sensor for tribological research. Journal of Micromechanics and Microengineering, 8 (2). pp. 138-140. ISSN 0960-1317

Gui, C. and Elwenspoek, M. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and Future Role of Chemical Mechanical Polishing in Wafer Bonding. Journal of the Electrochemical Society, 145 (6). pp. 2198-2204. ISSN 0013-4651

Gui, C. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and future role of CMP in wafer bonding. In: Fourth International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, Paris, France (pp. pp. 114-126).

Kirilyuk, A. and Rasing, Th. and Haast, M.A.M. and Lodder, J.C. (1998) Probing structure and magnetism of CoNi-Pt interfaces by non-linear magneto-optics. Applied Physics Letters, 72 (18). pp. 2331-2333. ISSN 0003-6951

Hug, Hans J. and Stiefel, B. and Schendel, P.J.A. and Moser, A. and Hofer, R. and Martin, S. and Guntherodt, H.-J. and Porthun, Steffen and Abelmann, Leon and Lodder, J.C. and Bochi, Gabriel and O'Handley, R.C. (1998) Quantitative magnetic force microscopy on perpendicularly magnetized samples. Journal of Applied Physics, 83 (11). pp. 5609-5620. ISSN 0021-8979

Haast, M.A.M. and Schuurhuis, J.R. and Abelmann, L. and Lodder, J.C. and Popma, Th.J.A. (1998) Reversal mechanism of submicron patterned CoNi/Pt multilayers. IEEE Transactions on Magnetics, 34 (4). pp. 1006-1008. ISSN 0018-9464

Braber, E.T. den and Jansen, H.V. and Boer, M.J. de and Croes, H.J.E. and Elwenspoek, M. and Ginsel, L.A. and Jansen, J.A. (1998) Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk titanium substrata. Journal of Biomedical Materials Research, 40 (3). pp. 425-433. ISSN 0021-9304

Elwenspoek, M.C. (1998) Stationary hillocks on etching silicon. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 70-73).

Rusu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) The electrolysis of water: an actuation principle for MEMS with a big opportunity. In: 6th International conference on New Actuators with accompanying exhibition, 17-19 June, 1998, Bremen, Germany (pp. pp. 118-121).

Monsma, Douwe Johannes (1998) The spin-valve transistor. thesis.

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Utilizing the {111} plane switch-over etching process for micro fluid control applications. In: Micro Total Analysis Systems '98, 13-16 October 1998, Banff, Canada.

Nijdam, A.J. and Berenschot, J.W. and Suchtelen, J. van and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 74-77).

1997

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan H. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of Microelectromechanical Systems, 6 (3). pp. 234-241. ISSN 1057-7157

Gerritsma, Gerrit J. and Verhoeven, Martin A.J. and Wiegerink, Remco J. and Rogalla, Horst (1997) A high-Tc 4-bit periodic threshold analog-to-digital converter. IEEE Transactions on Applied Superconductivity, 7 (2, Par). pp. 2987-2990. ISSN 1051-8223

Sánchez, S. and Elwenspoek, M.C. and Gui, C. and Nivelle, M.J.M.E. de and Vries, R.J. de and Korte, P.A.J. de and Bruijn, M.P. and Wijnbergen, J.J. and Michalke, W. and Steinbeiss, E. and Heidenblut, T. and Schwierzi, B. (1997) A high-Tc superconductor bolometer on a silicon nitride membrane. In: 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997, 26-30 Jan 1997, Nagoya, Japan (pp. pp. 506-571).

Sanchez, S. and Elwenspoek, M.C. and Gui, C. and Nivelle, M.J.M.E. de and Vries, R. de and Korte, P.A.J. de and Bruijn, M.P. and Schwierzi, B. (1997) A high-Tc superconductor bolometer on a silicon nitridemembrane. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997, 26-30 Jan 1997, Nagoya, Japan (pp. pp. 506-571).

Toor, M.W. van and Lammerink, T.S.J. and Gardeniers, J.G.E. and Elwenspoek, M. and Monsma, D. (1997) A novel micrmechanical flow controller. Journal of Micromechanics and Microengineering, 7 (3). pp. 165-169. ISSN 0960-1317

Elwenspoek, M.C. (1997) Actuatoren op weg naar de markt. Polytechnisch tijdschrift. Werktuigbouw . pp. 7-14. ISSN 09255680

Tas, N.R. and Vogelzang, A.H. and Elwenspoek, M.C. and Legtenberg, R. (1997) Adhesion and frinction in MEMS. In: Proceedings Micro/nana tribology and it's applications.

Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M. and Kelly, J.J. (1997) An electrochemical active valve. Electrochimica Acta, 42 (20-22). pp. 3367-3373. ISSN 0013-4686

Hoekstra, H.J.W.M. and Noordman, O. and Krijnen, G.J.M. and Varshney, R.K. and Henselmans, E. (1997) Beam-propagation method for second-harmonic generation in waveguides with birefringent materials. Journal of the Optical Society of America B: Optical Physics, 14 (7). pp. 1823-1830. ISSN 0740-3224

Neagu, C.R. and Jansen, H.V. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) Characterization of a planar microcoil for implantable microsystems. Sensors and Actuators A: Physical, 62 (1-3). pp. 599-611. ISSN 0924-4247

Lalbahadoersing, S. and Groenland, J.P.J. and Luitjens, S.B. and Lodder, J.C. (1997) Comparison Of Recording Properties Of ME Tape And Thin MP Tape With Respect To Overwrite Behaviour. In: IEEE International Magnetics Conference, INTERMAG 1997, 1-4 April 1997, New Orleans, Lousiana.

Lalbahadoersing, S. and Groenland, J.P.J. and Luitjens, S.B. and Lodder, J.C. (1997) Comparison of recording properties of ME tape and thin MP tape with respect to overwrite behavior. IEEE Transactions on Magnetics, 33 (5). pp. 3061-3063. ISSN 0018-9464

Rijn, Cees van and Wekken, Michiel van der and Nijdam, Wietze and Elwenspoek, Miko (1997) Deflection and maximum load of microfiltration membrane sieve made with silicon micromachining. Journal of Microelectromechanical Systems, 6 (1). pp. 48-54. ISSN 1057-7157

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Berg, A. van den and Elwenspoek, M.C. (1997) Designing, realization and characterization of a novel capacitive pressure/flow sensor. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA (pp. pp. 151-154).

Monsma, D.J. and Vlutters, R. and Shimatsu, T. and Keim, E.G. and Mollema, R.H. and Lodder, J.C. (1997) Development of the spin-valve transistor. IEEE transactions on magnetics, 33 (5 , Pa). pp. 3495-3499. ISSN 00189464

Kasparian, Jerome and Elwenspoek, M. and Allongue, Philippe (1997) Digital computation and in situ STM approach of silicon anistropic etching. Surface Science, 388 (1-3). pp. 50-62. ISSN 0039-6028

Kemner, K.M. and Idzerda, Y.U. and Harris, V.G. and Chakarian, V. and Elam, W.T. and Kao, C.C. and Johnson, E. and Feng, Y.C. and Laughlin, D.E. and Chen, C.T. and Lee, K.B. and Lodder, J.C. (1997) Direct observation of Cr magnetic order in CoCrTa and CoCrPt thin films. Journal of Applied Physics, 81 . pp. 1002-1004. ISSN 0021-8979

Legtenberg, Rob and Gilbert, John and Senturia, Stephen D. and Elwenspoek, Miko (1997) Electrostatic curved electrode actuators. Journal of Microelectromechanical Systems, 6 (3). pp. 257-265. ISSN 1057-7157

Tjerkstra, R.W. and Boer, M. de and Berenschot, E. and Gardeniers, J.G.E. and Berg, A. van den and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica Acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686

Tjerkstra, R. Willem and Boer, Meint de and Berenschot, Erwin and Gardeniers, J.G.E. and Berg, Albert van den and Elwenspoek, Miko (1997) Etching technology for microchannels. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan (pp. pp. 147-152).

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M. and Lambeck, P.V. (1997) Fusion bonding of rough surfaces with polishing technique for silicon micromaching. Microsystem Technologies, 3 (3). pp. 122-128. ISSN 0946-7076

Gui, C. and Jansen, H.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multi layer substrates. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA (pp. pp. 633-636).

Gui, C. and Jansen, H.V. and Boer, M. de and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: International Conference on Solid-State Sensors and Actuators, TRANSDUCERS, 16-19 June 1997, Chicago, IL, USA (pp. pp. 633-636).

Lodder, J.C. and Monsma, D.J. and Mollema, R.H. and Shimatsu, T. and Vlutters, R. (1997) Latest developments of the spin-valve transistor. Journal of Magnetism and Magnetic Materials, 175 (1-2). p. 159. ISSN 0304-8853

Nivelle, M.J.M.E. de and Bruijn, M.P. and Vries, R. de and Wijnbergen, J.J. and Korte, P.A.J. de and Sanchez, S. and Elwenspoek, M. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1997) Low noise high-Tc superconducting bolometers on silicon nitride membranes for far-infrared detection. Journal of Applied Physics, 82 (10). pp. 4719-4726. ISSN 0021-8979

Haan, S. de and Lodder, J.C. (1997) Magnetisation reversal mechanism in Co-Cr media for perpendicular magnetic recording. Journal of Magnetism and Magnetic Materials, 168 (3). pp. 321-335. ISSN 0304-8853

Reed, M.L. and Elwenspoek, M.C. and Johansson, S. and Obermeier, E. and Fujita, H. and Uenishi, Y. (1997) Materials for mechanical and optical microsystems. Materials Research Society, Pittsburgh, Pennsylvania. ISBN 9781558993488

Berg, A. van den and Lammerink, T.S.J. (1997) Micro Total Analysis Systems: Microfluidic aspects, integration concept and applications. In: Microsystem Technology in Chemistry and Life Science. Springer verlag, Berlin, pp. 21-49. ISBN 9783540634249

Burger, J.F. and Brake, H.J.M. ter and Elwenspoek, M.C. and Rogalla, H. (1997) Microcooling: study on the application of micromechanical techniques. In: 9th International Cryocooler Conference '96, June 25-27, 1996, Waterville Valley, NH (pp. pp. 687-696).

Rijn, C.J.M. van and Kuiper, S. and Nijdam, W. and Elwenspoek, M.C. (1997) Microsieves: development and applications of new high flux micro filtration membranes. In: Proceedings of Euromembrane '97 Symposium (pp. pp. 437-440).

Schuurhuis, J.R. and Haast, M.A.M. and Abelmann, L. and Veldhuis, G.J. and Lodder, J.C. (1997) Nanofabricage van een discreet medium voor magnetische recording met zeer hoge bitdichtheid. Nevac blad, 35 (3). pp. 55-63. ISSN 0169-9431

Abelmann, Leon and Lodder, Cock (1997) Oblique evaporation and surface diffusion. Thin Solid Films, 1997 (305). pp. 1-2. ISSN 0040-6090

Bijker, M.D. and Visser, E.M. and Lodder, J.C. and Popma, Th.J.A. (1997) Oblique sputtered Co and Co80Ni20 thin films. Journal of the Magnetics Society of Japan, 21 (Suppl.). pp. 169-172. ISSN 0285-0192

Bijker, M.D. and Abelmann, L. and Schrauwen, C.P.G. and Lodder, J.C. (1997) Opgedampte video tape op laboratorium schaal van Goliath tot David: Miniaturisering van een roll-coater. Nevac blad, 35 (3). pp. 69-81. ISSN 0169-9431

Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1997) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. JSME International Journal, Series C, 40 (1). pp. 33-41. ISSN 0914-8825

Burger, J.F. and Berenschot, J.W. and Visscher, H. and Elwenspoek, M.C. (1997) Piezoresistive friction force sensor for tribological research. In: Micro Mechanics Europe, MME 1997, Aug. 31 - Sept. 2, 1997, Southampton, England (pp. pp. 152-155).

Jansen, Henri and Boer, Meint de and Wiegerink, Remco and Tas, Niels and Smulders, Edwin and Neagu, Cristina and Elwenspoek, Miko (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic Engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317

Sanchez, S. and Gui, C. and Elwenspoek, M. (1997) Spontaneous direct bonding of thick silicon nitride. Journal of Micromechanics and Microengineering, 7 (3). pp. 111-113. ISSN 0960-1317

Exter, M.J. den and Bekkum, H. van and Rijn, C.J.M. van and Kapteijn, F. and Moulijn, J.A. and Schellevis, H. and Beenakker, C.I.N. (1997) Stability of oriented silicalite-1 films in view of zeolite membrane preparation. Zeolites, 19 (1). pp. 13-20. ISSN 01442449

Tas, N.R. and Sonnenberg, A.H. and Sander, A.F.M. and Elwenspoek, M.C. (1997) Surface micromachined linear electrostatic stepper motor. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan (pp. pp. 215-220).

Spiering, V.L. and Lammerink, T.S.J. and Burger, G.J. and Riet og Scholten, J.K. te and Berg, A. van den (1997) Technologies and applications for micro fluid systems. In: International Conference on Power Transmission Automation and Planning, 1997, Milan, Italy (pp. pp. 577-591).

Spiering, Vincent and Lammerink, Theo and Burger, Gert-Jan and Riet og Scholten, Jan-Kees te and Berg, Albert van den (1997) Technologies and applications for micro fluid systems [Sistemi di microanalisi per fluidi]. Oleodinamica-Pneumatica, 38 (11). pp. 92-102. ISSN 1122-5017

Jansen, Henri and Boer, Meint de and Wensink, Henk and Kloeck, Ben and Elwenspoek, Miko (1997) The black silicon method VIII: a study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. In: Micro- and Nano-Engineering 1997, 15 September 1997, Athens, Greece.

Tas, Niels and Wissink, Jeroen and Sander, Louis and Lammerink, Theo and Elwenspoek, Miko (1997) The shuffle motor: a high force, high precision linear electrostatic stepper motor. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS 1997, June 16-19, 1997, Chicago, USA (pp. pp. 777-780).

Kranenburg, Herma van and Corbach, Herman D. van and Woerlee, Pierre H. and Lohmeier, Martin (1997) W-CMP for sub-micron inverse metallisation. Microelectronic Engineering, 33 (1-4). pp. 239-246. ISSN 0167-9317

1996

Haes, Jan and Baets, Roel and Weinert, C.M. and Gravert, M. and Nolting, H.P. and Andrade, M. Adelaide and Leite, A. and Bissessur, Hans K. and Davies, J.B. and Ettinger, Robert D. and Ctyroky, Jiri and Ducloux, E. and Ratovelomanana, F. and Vodjdani, N. and Helfert, Stefan and Pregla, Reinholt and Wijnands, F.H.G.M. and Hoekstra, H.J.W.M. and Krijnen, G.J.M. (1996) A comparison between different propagative schemes for the simulation of tapered step index slab waveguides. Journal of Lightwave Technology, 14 (6). pp. 1557-1569. ISSN 0733-8724

Nivelle, M.J.M.E. de and Bruijn, M.P. and Vries, R. de and Wijnbergen, J.J. and Korte, P.A.J. de and Sanchez, S. and Elwenspoek, M. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. and Frericks, M. (1996) A high Tc superconductor bolometer for remote sensing of atmospheric OH. Journal de Physique IV, 6 (Colloq). pp. 423-428. ISSN 1155-4339

Sanchez, S. and Nivelle, M.J.M.E. de and Michalke, W. and Steinbeiss, E. and Burnus, M. and Heidenblut, T. and Schwierzi, B. and Vries, R. de and Korte, P.A.J. de and Elwenspoek, M.C. (1996) A high-Tc superconductor bolometer on a Si3N4/Si membrane. In: National Sernsor Conference 1996, March 20-21, 1996, Delft, The Netherlands (pp. pp. 99-102).

Holzmann, Peter J. and Wiegerink, Remco J. and Gierkink, Sander L.J. and Wassenaar, Roelof F. and Stroet, Peter (1996) A low-offset low-voltage CMOS Op Amp with rail-to-rail input and output ranges. In: IEEE International Symposium on Circuits and Systems, ISCAS 1996, May 12-15, 1996, Atlanta, Georgia, USA (pp. pp. 179-182).

Bree, H.E. de and Korthorst, T. and Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (1996) A method to measure apparent acoustic pressure, flow gradient and acoustic intensity using two micromachined flow microphones. In: Proceedings Eurosensors X (pp. pp. 827-830).

Rijn, Cees van and Nijdam, Wietze and Elwenspoek, Miko (1996) A microsieve for leukocyte depletion of erythrocyte concentrates. In: 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Bridging Disciplines for Biomedicine, 31 Oct.-3 Nov. 1996, Amsterdam, Netherlands (pp. pp. 256-257).

Toor, M.W. van and Lammerink, T.S.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Monsma, D.J. (1996) A novel micromechanical flow controller. Journal of Micromechanics and Microengineering, 7 (3). pp. 165-169. ISSN 0960-1317

Jansen, Henri and Gardeniers, Han and Boer, Meint de and Elwenspoek, Miko and Fluitman, Jan (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of Micromechanics and Microengineering, 6 (1). pp. 14-28. ISSN 0960-1317

Spiering, V.L. and Bergveld, P. and Elwenspoek, M.C. and Berg, A. van den (1996) A µsensor array in a fluidic system for space applications. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 143-146).

Baek, Y. and Schiek, R. and Stegeman, G.I. and Krijnen, G.J.M. and Baumann, I. and Sohler, W. (1996) All-optical integrated Mach-Zehnder switching due to cascaded nonlinearities. Applied Physics Letters, 68 (15). pp. 2055-2057. ISSN 0003-6951

Baek, Y. and Schiek, R. and Krijnen, G.J.M. and Stegeman, G.I. and Baumann, I. and Sohler, W. (1996) All-optical integrated Mach-Zehnder switching in lithium niobate waveguides due to cascaded nonlinearities. In: Proceedings of the 1996 Conference on Lasers and Electro-Optics, CLEO'96, 2-7 June 1996, Anaheim, CA, USA (pp. pp. 297-298).

Schiek, R. and Baek, Y. and Krijnen, G. and Stegeman, G.I. and Baumann, I. and Sohler, W. (1996) All-optical switching in lithium niobate directional couplers with cascaded nonlinearity. Optics Letters, 21 (13). pp. 940-942. ISSN 0146-9592

Neagu, Cristina R. and Gardeniers, Johannes G.E. and Elwenspoek, Miko and Kelly, John J. (1996) An electrochemical microactuator: principle and first results. Journal of Microelectromechanical Systems, 5 (1). pp. 2-9. ISSN 1057-7157

Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) An electrochemically actuated microvalve. In: ACTUATOR 96, 5th International Conference on New Actuators, 26-28 June 1996, Bremen, Germany (pp. pp. 41-44).

Stegeman, G.I. and Schiek, R. and Baek, Y. and Krijnen, G.J.M. and Baumann, I. and Sohler, W. (1996) Applications of cascading nonlinear optics to all-optical devices. In: Proceedings of the 1996 9th Annual Meeting of IEEE Lasers and Electro-Optics Society, LEOS'96. Part 2 (of 2), 18-21 Nov 1996, Boston, MA, USA (pp. pp. 322-323).

Elwenspoek, M.C. (1996) Bruggen bouwen, grenzen uberwinden. [Lecture]

Krijnen, Gijs J.M. and Hoekstra, Hugo J.W.M. and Stegeman, George I. and Torruellas, William (1996) Cerenkov second-harmonic generation in the strong conversion limit: New effects. Optics Letters, 21 (12). pp. 851-853. ISSN 0146-9592

Rusu, C.R. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Characterisation of a planar microcoil for implantable microsystems. In: Eurosensors X, European Conference on Solid-State Transducers, 8-11 September 1996, Leuven, Belgium (pp. pp. 343-346).

Legtenberg, Rob and Groeneveld, A.W. and Elwenspoek, M. (1996) Comb-drive actuators for large displacements. Journal of Micromechanics and Microengineering, 6 (3). pp. 320-329. ISSN 0960-1317

Meng, Q. and Drent, W.P. van and Lodder, J.C. and Popma, Th.J.A. (1996) Curie temperature dependence of magnetic properties of CoNi/Pt multilayer films. Journal of Magnetism and Magnetic Materials, 156 (1-3). pp. 296-298. ISSN 0304-8853

Smith, A. and Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Design, fabrication and characterisation of a planar microcoil inductor for power supply in and data exchange with implantable microsystems. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 35-38).

Phillips, G.N. and O'Grady, K. and Meng, Q. and Lodder, J.C. (1996) Domain structure and magnetisation processes in magneto-optic Co/Pt thin films. IEEE Transactions on Magnetics, 32 (5). pp. 4070-4072. ISSN 0018-9464

Kambersky, V. and Haan, P. de and Simsova, J. and Porthun, S. and Gemperle, R. and Lodder, J.C. (1996) Domain wall theory and exchange stiffness in Co/Pd multilayers. Journal of Magnetism and Magnetic Materials, 157-15 . pp. 301-302. ISSN 0304-8853

Abelmann, L. (1996) Dunne films met schuine eigenschappen. Ned Tijdschrift voor Natuurkunde, 16 . pp. 339-342.

Donnet, D.M. and Tsutsumi, K. and Haan, P. de and Lodder, J.C. (1996) Effect of sputter gas on the physical and magnetic microstructure of Co/Cu multilayers. Journal of Applied Physics, 79 (8). pp. 6243-6245. ISSN 0021-8979

Meng, Q. and Haan, P. de and Drent, W.P. van and Lodder, J.C. and Popma, Th.J.A. (1996) Effects of Pt speedlayer and Ar pressure on magnetic and structural properties of sputtered CoNi/Pt multilayers. IEEE Transactions on Magnetics, 32 (5). pp. 4064-4066. ISSN 0018-9464

Bijlsma, Sipke J. and Kranenburg, Herma van and Nieuwesteeg, K.J.B.M. and Pitt, Michael G. and Verweij, Jan F. (1996) Electrical breakdown of amorphous hydrogenated silicon rich silicon nitride thin film diodes. IEEE Transactions on Electron Devices, 43 (9). pp. 1592-1601. ISSN 0018-9383

Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrochemical microvalve. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 21-24).

Rührig, M. and Porthun, S. and Lodder, J.C. and McVitie, S. and Heyderman, L.J. and Johnston, A.B. and Chapman, J.N. (1996) Electron beam fabrication and characterization of high- resolution magnetic force microscopy tips. Journal of Applied Physics, 79 (6). pp. 2913-2919. ISSN 0021-8979

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 204-209).

Atkinson, R. and Pahirathan, S. and Salter, I.W. and Tatnall, C.J. and Lodder, J.C. and Meng, Q. and Grundy, P.J. (1996) Fundamental optical and magneto-optical constants of Co/Pt and CoNi/Pt multilayered films. Journal of Magnetism and Magnetic Materials, 162 (1). pp. 131-138. ISSN 0304-8853

Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1996) Fundamental study on a thin-film ae sensor for measurement of behavior of a multi-pad contact slider. In: 1996 IEEE International Magnetics Conference, INTERMAG '96, 9-12 April 1996, Seattle, WA, USA (pp. pp. 3675-3677).

Tsutsumi, K. and Haan, P. de and Eisenberg, M. and Monsma, D.J. and Lodder, J.C. (1996) Giant magnetoresistance in Co/Cu multilayers sputtered with Kr. Journal of Magnetism and Magnetic Materials, 1-3 (156). pp. 327-328. ISSN 0304-8853

Porthun, Steffen (1996) High resolution magnetic force microscopy: instrumentation and application for recording media. thesis.

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1996) High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through. Sensors and Actuators A: Physical, 54 (1-3). pp. 669-673. ISSN 0924-4247

Klootwijk, J.H. and Weusthof, M.H.H. and Kranenburg, H. van and Woerlee, P.H. and Wallinga, H. (1996) Improvements of deposited interpolysilicon dielectric characteristics with RTP N2O-anneal. IEEE Electron Device Letters, 17 (7). pp. 358-359. ISSN 0741-3106

Immink, A.H.J. and Bijker, M.D. and Abelmann, L. and Lodder, J.C. (1996) Interaction in double layered ME tape. Journal of Magnetism and Magnetic Materials, 155 (1-3). pp. 279-283. ISSN 0304-8853

Samwel, E.O. and Bijl, D.B. and Lodder, J.C. and Popma, Th.J.A. (1996) Intrinsic angular investigations on metal evaporated tapes. Journal of Magnetism and Magnetic Materials, 155 (1-3). pp. 292-296. ISSN 0304-8853

Tjerkstra, R.W. and Gardeniers, J.G.E. and Berg, A. van den and Elwenspoek, M.C. (1996) Isotropically etched channels for gas chromatography. Analytical Methods and Instrumentation . pp. 247-249. ISSN 1063-5246

Lodder, J.C. (1996) Magnetic structures in Co---Cr media for perpendicular magnetic recording. Journal of Magnetism and Magnetic Materials, 159 (1-2). pp. 238-248. ISSN 0304-8853

Lodder, J.C. (1996) Magnetic thin films for high-density recording. Thin Solid Films, 281-28 (1-2). pp. 474-483. ISSN 0040-6090

Meng, Q. and Lodder, J.C. and Popma, Th.J.A. (1996) Magneto-optical kerr spectroscopy of CoNi/Pt and Co/Pt multilayers. Journal of the Magnetics Society of Japan, 20 . pp. 287-290. ISSN 0285-0192

Meng, Q. (1996) Magneto-optical recording media - CoNi/Pt and Co/Pt multilayers. thesis.

Luitjens, S.B. and Stupp, S.E. and Lodder, J.C. (1996) Metal evaporated tape: state of the art and prospects. Journal of magnetism and magnetic materials, 155 (1-3). pp. 261-265. ISSN 0304-8853

Ruiter, A.G.T. and Moers, M.H.P. and Hulst, N.F. van and Boer, M. de (1996) Microfabrication of near-field optical probes. Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 14 (2). pp. 597-601. ISSN 1071-1023

Fluitman, Jan (1996) Microsystems technology: objectives. Sensors and Actuators A: Physical, 56 (1-2). pp. 151-166. ISSN 0924-4247

Burger, Johannes F. and Burger, Gert-Jan and Lammerink, Theo S.J. and Imai, Satomitsu and Fluitman, Jan H.J (1996) Miniaturised friction force measuring system for tribological research on magnetic storage devices. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, February 11-15, 1996, San Diego, California, USA (pp. pp. 99-104).

Lammerink, T.S.J. and Spiering, V.L. and Elwenspoek, M. and Fluitman, J.H.J. and Berg, A. van den (1996) Modular concept for fluid handling systems: a demonstrator micro analysis system. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 389-394).

Meng, Q. and Donnet, D.M. and Schendel, P.J.A. and Lodder, J.C. and Popma, Th.J.A. (1996) Optimasation of CoNi/Pt multilayers compared with Co/Pt multilayers for thermomagnetic writing. Journal of the Magnetics Society of Japan, 20 . pp. 53-56. ISSN 0285-0192

Krijnen, Gijs J.M. and Torruellas, William and Stegeman, George J. and Hoekstra, Hugo J.W.M. and Lambeck, Paul V. (1996) Optimization of second harmonic generation and nonlinear phase shifts in the Cerenkov regime. IEEE Journal of Quantum Electronics, 32 (4). pp. 729-738. ISSN 0018-9197

Imai, Satomitsu and Burger, Gert-Jan and Lammerink, Theo S.J. and Fluitman, Jan H.J. (1996) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. Transactions of the Japan Society of Mechanical Engineers/Nippon Kikai Gakkai Ronbunshu, C Hen, 62 (595). pp. 928-938. ISSN 0914-8825

Elwenspoek, M. (1996) Physical chemistry of wet chemical anisotropic etching of silicon. In: Proceedings of the ASME Dynamic Systems and Control Division. American Society of Mechanical Engineers, pp. 901-907. ISBN 9780791817469

Jansen, Henricus Venantius and Boer, Meint Jelle de and Legtenberg, Rob and Elders, Job and Elwenspoek, Miko Curt and Fluitman, Johannes Hermanus Josephus (1996) Process for producing micromechanical structures by means of reactieve ion etching. Patent.

Geurtsen, A.J.M. and Kools, J.C.S. and Wit, L. and Lodder, J.C. (1996) Pulsed laser deposition of permanent magnetic Nd2Fe14B thin films. Applied Surface Science, 96-98 . pp. 887-890. ISSN 0169-4332

Haan, S. de and Lodder, J.C. (1996) Reversal studies on sub-micron Co-Cr thin films by AHE analysis. Journal of Magnetism and Magnetic Materials, 155 (1-3). pp. 193-195. ISSN 0304-8853

Tas, N.R. and Elwenspoek, M.C. and Legtenberg, R. (1996) Side-wall spacers for stiction reduction in surface micromachined mechanisms. In: Micro Mechanics Europe, MME, 21-22 October 1996, Barcelona, Spain (pp. pp. 92-95).

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1996) Silicon fusion bonding of rough surface with polishing technique. In: Micro System Technologies '96. VDE-Verlag, Berlin, pp. 205-210.

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1996) Silicon fusion bonding with chemical mechanical polishing. In: Proceedings of the 1996 National Sensor Conference. , Delft, pp. 93-97. ISBN 9789040713217

Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. and Berg, A. van den (1996) Sistemi di microanalisi per Fluidi. Oleodinamica Pneumatica Lubrificazione (6). pp. 76-83. ISSN 0391-8645

Drent, W.P. van and Suzuki, T. and Meng, Q. and Lodder, J.C. and Popma, Th.J.A. (1996) Spectroscopic Kerr investigations of CoNi/Pt multilayers. Journal of Applied Physics, 79 (8). pp. 6190-6192. ISSN 0021-8979

Tas, Niels and Sonnenberg, Tonny and Jansen, Henri and Legtenberg, Rob and Elwenspoek, Miko (1996) Stiction in surface micromachining. Journal of Micromechanics and Microengineering, 6 (4). pp. 385-397. ISSN 0960-1317

Bressers, P.M.M.C. and Kelly, J.J. and Gardeniers, J.G.E. and Elwenspoek, M. (1996) Surface morphology of p-type (100) silicon etched in aqueous alkaline solution. Journal of the Electrochemical Society, 143 (5). pp. 1744-1750. ISSN 0013-4651

Spiering, Vincent L. and Lammerink, Theo S.J. and Jansen, Henri V. and Berg, Albert van den and Fluitman, Jan H.J (1996) Technologies and microstructures for separation techniques in chemical analysis. In: Micromachining and Microfabrication 1996, 14-15 October, 1996, Austin, Texas, USA (pp. pp. 2882-2887).

Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1996) The black silicon method VI: high aspect ratio treck etching for MEMS applications. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 250-257).

Bijker, M.D. and Donnet, D.M. and Lodder, J.C. (1996) The effect of sputter pressure on the microstrucure of CoNi/Pt multilayers. Journal of the Magnetics Society of Japan, 20 (Suppl.). pp. 407-410. ISSN 0285-0192

Drent, W.P. van and Bijker, M.D. and Lodder, J.C. (1996) The effect of stress and magnetostriction on the anisotropy of CoNi/Pt multilayers. Journal of Magnetism and Magnetic Materials, 156 (1-3). pp. 309-310. ISSN 0304-8853

Elwenspoek, M. (1996) The form of etch rate minima in wet chemical anisotropic etching of silicon. Journal of Micromechanics and Microengineering, 6 (4). pp. 405-409. ISSN 0960-1317

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Elwenspoek, Miko (1996) The two sensor µ-flown : an improved flow sensing principle. In: Eurosensors X, The 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium (pp. pp. 1301-1304).

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Jansen, Henri and Lammerink, Theo S.J. and Elwenspoek, Miko (1996) The μ-flown: a novel device for measuring acoustic flows. Sensors and Actuators A: Physical, 54 (1-3). pp. 552-557. ISSN 0924-4247

Berenschot, Erwin and Jansen, Henri and Burger, Gert-Jan and Gardeniers, Han and Elwenspoek, Miko (1996) Thermally assisted ion beam etching of polytetrafluoroethylene, a new technique for high aspect ratio etching of MEMS. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, February 11-15, 1996, San Diego, California, USA (pp. pp. 277-284).

Popescu, Dan S. and Dascalu, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1996) Ultrasonic transducer with thermo mechanical excitation andpiezoresistive detection. In: International Semiconductor Conference, CAS 1999, 9-12 October 1996, Sinaia, Romania (pp. pp. 85-87).

Spiering, V.L. and Lammerink, T.S.J. and Berg, A. van den (1996) Vooronderzoek in het kader van capillair connectoren en micro-detectoren voor een micro gaschromatograaf. [Report]

1995

Jansen, Henri and Gardeniers, Han and Fluitman, Jan (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 18-30).

Wiegerink, Remco J. and Gerritsma, Gerrit J. and Reuvekamp, Eugene M.C.M. and Verhoeven, Martin A.J. and Rogalla, Horst (1995) An HTS Quasi-One junction SQUID-based periodic threshold comparator for a 4-bit superconductive flash A/D converter. IEEE Transactions on Applied Superconductivity, 5 (3). pp. 3452-3458. ISSN 1051-8223

Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) An electrochemical micro actuator. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 106-110).

Legtenberg, R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic axial gap wobble motor.

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Lammerink, Theo and Elwenspoek, Miko (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 404-407).

Legtenberg, Rob and Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1995) Anisotropic reactive ion etching of silicon using SF6/02/CHF3 gas mixtures. Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651

Elders, J. and Jansen, H.V. and Elwenspoek, M. and Ehrfeld, W. (1995) Deemo: a new technology for the fabrication of microstructures. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 238-243).

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators.

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan (1995) Electrostatic curved electrode actuators. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - Feb. 1995, Amsterdam, The Netherlands (pp. pp. 37-42).

Elwenspoek, M.C. (1995) Etching technology. In: COMETT UETP MEMS. ISRM, Neuchatel, Switzerland.

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1995) High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through. In: Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden (pp. pp. 573-576).

Rijn, C.J.M. van and Nijdam, W. and Elwenspoek, M.C. (1995) High flow rate microsieve for bio medical applications. Proceedings of the ASME Dynamic Systems and Control Division, 57-2 . pp. 995-1000. ISSN 0022-0434

Rijn, C.J.M. van and Nijdam, W. and Elwenspoek, M.C. (1995) High flowrate microsieve for biomedical applications. In: 1995 ASME International mechanical engineering congress and exposition (pp. pp. 995-1000).

Lammerink, Theo S.J. and Dijkstra, Fred and Houkes, Zweitze and Kuijk, Joost van (1995) Intelligent gas-mixture flow sensor. Sensors and Actuators A: Physical, 47 (1-3). pp. 380-384. ISSN 0924-4247

Porthun, S. and Rührig, M. and Lodder, J.C. (1995) Magnetic force microscopy on thin film magnetic recording media. In: Forces in scanning probe microscopy. NATO ASI Series: Applied Sciences, 286 . Kluwer Academic Publishers, Dordrecht, pp. 471-476. ISBN 9780792334064

Rijn, Cees J.M. van and Elwenspoek, Miko C. (1995) Micro filtration membrane sieve with silicon micro machining for industrial and biomedical applications. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 83-87).

Berg, Albert van den and Lammerink, Theo (1995) Micro totaal analysesysteem (µtas). Mikroniek, 1995 (3). pp. 74-77. ISSN 0026-3699

Lammerink, T.S.J. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Micromachined hydraulic astable multivibrator. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - 2 Feb. 1995, Amsterdam, The Netherlands (pp. pp. 13-18).

Ctyroky, J. and Hoekstra, H.J.W.M. and Krijnen, G.J.M. and Lambeck, P.V. and Joannes, L. and Decoster, D. and Leite, A.P. and Pregla, R. and Ahlers, E. and Vinchant, J.F. and Andrade, M.A. (1995) Modelling of self-aligned total internal reflection waveguide mirrors: an interlaboratory comparison. Optical and quantum electronics, 27 (10). pp. 935-942. ISSN 0306-8919

Berg, A. van den and Lammerink, T.S.J. and Fluitman, J.H.J. (1995) Modular concept for miniature chemical systems. In: PACIFICHEM '95, December 17-22, 1995, Honolulu, Hawai.

Berg, A. van den and Lammerink, T.S.J. and Spiering, V.L. and Olthuis, W. (1995) Modular concept for miniature chemical systems. In: Microsystem technolgy for chemical and biological microreactors. Ehrfeld, VCH Gesellschaft, Weinheim, Germany, pp. 109-123. ISBN 9783527102266

Berg, A. van den and Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Bergveld, P. (1995) Modular concept for miniature chemical systems. In: International Conference on Integrated Micro/Nanotechnology for Space Applications, October 30 - November 3, 1995, Houston, Texas.

Kuijk, J. van and Lammerink, T.S.J. and Bree, H-E. de and Elwenspoek, M. and Fluitman, J.H.J. (1995) Multi-parameter detection in fluid flows. Sensors and Actuators A: Physical, 47 (1-3). pp. 369-372. ISSN 0924-4247

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 157-162).

Wijnands, Frank and Hoekstra, Hugo J.W.M. and Krijnen, Gijs J.M. and Ridder, René M. de (1995) Numerical solution method of nonlinear guided modes with a finite difference complex axis beam propagation method. IEEE Journal of Quantum Electronics, 31 (5). pp. 782-790. ISSN 0018-9197

Monsma, D.J. and Lodder, J.C. and Popma, Th.J.A. and Dieny, B. (1995) Perpendicular Hot Electron Spin-Valve Effect in a New Magnetic Field Sensor: The Spin-Valve Transistor. Physical Review Letters, 74 (26). pp. 5260-5263. ISSN 0031-9007

Elwenspoek, M.C. (1995) Physical chemistry of wetchemical anisotropic etching of silicon. In: 1995 ASME International mechanical engineering congress and exposition, gerefereed.

Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. and Tokuyama, M. and Hirose, S. (1995) Piezoelectric impact force sensor array for tribological research on rigid disk storage media. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 294-299).

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M. (1995) Planarization and fabrication of bridges across deep groves or holes in silicon using a dry film photoresist followed by an etch back. Journal of Micromechanics and Microengineering, 5 (2). pp. 189-192. ISSN 0960-1317

Graaf, A. van der and Frederikze, H. and Haan, P. de and Rekveldt, M.Th. and Lodder, J.C. (1995) Polarized neutron reflectometry on Co-Cr. Journal of Magnetism and Magnetic Materials, 140-14 (1). pp. 695-696. ISSN 0304-8853

Gui, Chengqun and Legtenberg, Rob and Elwenspoek, Miko and Fluitman, Jan H. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of Micromechanics and Microengineering, 5 (2). pp. 183-185. ISSN 0960-1317

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of Micromechanics and Microengineering, 5 (2). pp. 151-157. ISSN 0960-1317

Spiering, Vincent L. and Berenschot, J.W. and Elwenspoek, Miko and Fluitman, Jan H.J (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of Microelectromechanical Systems, 4 (3). pp. 151-157. ISSN 1057-7157

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Faase, F.J. (1995) Sacrificial wafer bonding: an addition to the micromachining techniques. In: Third International Symposium on Semiconductor Wafer Bonding, May 21-26, 1995, Reno, Nevada, USA (pp. pp. 642-643).

Popescu, Dan O. and Dascula, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1995) Silicon active microvalves using buckled membranes for actuation. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 305-308).

Elwenspoek, M. and Weustink, M. and Legtenberg, R. (1995) Static and dynamic properties of active joints. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 412-415).

Bijker, M.D. and Drent, W.P. van and Lodder, J.C. (1995) Stress measurements on magnetic multilayers. Journal of Magnetism and Magnetic Materials, 148 (1-2). pp. 160-162. ISSN 0304-8853

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Backlund, Ylva and Jansen, Henri (1995) The Wheatstone Gadget : a simple ciruit for the measuring differential resistance variations. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 201-204).

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic Engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317

Jansen, Henri and Boer, Meint de and Otter, Bert and Elwenspoek, Miko (1995) The black silicon method IV: the fabrication of three dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 88-93).

Boer, Meint de and Jansen, Henri and Elwenspoek, Miko (1995) The black silicon method V: a study of the fabrication of movable structure for micro electromechanical systems. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 565-568).

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of Micromechanics and Microengineering, 5 (2). pp. 115-120. ISSN 0960-1317

Tas, N.R. and Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) The electrostatic shuffle motor. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 128-131).

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Jansen, Henri and Lammerink, Theo and Elwenspoek, Miko (1995) The μ-flown: A Novel Device Measuring Acoustical Flows. In: Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden (pp. pp. 536-539).

Imai, S. and Tokuyama, M. and Hirose, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1995) Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction. IEEE Transactions on Magnetics, 31 (6). pp. 3009-3011. ISSN 0018-9464

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Towards position control of electrostatic comb drives.

Legtenberg, R. and Groneveld, A.W. and Elwenspoek, M.C. (1995) Towards position control of electrostatic comb drives. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 124-127).

1994

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M. and Fluitman, J.H.J. (1994) (Electro-) mechanical characateristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 41 (1). pp. 4-6. ISSN 0885-3010

Krijnen, Gijs J.M. and Hoekstra, Hugo J.W.M. and Lambeck, Paul V. (1994) A new method for the calculation of propagation constants and field profiles of guided modes of nonlinear channel waveguides based on the effective index method. Journal of Lightwave Technology, 12 (9). pp. 1550-1559. ISSN 0733-8724

Krijnen, G.J.M. and Villeneuve, A. and Stegeman, G.I. and Lambeck, P.V. and Hoekstra, H.J.W.M. (1994) A versatile all-optical modulator based on nonlinear Mach-Zehnder interferometers. In: IEEE Nonlinear Optics: Materials, Fundamentals and Applications, NLO '94, 25-29 Jul 1994, Waikoloa, HI, USA (pp. pp. 412-414).

Krijnen, G.J.M. and Lambeck, P.V. and Hoekstra, H.J.W.M. (1994) All-optical switching by means of nonlinear asymmetrical Y-junctions. In: Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting, 8-13 May 1994, Anaheim, CA, USA (pp. pp. 109-110).

Prak, Albert and Fluitman, Jan H.J (1994) Application of a model for silicon resonant sensors. Sensors and Actuators A: Physical, 41-42 (1-3). pp. 251-255. ISSN 0924-4247

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247

Jansen, Henri and Verhagen, Rudi and Elwenspoek, Miko (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparts, November 14th, 1994, Vienna, Austria.

Jansen, Henri and Verhagen, Rudi and Elwenspoek, Miko (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparths, 14 November, Vienna, Austria.

Geerts, Wim and Lodder, Cock and Popma, Theo (1994) Biaxial kerr magnetometry in oblique field for the study of thin films with a perpendicular anisotropuy. Journal of Magnetism and Magnetic Materials, 137 (1-2). pp. 224-232. ISSN 0304-8853

Popescu, Dan O. and Lammerink, Theo S.J. and Elwenspoek, Miko (1994) Buckled membranes for microstructures. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS , January 25-28, 1994, Oiso, Japan (pp. pp. 188-192).

Torruellas, William E. and Krijnen, Gijs and Kim, Dug Y. and Schiek, Roland and Stegeman, George J. and Vidakovic, Petar and Zyss, Joseph (1994) Cascading nonlinearities in an organic single crystal core fiber: The Cerenkov regime. Optics Communications, 112 (1-2). pp. 122-130. ISSN 0030-4018

Simsova, Jarmila and Gemperle, Richard and Kambersky, Vladimir and Porthun, Steffen and Haan, Poul de and Lodder, Cock (1994) Domain Structure of Co/Pd multilayers. IEEE transactions on Magnetics, 30 (2 , Pa). pp. 784-787. ISSN 0018-9464

Wijers, C.M.J. and Boeij, P.L. de and Hasselt, C.W. van and Rasing, Th. (1994) Effect of linear polarisability and local fields on surface SHG. Solid State Communications, 93 (1). pp. 17-20. ISSN 0038-1098

Aitchison, J.S. and Villeneuve, A. and Krijnen, G.J.M. and Stegeman, G.I. (1994) Efficient all-optical switching in a nonlinear AlGaAs X-junction. In: Conference on Lasers and Electro-Optics Europe - Technical Digest, 28 Aug -02 Sept 1994, Amsterdam, Netherlands (pp. pp. 405-406).

Legtenberg, Rob and Tilmans, Harrie A.C. (1994) Electrostatically driven vacuum-encapsulated polysilicon resonators part I. design and fabrication. Sensors and Actuators A: Physical, 45 (1). pp. 57-66. ISSN 0924-4247

Tilmans, Harrie A.C. and Legtenberg, Rob (1994) Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance. Sensors and Actuators A: Physical, 45 (1). pp. 67-84. ISSN 0924-4247

Amirhaghi, S. and Craciun, V. and Craciun, D. and Elders, J. and Boyd, I.W. (1994) Low temperature growth of highly transparent c-axis oriented ZnO thin films by pulsed laser deposition. Microelectronic Engineering, 25 (2-4). pp. 321-326. ISSN 0167-9317

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M. and Fluitman, J.H.J. (1994) Low temperature sacrificial wafer bonding for planarization after very deep etching. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS, January 25-28, 1994, Oiso, Japan (pp. pp. 69-74).

Rührig, M. and Porthun, S. and Lodder, J.C. (1994) Magnetic Force Microscopy Using Electron-Beam Fabricated Tips. Review of Scientific Instruments, 65 (10). pp. 3224-3228. ISSN 0034-6748

Lodder, Cock and Haan, Sietze de and Kooten, Matthijs van and Lintelo, Hans te and Porthun, Steffen (1994) Magnetic Structures in Co-Cr Films for Perpendicular Recording. Journal of the Magnetics Society of Japan, 18 (Suppl.). pp. 493-499. ISSN 0285-0192

Lintelo, J.G.Th. te and Lodder, J.C. and McVitie, S. and Chapman, J.N. (1994) Magnetic stray fields of Co-Cr microstrips measured by Lorentz microscopy. Journal of Applied Physics, 75 (6). pp. 3002-3007. ISSN 0021-8979

Elders, J. and Jansen, H.V. and Elwenspoek, M. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS , January 25-28, 1994, Oiso, Japan (pp. pp. 170-175).

Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Micro liquid handling systems. In: Onder de loep genomen, miniturisatie en microsysteemtechnologie, 1994, Veldhoven (pp. pp. 1-14).

Lammerink, T.S.J. and Berg, A. van den and Fluitman, J.H.J. (1994) Micro system array sensors. In: Sensor Technology Conference (pp. pp. 173-177).

Fluitman, Jan H.J (1994) Micro systems technology. In: IEEE Custom Integrated Circuits Conference, CICC, 1-4 May 1994, San Diego, CA, USA (pp. pp. 471-478).

Fluitman, Jan H. and Berg, Albert van den and Lammerink, Theo S. (1994) Micromechanical components for µTAS. In: MicroTAS '94 Workshop, (Invited speaker), November 21-22, 1994, Enschede, The Netherlands (pp. pp. 73-83).

Elders, J. and Kuijk, J.C.C. van and Lammerink, T.S.J. and Elwenspoek, M.C. and Leeuwis, H. (1994) Micropompen. Klinische Fysica, 3 . pp. 338-342. ISSN 0168-7026

Berg, Albert van den and Bergveld, P. and Elwenspoek, M. and Fluitman, J.H.J. (1994) Miniaturized chemical analysis systems. In: 5th International Symposium on Micro Machine and Human Science, 2-4 October 1994, Nagoya, Japan (pp. pp. 181-184).

Wijnands, Frank and Hoekstra, Hugo J.W.M. and Krijnen, Gijs J.M. and Ridder, René M. de (1994) Modal fields calculation using the finite difference beam propagation method. Journal of Lightwave Technology, 12 (12). pp. 2066-2072. ISSN 0733-8724

Berenschot, J.W. and Gardeniers, J.G.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) New applications of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 338-343. ISSN 0924-4247

Berge, P. ten and Abelmann, L. and Lodder, J.C. and Schrader, A. and Luitjens, S.B. (1994) Oblique Evaporation of Co80Ni20 part II: Continuously Varying Angleof Vapour Incidence. Journal of the Magnetics Society of Japan, 18 (Suppl.). pp. 295-298. ISSN 0285-0192

Abelmann, L. (1994) Oblique evaporation of Co80Ni20 for magnetic recording. thesis.

Lintelo, J.G.Th. te and Lodder, J.C. (1994) On the Relationship between Magnetic Viscosity and Coercivity of Perpendicular Media. Journal of Applied Physics, 76 (3). pp. 1741-1744. ISSN 0021-8979

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. (1994) Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back. In: 5th Workshop on Micromachining, Micromechanics and Microsystems (MME'94) (pp. pp. 210-213).

Kooten, M. van and Haan, S. de and Lodder, J.C. and Popma, Th.J.A. (1994) Reversible Magnetization-Rotation in Sub-Micron Co-Cr Samples: Measurements and Micromagnetic Simulations. Journal of Applied Physics, 75 (10). pp. 5508-5510. ISSN 0021-8979

Spiering, V.L. and Berends, H. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Sacrificial wafer bonding: a useful tool in micromachining. In: (pp. pp. 329-334).

Popescu, Dan O. and Dascula, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1994) Silicon active microvalves using buckled membranes for actuation. In: 17th Annual Semiconductor Conference, 11-16 October, 1994, Sinaia, Romania (pp. pp. 313-316).

Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Silicon microstructures for fluid handling. ABB-nieuwsbrief, 1994 (9). pp. 9-12. ISSN 0925-1529

Elwenspoek, M. (1994) Some selected research items of the micro mechanics department at MESA. In: 5th International Symposium on Micro Machine and Human Science, 2-4 October 1994, Nagoya, Japan (pp. pp. 9-31).

Legtenberg, Rob and Tilmans, Harrie A.C. and Elders, Job and Elwenspoek, Miko (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and Actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247

Kranenburg, Herma van and Lodder, Cock (1994) Tailoring growth and local composition by oblique-incidence deposition: a review and new experimental data. Materials Science and Engineering R: Reports, 11 (7). pp. 295-354. ISSN 0927-796X

Gardeniers, J.G.E. and Elwenspoek, M.C. and Cobianu, C. (1994) Texture variations in sol-gel derived PZT films on substrates with platinum metallization. In: Proceedings of the 1994 MRS Spring Meeting, 4-8 April 1994, San Francisco, CA, USA (pp. pp. 451-456).

Gardeniers, J.G.E. and Elwenspoek, M.C. and Cobianu, C. (1994) Texture variations in sol-gel derived pzt films on substrates with platinum metallization. In: Polycrystalline thin films. Materials Research Society, Pittsburgh, pp. 451-456. ISBN 9781558992436

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches. In: Micro and Nano Engineering (pp. pp. 312-313).

Jansen, H.V. and Verhagen, R. and Elwenspoek, M.C. (1994) The black silicon method III: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping and other MEMS applications. In: Proceedings of Handling and Assembly of microparts 1994 (pp. pp. 1-10).

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe Conference, MME 1994, September 5-6, 1994, Pisa, Italy (pp. pp. 60-64).

Li, Cheng-Zhang and Lodder, J.C. and Szpunar, J.A. (1994) The influence of the textural development on magnetic properties in Co-Cr thin films. Journal of Magnetism and Magnetic Materials, 131 (3). pp. 427-439. ISSN 0304-8853

Elwenspoek, M. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Towards integrated microliquid handling systems. Journal of Micromechanics and Microengineering, 4 (4). pp. 227-245. ISSN 0960-1317

Elwenspoek, M. and Lindberg, U. and Kok, H. and Smith, L. (1994) Wet chemical etching mechanism of silicon. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994, Oiso, Japan (pp. pp. 223-228).

1993

Wiegerink, Remco J. (1993) A CMOS Wideband Linear Current Attenuator with Electronically Variable Gain. In: IEEE International Symposium on Circuits and Systems, ISCAS 1993, 3-6 May 1993, Chicago, IL, USA (pp. pp. 962-965).

Botma, J.H. and Wassenaar, R.F. and Wiegerink, R.J. (1993) A low-voltage CMOS Op Amp with rail-to-rail constant-gm input stage and a class AB rail-to-rail output stage. In: IEEE International Symposium on Circuits and Systems, ISCAS 1993, 3-6 May 1993, Chicago, Illinois (pp. pp. 1314-1317).

Abelmann, Leon and Kambersky, Vladimir and Lodder, Cock and Popma, Theo J.A. (1993) Analysis of Torque Measurements on Films with Oblique Anistropy. IEEE Transactions on Magnetics, 29 (6, par). pp. 3022-3024. ISSN 0018-9464

Abelmann, Leon and Kambersky, Vladimir and Lodder, Cock and Popma, Theo J.A. (1993) Analysis of torque measurements on films with oblique anisotropy. IEEE Transactions on Magnetics, 29 (6 , Pa). pp. 3022-3024. ISSN 0018-9464

Kranenburg, Herma van and Lodder, Cock and Popma, Theo J.A. (1993) Asymmetric co-evaporated Co-Cr films: magnetic parameters and reversal mechanism. Journal of Magnetism and Magnetic Materials, 120 (1-3). pp. 225-228. ISSN 0304-8853

Porthun, St. and Berge, P. ten and Lodder, J.C. (1993) Bitter colloid observations of magnetic structures in perpendicular magnetic recording media. Journal of Magnetism and Magnetic Materials, 123 (1-2). pp. 199-208. ISSN 0304-8853

Elwenspoek, M.C. (1993) Chemical physics of wet chemical etching of silicon. In: Micromachine (pp. pp. 1-28).

Kambersky, V. and Haan, P. de and Lodder, J.C. and Simsova, J. and Gemperle, R. (1993) Domain structures in Co/Pd multilayers. IEEE Transactions on Magnetics, 29 (6). pp. 3138-3140. ISSN 0018-9464

Kraan, W.H. and Rekveldt, M.Th. and Haan, P. de and Lodder, J.C. (1993) Domain wall effects in neutron depolarisation in Co-Cr films. Journal of Magnetism and Magnetic Materials, 120 (1-3). pp. 372-374. ISSN 0304-8853

Prak, A. and Lammerink, T.S.J. and Fluitman, J.H.J. and Elwenspoek, M.C. (1993) Dynamic response of silicon resonant sensors. In: 7th International Conference on Solid-State Sensors and Actuators, Transducers 1993, June 7-10, 1993, Yokohama, Japan (pp. pp. 206-209).

Elwenspoek, M.C. and Blind, P. and Boer, M.J. de (1993) Etching Technology. Course book UETP MEMS, FSRM, Zwitserland.

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Integrated micro-liquid dosing systems. In: Micro Electro Mechanical Systems, MEMS '93, Februari 7-10, 1993, Fort Lauderdale, FL, USA (pp. pp. 254-259).

Groenland, J.P.J. (Hans) and Engelen, G.J.P. (Peter) van and Bernards, Jan P.C. and Cramer, Hugo A.J. (1993) Investigating recording patterns using magnetic force microscopy. Journal of Magnetism and Magnetic Materials, 120 (1-3). pp. 327-329. ISSN 0304-8853

Kordecki, R. and Meckenstock, R. and Pelzl, J. and Nikitov, S. and Lodder, J.C. (1993) Investigations of bulk and surface spin wave modes in FeNi multilayers by spin wave resonance. Journal of Magnetism and Magnetic Materials, 121 (1-3). pp. 524-527. ISSN 0304-8853

Berge, P. ten and Lodder, J.C. and Plößl, R. and Chapmann, J.N. (1993) Magnetic Microstructure of sputtered Co-Cr films. Journal of Magnetism and Magnetic Materials, 120 (1-3). pp. 362-365. ISSN 0304-8853

Hayashi, M. and Katayama, T. and Suzuki, Y. and Taninaka, M. and Thiaville, A. and Geerts, W. (1993) Magneto-optical Kerr rotation spectra in Fe ultrathin film on noble metals. Journal of Magnetism and Magnetic Materials, 126 (1-3). pp. 547-549. ISSN 0304-8853

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA (pp. pp. 171-176).

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief. In: 4th Workshop on Micromachining, Micromechanics and Microsystems, MME '93, September 7-8, 1993, Neuchatel, Switzerland (pp. pp. 223-227).

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M. (1993) Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief. Journal of Micromechanics and Microengineering, 3 (4). pp. 243-246. ISSN 0960-1317

Miyake, Ryo and Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Micro mixer with fast diffusion. In: Micro Electro Mechanical Systems, MEMS '93: 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', Februari 7-10, 1993, Fort Lauderdale, FL, USA (pp. pp. 248-253).

Lammerink, Theo S.J. and Tas, Niels R. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Micro-liquid flow sensor. Sensors and Actuators A: Physical, 37-38 . pp. 45-50. ISSN 0924-4247

Elwenspoek, M.C. (1993) Microelectromechanical systems (MEMS). Sensornieuws (2:2). pp. 2-9. ISSN 13863002

Kranenburg, Herma van and Lodder, Cock and Popma, Theo J.A. (1993) Morphology and texture of co-evaporated Co-Cr films. Journal of Magnetism and Magnetic Materials, 120 (1-3). pp. 353-356. ISSN 0304-8853

Lodder, J.C. and Kranenburg, H. van and Takei, K. and Maeda, Y. (1993) NMR measurements on obliquely evaporated Co-Cr films. Journal of Magnetism and Magnetic Materials, 118 (1-2). pp. 248-262. ISSN 0304-8853

Frederikze, H. and Haan, P. de and Lodder, J.C. and Rekveldt, M.Th. (1993) Neutron reflectometry on Co-Cr layers. Journal of Magnetism and Magnetic Materials, 120 (1-3). pp. 369-371. ISSN 0304-8853

Hoekstra, H.J.W.M. and Krijnen, G.J.M. and Lambeck, P.V. (1993) New formulation of the beam propagation method based on the slowly varying envelope approximation. Optics Communications, 97 (5-6). pp. 301-303. ISSN 0030-4018

Elwenspoek, M. (1993) On the mechanism of anisotropic etching of silicon. Journal of the Electrochemical Society, 140 (7). pp. 2075-2080. ISSN 00134651

Spiering, Vincent L. and Bouwstra, Siebe and Spiering, Ruud M.E.J. (1993) On-chip decoupling zone for package-stress reduction. Sensors and Actuators A: Physical, 39 (2). pp. 149-157. ISSN 0924-4247

Spiering, V.L. and Burger, J.F. and Elwenspoek, M.C. and Bouwstra, S. (1993) Package stress reduction and low initial stress thanks to deep corrugations. In: 7th International Conference on Solid State, Sensors and Actuators, Transducers '93, June 7-10, 1993, Yokohama, Japan (pp. pp. 44-45).

Lindberg, Ulf and Soderkvist, Jan and Lammerink, Theo and Elwenspoek, Miko (1993) Quasi-buckling of micromachined beams. Journal of Micromechanics and Microengineering, 3 (4). pp. 183-186. ISSN 0960-1317

Tilmans, H.A.C. and Elwenspoek, M.C. (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. In: 4th Workshop on Micromachining, Micromechanics and Microsystems (MME '93) (pp. pp. 133-137).

Tilmans, Harrie A.C. and Elwenspoek, Miko (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. Journal of Micromechanics and Microengineering, 3 (4). pp. 193-197. ISSN 0960-1317

Spiering, V.L. and Bouwstra, S. and Fluitman, J.H.J. (1993) Realization of mechanical decoupling zones for package-stress reduction. Sensors and Actuators A: Physical, 37-38 . pp. 800-804. ISSN 0924-4247

Holsheimer, J. and Tas, N.R. and He, J. and Boer, J.A. den and Struijk, J.J. and Hoekema, R. and Barolat, G. and Rozeboom, A.R. (1993) Relationship between perception threshold and thickness of the dorsal csf-layer in epidural spinal cord stimulation. In: 15th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, 1993, October 28-31, 1993, San Diego, CA (pp. pp. 1202-1203).

Samwel, E.O. and Bissell, P.R. and Lodder, J.C. (1993) Remanent Magnetic Measurements on Perpendicular Recording Materials with Compensation for Demagnetizing Fields. Journal of Applied Physics, 73 (3). pp. 1353-1359. ISSN 0021-8979

Wijers, C.M.J. and Rasing, Th. and Hollering, R.W.J. (1993) Second harmonic generation from thin slabs in the discrete dipole approach. Solid State Communications, 85 (3). pp. 233-237. ISSN 0038-1098

Kooten, M. van and Haan, S. de and Lodder, J.C. and Lyberatos, A. and Chantrell, R.W. and Miles, J.J. (1993) Simulations of the magnetization reversal of clustered Co-Cr particles. Journal of Magnetism and Magnetic Materials, 120 (1-3). pp. 145-148. ISSN 0304-8853

Bouwstra, Siebe and Rooijen, Jeroen van and Tilmans, Harrie A.C. and Selvakumar, Arjun and Najafi, Khahl (1993) Thermal base drive for micromechanical resonators employing deep-diffusion bases. Sensors and Actuators A: Physical, 37-38 . pp. 38-44. ISSN 0924-4247

Lodder, J.C. and Haan, P. de and Kranenburg, H. van (1993) ‘Giant’ magnetoresistance in obliquely co-evaporated Co-Ag films. Journal of Magnetism and Magnetic Materials, 128 (1-2). pp. 219-228. ISSN 0304-8853

1992

Müller-Pfeiffer, S. and Kranenburg, H. van and Lodder, J.C. (1992) A two-dimensional Monte Carlo model for thin film growth by oblique evaporation: simulation of two-component systems for the example of Co-Cr. Thin Solid Films, 213 (1). pp. 143-153. ISSN 0040-6090

Elwenspoek, M. and Smith, L. and Hok, B. (1992) Active joints for microrobot limbs. Journal of Micromechanics and Microengineering, 2 (3). pp. 221-223. ISSN 0960-1317

Blom, F.R. and Bouwstra, S. and Elwenspoek, M. and Fluitman, J.H.J. (1992) Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. Journal of Vacuum Science and Technology B: Microelectronics, processing and phenomena, 10 (1). pp. 19-26. ISSN 0734-211X

Hoekstra, H.J.W.M. and Krijnen, G.J.M. and Lambeck, P.V. (1992) Efficient interface conditions for the finite difference beam propagation method. Journal of Lightwave Technology, 10 (10). pp. 1352-1355. ISSN 0733-8724

Mullem, C.J. van and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators the resonant silicon beam force sensor. Sensors and Actuators A: Physical, 31 (1-3). pp. 168-173. ISSN 0924-4247

Aitlamine, H. and Abelmann, L. and Puchalska, I.B. (1992) Induced Anisotropies in NiCo Obliquely Deposited Films and Their effect on Magnetic Domains. Journal of Applied Physics, 71 (1). pp. 353-361. ISSN 0021-8979

Samwel, E.O. and Bissell, P.R. and Lodder, J.C. (1992) Internal field corrections in perpendicular columnar structured Alumite films. Journal of Magnetism and Magnetic Materials, 115 (2-3). pp. 327-332. ISSN 0304-8853

Lintelo, J.G.Th. te and Lodder, J.C. and Engemann, J. and Popma, Th.J.A. (1992) Investigation on Co-Cr micro-strips for VBLM. Journal of Magnetism and Magnetic Materials, 115 (2-3). pp. 333-341. ISSN 0304-8853

Haan, P. de and Meng, Q. and Katayama, T. and Lodder, J.C. (1992) Magnetic and magneto-optical properties of sputtered Co/Pd multilayers. Journal of Magnetism and Magnetic Materials, 113 (1-3). pp. 29-35. ISSN 0304-8853

Geerts, Wilhelmus Johannes Maria Arnoldu (1992) Magnetization distribution at the surface of Co-Cr films:magneto-optical, chemical and structural characterization. thesis.

Katayama, T. and Sugimoto, T. and Suzuki, Y. and Hashimoto, M. and Haan, P. de and Lodder, J.C. (1992) Magneto-optical Kerr rotation spectra in ordered and disordered plases of Fe-Pt alloy films. Journal of Magnetism and Magnetic Materials, 104-10 (2). pp. 1002-1004. ISSN 0304-8853

Tilmans, Harrie A.C. and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Micro resonant force gauges. Sensors and Actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247

Pan, G. and Mapps, D.J. and Akhter, M.A. and Lodder, J.C. and Berge, P. ten and Wong, H.Y. and Chapmann, J.N. (1992) Microstructure and magnetic properties of very thin CoCr films deposited on different underlayers by RF-sputtering. Journal of Magnetism and Magnetic Materials, 113 (1-3). pp. 21-28. ISSN 0304-8853

Hoekstra, H.J.W.M. and Krijnen, G.J.M. and Driessen, A. and Lambeck, P.V. and Popma, Th.J.A. (1992) Non-linear optics for transducers: principles and materials. Sensors and Actuators A: Physical, 34 (3). pp. 179-192. ISSN 0924-4247

Hoekstra, H.J.W.M. and Krijnen, G.J.M. and Lambeck, P.V. (1992) On the accuracy of the finite difference method for applications in beam propagating techniques. Optics Communications, 94 (6). pp. 506-508. ISSN 0030-4018

Groenland, J.P.J. and Eijkel, C.J.M. and Fluitman, J.H.J. and Ridder, R.M. de (1992) Permalloy thin-film magnetic sensors. Sensors and Actuators A: Physical, 30 (1-2). pp. 89-100. ISSN 0924-4247

Prak, Albert and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Selective Mode Excitation And Detection Of Micromachined Resonators. Journal of Microelectromechanical Systems, 1 (4). pp. 179-186. ISSN 1057-7157

Prak, Albert and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Selective mode excitation and detection of micromachined resonators. In: Micro Electro Mechanical Systems '92, MEMS, February 4-7, 1992, Travemuende, Germany (pp. pp. 220-225).

Krijnen, G.J.M. and Hoekstra, H.J.W.M. and Lambeck, P.V. and Popma, Th.J.A. (1992) Simple analytical description of performance of Y-junctions. Electronics Letters, 28 (22). pp. 2072-2074. ISSN 0013-5194

IJntema, Dominicus J. and Tilmans, Harrie A.C. (1992) Static and dynamic aspects of an air gap capacitor. Sensors and Actuators A: Physical, 35 (2). pp. 121-128. ISSN 0924-4247

Berge, Peter ten and Lodder, Cock and Porthun, Steffen and Popma, Theo (1992) Structural and magnetic characterization of very thin Co-Cr film. Journal of Magnetism and Magnetic Materials, 113 (1-3). pp. 36-46. ISSN 0304-8853

Geerts, W.J.M.A. and Lodder, J.C. and Popma, Th.J.A. (1992) Surface properties and stray fields of RF-sputtered CoCr films. Journal of Magnetism and Magnetic Materials, 104-10 (2). pp. 971-972. ISSN 0304-8853

Berge, Peter ten (1992) The effect of substrate materials on the structuraland magnetic properties of Co-Cr recording media. thesis.

Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Thermal actuation of clamped silicon microbeans. Sensors and Materials, 5 (3-4). pp. 217-238. ISSN 0914-4935

1991

Wiegerink, Remco J. (1991) A CMOS four-quadrant analog current multiplier. In: IEEE International Symposium on Circuits and Systems, ISCAS 1991, 11-14 June 1991, Singapore (pp. pp. 2244-2247).

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A Differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Eijk, Pieter D. van and Reglat, Muriel and Vassilief, Georges and Krijnen, Gijs J.M. and Driessen, Alfred and Mouthaan, Anton J. (1991) Analysis of the modal behavior of an antiguide diode laser array with Talbot filter. Journal of Lightwave Technology, 9 (5). pp. 629-634. ISSN 0733-8724

Simsova, J. and Kambersky, V. and Gemperle, R. and Lodder, J.C. and Geerts, W.J.M.A. and Otten, B. and Berge, P. ten (1991) Domain Structure of Co-Cr Films on Minor Loops. Journal of Magnetism and Magnetic Materials, 101 (1-3). pp. 196-198. ISSN 0304-8853

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1991) Frequency dependence of thermal excitation of micromechanical resonators. Sensors and Actuators A: Physical, 27 (1-3). pp. 685-689. ISSN 0924-4247

Mullem, C.J. van and Gabriel, K.J. and Fujita, H. (1991) Large Deflection Performance of Surface Micromachined Corrugated Diaphragms. In: International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, TRANSDUCERS, San Fransisco, USA, 1991 (pp. pp. 1014-1017).

Legtenberg, Rob and Bouwstra, Siebe and Elwenspoek, Miko (1991) Low temperature glass bonding for sensor applications using boron oxide thin films. Journal of Micromechanics and Microengineering, 1 (3). pp. 157-160. ISSN 0960-1317

Lyberatos, A. and Chantrell, R.W. and Sterringa, E.R. and Lodder, J.C. (1991) Magnetic Viscosity in Perpendicular Media. Journal of Applied Physics, 70 (8). pp. 4431-4438. ISSN 0021-8979

Zeper, Wouter Bastiaan (1991) Magneto-optical recording media based on Co/Pt multilayers. thesis.

Elwenspoek, M. (1991) Micromechanical resonant sensors. Journal A, 32 (3). pp. 15-22. ISSN 0771-1107

Hoekstra, H.J.W.M. and Krijnen, G.J.M. and Driessen, A. and Lambeck, P.V. and Popma, Th.J.A. (1991) Nonlinear optics for transducers: principles and materials. In: International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991, 24-27 June1991, San Fransisco, CA, USA (pp. pp. 711-718).

Bouwstra, Siebe and Geijselaers, Bert (1991) On the Resonance Frequencies of Microbridges. In: International Conference on Solid-State Sensors and Actuators, TRANSDUCERS, 24-27 June1991, San Fransisco, USA (pp. pp. 538-542).

Spiering, V.L. and Bouwstra, S. and Spiering, R.M.E.J. and Elwenspoek, M.C. (1991) On-chip Decoupling Zone For Package-Stress Reduction. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA (pp. pp. 982-985).

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J. (1991) Optical Excitation of Micro-Mechanical Resonators. In: IEEE Micro Electro Mechanical Systems, MEMS 1991: 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots', 30 January 1991 - 2 February 1991, Nara, Japan (pp. pp. 160-165).

Mullem, C.J. van and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M. (1991) Piezoelectrically driven silicon beam force sensor. Sensors and Actuators A: Physical, 26 (1-3). pp. 379-383. ISSN 0924-4247

Prak, Albert and Blom, Frans R. and Elwenspoek, Miko and Lammerink, Theo S.J. (1991) Q-factor and Frequency Shift of Resonating Silicon Diaphragms in Air. Sensors and Actuators A: Physical, 27 (1-3). pp. 691-698. ISSN 0924-4247

Pol, F.C.M. van de and Blom, F.R. and Popma, Th.J.A. (1991) R.F. planar magnetron sputtered ZnO films I: structural properties. Thin Solid Films, 204 (2). pp. 349-364. ISSN 0040-6090

Blom, F.R. and Pol, F.C.M. van de and Bauhuis, G. and Popma, Th.J.A. (1991) R.F. planar magnetron sputtered ZnO films II: Electrical properties. Thin solid films, 204 (2). pp. 365-376. ISSN 0040-6090

Tilmans, Harrie A.C. and IJntema, Dominicus .J. and Fluitman, Jan H.J (1991) Single Element Excitation and Detection of (Micro-)Mechanical Resonators. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA (pp. pp. 533-537).

Masuda, T. and Geerts, W.J.M.A. and Lodder, J.C. (1991) Surface chemical state of sputtered Co-Cr films. Journal of Magnetism and Magnetic Materials, 95 (1). pp. 123-132. ISSN 0304-8853

Simšová, J. and Gemperle, R. and Lodder, J.C. (1991) The use of colloid-SEM method for domain observation in CoCrfilms. Journal of Magnetism and Magnetic Materials, 95 (1). pp. 85-94. ISSN 0304-8853

1990

Pol, F.C.M. van de and Elwenspoek, M.C. and Lammerink, T.S.J. and Fluitman, J.H.J. (1990) A micromechanical viewing screen: principle and feasibility. In: 5th Sensors & Actuators Symposium, November 15-16, 1990, Enschede, The Netherlands (pp. pp. 249-253).

Eijkel, C.J.M. and Branebjerg, J. and Elwenspoek, M. and Pol, F.C.M. van de (1990) A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structures. IEEE Electron Device Letters, 11 (12). pp. 588-589. ISSN 0741-3106

Pol, F.C.M. van de and Lintel, H.T.G. van and Elwenspoek, M. and Fluitman, J.H.J. (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors and Actuators A: Physical, 21 (1-3). pp. 198-202. ISSN 0924-4247

Geerts, W.J.M.A. and Lintelo, J.G.Th. te and Lodder, J.C. and Popma, Th.J.A. (1990) Anomalous Hc in CoCr-films: surface and bulk measurements. IEEE Transactions on Magnetics, 26 (1). pp. 36-38. ISSN 0018-9464

Masuda, T. and Geerts, W.J.M.A. and Henekamp, L.J. and Lodder, J.C. (1990) Chemical composition of sputtered CoCr for perpendicular recording. In: International Magnetics Conference, Digests of INTERMAG 1990, 17-20 Apr 1990, Brighton, UK (pp. FA-07).

Bernards, Johannes Petrus Cornelis and Schrauwen, Cornelis Petrus Gerardus (1990) Co-Cr layers for perpendicular magnetic recording. thesis.

Heijden, A.E.D.M. van der and Elwenspoek, M.C. (1990) Contact nucleation: in situ and ex situ observations of surface damaging. Journal of Crystal Growth, 100 (3). pp. 1087-1091. ISSN 0022-0248

Hamnes, P.C.A. and Krijnen, G.J.M. and Driessen, A. (1990) High effiency small-size planar hyperbolical lenses. Electronics Letters, 26 (14). pp. 1064-1066. ISSN 0013-5194

Bouwstra, Siebe and Weerd, Eddy de and Elwenspoek, Miko (1990) In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators. Sensors and Actuators A: Physical, 24 (3). pp. 227-235. ISSN 0924-4247

Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1990) Low-temperature glass bonding for sensor applications. In: Micro Mechanics Europe Conference, MME, November 26-27, 1990, Berlin, Germany (pp. pp. 87-92).

Kranenburg, H. van and Lodder, J.C. and Toth, L. and Popma, Th.J.A. and Maeda, Y. (1990) Microstructure of co-evaporated CoCr films with perpendicular anisotropy. IEEE Transactions on Magnetics, 26 (5). pp. 1620-1622. ISSN 0018-9464

Vogels, L.J.P. and Marsman, H.A.M. and Verheijen, M.A. and Bennema, P. and Elwenspoek, M. (1990) On the growth of ammonium nitrate(III) crystals. Journal of Crystal Growth, 100 (3). pp. 439-446. ISSN 0022-0248

Suskia, J. and Largeaua, D. and Steyer, A. and Pol, F.C.M. van de and Blom, F.R. (1990) Optically activated ZnO/Sio2/Si cantilever beams. Sensors and Actuators A: Physical, 24 (3). pp. 221-225. ISSN 0924-4247

Eijkel, Kees J.M. and Fluitman, Jan H.J (1990) Optimization of the response of magnetoresistive elements. IEEE Transactions on Magnetics, 26 (1). pp. 311-321. ISSN 0018-9464

Korf, S.J. and Roos, J.A. and Derksen, J.W.H.C. and Vreeman, J.A. and Ommen, J.G. van and Ross, J.R.H. (1990) Oxidative coupling of methane over Ba/CaO catalysts: a comparison with Li/MgO. Applied Catalysis, 59 (1). pp. 291-309. ISSN 0166-9834

Lammerink, T.S.J. and Elwenspoek, M. and Ouwerkerk, R.H. van and Bouwstra, S. and Fluitman, J.H.J. (1990) Performance of thermally excited resonators. Sensors and Actuators A: Physical, 21 (1-3). pp. 352-356. ISSN 0924-4247

Bouwstra, Siebe and Legtenberg, Rob and Tilmans, Harrie A.C. and Elwenspoek, Miko (1990) Resonating microbridge mass flow sensor. Sensors and Actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247

Zhang, Ning and Lodder, J.C. (1990) Structural and magnetic properties of CoCr ribbons. Journal of Magnetism and Magnetic Materials, 89 . pp. 284-298. ISSN 0304-8853

Li, Cheng-Zhang and Lodder, J.C. (1990) The influence of the packing density on the magnetic behaviour of alumite media. Journal of Magnetism and Magnetic Materials, 88 . pp. 236-246. ISSN 0304-8853

Blom, F.R. and IJntema, D.J. and Pol, F.C.M. van de and Elwenspoek, M. and Fluitman, J.H.J. and Popma, Th.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and Actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247

Groenland, Johannes Petrus Jacobus (1990) Thin-film magnetoresistive absolute position detector. thesis.

1989

Pol, F.C.M. van de and Wonnink, D.G.J. and Elwenspoek, M. and Fluitman, J.H.J. (1989) A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices. Sensors and Actuators, 17 (1-2). pp. 139-143. ISSN 0250-6874

Bouwstra, S. and Blom, F.R. and Lammerink, T.S.J. and Yntema, H. and Schrap, P. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Excitation and detection of vibrations of micromechanical structures using a dielectric thin film. Sensors and Actuators, 17 (1-2). pp. 219-223. ISSN 0250-6874

Stam, Maria Theresia Helena Clasina Wilhelmina (1989) Ferromagnetic resonance studies and magnetization curvesof Co-Cr and Co-Cr/Ni-Fe thin films. thesis.

Admon, U. and Dariel, M.P. and Grunbaum, E. and Lodder, J.C. (1989) Irreversible magnetization reversal in some Co-based alloy thin films. Journal of Applied Physics, 66 (1). pp. 316-319. ISSN 0021-8979

Wiegerink, Remco J. and Seevinck, Evert and Jager, Wim de (1989) Offset cancelling circuit. IEEE Journal of Solid-State Circuits, 24 (3). pp. 651-658. ISSN 0018-9200

Blom, F.R. and Bouwstra, S. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Resonating silicon beam force sensor. Sensors and Actuators, 17 (3-4). pp. 513-519. ISSN 0250-6874

Heijden, A.E.D.M. van der and Elwenspoek, M. and Eerden, J.P. van der (1989) Size distribution of embryos produced by crystal-rod contacts. Journal of Crystal Growth, 98 (3). pp. 398-410. ISSN 0022-0248

Bouwstra, Siebe and Kemna, Paul and Legtenberg, Rob (1989) Thermally Excited Resonating Membrane Mass Flow Sensor. Sensors and Actuators, 20 (3). pp. 213-223. ISSN 0250-6874

Elwenspoek, M. and Blom, F.R. and Bouwstra, S. and Lammerink, T.S.J. and Pol, F.C.M. van de and Tilmans, H.A.C. and Popma, Th.J.A. and Fluitman, J.H.J. (1989) Transduction mechanisms and their applications in micromechanical devices. In: IEEE Micro Electro Mechanical Systems, MEMS, 20-22 Feb. 1989 , Salt Lake City, UT (pp. pp. 126-132).

1988

Pronk, F.A. and Lodder, J.C. (1988) Co-evaporation of Co-Cr at intermediate oblique incidence. IEEE transactions on Magnetics, 24 (2, par). pp. 1744-1746. ISSN 0018-9464

Krijnen, G. and Luitjens, S.B. and Bie, R.W. de and Lodder, J.C. (1988) Correlation between anisotropy direction and pulse shape for metal evaporated tape. IEEE transactions on Magnetics, 24 (2, par). pp. 1817-1819. ISSN 0018-9464

Simšová, J. and Lodder, J.C. and Kaczér,, J. and Gemperle, R. and Jurek, K. and Tomáš, I. (1988) Domain observation of a CoCr film by the colloid-sem method. Journal of Magnetism and Magnetic Materials, 73 (2). pp. 131-135. ISSN 0304-8853

Maatman, D. and Gruisinga, W. and Lambeck, P.V. and Popma, Th.J.A. (1988) Production of thin luminescent films by Chemical Aerosol Deposition Technology (CADT). Journal of Aerosol Science, 19 (7). pp. 1369-1372. ISSN 0021-8502

Ruigrok, Jacobus Josephus Maria (1988) Theoretical and experimental investigations on short-wavelengthrecording. thesis.

1987

Lodder, J.C. and Wind, D. and Popma, Th.J.A. and Hubert, A. (1987) Domain studies of CoCr with perpendicular anisotropy. IEEE Transactions on Magnetics, 23 (5). pp. 2055-2057. ISSN 0018-9464

Lodder, J.C. and Wind, D. and Dorssen, G. and Popma, Th.J.A. and Hubert, A. (1987) Domains and magnetic reversals in CoCr. IEEE Transactions on Magnetics, 23 (1). pp. 214-216. ISSN 0018-9464

Admon, U. and Dariel, M.P. and Grunbaum, E. and Lodder, J.C. (1987) Magnetic properties of electrodeposited Co-W thin films. Journal of Applied Physics, 62 (5). pp. 1943-1947. ISSN 0021-8979

1986

Vos, M.J. and Luitjens, S.B. and Bie, R.W. de and Lodder, J.C. (1986) Magnetization transitions obtained by deconvolution of measured replay pulses in perpendicular magnetic recording. IEEE Transactions on Magnetics, 22 (5). pp. 373-375. ISSN 0018-9464

Pronk, F.A. and Groenland, J.P.J. and Lammerink, T.S.J. (1986) Simulation model for a silicon Hall sensor in an absolute digital position detection system. Solid-State Electronics, 29 (5). pp. 579-584. ISSN 0038-1101

1984

Elwenspoek, M. and Brinkmann, R. and Hartrott, M. von and Kiehl, M. and Maxim, P. and Paulick, C.A. and Willeke, F. and Quitmann, D. (1984) Association in strongly interacting liquid binary alloys and nuclear spin relaxation. Journal of Non-Crystalline Solids, 61-62 (1). pp. 153-156. ISSN 0022-3093

Groenland, J.P.J. (1984) Magnetoresistive sensor for absolute position detection. In: Sensors & Actuators, 1-2 Nov 1984, Enschede (pp. pp. 67-72).

Groenland, J.P.J. (1984) Magnetoresistive transducer for absolute position detection. IEEE Transactions on Magnetics, 20 (5). pp. 969-971. ISSN 0018-9464

Lammerink, T.S.J. and Fluitman, J.H.J. (1984) Measuring method for optical fibre sensors. Journal of Physics E: Scientific Instruments, 17 (12). p. 1127. ISSN 0022-3735

Elwenspoek, M. and Bennema, P. (1984) Physical models for secondary nucleation. In: Industrial crystallization 84 : proceedings of the 9th Symposium on industrial crystallization, The Hague, The Netherlands, September 25-28, 1984. Elsevier, The Hague, The Netherlands, pp. 267-269. ISBN 9780444424068

Hemmes, K. and Lodder, J.C. and Rekveldt, M.Th. and Kraan, W.H. (1984) The magnetic domain structure of CoCr layers studied by neutron depolarisation: letter to the editor. Journal of Physics D: Applied Physics, 17 (10). L157-L162. ISSN 0022-3727

1983

Elwenspoek, M. and Brinkmann, R. and Maxim, P. and Paulick, C. and Quitmann, D. (1983) Nuclear quadrupolar spin relaxation and association in binary liquid metallic alloys. Berichte der Bunsen-Gesellschaft für Physikalische Chemie, 87 (9). pp. 823-826. ISSN 0005-9021

1981

Fluitman, Jan H. (1981) Applicability of the planar Hall effect. Journal of Applied Physics, 52 . pp. 2468-2470. ISSN 0021-8979

Fluitman, J.H.J. and Groenland, J.P.J. (1981) Comparison of a shielded "One-sided" planar hall-transducer with an MR-head. IEEE Transactions on Magnetics, 17 (6). pp. 2893-2895. ISSN 0018-9464

Druyvesteyn, W.F. and Raemaekers, E.L.M. and Verhaar, R.D.J. and Wilde, J. de and Fluitman, J.H.J. and Groenland, J.P.J. (1981) Magnetic behaviour of narrow track thin-film heads. Journal of Applied Physics, 52 (3). pp. 2462-2464. ISSN 0021-8979

Groenland, J.P.J. and Fluitman, J.H.J. (1981) Measurement system for two-dimensional magnetic field distributions, applied to the investigation of recording head fields. Journal of Physics E: Scientific Instruments, 14 (4). p. 503. ISSN 0022-3735

Boroske, E. and Elwenspoek, M. and Helfrich, W. (1981) Osmotic shrinkage of giant egg-lecithin vesicles. Biophysical Journal, 34 (1). pp. 95-109. ISSN 0006-3495

Groenland, J.P.J. (1981) Visuele informatie-overdracht tussen 'mens' en 'machine'. De Ingenieur, 1998 (41). pp. 6-10. ISSN 0020-1146

1980

Fluitman, J.H.J. (1980) Hall-effect device with both voltage leads on one side of the conductor. Journal of Physics E: Scientific Instruments, 13 (7). p. 783. ISSN 0022-3735

Wielinga, T. and Gruisinga, W. and Leeuwis, H. and Lodder, J.C. and Weers, J.F. van and Wilmans, J.C. (1980) Rate control in dual source evaporation. Journal of Physics E: Scientific Instruments, 13 (2). p. 170. ISSN 0022-3735

1979

Fluitman, J.H.J. and Groenland, J.P.J. (1979) Investigation of the structure of recording head fields. IEEE Transactions on Magnetics, 15 (6). pp. 1634-1636. ISSN 0018-9464

1978

Fluitman, J.H.J. (1978) Recording head field measurement with a magnetoresistive transducer. IEEE Transactions on Magnetics, 14 (5). pp. 433-435. ISSN 0018-9464

Jansen, H.V. and Fluitman, J.H.J. and Wesseling, P. (1978) Some problems concerning the accuracy and efficiency of self- consistent iterative calculations in magnetic recording. IEEE transactions on magnetics, MAG-14 . pp. 1141-1148. ISSN 0018-9464

1973

Lodder, J.C. and Berg, K.G. van den (1973) A method for accurately determining lattice parameters using electron diffraction in a commercial electron microscope. Journal of Microscopy, 100 . pp. 93-98. ISSN 0022-2720

Fluitman, J.H.J. (1973) The influence of sample geometry on the magnetoresistance of Ni- Fe films. Thin Solid Films, 16 (3). pp. 269-276. ISSN 0040-6090

1972

Hulscher, W.S. and Berg, K.G. van den and Lodder, J.C. (1972) Manganese ferrite thin films Part I: Preparation and structure. Thin Solid Films, 9 (3). pp. 363-375. ISSN 0040-6090

This list was generated on Sun Sep 21 06:10:19 2014 CEST.