Research Group: Semiconductor Components (SC)

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Number of items: 504.

2014

Van Bui, H. and Wiggers, F.B. and Jong, M.P. de and Kovalgin, A.Y. (2014) An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer. In: International Conference on Microelectronic Test Structures, ICMTS 2014, 24-27 March 2014, Udine, Italy (pp. pp. 53-57).

Kazmi, Syed Naveed Riaz (2014) Capacitively transduced polycrystalline GeSi MEM resonators. thesis.

Friedlein, R. and Fleurence, A. and Aoyagi, K. and Jong, M.P. de and Van Bui, H. and Wiggers, F.B. and Yoshimoto, S. and Koitaya, T. and Shimizu, S. and Noritake, H. and Mukai, K. and Yoshinobu, J. and Yamada-Takamura, Y. (2014) Core level excitations — A fingerprint of structural and electronic properties of epitaxial silicene. The journal of Chemical Physics, 140 (18). pp. 1-6. ISSN 0021-9606

Kovalgin, Alexey Y. and Van Bui, Hao and Schmitz, Jurriaan and Wolters, Rob A.M. (2014) Growth and properties of subnanometer thin titanium nitride films. In: Nano & Giga 2014, 10-14 March 2014, Phoenix, AZ, USA (pp. p. 1).

Van Bui, H. and Wiggers, F.B. and Aarnink, A.A.I. and Nguyen, M.D. and Jong, M.P. de and Kovalgin, A.Y. and Gupta, A.Y. (2014) Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AIN films. In: 14th International Conference on Atomic Layer Deposition, SLD 2014, 15-18 June 2014, Kyoto, Japan (pp. p. 113).

Friedlein, R. and Van Bui, H. and Wiggers, F.B. and Yamada-Takamura, Y. and Kovalgin, A.Y. and Jong, M.P. de (2014) Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules. Journal of chemical physics, 140 . pp. 2047051-2047054. ISSN 0021-9606

Schmitz, Jurriaan and Rangarajan, Balaji and Kovalgin, Alexey Yu (2014) Materials and integration schemes for above-IC integrated optics. In: 15th International Conference on Ultimate Integration on Silicon, ULIS 2014, 7-9 April 2014, Stockholm, Sweden (pp. pp. 153-156).

Van Bui, H. and Nguyen, M.D. and Wiggers, F.B. and Aarnink, A.A.I. and Jong, M.P. de and Kovalgin, A.Y. (2014) Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films. ECS journal of solid state science and technology, 3 (4). pp. 101-106. ISSN 2162-8769

Hajlasz, M. and Donkers, J.J.T.M. and Sque, S.J. and Heil, S.B.S. and Gravesteijn, D.J. and Rietveld, F.J.R. and Schmitz, J. (2014) Sheet resistance under Ohmic contacts to AlGaN/GaN heterostructures. Applied physics letters, 104 . p. 242109. ISSN 0003-6951

2013

Van Bui, Hao (2013) Atomic layer deposition of TiN films : growth and electrical behavior down to sub-nanometer scale. thesis.

Kaleli, Buket (2013) Characterization of strained silicon FinFETs and the integration of a piezoelectric layer. thesis.

Wang, J and Salm, Cora and Schmitz, Jurriaan (2013) Comparison of C-V measurement methods for RF-MEMS capacitive switches. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2013, 25-28 March, 2013, San Diego, CA, USA (pp. pp. 53-58).

Ferrara, A. and Steeneken, P.G. and Reimann, K. and Heringa, A. and Yan, L. and Boksteen, B.K. and Swanenberg, M. and Koops, G.E.J. and Scholten, A.J. and Surdeanu, R. and Schmitz, J. and Hueting, R.J.E. (2013) Comparison of electrical techniques for temperature evaluation in power MOS transistors. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2013, 25-28 March 2013, San Diego, CA, USA (pp. pp. 115-120).

Van Bui, Hao and Kovalgin, Alexey and Schmitz, Jurriaan and Wolters, Rob A.M. (2013) Conduction and electric field effect in ultra-thin TiN films. Applied physics letters, 103 (5). 051904. ISSN 0003-6951

Kazmi, S.N.R. and Salm, C. and Schmitz, J. (2013) Deep reactive ion etching of in situ boron doped LPCVD $Ge_{0.7}Si_{0.3}$ using $SF_6$ and $O_2$ plasma. Microelectronic engineering, 110 . pp. 311-314. ISSN 0167-9317

Rangarajan, Balaji and Kovalgin, Alexey Y. and Schmitz, Jurriaan (2013) Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C. Surface and coatings technology, 230 . pp. 46-50. ISSN 0257-8972

Boksteen, B.K. and Ferrara, A. and Heringa, A. and Steeneken, P.G. and Koops, G.E.J. and Hueting, R.J.E. (2013) Design optimization of field-plate assisted RESURF devices. In: 25th International Symposium on Power Semiconductor Devices & ICs, ISPSD 2013, 26-30 May 2013, Kanazawa, Japan (pp. pp. 237-240).

Koppert, W.J.C. and Bakel, N. van and Bilevych, Y. and Colas, P. and Desch, K. and Fransen, M. and Graaf, H. van der and Hartjes, F. and Hessey, N.P. and Kaminski, J. and Schmitz, J. and Schön, R. and Zappon, F. (2013) GridPix detectors: production and beam test results. Nuclear instruments and methods in physics research. Section A: Accelerators, spectrometers, detectors and associated equipment, 732 . pp. 245-249. ISSN 0168-9002

Van Bui, H. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. (2013) Hot-Wire generated atomic hydrogen and its impact on thermal ALD in $TiCl_4/NH_3$ system. ECS journal of solid state science and technology, 2 (4). pp. 149-155. ISSN 2162-8777

Van Bui, H. and Aarnink, A.A.I. and Jong, M.P. de and Kovalgin, A.Y. (2013) In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films. NEVAC Blad, 51 (3). pp. 24-31. ISSN 0169-9431

Rangarajan, B. and Kovalgin, A.Y. and Wörhoff, K. and Schmitz, J. (2013) Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics. Optics letters, 38 (6). pp. 941-943. ISSN 0146-9592

Rangarajan, Balaji (2013) Materials for monolithic integration of optical functions on CMOS. thesis.

Schmitz, Jurriaan (2013) Microchip post-processing: There is plenty of room at the top. In: Future trends in microelectronics: frontiers and innovation. Future trends in microelectronics, 7 . John Wiley & Sons, Inc., Hoboken, NJ, pp. 110-119. ISBN 9781118442166

Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2013) On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films. Applied surface science, 269 . pp. 45-49. ISSN 0169-4332

Hemert, Tom van and Hueting, Raymond J.E. (2013) Piezoelectric strain modulation in FETs. IEEE transactions on electron devices, 60 . pp. 3265-3270. ISSN 0018-9383

Piccolo, G. and Sammak, A. and Hueting, R.J.E. and Schmitz, J. and Nanver, L.K. (2013) Role of junction depth in light emission from silicon p-i-n LEDs. In: 43rd European Solid-State Device Research Conference, ESSDERC 2013, 16-20 September 2013, Bucharest, Romania (pp. pp. 119-122).

Kovalgin, Alexey Y. and Aarnink, Antonius A.I. (2013) Semiconductor processing apparatus with compact free radical source. Patent.

Spruijtenburg, Paul C. and Ridderbos, Joost and Mueller, Filipp and Leenstra, Anne W. and Brauns, M and Aarnink, Antonius A.I. and Wiel, Wilfred G. van der and Zwanenburg, Floris A. (2013) Single-hole tunneling through a two-dimensional hole gas in intrinsic silicon. Applied physics letters, 102 (19). p. 192105. ISSN 0003-6951

Hemert, T. van and Kaleli, B. and Hueting, R.J.E. and Esseni, D. and Dal, M.J.H. van and Schmitz, J. (2013) Strain and conduction-band offset in narrow n-type finFETs. IEEE transactions on electron devices, 60 (3). pp. 1005-1010. ISSN 0018-9383

Kaleli, B. and Hemert, T. van and Hueting, R.J.E. and Wolters, R.A.M. (2013) Strain characterization of FinFETs using Raman spectroscopy. Thin solid films, 541 . pp. 57-61. ISSN 0040-6090

Hemert, Tom van (2013) Tailoring strain in microelectronic devices. thesis.

Graaf, H. van der and Aarnink, A.A.I. and Aarts, A. and Bakel, N. van and Berbee, E. and Berkien, A. and Beuzekom, M. van and Bosma, M. and Campbell, M. and Chefdeville, M.A. and Colas, P. and Colijn, A.-P. and Fomaini, A. and Fransen, M. and Giganon, A. and Giomataris, I. and Gotink, W. and Groot, N. de and Hartjes, F. and van der Heijden, B. and Hessey, N. and Jansweijer, P. and Konig, A. and Koppert, W. and Llopart, X. and Nooij, L. de and Putten, S. van der and Rövekamp, J. and Salm, C. and San Segundo Bello, D. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Verkooijen, H. and Visschers, J. and Visser, J. and Wijnen, T. and Wyrsch, N. (2013) The gridpix detector: history and perspective. Modern Physics Letters A, 28 (28-13). pp. 13400211-13400217. ISSN 0217-7323

Ferrara, A. and Steeneken, P.G. and Heringa, A. and Boksteen, B.K. and Swanenberg, M. and Scholten, A.J. and Dijk, L. van and Schmitz, J. and Hueting, R.J.E. (2013) The safe operating volume as a general measure for the operating limits of LDMOS transistors. In: International Electron Devices Meeting, IEDM 2013, 9-11 December 2013, Washington, DC, USA (pp. 6.7.1-6.7.4).

2012

Hemert, Tom van and Hueting, R.J.E. (2012) Active strain modulation in field effect devices. In: European Solid-State Device Research Conference, ESSDERC 2012, 17-21 September 2012, Bordeaux, France (pp. pp. 125-128).

Kovalgin, Alexey Y. and Tiggelman, Natalie and Wolters, Rob A.M. (2012) An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance. IEEE Transactions on Electron Devices, 59 (2). 426-432 . ISSN 0018-9383

Kazmi, Syed Naveed Riaz and Aarnink, Tom and Salm, Cora and Schmitz, Jurriaan (2012) CMOS-MEMS Post Processing Compatible Capacitively Transduced GeSi Resonators. In: Proceedings of 2012 IEEE International Frequency Control Symposium (IFCS) , 21-24 May 2012, Baltimore, USA (pp. pp. 1-4).

Hemert, Tom van and Reimann, Klaus and Hueting, Raymond J.E. (2012) Extraction of second order piezoelectric parameters in bulk acoustic wave resonators. Applied physics letters, 100 (23). p. 232901. ISSN 0003-6951

Boksteen, B.K. and Dhar, S. and Heringa, A. and Koops, G.E.J. and Hueting, R.J.E. (2012) Extraction of the electric field in field plate assisted RESURF devices. In: 24th International Symposium on Power Semiconductor Devices and ICs, ISPSD 2012, 3-7 June 2012, Bruges, Belgium (pp. pp. 145-148).

Herfst, Rodolf W. and Steeneken, Peter G. and Tiggelman, Mark P.J. and Stulemeijer, Jiri and Schmitz, Jurriaan (2012) Fast RF-CV characterization through High-Speed 1-port S-Parameter measurements. IEEE Transactions on Semiconductor Manufacturing, 25 (3). pp. 310-316. ISSN 0894-6507

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2012) Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE Transactions on Semiconductor Manufacturing, 25 (2). pp. 1-24. ISSN 0894-6507

Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2012) Growth of sub-nanometer thin continuous TiN films by atomic layer deposition. ECS journal of solid state science and technology, 1 (6). pp. 285-290. ISSN 2162-8777

Rangarajan, B. and Kovalgin, A.Y. and Oesterlin, P. and Kloe, R. de and Brunets, I. and Schmitz, J. (2012) Laterally confined large-grained Poly-GeSi films: crystallization and dopant activation using green laser. ECS journal of solid state science and technology, 1 (6). pp. 263-268. ISSN 2162-8777

Kazmi, S.N.R. and Kovalgin, A.Y. and Aarnink, A.A.I. and Salm, C. and Schmitz, J. (2012) Low-stress highly-conductive in-situ boron doped Ge$_{0.7}$Si$_{0.3}$ films by LPCVD. ECS journal of solid state science and technology, 1 (5). P222-P226. ISSN 2162-8777

Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2012) Nanoscale carrier injectors for high luminescence Si-based LEDs. Solid-state electronics, 74 (Special Issue). pp. 43-48. ISSN 0038-1101

Faber, Erik J. and Wolters, Rob A.M. and Schmitz, Jurriaan (2012) Novel test structures for dedicated temperature budget determination. IEEE Transactions on Semiconductor Manufacturing, 25 (3). pp. 339-345. ISSN 0894-6507

Boksteen, B.K. and Dhar, S. and Ferrara, A. and Heringa, A. and Hueting, R.J.E. and Koops, G.E.J. and Salm, C. and Schmitz, J. (2012) On the degradation of field-plate assisted RESURF power devices. In: IEEE International Electron Devices Meeting, IEDM 2012 , 10-13 December 2012, San Francisco, CA, USA (pp. pp. 311-314).

Puliyankot, Vidhu and Hueting, Raymond J.E. (2012) One-Dimensional Physical Model to Predict the Internal Quantum Efficiency of Si-Based LEDs. IEEE Transactions on Electron Devices, 59 (1). pp. 26-34. ISSN 0018-9383

Van Bui, Hao and Wolters, Rob A.M. and Kovalgin, Alexey Y. (2012) TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness. In: Proceedings of the International Conference on Anvanced Materials and Nanotechnology (ICAMN 2012), 13-14 Dec 2012, Hanoi, Vietnam (pp. pp. 7-12).

2011

Blanco Carballo, V.M. and Fransen, M. and Graaf, H. van der and Lu, J. and Schmitz, J. (2011) A CMOS compatible Microbulk Micromegas-like detector using silicon oxide as spacer material. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 629 (1). pp. 118-122. ISSN 0168-9002

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2011) A Difference in Using Atomic Layer Deposition or Physical Vapour Deposition TiN as Electrode Material in Metal-Insulator-Metal and Metal-Insulator-Silicon Capacitors. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8368-8373. ISSN 1533-4880

Rangarajan, Balaji and Brunets, Ihor and Oesterlin, Peter and Kovalgin, Alexey and Schmitz, Jurriaan (2011) Characterization of Green Laser Crystallized GeSi Thin Films. In: 2011 MRS Spring Meeting, 25-29 April 2011, San Francisco, CA, USA (pp. a06-04).

Roy, Deepu (2011) Characterization of electrical contacts for phase change memory cells. thesis.

Koppert, W.J.C. and Fransen, M. and Bakel, N. van and Graaf, H. van der and Hartjes, F. and Timmermans, J. and Visser, J. and Kluit, R. and Gromov, V. and Zappon, F. and Blanco Carballo, V. and Schmitz, J. and Bilevych, Y. (2011) Charge protection characterisation and drift time resolution improvement for GridPix. In: IEEE Nuclear Science Symposium and Medical Imaging Conference, NSS/MIC 2011, 23-29 October 2011, Valencia, Spain (pp. pp. 1799-1802).

Roy, Deepu and Pijper, Ralf M.T. and Tiemeijer, Luuk F. and Wolters, Rob A.M. (2011) Contact resistance measurement structures for high frequencies. In: 24th International Conference on Microelectronic Test Structures, ICMTS, 4-7 April 2011, Amsterdam, the Netherlands (pp. pp. 49-54).

Roy, Deepu and Klootwijk, Johan H. and Gravesteijn, Dirk J. and Wolters, Rob A.M. (2011) Contact resistance of TiW to ultra-thin phase change material layers. In: 41st European Solid-State Device Research Conference, ESSDERC 2011, 12-16 September 2011, Helsinki, Finland (pp. pp. 87-90).

Roy, Deepu and Zandt, Micha A.A. in 't and Wolters, Rob A.M. (2011) Electrical characterization of Thin-Film structures with redeposited sidewall. IEEE Transactions on Electron Devices, 58 (4). pp. 924-930. ISSN 0018-9383

Jose, S. and Hueting, R.J.E. (2011) Experimental investigation of dual wave optimized reflector stacks in solidly mounted resonators. In: IEEE International Ultrasonics Symposium, IUS 2011, 18-21 October 2011, Orlando, FL, USA (pp. pp. 1234-1237).

Hemert, T. van and Sakriotis, D. and Hueting, R.J.E. and Schmitz, J. (2011) Exploring capacitance-voltage measurements to find the piezoelectric coefficient of aluminum nitride. In: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 4-7 April 2011, Amsterdam, the Netherlands (pp. pp. 69-73).

Hemert, T. van and Kaleli, B. and Hueting, R.J.E. and Esseni, D. and Dal, M.J.H. van and Schmitz, J. (2011) Extracting the Conduction Band Offset in Strained FinFETs from Subthreshold-Current Measurements. In: 41st European Solid-State Device Research Conference, ESSDERC 2011, 12-16 September 2011, Helsinki, Finland (pp. pp. 275-278).

Faber, Erik J. and Wolters, Rob A.M. and Schmitz, Jurriaan (2011) Gap-closing test structures for temperature budget determination. In: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 4-7 April 2011, Amsterdam, the Netherlands (pp. pp. 165-169).

Steen, Jan-Laurens Pieter Jacobus van der (2011) Geometrical scaling effects on carrier transport in ultrathin-body MOSFETs. thesis.

Rangarajan, Balaji and Brunets, Ihor and Oesterlin, Peter (2011) Green Laser Crystallization of GeSi Thin Films and Dopant Activation. ECS Transactions, 35 (2). pp. 17-25. ISSN 1938-5862

Van Bui, H. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 . pp. 214-220. ISSN 0013-4651

Puliyankot, V. and Piccolo, G. and Hueting, R.J.E. and Heringa, A. and Kovalgin, A. and Schmitz, J. (2011) Increased light emission by geometrical changes in Si LEDs. In: 8th International Conference on Group IV Photonics, GFP 2011, 14-16 September 2011, London, UK (pp. pp. 287-289).

Lu, Jiwu and Liu, Wei and Kovalgin, Alexey Y. and Sun, Yun and Schmitz, Jurriaan (2011) Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells. IEEE Transactions on Electron Devices, 58 (8). pp. 2620-2627. ISSN 0018-9383

Lu, Jiwu and Kovalgin, Alexey Y. and Werf, Karine H.M. van der and Schropp, Ruud E.I. and Schmitz, Jurriaan (2011) Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells. IEEE Transactions on Electron Devices, 58 (5). pp. 2014-2021. ISSN 0018-9383

Roy, Deepu and Wolters, Rob A.M. (2011) Interface Characterization of Metals and Metal-nitrides to Phase Change Materials. In: 2011 MRS Spring Meeting, 25-29 April 2011, San Francisco, CA, USA (pp. q03-02).

Andricciola, Pietro (2011) Interpretation of MOS transistor mismatch signature through statistical device simulations. thesis.

Piccolo, G. and Puliyankot, V. and Kovalgin, A.Y. and Hueting, R.J.E. and Heringa, A. and Schmitz, J. (2011) Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs. In: 41st European Solid-State Device Research Conference, ESSDERC 2011, 12-16 September 2011, Helsinki, Finland (pp. pp. 175-178).

Kazmi, S.N.R. and Aarnink, A.A.I. and Kovalgin, A.Y. and Salm, C. and Schmitz, J. (2011) Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS. ECS Transactions, 35 (30). pp. 45-52. ISSN 1938-5862

Lu, J. and Liu, W. and Kovalgin, A.Y. and Sun, Y. and Schmitz, J. (2011) Materials Characterization of CIGS solar cells on Top of CMOS chips. In: MRS Spring Meeting - Symposium E – Energy Harvesting, 25-29 April 2011, San Francisco, CA, USA (pp. e06-23).

Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) Measurement of reaction heats using a polysilicon-based microcalorimetric sensor. Sensors and Actuators A: Physical, 169 (2). pp. 308-316. ISSN 0924-4247

Andricciola, Pietro and Tuinhout, Hans and Wils, Nicole and Schmitz, Jurriaan (2011) Microsecond pulsed DC matching measurements on MOSFETs in strong and weak inversion. In: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 4-7 April 2011, Amsterdam, the Netherlands (pp. pp. 90-94).

Puliyankot, V. and Hueting, R.J.E. (2011) Modelling and optimisation of the internal quantum efficiency of Si-based LEDs. In: 11th International Conference on Numerical Simulation of Optoelectronic Devices, NUSOD 2011, 5-8 September 2011, Rome, Italy.

Groenland, A.W. and Kovalgin, A.Y. and Schmitz, J. and Wolters, R.A.M. (2011) Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators. ECS Transactions, 35 (30). pp. 25-34. ISSN 1938-5862

Groenland, Alfons Wouter (2011) Nanolink-based thermal devices: integration of ALD TiN thin films. thesis.

Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Negative Charge in Plasma Oxidized SiO2 Layers. ECS Transactions, 35 (4). pp. 259-272. ISSN 1938-5862

Faber, Erik J. and Wolters, Rob A.M. and Schmitz, Jurriaan (2011) On the kinetics of platinum silicide formation. Applied Physics Letters, 98 (8). 082102. ISSN 0003-6951

Jose, S. and Hueting, R.J.E. and Jansman, A.B.M. (2011) On the rule of thumb for flipping the dispersion relation in BAW devices. In: IEEE International Ultrasonics Symposium, IUS 2011, 18-21 October 2011, Orlando, FL, USA (pp. pp. 1712-1715).

Boogaard, Arjen (2011) Plasma-enhanced chemical vapor deposition of silicon dioxide : optimizing dielectric films through plasma characterization. thesis.

Brunets, Ihor and Walters, Robert J. and Kovalgin, Alexey Y. and Polman, Albert and Schmitz, Jurriaan (2011) Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source. In: 219th ECS Meeting, 1-6 May 2011, Montreal, QC, Canada.

Jose, Sumy (2011) Reflector stack optimization for bulk acoustic wave resonators. thesis.

Herfst, Roelof W. and Schmitz, Jurriaan and Scholten, Andries J. (2011) Simultaneous extraction of threshold voltage and mobility degradation from on-the-fly NBTI measurements. In: IEEE International Reliability Physics Symposium, IRPS 2011, 10-14 April 2011, Monterey, USA (pp. XT.6.1-XT.6.4).

Herfst, Rodolf W. and Schmitz, Jurriaan and Scholten, Andries J. (2011) Simultaneous extraction of threshold voltage and mobility degradation from on-the-fly NBTI measurements. In: IEEE International Reliability Physics Symposium, IRPS 2011, 10-14 April 2011, Monterey, USA (pp. XT.6.1 -XT.6.4).

Lu, Jiwu (2011) Solar cells on CMOS chips as energy harvesters - integration and CMOS compatibility. thesis.

Bilevych, Y. and Blanco Carballo, V.M. and Chefdeville, M.A. and Colas, P. and Delagnes, E. and Fransen, M. and Graaff, H. van der and Koppert, W.J.C. and Melai, J. and Salm, C. and Schmitz, J. and Timmermans, J. and Wyrsch, N. (2011) Spark protection layers for CMOS pixel anode chips in MPGDs. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 629 (1). pp. 66-73. ISSN 0168-9002

Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) The development of titanium silicide–boron-doped polysilicon resistive temperature sensors. Journal of Micromechanics and Microengineering, 21 (10). p. 105022. ISSN 0960-1317

Van Bui, H. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8120-8125. ISSN 1533-4880

2010

Melai, Joost and Breskin, Amos and Cortesi, Marco and Bilevych, Yevgen and Fransen, Martin and Graaf, Harry van der and Visschers, Jan and Blanco Carballo, Víctor and Salm, Cora and Schmitz, Jurriaan (2010) A UV sensitive integrated micromegas with timepix readout. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 628 . pp. 133-137. ISSN 0168-9002

Jose, S. and Jansman, A.B.M. and Hueting, R.J.E. (2010) A design procedure for an acoustic mirror providing dual reflection of longitudinal and shear waves in Solidly Mounted BAW Resonators (SMRs). In: IEEE International Ultrasonics Symposium, IUS, 20-23 September 2009, Rome, Italy (pp. pp. 2111-2114).

Steen, J.-L.P.J. van der and Palestri, P. and Esseni, D. and Hueting, R.J.E. (2010) A new model for the backscatter coefficient in nanoscale MOSFETs. In: 40th European Solid-State Device Research, Essderc 2010, 13-17 Sep 2010, Sevilla, Spain (pp. pp. 234-237).

Lu, J. and Liu, W. and Werf, C.H.M. van der and Kovalgin, A.Y. and Sun, Y. and Schropp, R.E.I. and Schmitz, J. (2010) Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems. In: IEEE International Electron Devices Meeting, IEDM 2010, 6-8 December 2010, San Francisco, CA, USA (pp. 31.3.1.-31.3.4).

Jose, S. and Hueting, R.J.E. and Jansman, A.B.M. (2010) Acoustic dispersion of solidly mounted resonators with an optimized reflector stack for dual wave reflection. In: IEEE International Ultrasonics Symposium, IUS 2010, 11-14 Oct 2010, San Diego, CA (pp. pp. 91-94).

Salm, Cora and Eijkel, Jan and Heijden, Ferdi van der and Odijk, Mathieu (2010) Adapting to a changing highschool population. In: 8th European Workshop on Microelectronics Education, EWME 2010, 10-12 May 2010, Darmstadt, Germany (pp. pp. 180-184).

Boksteen, B.K. and Hueting, R.J.E. and Salm, C. and Schmitz, J. (2010) An Initial study on The Reliability of Power Semiconductor Devices. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 68-72).

Melai, Joost and Lyashenko, Alexey and Breskin, Amos and Graaf, Harry van der and Timmermans, Jan and Visschers, Jan and Salm, Cora and Schmitz, Jurriaan (2010) An integrated micromegas UV-photon detector. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 633 . pp. 194-197. ISSN 0168-9002

Blanco Carballo, V. and Chefdeville, M.A. and Decowski, M.P. and Fransen, M. and Graaf, H. van der and Koppert, W.J.C. and Schmitz, J. (2010) Applications of GridPix detectors. Journal of Instrumentation, 5 (2). pp. 1-5. ISSN 1748-0221

Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Mauczok, R. and Keur, W. and Hueting, R.J.E. (2010) BaxSr1−xTi1.02O3 metal–insulator–metal capacitors on planarized alumina substrates. Thin Solid Films, 518 (10). pp. 2854-2959. ISSN 0040-6090

Roy, Deepu and Zandt, Micha in 't and Wolters, Rob (2010) Bias dependent specic contact resistance of phase change material to metal contacts. In: STW.ICT Conference 2010, 18-19 November 2010, Veldhoven, The Netherlands (pp. pp. 147-149).

Hasper, Albert and Snijders, Gert-Jan and Vandezande, Lieve and De Blank, Marinus J. and Bankras, Radko Gerard (2010) Deposition of TiN films in a batch reactor. Patent.

Jinesh, Kochupurackal Balakrishna Pillai (2010) Dielectric properties of atomic-layer-deposited LayZr1-yOx and EryHf1-yOx thin films. thesis.

Nguyen, Van Hieu and Salm, Cora (2010) Effect of current crowding on electromigration lifetime investigated by simulation and experiment. Computational Materials Science, 49 (4). pp. 235-238. ISSN 0927-0256

Kaleli, B. and Aarnink, A.A.I. and Smits, S.M. and Hueting, R.J.E. and Wolters, R.A.M. and Schmitz, J. (2010) Electron Beam Lithography of HSQ and PMMA Resists and Importance of their Properties to Link the Nano World to the Micro World. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 105-108).

Rajasekharan, B. and Hueting, R.J.E. and Salm, C. and Hemert, T. van and Wolters, R.A.M. and Schmitz, J. (2010) Fabrication and characterization of the charge-plasma diode. IEEE electron device letters, 31 (6). pp. 528-530. ISSN 0741-3106

Herfst, R.W. and Steeneken, P.G. and Tiggelman, M.P.J. and Stulemeijer, J. and Schmitz, J. (2010) Fast RF-CV characterization through high-speed 1-port S-parameter measurements. In: Proceedings of IEEE International Conference on Microelectronic Test Structures (ICMTS), 2010, 22-25 Mar 2010, Hirosjima, Japan (pp. pp. 170-173).

Kazmi, S.N.R. and Rangarajan, B. and Aarnink, T. and Salm, C. and Schmitz, J. (2010) Low Stressed In-situ Boron doped Poly SiGe Layers for High-Q Resonators. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 109-113).

Tiggelman, N. and Kovalgin, A.Y. and Brennan, R. and Wolters, R.A.M. (2010) Low specific contact resistance of NiSi and PtSi to Si: impact of interface. Electrochemical and Solid-State Letters, 13 (12). H450-H453. ISSN 1099-0062

Faber, E.J. and Wolters, R.A.M. and Schmitz, J. (2010) Novel test structures for temperature budget determination during wafer processing. In: IEEE International Conference on Microelectronic Test Structures (ICMTS), 2010, 22-25 Mar 2010, Hirosjima, Japan (pp. pp. 30-33).

Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2010) On the effect of nano-injectors on conduction in silicon p-i-n diodes. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 140-142).

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2010) On the leakage problem of MIM capacitors due to improper etching of titanium nitride. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 89-92).

Hemert, T. van and Hueting, R.J.E. and Rajasekharan, B. and Salm, C. and Schmitz, J. (2010) On the modelling and optimisation of a novel Schottky based silicon rectifier. In: 40th European Solid-State Device Research, Essderc 2010, 13-17 Sep 2010, Sevilla, Spain (pp. pp. 460-463).

Jose, Sumy and Jansman, André B.M. and Hueting, Raymond J.E. and Schmitz, Jurriaan (2010) Optimized reflector stacks for solidly mounted bulk acoustic wave resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 57 (12). pp. 2753-2763. ISSN 0885-3010

Melai, Joost (2010) Photon imaging using post-processed CMOS chips. thesis.

Roy, Deepu and Zandt, Micha A.A. in 't and Wolters, Rob A.M. (2010) Specific contact resistance of phase change materials to metal electrode. IEEE Electron Device Letters, 31 (11). pp. 1293-1295. ISSN 0741-3106

Melai, J. and Blanco Carballo, V.M. and Salm, C. and Schmitz, J. (2010) Suspended membranes, cantilevers and beams using SU-8 foils. Microelectronic Engineering, 87 (5-8). pp. 1274-1277. ISSN 0167-9317

2009

Walters, Robert J. and Loon, Rob V.A. van and Brunets, Ihor and Schmitz, Jurriaan and Polman, Albert (2009) A silicon-based electrical source for surface plasmon polaritons. In: 6th International Conference on GroupIV Photonics GFP'09, 9-11 Sept 2009, San Francisco, USA (pp. pp. 74-76).

Walters, R.J. and Loon, R.V.A. van and Brunets, I. and Schmitz, J. and Polman, A. (2009) A silicon-based electrical source of surface plasmon polaritons. Nature Materials, 8 (12). pp. 1-4. ISSN 1476-1122

Puliyankot, V. and Hueting, R.J.E. and Schmitz, J. (2009) An initial modelling and simulation study on the 1D Si-Based LED. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 170-173).

Roy, D. and Klootwijk, J.H. and Verhaegh, N.A.M. and Roosen, H.H.A.J. and Wolters, R.A.M. (2009) Comb Capacitor Structures for On-Chip Physical Uncloneable Function. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 96-102. ISSN 0894-6507

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 150-152).

Stavitski, N. and Klootwijk, J.H. and Zeijl, H.W. van and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 146-152. ISSN 0894-6507

Zandt, M.A.A. in ‘t and Jedema, F.J. and Gravesteijn, D.J. and Attenborough, K. and Wolters, R.A.M. (2009) Doped SbTe phase change material in memory cells. In: International Materials Research Congress, IMRC 2009, 16-21 August 2009, Cancun, Mexico.

Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2009) Effect of carrier injector size on silicon LED performance. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 167-169).

Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of Applied Physics, 105 (3). 033714. ISSN 0021-8979

Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. (2009) Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling. ECS Transactions, 25 (8). pp. 23-32. ISSN 1938-5862

Scholten, A.J. and Smit, G.D.J. and Pijper, R.M.T. and Tiemijer, L.F. and Tuinhout, H.P. and Steen, J.-L.P.J. van der and Mercha, A. and Braccioli, M. and Klaassen, D.B.M. (2009) Experimental assessment of self-heating in SOI FinFETs. In: IEEE International Electron Device Meeting, IEDM, 7-9 Dec. 2009, Baltimore, MD, USA (pp. pp. 305-308).

Steen, Jan-Laurens P.J. van der and Hueting, R.J.E. and Schmitz, J. (2009) Extracting Energy Band Offsets on Long-Channel Thin Silicon-on-Insulator MOSFETs. IEEE Transactions on Electron Devices, 56 (9). pp. 1999-2007. ISSN 0018-9383

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2009, 30 March - 2 April 2009, Oxnard, CA, USA (pp. pp. 191-195).

Blanco Carballo, V.M. and Bilevych, Y. and Chefdeville, M.A. and Fransen, M. and Graaf, H. van der and Salm, C. and Schmitz, J. and Timmermans, J. (2009) GEMGrid: a wafer post-processed GEM-like radiation detector. Nuclear instruments and methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 608 (1). pp. 86-91. ISSN 0168-9002

Rink, Ingrid and Wali, Faisal and Knotter, D.M. (2009) Impact of metal-ion contaminated silica particles on gate oxide integrity. Solid State Phenomena, 145-14 . pp. 131-134. ISSN 1012-0394

Wali, Faisal and Knotter, D. Martin and Mud, Auke and Kuper, Fred G. (2009) Impact of particles in ultra pure water on random yield loss in IC production. Microelectronic Engineering, 86 (2). pp. 140-144. ISSN 0167-9317

Roy, Deepu and Zandt, Micha in 't and Wolters, Rob (2009) Impact of sidewalls on electrical characterization. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 105-107).

Kovalgin, A.Y. and Boogaard, A. and Wolters, R.A.M. (2009) Impact of small deviations in EEDF on silane-based plasma chemistry. ECS Transactions, 25 (8). pp. 429-436. ISSN 1938-5862

Aarnink, A.A.I. and Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen. In: 9th International Conference on Atomic Layer Deposition, 19-22 July 2009, Monterey, CA, USA.

Lu, Jiwu and Kovalgin, Alexey Y. and Schmitz, Jurriaan (2009) Influence of passivation process on chip performance. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 542-544).

Wali, Faisal and Knotter, D. Martin and Bearda, Twan and Mertens, Paul W. (2009) Local distribution of particles deposited on patterned surfaces. Solid State Phenomena, 145-14 . pp. 65-68. ISSN 1012-0394

Brunets, I. and Boogaard, A. and Smits, S.M. and Vries, H. de and Aarnink, A.A.I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2009) Low temperature TFTs with poly-stripes. In: Proceedings of the 5th International Thin Film Transistor Conference ITC'09, 5-6 Mar 2009, Palaiseau, France (pp. pp. 62-65).

Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Boogaard, A. and Schmitz, J. (2009) Low-temperature fabricated TFTs on polysilicon stripes. IEEE Transactions on Electron Devices, 56 (8). pp. 1637-1644. ISSN 0018-9383

Kazmi, S.N.R. and Salm, Cora and Schmitz, J. (2009) Materials selection for low temperature processed high Q resonators using ashby approach. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 81-84).

Rajasekharan, B. and Salm, C. and Wolters, R.A.M. and Aarnink, A.A.I. and Boogaard, A. and Schmitz, J. (2009) Metal contacts to lowly doped Si and ultra thin SOI. In: Proceedings of Fifth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, 19-21 Jan 2009, Gotheburg, Sweden (pp. pp. 29-30).

Rajasekharan, Bijoy and Salm, Cora and Hueting, Ray and Wolters, Rob and Schmitz, Jurriaan (2009) Metal contacts to lowly doped Si and ultra thin SOI. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 103-104).

Blanco Carballo, V.M. and Melai, J. and Salm, C. and Schmitz, J. (2009) Moisture resistance of SU-8 and KMPR as structural material. Microelectronic Engineering, 86 (4-6). pp. 765-768. ISSN 0167-9317

Faber, Erik J. and Wolters, Rob A.M. and Rajasekharan, Bijoy and Salm, Cora and Schmitz, Jurriaan (2009) Monitoring silicide formation via in situ resistance measurements. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 67-70).

Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Net Negative Charge in low-temperature SiO2 gate dielectric layers. Microelectronic Engineering, 86 (7-9). pp. 1707-1710. ISSN 0167-9317

Tiggelman, M.P.J. and Reimann, K. and Van Rijs, F. and Schmitz, J. and Hueting, R.J.E. (2009) On the Trade-Off Between Quality Factor and Tuning Ratio in Tunable High-Frequency Capacitors. IEEE Transactions on Electron Devices, 56 (9). pp. 2128-2136. ISSN 0018-9383

Knotter, D. Martin and Wali, Faisal (2009) Particles in Semiconductor Processing. In: Developments in Surface Contamination and Cleaning - Methods for Removal of Particle Contaminants. Elsevier, Amsterdam, pp. 81-120. ISBN 9781437778304

Melai, Joost and Lyashenko, Alexey and Breskin, Amos and Graaf, Harry van der and Timmermans, Jan and Visschers, Jan and Salm, Cora and Schmitz, Jurriaan (2009) Photocathodes for a post-processed imaging array. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 32-35).

Melai, Joost and Salm, Cora and Wolters, Rob and Schmitz, Jurriaan (2009) Qualitative and quantitative characterization of outgassing from SU-8. Microelectronic Engineering, 86 (4-6). pp. 761-764. ISSN 0167-9317

Blanco Carballo, Víctor Manuel (2009) Radiation imaging detectors made by wafer post-processing of CMOS chips. thesis.

Tiggelman, Markus Petrus Josephus and Reimann, Klaus (2009) Reconfigurable radio-frequency front-end. Patent.

Stavitski, Natalie (2009) Silicide-to-silicon specific contact resistance characterization : test structures and models. thesis.

Arguirov, T. and Mchedlidze, T. and Kittler, M. and Reiche, M. and Wilhelm, T. and Hoang, T. and Holleman, J. and Schmitz, J. (2009) Silicon based light emitters utilizing radiation from dislocations; electric field induced shift of the dislocation-related luminescence. Physica E: Low-dimensional Systems and Nanostructures, 41 (6). pp. 907-911. ISSN 1386-9477

Jose, S. and Jansman, A.B.M. and Hueting, R.J.E. (2009) Solidly Mounted Resonator with Optimized Acoustic Reflector. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 159-162).

Schmitz, J. (2009) Special Section on the 2008 International Conference on Microelectronic Test Structure. In: Special Section on the 2008 International Conference on Microelectronic Test Structure (pp. pp. 1-50).

Tiggelaar, R.M. and Sanders, R.G.P. and Groenland, A.W. and Gardeniers, J.G.E. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and Actuators A: Physical, 152 (1). pp. 39-47. ISSN 0924-4247

Rangarajan, Balaji and Brunets, Ihor and Holleman, Jisk and Kovalgin, Alexey Y. and Schmitz, Jurriaan (2009) TFTs as photodetectors for optical interconnects. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands (pp. pp. 52-54).

Hurley, Paul K. and Negara, Adi and Hemert, Tom van and Cherkaoui, Karim (2009) The Influence of Oxide Charge on Carrier Mobility in HfO2/TiN Gate Silicon MOSFETs. ECS Transactions, 19 (2). pp. 379-391. ISSN 1938-5862

Melai, Joost and Salm, Cora and Smits, Sander and Visschers, Jan and Schmitz, Jurriaan (2009) The electrical conduction and dielectric strength of SU-8. Journal of Micromechanics and Microengineering, 19 (6). 065012. ISSN 0960-1317

Bilevych, Y. and Blanco Carballo, V.M. and Breur, S. and Fransen, M. and Graaf, H. van der and Hartjes, F. and Hessey, N. and Kalter, R. and Ketel, T. and Koppert, W.C. and Rogers, M. and Schmitz, J. and Timmermans, J. and Visschers, J. (2009) The performance of GridPix detectors. In: IEEE Nuclear Science Symposium Conference Record 2009, 24 October - 1 November 2009, Orlando, FL, USA (pp. pp. 231-236).

Van Bui, Hao and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2009) Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 59-62).

Tiggelman, Markus Petrus Josephus (2009) Thin film barium strontium titanate capacitors for tunable RF front-end applications. thesis.

Furukawa, Yukiko and Reimann, Klaus and Jedema, Friso Jacobus and Tiggelman, Markus Petrus Josephus and Roest, Aarnoud Laurens (2009) Tunable capacitor. Patent.

Bilevych, Y. and Blanco Carballo, V.M. and Chefdeville, M.A. and Fransen, M. and Graaf, H. van der and Salm, C. and Schmitz, J. and Timmermans, J. (2009) Twingrid: a wafer post-processed multistage micro patterned gaseous detector. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 610 (3). pp. 644-648. ISSN 0168-9002

2008

Blanco Carballo, Víctor Manuel and Chefdeville, Maximilien and Fransen, Martin and Graaf, Harry van der and Melai, Joost and Salm, Cora and Schmitz, Jurriaan and Timmermans, Jan (2008) A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip. IEEE Electron Device Letters, 29 (6). pp. 585-588. ISSN 0741-3106

Stavitski, N. and Klootwijk, J.H. and Zeijl, H.W. van and Kovalgin, A.Y. and Wolters, R.A.M. (2008) A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland (pp. pp. 199-204).

Brunets, I. and Groenland, A.W. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. (2008) A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers. In: 18th International Conference on Atomical Layer Deposition, ALD 2008, 29 June - 2 July 2008, Bruges, Belgium (pp. P-54).

Piccolo, G. and Hoang, T. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Antifuse injectors for SOI LEDs. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 573-575).

Sasse, Guido T. and Schmitz, Jurriaan (2008) Application and evaluation of the RF charge-pumping technique. IEEE Transactions on Electron Devices, 55 (3). pp. 881-889. ISSN 0018-9383

Herfst, Roelof Willem (2008) Center-Shift Method for the Characterization of Dielectric Charging in RF MEMS Capacitive Switches. IEEE Transactions on Semiconductor Manufacturing, 21 (2). pp. 148-153. ISSN 0894-6507

Rajasekharan, B. and Hueting, R.J.E. and Salm, C. and Hoang, T. and Schmitz, J. (2008) Charge plasma diode - a novel device concept. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 576-579).

Kazmi, S.N.R. and Schmitz, J. (2008) Comparison of gate capacitance extraction methodologies. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 562-564).

Herfst, Roelof Willem (2008) Degradation of RF MEMS capacitive switches. thesis.

Boogaard, A. and Roesthuis, R. and Brunets, I. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2008) Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 452-456).

Rajasekharan, B. and Salm, C. and Hueting, R.J.E. and Hoang, T. and Schmitz, J. (2008) Dimensional scaling effects on transport properties of ultrathin body p-i-n diodes. In: Proceedings of the 9th Conference on ULtimate Integration on Silicon, 12-14 Mar 2008, Udine, Italy (pp. pp. 195-198).

Steen, J.-L.P.J. van der and Hueting, R.J.E. and Schmitz, J. (2008) Energy band offset extraction – a comparative study –. In: 11th annual workshop on semiconductor advances for future electronics and sensors, SAFE 2008, 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 592-595).

Mchedlidze, T. and Arguirov, T. and Kittler, M. and Hoang, T. and Holleman, J. and Le Minh, P. and Schmitz, J. (2008) Engineering of dislocation-loops for light emission from silicon diodes. Solid State Phenomena, 131-13 . pp. 303-308. ISSN 1012-0394

Stavitski, Natalie and Dal, Mark J.H. van and Lauwers, Anne and Vrancken, Christa and Kovalgin, Alexey Y. and Wolters, Rob A.M. (2008) Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction. IEEE Transactions on Electron Devices, 55 (5). pp. 1170-1176. ISSN 0018-9383

Steen, J.-L.P.J. van der and Hueting, R.J.E. and Schmitz, J. (2008) Extracting energy band offsets on Thin Silicon–On–Insulator MOSFETs. In: 38th European Solid-State Device Research Conference, 15-19 September 2008, Edinburgh, Schotland (pp. pp. 242-245).

Schmitz, Jurriaan and Thewes, Roland (2008) Foreword: Special issue devoted to the ESSDERC’07 conference. Solid-State Electronics, 52 (9). p. 1265. ISSN 0038-1101

Lu, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Functional layers for CIGS solar cell on-chip fabrication during post-processing. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 487-490).

Melai, Joost and Blanco Carballo, Víctor M. and Salm, Cora and Wolters, Rob and Schmitz, Jurriaan (2008) Further outgassing studies on SU-8. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 491-494).

Herfst, R.W. and Steeneken, P.G. and Schmitz, J. (2008) Identifying degradation mechanisms in RF MEMS capacitive switches. In: Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, USA (pp. pp. 168-171).

Tiggelman, M.P.J. and Reimann, K. and Liu, J. and Klee, M. and Keur, W. and Mauczock, R. and Schmitz, J. and Hueting, R.J.E. (2008) Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies. In: 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-27 March 2008, Edinburgh, Schotland (pp. pp. 190-195).

Wali, Faisal and Knotter, D.M. and Kuper, F.G. (2008) Impact of nano particles on semiconductor manufacturing. In: Proceedings of 12th IEEE International Multitopic Conference (INMIC) 2008, 23-24 Dec 2008, Karachi (pp. pp. 97-99).

Roy, D. and In 't Zand, M.A.A. and Delhounge, R. and Klootwijk, J.H. and Wolters, R.A.M. (2008) Influence of interfacial layer on contact resistance. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 499-500).

Herfst, R.W. and Steeneken, P.G. and Schmitz, J. and Mank, A.J.G. and Gils, M. van (2008) Kelvin probe study of laterally inhomogeneous dielectric charging and charge diffusion in RF MEMS capacitive switches. In: IEEE International Reliability Physics Symposium, IRPS , April 27 - May 1 2008, Phoenix, AZ (pp. pp. 492-495).

Brunets, I. and Loon, R.V.A. van and Walters, R.J. and Polman, A. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2008) Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 399-402).

Wali, Faisal and Knotter, D. Martin and Kuper, F.G. (2008) Liquid-borne nano particles impact on the random yield during critical processes in IC’s production. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 513-515).

Kovalgin, Alexey Y. and Isai, Gratiela and Holleman, Jisk and Schmitz, Jurriaan (2008) Low-Temperature SiO2 Layers Deposited by Combination of ECR Plasma and Supersonic Silane/Helium Jet. Journal of the Electrochemical Society, 155 (2). G21-G28. ISSN 0013-4651

Walters, R.J. and Loon, R. van and Polman, A. and Brunets, I. and Piccolo, G. and Schmitz, J. (2008) Luminescence properties of silicon nanocrystals in Al2O3 fabricated at low temperature. In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy (pp. pp. 41-42).

Sasse, Guido T. and Kuper, Fred G. and Schmitz, Jurriaan (2008) MOSFET Degradation Under RF Stress. IEEE Transactions on Electron Devices, 55 (11). pp. 3167-3174. ISSN 0018-9383

Jose, S. and Hueting, R.J.E. and Jansman, A.B.M. (2008) Modelling of bulk acoustic wave resonators for microwave filters. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 558-561).

Blanco Carballo, V.M. and Melai, J. and Salm, C. and Schmitz, J. (2008) Moisture resistance of SU-8 and KMPR as structural material for integrated gaseous detectors. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 395-398).

Bilevych, Y. and Blanco Carballo, V.M. and Chefdeville, M. and Fransen, M. and Graaf, H. van der and Groot, N. de and Hartjes, F. and Konig, A. and Nooij, L. de and Rogers, M. and Schmitz, J. and Timmermans, J. and Romaniouk, A. and Konovalov, S. and Morozov, S. (2008) New results from GridPix detectors. In: IEEE Nuclear Science Symposium, NSS, 19-25 October 2008, Dresden, Germany (pp. pp. 1311-1315).

Schmitz, J. and Vries, R. de and Salm, C. and Hoang, T. and Hueting, R.J.E. and Holleman, J. (2008) On the switching speed of SOI LEDs. In: Proceedings of the Fourth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, 23-25 Jan 2008, Cork, Ireland (pp. pp. 101-102).

Agiral, Anil and Groenland, Alforns W. and Kumar Chinthaginjala, J. and Seshan, K. and Lefferts, Leon and Gardeniers, J.G.E. (Han) (2008) On-chip microplasma reactors using carbon nanofibres and tungsten oxide nanowires as electrodes. Journal of Physics D: Applied Physics, 41 (19). p. 194009. ISSN 0022-3727

Faber, E.J. and Albers, M. and Smet, L.C.P.M. de and Olthuis, W. and Zuilhof, H. and Sudholter, E.J.R. and Bergveld, P. and Berg, A. van den (2008) Organic layers on silicon result in a unique hybrid fet. In: 22nd International Conference Eurosensors, 7-11 Sept 2008, Dresden, Germany (pp. pp. 848-851).

Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Poly-Si stripe TFTs by Grain-Boundary controlled crystallization of Amorphous-Si. In: Proceedings of the 38th European Solid-State Device Research Conference, 15-19 September 2008, Edinburgh, Schotland (pp. pp. 87-90).

Nijhuis, Christian A. and Maat, Jurjen ter and Bisri, Satria Z. and Weusthof, Marcel H.H. and Salm, Cora and Schmitz, Jurriaan and Ravoo, Bart Jan and Huskens, Jurriaan and Reinhoudt, David N. (2008) Preparation of metal-SAM-dendrimer-SAM-metal junctions by supramolecular metal transfer printing. New Journal of Chemistry, 32 (4). pp. 652-661. ISSN 1144-0546

Nijhuis, Christian A. and Maat, Jurjen ter and Bisri, Satria Z. and Weusthof, Marcel H.H. and Salm, Cora and Schmitz, Jurriaan and Ravoo, Bart Jan and Huskens, Jurriaan and Reinhoudt, David N. (2008) Preparation of metal–SAM–dendrimer–SAM–metal junctions by supramolecular metal transfer printing,. New Journal of Chemistry, 32 . pp. 652-661. ISSN 1144-0546

Chefdeville, M. and Graaf, H. van der and Hartjes, F. and Timmermans, J. and Visschers, J. and Blanco Carballo, V.M. and Salm, C. and Schmitz, J. and Smits, S. and Colas, P. and Giomataris, I. (2008) Pulse height fluctuations of integrated micromegas detectors. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 591 (1). pp. 147-150. ISSN 0168-9002

Sasse, Guido T. and Acar, Mustafa and Kuper, Fred G. and Schmitz, J. (2008) RF CMOS reliability simulations. Microelectronics Reliability, 48 (8-9). pp. 1581-1585. ISSN 0026-2714

Steeneken, Peter and Herfst, Rodolf and Suy, Hilco and Goossens, Martijn and Beek, Joost van and Bielen, Jeroen and Stulemeijer, Jiri and Schmitz, Jurriaan (2008) RF MEMS Switches for Mobile Communication. Future Fab International, 24 . pp. 24-30.

Salm, Cora and Blanco Carballo, Víctor M. and Melai, Joost and Schmitz, Jurriaan (2008) Reliability aspects of a radiation detector fabricated by post-processing a standard CMOS chip. Microelectronics Reliability, 48 (8-9). pp. 1139-1143. ISSN 0026-2714

Sasse, Guido Theodor (2008) Reliability engineering in RF CMOS. thesis.

Hoang, T. and Holleman, J. and Schmitz, J. (2008) SOI LEDs with carrier confinement. In: Materials Science Forum. Trans Tech Publications, Switzerland, Stafa- Zurich, Switzerland, pp. 101-116. ISBN 9780878493586

Piccolo, G. and Hoang, T. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Silicon LEDs with antifuse injection. In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy (pp. pp. 49-51).

Stavitski, N. and Dal, M.J.H. van and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range. IEEE electron device letters, 29 (4). pp. 378-381. ISSN 0741-3106

Hueting, R.J.E. and Rajasekharan, B. and Salm, C. and Schmitz, J. (2008) The charge plasma P-N diode. IEEE electron device letters, 29 (12). pp. 1367-1369. ISSN 0741-3106

Kuindersma, P. and Hoang, T. and Schmitz, J. and Vijayaraghavan, M.N. and Dijkstra, M. and Noort, W.A. van and Vanhoucke, T. and Peters, W.C.M. and Kramer, M.C.J.C.M. (2008) The power conversion efficiency of visible light emitting devices in standard BiCMOS processes. In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy (pp. pp. 256-258).

Tiggelman, M.P.J. and Reimann, K. and Liu, J. and Klee, M. and Mauczok, R. and Keur, W. and Schmitz, J. and Hueting, R.J.E. (2008) The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 506-508).

Groenland, A.W. and Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Schmitz, J. (2008) Thermal and plasma-enhanced oxidation of ALD TiN. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 468-471).

2007

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2007) A pillar-shaped antifuse-based silicon chemical sensor and actuator. IEEE sensors journal, 7 (1). pp. 18-27. ISSN 1530-437X

Schmitz, J. (2007) Adding functionality to microchips by wafer post-processing. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 576 (1). pp. 142-149. ISSN 0168-9002

Ramaneti, R. and Lodder, J.C. and Jansen, R. (2007) Anomalous Hall effect in anatase Co:TiO2 ferromagnetic semiconductor. Applied physics letters, 91 . 012502. ISSN 0003-6951

Klee, M. and Beelen, D. and Keurl, W. and Kiewitt, R. and Kumar, B. and Mauczok, R. and Reimann, K. and Renders, Ch. and Roest, A. and Roozeboom, F. and Steeneken, P.G. and Tiggelman, M.P.J. and Vanhelmont, F. and Wunnicke, O. and Lok, P. and Neumann, K. and Fraser, J. and Schmitz, G. (2007) Application of Dielectric, Ferroelectric and Piezoelectric Thin Film Devices in Mobile Communication and Medical Systems. In: 15th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2006, 30 July - 3 August 2006, Sunset Beach, NC, USA (pp. pp. 9-16).

Steen, J.-L.P.J. van der and Hueting, R.J.E. and Smit, G.D.J. and Hoang, T. and Holleman, J. and Schmitz, J. (2007) Band Offset Measurements on Ultra-Thin (100) SOI MOSFETs. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 460-464).

Hurley, P.K. and Cherkaoui, K. and McDonnell, S. and Hughes, G. and Groenland, A.W. (2007) Characterisation and passivation of interface defects in (1 0 0)/Si/SiO2/HfO2/TiN gate stacks. Microelectronics Reliability, 47 (8). pp. 1195-1201. ISSN 0026-2714

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2007) Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD. Surface & Coatings Technology, 201 (22-23). pp. 8976-8980. ISSN 0257-8972

Blanco Carballo, V.M. and Chefdeville, M. and Colas, P. and Giomataris, Y. and Graaf, H. van der and Gromov, V. and Hartjes, F. and Kluit, R. and Koffeman, E. and Salm, C. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Visschers, J.L. (2007) Charge amplitude distribution of the Gossip gaseous pixel detector. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 583 (1). pp. 42-48. ISSN 0168-9002

Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Chemical modeling of a high-density inductively-coupled plasma reactor containing silane. Surface & Coatings Technology, 201 . pp. 8849-8853. ISSN 0257-8972

Melai, Joost and Salm, Cora and Smits, Sander and Blanco Carballo, Víctor M. and Schmitz, Jurriaan and Hageluken, Ben (2007) Considerations on using SU-8 as a construction material for high aspect ratio structures. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov. 2007, Veldhoven, The Netherlands (pp. pp. 529-534).

Stavitski, N. and Klootwijk, J.H. and Zeijl, H.W. van and Boksteen, B.K. and Kovalgin, A.Y. and Wolters, R.A.M. (2007) Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 551-554).

Rajasekharan, B. and Salm, C. and Hueting, R.J.E. and Hoang, T. and Wiel, W.G. van der and Schmitz, J. (2007) Dimensional scaling effects on transport properties of p-i-n diodes. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 457-459).

Visschers, J.L. and Blanco Carballo, V.M. and Chefdeville, M. and Colas, P. and Graaf, H. van der and Schmitz, J. and Smits, S.M. and Timmermans, J. (2007) Direct readout of gaseous detectors with tiled CMOS circuits. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 572 (1). pp. 203-204. ISSN 0168-9002

Degraeve, R. and Schmitz, J. and Pantisano, L. and Simoen, E. and Houssa, M. and Kaczer, B. and Groeseneken, G. (2007) Electrical characterization of advanced gate dielectrics. In: Dielectric Films for Advanced Microelectronics. Wiley series in materials for electronic & optoelectronic applications . John Wiley & Sons Ltd., England, pp. 371-435. ISBN 9780470013601

Tu, Hoang (2007) High efficient infrared-light emission from silicon LEDs. thesis.

Hoang, Tu and Holleman, Jisk and Le Minh, Puong and Schmitz, Jurriaan and Mchedlidze, Teimuraz and Arguirov, Tzanimir and Kittler, Martin (2007) Influence of dislocation loops on the near infrared light emission from silicon diodes. IEEE Transactions on Electron Devices, 54 (8). pp. 1860-1866. ISSN 0018-9383

Mchedlidze, T. and Arguirov, T. and Kittler, M. and Hoang, T. and Holleman, J. and Schmitz, J. (2007) Influence of electric field on spectral positions of dislocation-related luminescence peaks in silicon: Stark effect. Applied physics letters, 91 (20). p. 201113. ISSN 0003-6951

Piccolo, G. and Sarubbi, F. and Vandamme, L.J.K. and Macucci, M. and Scholtes, T.L.M. and Nanver, L.K. (2007) Low-Frequency Noise Characterization of Ultra-shallow Gate N-channel Junction Field Effect Transistors. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 448-451).

Wel, Arnoud P. van der and Klumperink, Eric A.M. and Kolhatkar, Jay S. and Hoekstra, Eric and Snoeij, Martijn F. and Salm, Cora and Wallinga, Hans and Nauta, Bram (2007) Low-Frequency Noise Phenomena in Switched MOSFETs. IEEE Journal of Solid-State Circuits, 42 (3). pp. 540-550. ISSN 0018-9200

Salm, Cora and Hoekstra, Eric and Kolhatkar, Jay S. and Hof, André J. and Wallinga, Hans and Schmitz, Jurriaan (2007) Low-frequency noise in hot-carrier degraded nMOSFETs. Microelectronics Reliability, 47 (4-5). pp. 577-580. ISSN 0026-2714

Brunets, I. and Aarnink, A.A.I. and Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices. Surface & Coatings Technology, 201 . pp. 9209-9214. ISSN 0257-8972

Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature process steps for realization of non-volatile memory devices. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 504-508).

Sasse, Guido T. and Vries, Rein J. de and Schmitz, Jurriaan (2007) Methodology for performing RF reliability experiments on a generic test structure. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2007, 19-22 March 2007, Tokyo, Japan (pp. pp. 177-182).

Steeneken, Peter and Suy, Hilco and Herfst, Rodolf and Goossens, Martijn and Beek, Joost van and Schmitz, Jurriaan (2007) Micro-elektromechanische schakelaars voor mobiele telefoons. Nederlands Tijdschrift voor Natuurkunde, 73e jaargang (9). pp. 314-317. ISSN 0926-4264

Lu, J. and Kovalgin, A.Y. and Schmitz, J. (2007) Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 603-607).

Schmitz, J. (2007) More than Moore creates opportunities for Materials Science. In: 16th International Materials Research Congress (IMRC) 2007, 25 Oct - 1 Nov 2007, Cancun, Mexico (pp. p. 19).

Blanco Carballo, V.M. and Salm, C. and Smits, S.M. and Schmitz, J. and Chefdeville, M. and Graaf, H. van der and Timmermans, J. and Visschers, J.L. (2007) On the geometrical design of integrated micromegas detectors. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 576 (1). pp. 1-4. ISSN 0168-9002

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) On the verification of EEDFs in plasmas with silane using optical emission spectroscopy. ECS Transactions, 6 (1). pp. 259-270. ISSN 1938-5862

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD. In: Proceedings of the 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 29 - 30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 404-407).

Nicollian, Paul Edward (2007) Physics of trap generation and electrical breakdown in ultra-thin SiO2 and SiON gate dielectric materials. thesis.

Tiggelman, M.P.J. and Reimann, K. and Schmitz, J. (2007) Reducing AC impedance measurement errors caused by the DC voltage dependence of broadband high-voltage bias-tees. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2007, 19-22 March 2007, Tokyo, Japan (pp. pp. 200-205).

Olthuis, W. and Faber, E.J. and Krommenhoek, E.E. and Berg, A. van den (2007) Sensing with FETs - once, now and future. In: 8. Dresdner Sensor-Symposium, 10-12 Dec 2007, Dresden (pp. pp. 37-44).

Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Schmitz, J. and Hueting, R.J.E. and Liu, J. and Furukawa, Y. and Mauczok, R. and Keur, W. (2007) Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 465-467).

Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 November 2007, Veldhoven, The Netherlands (pp. pp. 581-583).

Wali, Faisal and Knotter, D. Martin and Wortelboer, Ronald and Mud, Auke (2007) Statistical relation between particle contaminations in ultra pure water and defects generated by process tools. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 555-557).

Hoang, T. and Le Minh, P. and Holleman, J. and Schmitz, J. (2007) Strong efficiency improvement of SOI-LEDs through carrier confinement. IEEE electron device letters, 28 (5). pp. 383-385. ISSN 0741-3106

Blanco Carballo, V.M. and Salm, C. and Smits, S.M. and Schmitz, J. and Melai, J. and Chefdeville, M. and Graaf, H. van der (2007) Technological aspects of gaseous pixel detectors fabrication. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov. 2007, Veldhoven, The Netherlands (pp. pp. 501-503).

Lee, Kyong-Taek and Schmitz, Jurriaan and Brown, George A. and Heh, Dawei and Choi, Rino and Harris, Rusty and Song, Seung-Chul and Lee, Byoung Hun and Han, In-Sikh and Lee, Hi-Deok and Jeong, Yoon-Ha (2007) Test structures for accurate UHF C-V measurements of nano-scale CMOSFETs with HfSiON and TiN metal gate. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2007, 19-22 March 2007, Tokyo, Japan (pp. pp. 124-127).

Herfst, R.W. and Steeneken, P.G. and Schmitz, J. (2007) Time and voltage dependence of dielectric charging in RF MEMS capacitive switches. In: 45th Annual IEEE International Reliability Physics Symposium, IRPS 2007, 15-19 April 2007, Phoenix, Arizona (pp. pp. 417-421).

Steen, J.-L.P.J. van der and Hueting, R.J.E. and Smit, G.D.J. and Hoang, T. and Holleman, J. and Schmitz, J. (2007) Valence Band Offset Measurements on Thin Silicon-on-Insulator MOSFETs. IEEE Electron Device Letters, 28 (9). pp. 821-824. ISSN 0741-3106

Steen, Jan-Laurens P.J. van der and Esseni, David and Palestri, Pierpalo and Selmi, Luca and Hueting, Raymond J.E. (2007) Validity of the parabolic effective mass approximation in silicon and germanium n-MOSFETs with different crystal orientations. IEEE Transactions on Electron Devices, 54 (8). pp. 1843-1851. ISSN 0018-9383

Faber, Erik J. and Sparreboom, Wouter and Groeneveld, Wilrike and Smet, Louis C.P.M. de and Bomer, Johan and Olthuis, Wouter and Zuilhof, Han and Sudhölter, Ernst J.R. and Bergveld, Piet and Berg, Albert van den (2007) pH sensitivity of Si-C linked organic monolayers on crystalline silicon surfaces. ChemPhysChem, 8 (1). pp. 101-112. ISSN 1439-4235

2006

Blanco Carballo, V.M. and Chefdeville, M. and Graaf, H. van der and Salm, C. and Aarnink, A.A.I. and Smits, S.M. and Altpeter, D.M. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2006) A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing. In: 32nd European Solid State Device Research Conference, 02-06 July 2006, Montreux, Switzerland (pp. pp. 129-132).

Blanco Carballo, V.M. and Salm, C. and Smits, S.M. and Schmitz, J. and Chefdeville, M. and Graaf, H. van der and Timmermans, J. and Visschers, J.L. (2006) An integrated gaseous detector using microfabrication post-processing technology. In: 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 23-24 Nov. 2006, Veldhoven, The Netherlands (pp. pp. 369-372).

Campbell, M. and Heijne, E.H.M. and Llopart, X. and Chefdeville, M.A. and Colas, P. and Giomataris, Y. and Colijn, A.P. and Fornaini, A. and Graaf, H. van der and Kluit, P. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2006) An integrated readout system for drift chambers: the application of monolithic CMOS pixel sensors as segmented direct anode. In: 9th Topical Seminar on Innovative Particle and Radiation Detectors, 23-26 May 2004, Siena, Italy (pp. pp. 200-203).

Melai, J. and Salm, C. and Schmitz, J. and Smits, S.M. and Visschers, J.L. (2006) An integrated single photon detector array using porous anodic alumina. In: Proceedings of 8th IWORID (International Workshop on Radiation Imaging Detectors), 2 - 6 July 2006, Pisa, Italy (pp. p. 1).

Melai, J. and Salm, C. and Schmitz, J. and Smits, S.M. and Visschers, J.L. (2006) An integrated single photon detector array using porous anodic alumina. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 389-393).

Hueting, R.J.E. and Heringa, Anco (2006) Analysis of the subthreshold current of pocket or halo-implanted nMOSFETs. IEEE Transactions on Electron Devices, 53 (7). pp. 1641-1646. ISSN 0018-9383

Bankras, Radko G. and Tiggelman, Mark P.J. and Negara, M. Adi and Sasse, Guido T. and Schmitz, Jurriaan (2006) C-V test structures for metal gate CMOS. In: International Conference on Microelectronic Test Structures, ICMTS, March 6-9, 2006, Austin, Texas, USA (pp. pp. 226-229).

Herfst, R.W. and Huizing, H.G.A. and Steeneken, P.G. and Schmitz, J. (2006) Characterization of dielectric charging in RF MEMS capacitive switches. In: Proceedings of the 2006 International Conference on Microelectronic Test Structures (ICMTS), 6-9 Mar 2006, Austin, TX, USA (pp. pp. 133-136).

Sasse, G.T. and Schmitz, J. (2006) Charge Pumping at radio Frequencies: Methodology, Trap Response and Application. In: 44th Annual IEEE International Reliability Physics Symposium Proceedings, IRPS, 26-30 March 2006, San Jose, CA, USA (pp. pp. 627-628).

Stavitski, N. and Dal, M.J.H. van and Klootwijk, J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 436-438).

Merticaru, A.R. and Mouthaan, A.J. and Kuper, F.G. (2006) Current Degradation of a-Si:H/SiN TFTs at Room Temperature and Low Voltages. IEEE Transactions on Electron Devices, 53 (9). pp. 2273-2279. ISSN 0018-9383

Wali, Faisal and Knotter, D. Martin and Kelly, John J. and Kuper, Fred G. (2006) Deposition and detection of particles during integrated circuit manufacturing. In: 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 483-487).

Hasper, Albert and Snijders, Gert-Jan and Vandezande, Lieve and De Blank, Marinus J. and Bankras, Radko G. (2006) Deposition of TiN films in a batch reactor. Patent.

Merticaru, A.R. and Mouthaan, A.J. and Kuper, F.G. (2006) Determination of the contribution of defect creation and charge trapping to the degradation of a-Si:H/SiN TFTs at room temperature and low voltages. Journal of Non-Crystalline Solids, 352 (36-37). pp. 3849-3853. ISSN 0022-3093

Aarts, A.A. and Blanco Carballo, V.M. and Chefdeville, M. and Colas, P. and Dunand, S. and Fransen, M. and Graaf, H. van der and Giomataris, Y. and Hartjes, F. and Koffeman, G. and Melai, J. and Peek, H. and Riegler, W. and Salm, C. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Visschers, J.L. and Wyrsch, N. (2006) Discharge Protection and Ageing of Micromegas Pixel Detectors. In: 2006 IEEE Nuclear Science Symposium Conference Record, 29 Oct - 4 Nov 2006, San Diego, CA, USA (pp. pp. 3865-3869).

Tiggelman, M.P.J. and Reimann, K. and Klee, M. and Beelen, D. and Keur, W. and Schmitz, J. and Hueting, R.J.E. (2006) Electrical characterization of thin film ferroelectric capacitors. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 439-443).

Hurley, P.K. and Cherkaoui, K. and Groenland, A.W. (2006) Electrically active interface defects in the (100)Si/SiOx/HfO2/TiN system: Origin, instabilities and passivation. In: 210th Meeting of The Electrochemical Society (ECS), October 29-November 3, 2006, Cancun, Mexico.

Brunets, Ihor and Holleman, Jisk and Kovalgin, Alexey Y. and Aarnink, Tom and Boogaard, Arjen and Oesterlin, Peter (2006) Green Laser Crystallization of a-Si Films Using Preformed a-Si Lines. ECS Transactions, 3 (8). pp. 185-191. ISSN 1938-5862

Bankras, R.G. and Holleman, J. and Schmitz, J. and Sturm, J.M. and Zinine, A. and Wormeester, H. and Poelsema, B. (2006) In Situ Reflective High-Energy Electron Diffraction Analysis During the Initial Stage of a Trimethylaluminum/Water ALD Process. Chemical Vapor Deposition, 12 (5). pp. 275-280. ISSN 0948-1907

Bankras, Radko Gerard (2006) In-situ RHEED and characterization of ALD Al2O3 gate dielectrics. thesis.

Hoang, Tu and LeMinh, Phuong and Holleman, Jisk and Schmitz, Jurriaan (2006) Influence of Interface Recombination in Light Emission from Lateral Si-Based Light Emitting Devices. ECS Transactions, 3 (11). pp. 9-16. ISSN 1938-5862

Sasse, G.T. and Schmitz, J. (2006) Interface trap response to RF charge pumping measurements. In: 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 427-431).

Boogaard, Arjen and Kovalgin, Alexey and Aarnink, Tom and Wolters, Rob and Holleman, Jisk and Brunets, Ihor and Schmitz, Jurriaan (2006) Langmuir-probe Characterization of an Inductively-Coupled Remote Plasma System intended for CVD and ALD. ECS Transactions, 2 (7). pp. 181-191. ISSN 1938-5862

Salm, C. and Hoekstra, E. and Kolhatkar, J.S. and Hof, A.J. and Wallinga, H. and Schmitz, J. (2006) Low-Frequency noise in hot-carrier degraded MOSFETs. In: 14th workshop on dielectrics in microelectronics WODIM, 26-28 june 2006, Santa Tecla, Italy (pp. pp. 64-65).

Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, T. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane. Journal of the Electrochemical Society, 153 (9). H181-H188. ISSN 0013-4651

Kovalgin, Alexey and Holleman, Jisk (2006) Low-Temperature LPCVD of Polycrystalline GexSi1-��x Films with High Germanium Content. Journal of the Electrochemical Society, 153 (5). G363-G371. ISSN 0013-4651

Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane. In: Microfabricated systems and MEMS VII: Proceedings of the 206th ECS Meeting, 2004, Honolulu, Hawaii (pp. pp. 173-183).

Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 412-418).

Brunets, I. and Hemert, T. van and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2006) Memory devices with encapsulated Si nano-crystals: Realization and Characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 419-422).

Kovalgin, A.Y. and Zinine, A. and Bankras, R.G. and Wormeester, H. and Poelsema, B. and Schmitz, J. (2006) On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light. In: Proceedings of the Electrochemical Society, 29 okt - 3 nov 2006, Cancun, Mexico (pp. pp. 191-202).

Salm, C. and Hof, A.J. and Kuper, F.G. and Schmitz, J. (2006) Reduced temperature dependence of hot carrier degradation in deuterated nMOSFETs. Microelectronics Reliability, 46 (9-11). pp. 1617-1622. ISSN 0026-2714

Le Minh, P. and Holleman, J. (2006) Silicon light-emitting diode antifuse: properties and devices. Journal of physics D: applied physics, 39 . pp. 3749-3754. ISSN 0022-3727

Stavitski, N. and Dal, M.J.H. van and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Specific contact resistance measurements of metal-semiconductor junctions. In: Microelectronic Test Structures, 2006 IEEE International Conference on (pp. pp. 13-17).

Hoang, T. and LeMinh, P. and Hollleman, J. and Schmitz, J. (2006) The effect of dislocation loops on the light emission of silicon LEDs. IEEE Electron Device Letters, 27 (2). pp. 105-107. ISSN 0741-3106

Faber, Erik Jouwert (2006) Towards the hybrid organic semiconductor fet (hosfet) : electrical and electrochemical characterization of functionalized and unfunctionalized, covalently bound organic monolayers on silicon surfaces. thesis.

Steen, J.L. van der and Esseni, D. and Palestri, P. and Selmi, L. (2006) Validity of the Effective Mass Approximation in Silicon and Germanium Inversion Layers. In: 11th International Workshop on Computational Electronics, IWCE, 25-27 May 2006, Vienna, Austria (pp. pp. 301-302).

2005

Sowariraj, M.S.B. and Jong, P.C. de and Salm, C. and Mouthaan, A.J. and Kuper, F.G. (2005) A 3-D circuit model to evaluate CDM performance of ICs. Microelectronics Reliability, 45 (9-11). pp. 1425-1429. ISSN 0026-2714

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2005) A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. In: IEEE Sensors, 2005, 30 Oct .- 3 Nov. 2005 , Irvine, CA, USA (pp. pp. 1225-1228).

Aarnink, A.A.I. and Boogaard, A. and Brunets, I. and Isai, I.G. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2005) A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 67-69).

Kovalgin, A.Y. and Hof, A.J. and Schmitz, J. (2005) An approach to modeling of silicon oxidation in a wet ultra-diluted ambient. Microelectronic Engineering, 80 . pp. 432-435. ISSN 0167-9317

Chefdeville, M. and Colas, P. and Giomataris, Y. and Graaf, H. van der and Heijne, E.H.M. and Putten, S. van der and Salm, C. and Schmitz, J. and Smits, S. and Timmermans, J. and Visschers, J.L. (2005) An electron-multiplying 'Micromegas' grid made in silicon wafer post-processing technology. In: SAFE 2005, 8th Annual Workshop on Circuits, Systems and Signal Processing, 17-18 Nov. 2005, Veldhoven, the Netherlands (pp. pp. 139-142).

Chefdeville, M. and Colas, P. and Giomataris, Y. and Graaf, H. van der and Heijne, E.H.M. and Putten, S. van der and Salm, C. and Schmitz, J. and Smits, S.M. and Timmermans, J. and Visschers, J.L. (2005) An electron-multiplying ‘Micromegas’ grid made in silicon wafer post-processing technology. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 556 (2). pp. 490-494. ISSN 0168-9002

Hueting, Raymond J.E. and Toorn, Ramses van der (2005) Analysis of the Kirk effect in silicon-based bipolar transistors with a nonuniform collector profile. IEEE Transactions on Electron Devices, 52 (11). 2489 - 2495. ISSN 0018-9383

Bystrova, S. and Aarnink, A.A.I. and Holleman, J. and Wolters, R.A.M. (2005) Atomic Layer Deposition of W1.5N Barrier Films for Cu Metallization: Process and Characterization. Journal of the Electrochemical Society, 152 (7). G522-G527. ISSN 0013-4651

Bystrova, S. and Holleman, J. and Aarnink, A.A.I. and Wolters, R.A.M. (2005) Barrier properties of ALD1,5N thin films. In: International Conference on Advanced Metallization, 19-21 October 2004, San Diego, California, USA (pp. pp. 769-774).

Herfst, R.W. and Huizing, H.G.A. and Steeneken, P.G. and Schmitz, J. (2005) Characterization of dielectric charging in RF MEMS. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2005, 17-18 November 2005, Veldhoven, The Netherlands (pp. pp. 11-14).

Sasse, G.T. and Vries, H. de and Schmitz, J. (2005) Charge pumping at radio frequencies [MOSFET device interface state density measurement]. In: International Conference on Microelectronic Test Structures, ICMTS, 4-7 April 2005, Leuven, Belgium (pp. pp. 229-233).

Faber, Erik J. and Smet, Louis C.P.M. de and Olthuis, Wouter and Zuilhof, Han and Sudhölter, Ernst J.R. and Bergveld, Piet and Berg, Albert van den (2005) Covalently Attached 1-Alynes on Silicon Surfaces Provide Superior Insulators. In: SAFE 2005, 8th Annual Workshop on Circuits, Systems and Signal Processing, 17-18 Nov. 2005, Veldhoven, the Netherlands (pp. pp. 6-10).

Sowariraj, Mary Sheela Bobby (2005) Full chip modelling of ICs under CDM stress. thesis.

Campbell, M. and Heijne, E.H.M. and Llopart, X. and Colas, P. and Giganon, A. and Giomataris, Y. and Fornaini, A. and Graaf, H. van der and Kluit, P. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2005) GOSSIP: A vertex detector combining a thin gas layer as signal generator with a CMOS readout pixel array. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 560 (1). pp. 131-134. ISSN 0168-9002

Sturm, J.M. and Zinine, A. and Wormeester, H. and Poelsema, B. and Bankras, R.G. and Holleman, J. and Schmitz, J. (2005) Imaging of oxide charges and contact potential difference fluctuations in Atomic Layer Deposited AL203 on Si. Journal of Applied Physics, 97 (6). 063709. ISSN 0021-8979

Kolhatkar, Jay and Hoekstra, Eric and Hof, André and Salm, Cora and Schmitz, Jurriaan and Wallinga, Hans (2005) Impact of Hot-Carrier Degradation on the Low-Frequency Noise in MOSFETs Under Steady-State and Periodic Large-Signal Excitation. IEEE Electron Device Letters, 26 (10). pp. 764-766. ISSN 0741-3106

Bankras, R.G. and Holleman, J. and Schmitz, J. (2005) In-Situ RHEED analysis of atomic layer deposition. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, The Netherlands (pp. pp. 70-75).

Hoekstra, E. (2005) Large Signal Excitation Measurement Techniques for RTS Noise in MOSFETs. In: EUROCON 2005 "Computer as a tool", November, 22-24, 2005, Serbia & Montenegro, Belgrade (pp. pp. 1863-1866).

Sturm, J.M. and Zinine, A. and Wormeester, H. and Bankras, R.G. and Holleman, J. and Schmitz, J. and Poelsema, B. (2005) Laterally resolved electrical characterisation of high-L oxides with non-contact Atomic Force Microscopy. Microelectronic Engineering, 80 . pp. 78-81. ISSN 0167-9317

Sturm, J.M. and Zinine, A.I. and Wormeester, H. and Poelsema, B. and Bankras, R.G. and Holleman, J. and Schmitz, J. (2005) Nanoscale topography-capacitance correlation in high-K films: Interface heterogeneity related electrical properties. Journal of Applied Physics, 98 (7). 076104-1. ISSN 0021-8979

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. and Schmitz, J. (2005) On the Oxidation Kinetics of Silicon in Ultradiluted H2O and D2O Ambient. Journal of the Electrochemical Society, 152 (9). F133-F137. ISSN 0013-4651

Tiemeijer, L.F. and Havens, R.J. and Kort, R. de and Scholten, A.J. and Langevelde, R. van and Klaassen, D.B.M. and Sasse, G.T. and Bouttement, Y. and Petot, C. and Bardy, S. and Gloria, D. and Scheer, P. and Boret, S. and Haaren, B. van and Clement, C. and Larchanche, J-F. and Lim, I-S. and Duvallet, A. and Zlotnicka, A. (2005) Record RF performance of standard 90 nm CMOS technology. In: IEEE International Electron Devices Meeting 2004, 13-15 December 2004, San Francisco, California, USA (pp. pp. 441-444).

Klumperink, Eric and Wel, Arnoud van der and Kolhatkar, Jay and Hoekstra, Eric and Salm, Cora and Wallinga, Hans and Nauta, Bram (2005) Reduction of 1/f Noise by Switched Biasing: an Overview. In: ProRISC 2005, 16th Workshop on Circuits, Systems and Signal Processing, 17-18 November 2005, Veldhoven, The Netherlands (pp. pp. 307-311).

Faber, Erik J. and Smet, Louis C.P.M. de and Olthuis, Wouter and Zuilhof, Han and Sudhölter, Ernst J.R. and Bergveld, Piet and Berg, Albert van den (2005) Si-C Linked Organic Monolayers on Crystalline Silicon Surfaces as Alternative Gate Insulators. ChemPhysChem, 6 (10). pp. 2153-2166. ISSN 1439-4235

Sowariraj, M.S.B. and Jong, Peter C. de and Salm, Cora and Smedes, Theo and Mouthaan, A.J. Ton and Kuper, Fred G. (2005) Significance of Including Substrate Capacitance in the Full Chip Circuit Model of ICs under CDM Stress. In: 43th Annual International Reliability Physics Symposium, April 17-21, 2005, San Jose, CA, USA (pp. pp. 608-609).

Stavitski, N. and Dal, M.J.H. van and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2005) Specific contact resistance measurements of metal-semiconductor junctions. In: SAFE 2005, 8th Annual Workshop on Circuits, Systems and Signal Processing, 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 52-55).

Kolhatkar, Jay Sudhir (2005) Steady-state and cyclo-stationary RTS noise in mosfets. thesis.

Wang, Z. and Ackaert, J. and Scarpa, A. and Salm, C. and Kuper, F.G. and Vugts, M. (2005) Strategies to Cope with Plasma Charging Damage in Design and Layout Phases. In: International Conference on Integrated Circuit Design and Technology, ICICDT, 9-11 May 2005, Austin, Texas, USA (pp. pp. 91-98).

Hof, A.J. and Hoekstra, E. and Kovalgin, A.Y. and Schaijk, R. van and Baks, W.M. and Schmitz, J. (2005) The Impact of Deuterated CMOS processing on Gate Oxide Reliability. IEEE Transactions on Electron Devices, 52 (9). pp. 2111-2115. ISSN 0018-9383

Sasse, Guido T. and Vries, Henk and Schmitz, Jurriaan (2005) The RF charge pump technique for measuring the interface state density on leaky dielectrics. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 17-18 November 2005, Veldhoven, The Netherlands (pp. pp. 47-51).

Campbell, M. and Chefdeville, M. and Colas, P. and Colijn, A.P. and Forniani, A. and Giomataris, Y. and Graaf, H. van der and Heijne, E.H.M. and Kluit, P. and Llopart, X. and Schmitz, J. and Timmermans, J. and Visschers, J.K. (2005) The detection of single electrons by means of a Micromegas-covered Medipix2 pixel CMOS readout circuit. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 540 (2-3). pp. 295-304. ISSN 0168-9002

Forniani, A. and Campbell, M. and Chefdeville, M.A. and Colas, P. and Colijn, A.P. and Graaf, H. van der and Giomataris, Y. and Heijne, E.H.M. and Kluit, P. and Llopart, X. and Schmitz, J. and Timmermans, J. and Visschers, J.L. (2005) The detection of single electrons using a Microgas gas amplification and a MediPix2 CMOS pixel readout. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 546 (1-2). pp. 270-273. ISSN 0168-9002

Le Minh, P. and Hoang, T. and Holleman, J. and Schmitz, J. (2005) The effect of an electric field on a lateral silicon light-emitting diode. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, The Netherlands (pp. pp. 117-120).

Hoang, T. and LeMinh, P. and Holleman, J. and Schmitz, J. (2005) The effect of dislocation loops on the light emission of silicon LEDs. In: 35th European Solid-State Device Research Conference, ESSDERC, 12-16 Sept. 2005 , Grenoble, France (pp. pp. 359-362).

Hoang, T. and Le Minh, P. and Holleman, J. and Schmitz, J. (2005) The effect of dislocation loops on the light emission of silicon LEDs. In: Proceedings of 5th European Solid-State Device Research Conference (ESSDERC) 2005, 12-16 Sep 2005, Grenoble, France (pp. pp. 359-362).

Brunets, I. and Boogaard, A. and Isai, I.G. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2005) Three-dimensional IC's prolong the life of Moore's law. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 76-78).

2004

Hoang, T. and LeMinh, P. and Holleman, J. and Zieren, V. and Goossens, M.J. and Schmitz, J. (2004) A High Efficiency Lateral Light Emitting Device on SOI. In: 12th International Symposium on Electron Devices for Microwave and Optoelectronic Applications, EDMO, 8-9 November 2004, Berg-en-Dal, Kruger National Park, South Africa (pp. pp. 87-91).

Mouthaan, Ton (2004) A case study of a microsystems MSc curriculum. In: Second IEEE International Workshop on Electronic Design, Test and Applications, DELTA 2004, 28-30 Jan. 2004, Perth, Australia (pp. pp. 146-148).

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2004) A micro-scale hot-surface device based on non-radiative carrier recombination. In: 34th European Solid-State Device Research Conference, ESSDERC, 21-23 September 2004, Leuven, Belgium (pp. pp. 353-356).

Isai, Gratiela I. and Holleman, Jisk and Wallinga, Hans and Woerlee, Pierre H. (2004) Conduction and trapping mechanisms in SiO2 films grown near room temperature by multipolar electron cyclotron resonance plasma enhanced chemical vapor deposition. Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 22 (3). pp. 1022-1029. ISSN 1071-1023

Wang, Zhichun (2004) Detection of and protection against plasma charging damage in modern ic technology. thesis.

Ackaert, Jan Germain Gabriel (2004) Dielectric engineering: characterization, development and proces damage minimization of various silicon oxides. thesis.

Nguyen, H.V. and Salm, C. and Krabbenborg, B. and Weide-Zaage, K. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2004) Effect of Thermal Gradients on the Electromigration Lifetime in Power Electronics. In: IEEE 42nd Annual International Reliability Physics Symposium, 25-29 April 2004, Phoenix, Arizona, USA (pp. pp. 619-620).

Hoang, T. and LeMinh, P. and Holleman, J. and Schmitz, J. (2004) Effects of Dislocation Loops into Electroluminescence of Si-based Light Emitting Diodes. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 697-699).

Merticaru, Andreea Ruxandra (2004) Electrical instability of A-Si:H/SiN thin film transistors : a study at room temperature and low voltage stress. thesis.

Nguyen, H.V. and Salm, C. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. Ton and Kuper, Fred G. (2004) Fast Thermal Cycling-Enhanced Electromigration in Power Metallization. IEEE Transactions on Device and Materials Reliability, 4 (2). pp. 246-255. ISSN 1530-4388

Sowariraj, M.S.B. and Salm, Cora and Smedes, Theo and Mouthaan, A.J. Ton and Kuper, Fred G. (2004) Full chip model of CMOS Integrated Circuits under Charged Device Model stress. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 801-807).

Hof, A.J. and Kovalgin, A.Y. and Schmitz, J. and Schaijk, R. van and Baks, W.M. (2004) Gate Oxide Reliability and Deuterated CMOS Processing. In: IEEE International Integrated Reliability Workshop, 18-21 October 2004, Lake Tahoe, USA (pp. pp. 7-10).

Sasse, G.T. and Kort, R. de and Schmitz, J. (2004) Gate-capacitance extraction from RF C-V measurements. In: 34th European Solid-State Device Research Conference, ESSDERC 2004, 21-23 September 2004, Leuven, Belgium (pp. pp. 113-116).

Schmitz, J. and Weusthof, M.H.H. and Hof, A.J. (2004) Leakage current correction in quasi-static C-V measurements. In: International Conference on Microelectronic Test Structures, ICMTS, 22-25 March 2004, Awaji Yumebutai, Japan (pp. pp. 179-181).

Isai, Gratiela I. and Holleman, Jisk and Wallinga, Hans and Woerlee, Pierre H. (2004) Low Hydrogen Content Silicon Nitride Films Deposited at Room Temperature with an ECR Plasma Source. Journal of the Electrochemical Society, 151 (10). C649-C654. ISSN 0013-4651

Kolhatkar, J.S. and Hoekstra, E. and Salm, C. and Wel, A.P. van der and Klumperink, E.A.M. and Schmitz, J. and Wallinga, H. (2004) Modeling of RTS Noise in MOSFETs under Steady-State and Large-Signal Excitation. In: IEEE International Electron Devices Meeting, IEDM, 13-15 Dec. 2004, San Francisco, CA, USA (pp. pp. 759-762).

Faber, E.J. and Smet, L.C.P.M. de and Olthuis, W. and Zuilhof, H. and Sudhölter, E.J.R. and Bergveld, P. and Berg, A. van den (2004) Molecular Tuning of Electrical Properties of Mercury-Insulator-Silicon Diodes. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 630-638).

Faber, E.J. and Groeneveld, W.H. and Olthuis, W. and Berg, A. van den (2004) Mott Schottky measurements as a probe for site-binding dynamics at electrolyte | thin-insulator | silicon structures. In: The Sense of Contact 2004: where Industry meets Science, workshop Sensortechnology, March 23, 2004, Wageningen, Netherlands.

Campbell, M. and Heijne, E.H.M. and Llopart, X. and Chefdeville, M.A. and Colas, P. and Giganon, A. and Giomataris, Y. and Colijn, A.P. and Fornaini, A. and Graaf, H. van der and Kluit, P. and Timmermans, J. and Visschers, J.L. and Schmitz, J. (2004) New gaseous detectors: the application of CMOS pixel chips as direct anode. In: 2004 IEEE Nuclear Science Symposium Conference Record, 16-22 Oct 2004, Rome, Italy (pp. pp. 955-958).

Wang, Z. and Ackaert, J. and Salm, C. and Kuper, F.G. and De Backer, E. (2004) Plasma charging damage reduction in IC processing by a self-balancing interconnect. Microelectronics Reliability, 44 (9-11). pp. 1503-1507. ISSN 0026-2714

Wang, Zhichun and Ackaert, Jan and Salm, Cora and Kuper, Fred G. and Tack, Marnix and De Backer, Eddy and Coppens, Peter and De Schepper, Luc and Vlachakis, Basil (2004) Plasma-Charging Damage of Floating MIM Capacitors. IEEE Transactions on Electron Devices, 51 (6). pp. 1017-1024. ISSN 0018-9383

Schmitz, Jurriaan and Cubaynes, Florence N. and Havens, Ramon J. and Kort, Randy de and Scholten, Adries J. and Tiemeijer, Luuk F. (2004) Test structures design considerations for RF-CV measurements on leaky dielectrics. IEEE Transactions on Semiconductor Manufacturing, 17 (2). pp. 150-154. ISSN 0894-6507

Schmitz, J. and Cubaynes, F.N and Kort, R. de and Havens, R.J. and Scholten, A.J. and Tiemeijer, L.F. (2004) The RF-CV method for characterization of leaky gate dielectrics. Microelectronic Engineering, 72 . pp. 149-153. ISSN 0167-9317

Schmitz, J. and Cubaynes, F.N. and Kort, R. de and Havens, R.J. and Scholten, A.J. and Tiemeijer, L.F. (2004) The RF-CV method for characterization of leaky gate dielectrics. In: 13th Biannual Conference on Insulating Films on Semiconductors, 18 June 2003, Barcelona, Spain.

Colas, P. and Colijn, A.P. and Forniani, A. and Giomataris, Y. and Graaf, H. van der and Heijne, E.H.M. and Llopart, X. and Schmitz, J. and Timmermans, J. and Visschers, J.L. (2004) The readout of a GEM or Micromegas-equipped TPC by means of the Medipix2 CMOS sensor as direct anaode. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 535 (1-2). pp. 506-510. ISSN 0168-9002

Cubaynes, Florence Nathalie (2004) Ultra-thin plasma nitride oxide gate dielectrics for advanced MOS transistors. thesis.

2003

Nguyen, H.V. and Salm, C. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2003) A reliability model for interlayer dielectrics cracking during very fast thermal cycling. In: Advanced Metallization Conference 2003, September 29 - October 1, 2003 (Tokyo) and 21-23 October 2003 (Montreal), Tokyo, Japan and Montreal, Canada (pp. pp. 295-299).

Heuvel, M.G.L. van den and Hueting, R.J.E. and Hijzen, E.A. and Zandt, M.A.A. in 't (2003) An improved method for determining the inversion layer mobility of electrons in trench MOSFETs. In: IEEE 15th International Symposium on Power Semiconductor Devices and ICs, ISPSD 2003, April 14-17 2003, Cambridge, UK (pp. pp. 173-176).

Iordache, G. and Holleman, J. and Kovalgin, A.Y. and Jenneboer, A.J.S.M. (2003) Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands (pp. pp. 693-696).

Bystrova, S. and Holleman, J. and Wolters, R.A.M. and Aarnink, A.A.I. (2003) Atomic layer deposition of W - based layers on SiO2. In: 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands (pp. pp. 730-734).

Isai, Gratiela Ileana (2003) ECR plasma deposited SiO2 and Si3N4 layers : a room temperature technology. thesis.

Nguyen, H.V. and Salm, C. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2003) Electrothermomigration-induced failure in power IC metallization. In: 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands (pp. pp. 622-630).

Hoang, T. and Le Minh, P. and Holleman, J. and Schmitz, J. and Wallinga, H. (2003) High external quantum efficiency of the lateral P-I-N diodes realized of silicon on insulator (SOI) material. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands (pp. pp. 610-613).

Bankras, R.G. and Aarnink, A.A.I. and Holleman, J. and Schmitz, J. (2003) In-situ RHEED analysis of atomic layer deposition and characterization of AL203 gate dielectrics. In: 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands (pp. pp. 726-729).

Kolhatkar, J.S. and Wel, A.P. van der and Klumperink, E.A.M. and Salm, C. and Nauta, B. and Wallinga, H. (2003) Measurement and extraction of RTS Parameters under 'Switched Biased' conditions in MOSFETS. In: 17th International Conference on Noise and Fluctuations, ICNF, August 18-22, 2003, Prague, Czech Republic (pp. pp. 237-240).

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. and Schmitz, J. (2003) On oxidation kinetics and electrical quality of gate oxide grown in H2O or D2O ambient. In: 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands (pp. pp. 743-747).

Wang, Zhichun and Ackaert, Jan and Salm, Cora and Kuper, Fred G. and Bessemans, Klara and Backer, Eddy de (2003) Plasma charging damage induced by a power ramp down step in the end of plasma enhanced chemical vapour deposition (PECVD) process. In: 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands (pp. pp. 766-770).

Cubaynes, F.N. and Schmitz, J. and Marel, C. van der and Snijders, J.H.M. and Veloso, A. and Rothschild, A. and Olsen, C. and Date, L. (2003) Plasma nitridation optimization for sub-15 A gate dielectrics. In: International Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, 28 April - 2 May 2003, Paris, France (pp. pp. 595-604).

Schmitz, J. and Cubaynes, F.N. and Havens, R.J. and Kort, R. de and Scholten, A.J. and Tiemeijer, L.F. (2003) RF capacitance-voltage characterization of MOSFETs with high-leakage dielectric. IEEE Electron Device Letters, 24 (1). pp. 37-39. ISSN 0741-3106

Li, Yuan and Veenstra, Klaas Jelle and Dubois, Jerome and Peters-Wu, Lei and Zomeren, Agnes van and Kuper, Fred (2003) Reservoir effect and maximum allowed VIA misalignment for AICu interconnect with tungsten VIA plug. Microelectronics Reliability, 43 (9-11). pp. 1449-1454. ISSN 0026-2714

Sowariraj, M.S.B. and Smedes, Theo and Salm, Cora and Mouthaan, Ton and Kuper, Fred G. (2003) Role of package parasitics and substrate resistance on the Charged Device Model (CDM) failure levels - An explantion and die protection strategy. Microelectronics Reliability, 43 (9-11). pp. 1569-1575. ISSN 0026-2714

Kolhatkar, J.S. and Vandamme, L.K.J. and Salm, C. and Wallinga, H. (2003) Separation of Random Telegraph Signals from 1/f Noise in MOSFETs under Constant and Switched Bias Conditions. In: 33rd Conference on European Solid-State Device Research, ESSDERC, 16-18 Sept. 2003 , Lisboa, Portugal (pp. pp. 549-552).

Kolhatkar, J.S. and Salm, C. and Wallinga, H. (2003) Separation of random telegraph signals from 1/f noise in MOSFETs. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands (pp. pp. 614-617).

Le Minh, Phuong (2003) Silicon Light Emitting Devices for Integrated Applications. thesis.

Galca, Aurelian C. and Kooij, E. Stefan and Wormeester, Herbert and Salm, Cora and Leca, Victor and Rector, Jan H. and Poelsema, Bene (2003) Structural and optical characterization of porous anodic aluminium oxide. Journal of Applied Physics, 94 (7). pp. 4296-4305. ISSN 0021-8979

Faber, E.J. and Groeneveld, W.H. and Smet, L.C.P.M. de and Olthuis, W. and Zuilhof, H. and Sudhölter, E.J.R. and Bergveld, P. and Berg, A. van den (2003) Study of stability and pH response of organic monolayers on silicion in aqueous solutions via Mott Schottky measurements. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal.

Sowariraj, M.S.B. and Smedes, Theo and Salm, Cora and Mouthaan, Ton and Kuper, Fred G. (2003) Study on the influence of package parasitics and substrate resistance on the Charged Device Model(CDM) failure levels - possible protection methodology. In: 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands (pp. pp. 657-662).

Schmitz, J. and Cubaynes, F.N. and Havens, R.J. and Kort, R. de and Scholten, A.J. and Tiemeijer, L.F. (2003) Test structure design considerations for RF-CV measurements on leaky dielectrics. In: International Conference on Microelectronic Test Structures, 2003, 17-20 March 2003, Monterey, California, USA (pp. 181- 185).

2002

Kovalgin, A.Y. and Holleman, J. and Berg, A. van den (2002) A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances. In: Eurosensors XVI, European Conference on Solid-State Transducers, September 15-18, 2002, Prague, Czech Republic (pp. pp. 88-91).

Kolhatkar, J.S. and Salm, C. and Wallinga, H. (2002) Analysis of 'Switched Biased' random telegraph signals in MOSFETs. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands (pp. pp. 42-45).

Tosic Golo, Natasa and Kuper, Fred G. and Mouthaan, Ton J. (2002) Analysis of the Electrical Breakdown in Hydrogenated Amorphous Silicon Thin-Film Transistors. IEEE Transactions on Electron Devices, 49 (6). pp. 1012-1018. ISSN 0018-9383

Bystrova, S. and Holleman, J. and Woerlee, P.H. and Wolters, R.A.M. (2002) Characterization of Ta-based barrier films on SiLK for Cu-metalization. In: 5th Annual Workshop on Semiconductors Advances for Future Electronics, SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands (pp. pp. 9-13).

Ackaert, Jan and Wang, Zhichun and De Backer, E. and Coppens, P. (2002) Charging damage in floating metal-insulator-metal capacitors. In: 6th International Symposium on Plasma Process-Induced Damage, 13-15 May 2001, Monterey, California, USA (pp. pp. 120-123).

Kovalgin, A.Y. and Holleman, J. and Berg, A. van den (2002) Combined light/heat/gas sensors with decoupled electrical and thermal resistances. In: SeSens 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 635-648).

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. (2002) Comparison of H2O and D2O oxidation kinetics of <100> silicon. In: 5th Annual Workshop on Semiconductors Advances for Future Electronics, SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands (pp. pp. 35-38).

Mouthaan, Ton J. and Brink, R.W. and Vos, H. (2002) Competencies of BSc and MSc programmes in electrical engineering and student portfolios. In: First IEEE International Workshop on Electronic Design, Test and Applications, DELTA 2002, 29-31 Jan 2002 , Christchurch, New Zealand (pp. pp. 203-208).

Kolhatkar, J.S. and Salm, C. and Knitel, M.J. and Wallinga, H. (2002) Constant and Switched Bias Low Frequency Noise in p-MOSFETs with Varying Gate Oxide Thickness. In: 32nd European Solid-State Device Research Conference, ESSDERC, 24-26 September 2002, Firenze, Italy (pp. pp. 83-86).

Wang, Zhichun and Ackaert, Jan and Salm, Cora and Backer, Eddy de and Bosch, Geert van den and Zawalski, Wade (2002) Correlation between Hot Carrier Stress, Oxide Breakdown and Gate Leakage Current for Monitoring Plasma Processing Induced Damage on Gate Oxide. In: 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2002. IPFA, Singapore, Thailand, 8-12 July 2002, Singapore, Thailand (pp. pp. 242-245).

Ackaert, Jan and Wang, Zhichun and Backer, Eddy de and Salm, Cora (2002) Correlation between hot carrier stress, oxide breakdown and gate leakage current for monitoring plasma processing induced damage on gate oxide. In: 7th International Symposium of Plasma Process-Induced Damage, June 6-7, 2002, Maui, Hawaii, USA (pp. 45- 48).

Golo, Natasa (2002) Electrostatic Discharge Effects in Thin Film Transistors. thesis.

Nguyen, H. and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2002) Fast temperature cycling and electromigration induced thin film cracking multilevel interconnection: experiments and modeling. Microelectronics Reliability, 42 (9-11). pp. 1415-1420. ISSN 0026-2714

Nguyen, H. and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2002) Fast temperature cycling stress-induced and electromigration-induced interlayer dielectric cracking failure in multilevel interconnection. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands (pp. pp. 69-74).

Sowariraj, M.S.B. and Kuper, F.G. and Salm, C. and Mouthaan, A.J. and Smedes, T. (2002) Impact of layout and technology variation on the CDM performance of ggNMOSTs and SCRs. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands (pp. pp. 104-107).

Kim, G.M. and Kovalgin, A.Y. and Holleman, J. and Brugger, J. (2002) Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching. Journal of Nanoscience and Nanotechnology, 2 (1). pp. 55-59. ISSN 1533-4880

Nguyen, H. and Salm, C. and Wenzel, R. and Mouthaan, A.J. and Kuper, F.G. (2002) Simulation and experimental characterization of reservoir and via layout effects on electromigration lifetime. Microelectronics Reliability, 42 (9-11). pp. 1421-1425. ISSN 0026-2714

Wang, Zhichun and Scarpa, Andrea and Smits, Sander and Salm, Cora and Kuper, Fred (2002) Temperature Effect on Antenna Protection Strategy for Plasma-Process Induced Charging Damage. In: 7th International Symposium of Plasma Process-Induced Damage, June 6-7, 2002, Maui, Hawaii, USA (pp. pp. 134-137).

Wang, Z. and Scarpa, A. and Smits, S.M. and Kuper, F.G. and Salm, C. (2002) Temperature effect on protection diode for plasma-process induced charging damage. In: Proceedings of the 5th annual workshop on Semiconductors Advances for Future Electronics SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands (pp. pp. 127-130).

Nguyen, H.V. and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2002) Test chip for Detecting Thin Film Cracking Induced by Fast Temperature Cycling and Electromigration in Multilevel Interconnect Systems. In: 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA, 8-12 July 2002 , Singapore, Thailand (pp. pp. 135-139).

Nguyen, H. and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B.H. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2002) Test chip for detecting thin film cracking induced by fast temperature cycling and electromigration in multilevel interconnect systems. In: 9th International Symposium on Physics and Failure Analysis 2002, 8-12 Jul 2002, Singapore, Thailand (pp. pp. 135-139).

Sowariraj, M.S.B. and Salm, C. and Mouthaan, A.J. and Smedes, T. and Kuper, F.G. (2002) The influence of technology variation on ggNMOSTs and SCRs against CDM ESD stress. Microelectronics Reliability, 42 (9-11). pp. 1287-1292. ISSN 0026-2714

2001

Kolhatkar, J.S. and Salm, C. and Wallinga, H. (2001) 1/f noise and switched bias noise measurement in p-MOSFET with varying gate oxide thickness. In: Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2001, 28-30 Nov 2001, Veldhoven, The Netherlands (pp. pp. 92-95).

Kovalgin, A.Y. and Holleman, J. (2001) A study of morphology and texture of LPCVD germanium-silicon films. Journal de physique, IV . pp. 47-54. ISSN 1155-4339

Wang, Zhichun and Ackaert, Jan and Salm, Cora and Kuper, Fred (2001) Charging induced damage on complex-antenna test structures. In: Proceedings of the 4th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2001, 29-30 Nov 2001, Veldhoven, The Netherlands (pp. pp. 220-223).

Nguyen, V.H. and Hof, A.J. and Kranenburg, H. van and Woerlee, P.H. and Weimar, F. (2001) Copper chemical mechanical polishing using a slurry-free technique. Microelectronic Engineering, 55 (1-4). pp. 305-312. ISSN 0167-9317

Merticaru, A.R. and Mouthaan, A.J. (2001) Dynamics of metastable defects in a-Si:H/SiN TFTs. Thin Solid Films, 383 (1-2). pp. 122-124. ISSN 0040-6090

Nguyen, H.V. and Salm, C. and Vroemen, J. and Voets, J. and Krabbenborg, B. and Bisschop, J. and Mouthaan, A.J. and Kuper, F.G. (2001) Fast thermal cycling stress and degredation in multilayer interconnects. In: 4th Annual Workshop on Semiconductors Advances for Future Electronics, SAFE, 28-30 Nov 2001, Veldhoven, The Netherlands (pp. pp. 136-140).

Hof, A.J. and Holleman, J. and Woerlee, P.H. (2001) Gate current for p+-poly PMOS devices under gate injection conditions. In: 4th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2001, 28-30 Nov 2001, Veldhoven, The Netherlands (pp. pp. 72-75).

Boselli, Gianluca and Meeuwsen, Stan and Mouthaan, Ton and Kuper, Fred (2001) Investigations on double-diffused MOS transistors under ESD zap conditions. Microelectronics Reliability, 41 (3). pp. 395-405. ISSN 0026-2714

Kovalgin, Alexey and Holleman, Jisk and Salm, Cora and Woerlee, Pierre (2001) Low-Pressure CVD of Germanium-Silicon films using Silane and Germane sources. In: Thin Film Transistors Technologies V, 23-25 Oct 2000, Phoenix, Arizona, USA (pp. pp. 269-275).

Nguyen, Hieu V. and Salm, Cora and Mouthaan, Ton J. and Kuper, Fred G. (2001) Modeling of the Reservoir Effect on Electromigration Lifetime. In: 8th International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA, July 9-13, 2001, Singapore (pp. pp. 169-173).

Ackaert, J. and Wang, Z. and De Backer, E. and Colson, P. and Coppens, P. (2001) Non contact surface potential measurements for charging reduction during manufacturing of metal-insulator-metal capacitors. Microelectronics Reliability, 41 (9-10). pp. 1403-1407. ISSN 0026-2714

Boselli, Gianluca (2001) On High Injection Mechanisms in Semiconductor Devices under ESD Conditions. thesis.

Chen, X.Y. and Johansen, J.A. and Salm, C. and Rheenen, A.D. van (2001) On low-frequency noise of polycrystalline GexSi1-x for sub-micron CMOS technologies. Solid-State Electronics, 45 (11). pp. 1967-1971. ISSN 0038-1101

Wang, Zhichun and Ackaert, Jan and Salm, Cora and Kuper, Fred (2001) Plasma process-induced latent damage on gate oxide-demonstrated by single-layer and multi-layer antenna structures. In: 8th International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA, July 9-13, 2001, Singapore, Thailand (pp. pp. 220-223).

Wang, Zhichun and Scarpa, Andrea and Salm, Cora and Kuper, Fred (2001) Relation between Plasma Process-Induced Oxide Failure Fraction and Antenna Ratio. In: 6th International Symposium on Plasma Process-Induced Damage, May 14-15, 2001, Monterey, CA, USA (pp. pp. 16-19).

Salm, Cora and Houtsma, Vincent and Kuper, Fred and Woerlee, Pierre (2001) Temperature acceleration of thin gate-oxide degradation. In: 4th annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2001, 28-30 Nov 2001, Veldhoven, The Netherlands (pp. pp. 174-177).

Kovalgin, A.Y. and Holleman, J. and Berg, A. van den and Wallinga, H. (2001) Thin-film Antifuses for Pellistor Type Gas Sensors. In: Semiconductor Sensor and Actuator Technology, SeSens, November 30, 2001, Veldhoven, The Netherlands (pp. pp. 809-812).

2000

Bearda, Twan and Mertens, Paul W. and Heyns, Marc M. and Wallinga, Hans and Woerlee, Pierre (2000) Breakdown and Recovery of Thin Gate Oxides. Japanese Journal of Applied Physics, Part 2: Letters, 39 (6b). L582-L584. ISSN 0021-4922

Bearda, Twan and Mertens, Paul W. and Heyns, Marc M. and Woerlee, Pierre and Wallinga, Hans (2000) Breakdown and recovery of thin gate oxides. In: 30th European Solid-State Device research Conference, 11-13 September 2000, Cork, Ireland (pp. pp. 116-119).

Mouthaan, A.J. and Salm, C. and Lunenborg, M.M. and Wolf, M.A.R.C. de and Kuper, F.G. (2000) Dealing with hot-carrier aging in nMOS and DMOS, models, simulations and characterizations. Microelectronics Reliability, 40 (1). pp. 909-917. ISSN 0026-2714

Tosic, N. and Kuper, F.G. and Mouthaan, A.J. (2000) Degradation of -Si:H TFTs caused by electrostatic discharge. In: 22nd International Conference on Microelectronics, 2000, 14-17 May 2000 , Nis, Yugoslavia (pp. pp. 359-362).

Nguyen, V. and Kranenburg, H. van and Woerlee, P. (2000) Dependency of dishing on polish time and slurry chemistry in Cu CMP. Microelectronic Engineering, 50 (1-4). pp. 403-410. ISSN 0167-9317

Isai, G.I. and Kovalgin, A.Y. and Holleman, J. and Woerlee, P.H. and Wallinga, H. and Cobianu, C. (2000) Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source. In: 30th European Solid State Device Research Conference, 11-13 September 2000, Cork, Ireland (pp. pp. 424-427).

Houtsma, Vincent Etienne (2000) Gate Oxide Reliability of Poly-Si and Poly-SiGe CMOS Devices. thesis.

Ponomarev, Youri V. and Stolk, Peter A. and Salm, Cora and Schmitz, Jurriaan and Woerlee, Pierre H. (2000) High-Performance Deep SubMicron CMOS Technologies with Polycrystalline-SiGe Gates. IEEE Transactions on Electron Devices, 47 (4). pp. 848-855. ISSN 0018-9383

Nguyen, Viet H. and Velden, Peter van der and Daamen, Roel and Kranenburg, Herma van and Woerlee, Pierre H. (2000) Modelling of dishing for metal chemical mechanical polishing. In: International Electron Devices Meeting, 2000. IEDM Technical Digest, December 11 to 13, 2000, San Francisco, USA (pp. pp. 499-502).

Kovalgin, A.Y. and Akil, N.A. and Le Minh, P. and Holleman, J. and Berg, A. van den and Houtsma, V.E. and Wallinga, H. (2000) Nano-scale hotspots: a route to fast, real time and reliable gas sensing. In: SeSens workshop on Semiconductor Sensor and Actuator Technology, Nov. 30 - Dec. 1, 2000, Veldhoven, The Netherlands (pp. pp. 651-654).

Pol, Jacob Antonius van der (2000) New Methods for Building-In and Improvement of Integrated Circuit Reliability : Application to High Volume Semiconductor Manufacturing. thesis.

Boselli, G. and Mouthaan, A.J. and Kuper, F.G. (2000) Rise-time effects in ggnMOSt under TLP stress. In: 22nd International Conference on Microelectronics, 2000, 14-17 May, 2000, Nis, Serbia (pp. pp. 355-357).

Boselli, Gianluca and Mouthaan, Ton and Kuper, Fred (2000) Rise-time effects in ggnMOSt under TLP stress. Microelectronics Reliability, 40 (12). pp. 2061-2067. ISSN 0026-2714

Tosic, N. and Kuper, F.G. and Mouthaan, A.J. (2000) Transmission Line Model Testing of Top-Gate Amorphous Silicon Thin Film Transistors. In: 38th Annual IEEE International Reliability Physics Symposium, 10-13 April 2000, San Jose, CA (pp. pp. 289-294).

Scarpa, Andrea and Tao, Guoqiao and Kuper, Fred G. (2000) Wafer level reliability monitoring strategy of an advanced multi-process CMOS foundry. In: 41st Annual IEEE International International Reliability Physics Symposium, IRPS 2003, 30 March - 4 April 2003, Dallas, TX, USA (pp. 602- 603).

1999

Chen, X.Y. and Salm, C. and Hooge, F.N. and Woerlee, P.H. (1999) 1/f noise in polycrystalline SiGe analyzed in terms of mobility fluctuations. Solid-State Electronics, 43 (9). pp. 1715-1724. ISSN 0038-1101

Klootwijk, Johan H. and Kranenburg, Herma van and Woerlee, Pierre H. and Wallinga, Hans (1999) Deposited Inter-Polysilicon Dielectrics for Nonvolatile Memories. IEEE Transactions on Electron Devices, 1999 (7). pp. 1435-1445. ISSN 0018-9383

Wolters, D.R. and Verweij, J.F. and Zegers-van Duijnhoven, A.T.A. (1999) Dielectric breakdown in SiO2: A survey of test methods. In: New Insulators, Devices and Radiation Effects. Instabilities in Silicon Devices, 3 . Elsevier, pp. 233-263. ISBN 9780444818010

Boselli, Gianluca and Meeuwsen, Stan and Mouthaan, Ton and Kuper, Fred (1999) Investigations on Double-Diffused MOS (DMOS) transistors under ESD zap conditions. In: Electrical Overstress/Electrostatic Discharge Symposium, EOS/ESD, 1999, 28-30 Sept. 1999, Florida, USA (pp. pp. 11-18).

Houtsma, V.E. and Holleman, J. and Salm, C. and Haan, I.R. de and Schmitz, J. and Widdershoven, F.P. and Woerlee, P.H. (1999) Minority Carrier Tunneling and Stress-Induced Leakage Current for p+ gate MOS Capacitors with Poly-Si and PolySi0.7Ge0.3 Gate Material. In: International Electron Devices Meeting, 1999. IEDM Technical Digest, IEDM, Washington, USA (pp. pp. 457-460).

Schoenmaker, Wim and Petrescu, Violeta (1999) Modeling electromigration as a fluid–gas system. Microelectronics Reliability, 39 (11). pp. 1667-1676. ISSN 0026-2714

Houtsma, V.E. and Holleman, J. and Salm, C. and Woerlee, P.H. (1999) SILC in MOS capacitors with poly-Si and poly-Si0.7Ge0.3 gate material. Microelectronic Engineering, 48 (1-4). pp. 415-418. ISSN 0167-9317

Nguyen Nhu, Toan (1999) Spin-On Glass: Materials and Applications in Advanced IC Technologies. thesis.

Houtsma, V.E. and Holleman, J. and Salm, C. and Widdershoven, F.P. and Woerlee, P.H. (1999) Stress-Induced Leakage Current in p+ Poly MOS Capacitors with Poly-Si and Poly-Si0.7Ge0.3 Gate Material. IEEE Electron Device Letters, 1999 (20). pp. 314-316. ISSN 0741-3106

Nguyen Hoang, V. and Timmer, B. and Kranenburg, H. van and Woerlee, P.H. (1999) Time Dependency of the Planarization Process in Copper Chemical Mechanical Polishing. In: 29th European Solid-State Device Research Conference, ESSDERC, September 13-15, 1999, Leuven, Belgium (pp. pp. 260-263).

1998

Salm, C. and Klootwijk, J.H. and Ponomarev, Y. and Boos, P.W.M. and Gravesteijn, D.J. and Woerlee, P.H. (1998) Gate Current and Oxide Reliability in p+ Poly MOS Capacitors with Poly-Si and Poly-Ge0.3 Si0.7 Gate Material. IEEE Electron Device Letters, 19 (7). pp. 213-215. ISSN 0741-3106

Kranenburg, H. van and Woerlee, P.H. (1998) Influence of Overpolish Time on the Performance of W Damascene Technology. Journal of the Electrochemical Society, 145 (4). pp. 1285-1291. ISSN 0013-4651

Petrescu, V. and Mouthaan, A.J. and Schoenmaker, W. and Salm, C. (1998) Mechanical stress evolution and the blech length: 2D simulation of early electromigration effects. Microelectronics Reliability, 38 (6-8). pp. 1047-1050. ISSN 0026-2714

Vandenbossche, Eric and De Keukeleire, Catherine and Wolf, Marc de and Hove, Hugo van and Witters, Johan (1998) Modelling and simulation of hot-carriers degradation of high voltage floating lateral NDMOS transistors. Microelectronics Reliability, 38 (6-8). pp. 1097-1101. ISSN 0026-2714

Klootwijk, J.H. and Kranenburg, H. van and Weusthof, M.H.H. and Woerlee, P.H. and Wallinga, H. (1998) RTP annealings for high-quality LPCVD interpolysilicon dielectric layers. Microelectronics Reliability, 38 (2). pp. 277-280. ISSN 0026-2714

Mouthaan, Ton J. and Petrescu, Violeta (1998) The modeling of resistance changes in the early phase of electromigration. Microelectronics Reliability, 38 (1). pp. 99-105. ISSN 0026-2714

1997

Petrescu, V. and Mouthaan, A.J. (1997) 2D Modelling of Mechanical Stress Evolution and Electromigration in Confined Aluminium Interconnects. In: 21st International Conference on Microelectronics, MIEL 1997, NIS, Yugoslavia, 14-17 September 1997, Nis, Serbia (pp. pp. 629-632).

Salm, C. and Veen, D.T. and Gravesteijn, D.J. and Holleman, J. and Woerlee, P.H. (1997) Diffusion and Electrical Properties of Boron and Arsenic Doped Poly-Si and Poly-GexSi1�x (x ~ 0.3) as Gate Material for Sub-0.25 µm Complementary Metal Oxide Semiconductor Applications. Journal of the Electrochemical Society, 144 (10). pp. 3665-3673. ISSN 0013-4651

Petrescu, V. and Mouthaan, A.J. and Dima, G. and Govoreanu, B. and Mitrea, O. and Profirescu, M. (1997) Early resistance change and stress/electromigration evolution in near bamboo interconnects. In: International Semiconductor Conference, CAS, 7-11 Oct. 1997, Sinaia Romania (pp. pp. 311-314).

Petrescu, V. and Mouthaan, A.J. and Schoenmaker, W. (1997) Early resistance change and stress/electromigrationmodeling in aluminium interconnects. Microelectronics Reliability, 37 (10-11). pp. 1491-1494. ISSN 0026-2714

Rem, J.B. and Leuw, M.C.V. de and Holleman, J. and Verweij, J.F. (1997) Furnace and rapid thermal crystallization of amorphous GexSi1-x and Si for thin film transistors. Thin Solid Films, 296 (1-2). pp. 152-156. ISSN 0040-6090

Ponomarev, Y.V. and Salm, C. and Schmitz, J. and Woerlee, P.H. and Stolk, P.A. and Gravesteijn, D.J. (1997) Gate-Workfunction Engineering Using Poly-(Si,Ge) for High-Performance 0.18µm CMOS Technology. In: International Electron Devices Meeting, 1997. Technical Digest, Washington DC, USA (pp. pp. 829-832).

Rem, J.B. and Holleman, J. and Verweij, J.F. (1997) Incubation Time Measurements in Thin-Film Deposition. Journal of the Electrochemical Society, 144 (6). pp. 2101-2106. ISSN 0013-4651

Kranenburg, Herma van and Corbach, Herman D. van and Woerlee, Pierre H. and Lohmeier, Martin (1997) W-CMP for sub-micron inverse metallisation. Microelectronic Engineering, 33 (1-4). pp. 239-246. ISSN 0167-9317

1996

Lunenborg, M.M. and Graaff, H.C. de and Mouthaan, A.J. and Verweij, J.F. (1996) Comprehensive physical modeling of NMOSFET hot-carrier-induced degradation. Microelectronics Reliability, 36 (11/12). pp. 1667-1670. ISSN 0026-2714

Verweij, J.F. and Klootwijk, J.H. (1996) Dielectric breakdown I: A review of oxide breakdown. Microelectronics Journal, 27 (7). pp. 611-622. ISSN 0026-2692

Klootwijk, J.H. and Verweij, J.F. and Rem, J.B. and Bijlsma, S. (1996) Dielectric breakdown II: Related projects at the University of Twente. Microelectronics Journal, 27 (7). pp. 623-632. ISSN 0026-2692

Bijlsma, Sipke J. and Kranenburg, Herma van and Nieuwesteeg, K.J.B.M. and Pitt, Michael G. and Verweij, Jan F. (1996) Electrical breakdown of amorphous hydrogenated silicon rich silicon nitride thin film diodes. IEEE Transactions on Electron Devices, 43 (9). pp. 1592-1601. ISSN 0018-9383

Klootwijk, J.H. and Weusthof, M.H.H. and Kranenburg, H. van and Woerlee, P.H. and Wallinga, H. (1996) Improvements of deposited interpolysilicon dielectric characteristics with RTP N2O-anneal. IEEE Electron Device Letters, 17 (7). pp. 358-359. ISSN 0741-3106

Krabbenborg, B.H. and Bosma, A. and Graaff, H.C. de and Mouthaan, A.J. (1996) Layout to circuit extraction for three-dimensional thermal-electrical circuit simulation of device structures. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 15 (7). pp. 765-774. ISSN 0278-0070

Meneghesso, G. and Luchies, J.R.M. and Kuper, F.G. and Mouthaan, A.J. (1996) Turn-on speed of grounded gate NMOS ESD protection transistors. Microelectronics Reliability, 36 (11/12). pp. 1735-1738. ISSN 0026-2714

Meneghesso, G. and Luchies, J.R.M. and Kuper, F.G. and Mouthaan, A.J. (1996) Turn-on speed of grounded gate NMOS ESD protection transistors. In: 7th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, 8-11 October 1996, Enschede, The Netherlands (pp. pp. 1735-1738).

1995

Niehof, J. and Graaff, H.C. de and Mouthaan, A.J. and Verweij, J.F. (1995) An empirical model for early resistance changes due to electromigration. Solid-State Electronics, 38 (10). pp. 1817-1827. ISSN 0038-1101

Luchies, J.R.M. and Kort, C.G.M. de and Verweij, J.F. (1995) Fast turn-on of an NMOS ESD protection transistor: measurements and simulations. Journal of Electrostatics, 36 (1). pp. 81-92. ISSN 0304-3886

Graaff, H.C. de and Kloosterman, W.J. (1995) Modeling of the collector epilayer of a bipolar transistor in the MEXTRAM model. IEEE Transactions on Electron Devices, 42 (2). pp. 274-282. ISSN 0018-9383

Verweij, Jan and Lunenborg, Meindert (1995) On the design of a reliability circuit simulator. Microelectronics Reliability, 35 (1). pp. 101-103. ISSN 0026-2714

Haanappel, V.A.C. and Rem, J.B. and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1995) Properties of alumina films prepared by metal-organic chemical vapour deposition at atmospheric pressure in hte presence of small amounts of water. Surface and Coatings Technology, 72 (1-2). pp. 1-12. ISSN 0257-8972

1994

Masa, P. and Hoen, K. and Wallinga, H. (1994) 70 input, 20 nanosecond pattern classifier. In: IEEE International Conference on Neural Networks, 1994, 27 June - 2 July 1994, Orlando, FL, USA (pp. pp. 1854-1859).

Masa, Peter and Hoen, Klaas and Wallinga, Hans (1994) A high-speed analog neural processor. IEEE Micro, 14 (3). pp. 40-50. ISSN 0272-1732

Verweij, J.F. and Brombacher, A.C. and Lunenborg, M.M. (1994) Component lifetime modelling. Quality and Reliability Engineering International, 10 (4). pp. 263-271. ISSN 0748-8017

Zhou, M.-J. and Holleman, J. and Wallinga, H. (1994) Elimination or Minimisation of Optoelectronic Crosstalk between Photodiodes and Electronic Device in OEIC on Si. Electronics Letters, 30 (11). pp. 895-897. ISSN 0013-5194

Masa, P. and Hoen, K. and Wallinga, H. (1994) High speed VLSI neural network for high-energy physics. In: Fourth International Conference on Microelectronics for Neural Networks and Fuzzy Systems, 26-28 Sept. 1994, Turin, Italy (pp. pp. 422-428).

Liefting, Reinoud and Wijburg, Rutger C. and Custer, Jonathan S. and Wallinga, Hans and Saris, Frans W. (1994) Improved device performance by multistep or carbon co-implants. IEEE Transactions on Electron Devices, 41 (1). pp. 50-55. ISSN 0018-9383

Wolbert, Philip B.M. and Wachutka, Gerhard K.M. and Krabbenborg, Benno H. and Mouthaan, Ton J. (1994) Nonisothermal device simulation using the 2-D numerical process/device simulator TRENDY and application to SOI-devices. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 13 (3). pp. 293-302. ISSN 0278-0070

Kuper, Fred and Luchies, Jan Marc and Bruines, Joop (1994) Suppression and origin of soft ESD failures in a submicron CMOS process. Journal of Electrostatics, 33 (3). pp. 313-325. ISSN 0304-3886

Kort, Kees de and Luchies, Jan Marc and Vrehen, J.J. (1994) The transient behaviour of an input protection. Microelectronic Engineering, 24 (1-4). pp. 355-362. ISSN 0167-9317

Liefting, J.R. and Custer, J.S. and Saris, F.W. (1994) Time evolution of dislocation formation in ion implanted silicon. Materials Science and Engineering B: Solid-state materials for advanced technology, 25 (1). pp. 60-67. ISSN 0921-5107

1993

Niehof, J. and Flinn, P.A. and Maloney, T.J. (1993) Electromigration early resistance increase measurements. Quality and Reliability Engineering International, 9 (4). pp. 295-298. ISSN 0748-8017

Holleman, Jisk and Verweij, Jan F. (1993) Extraction of Kinetic Parameters for the Chemical Vapor Deposition of Polycrystalline Silicon at Medium and Low Pressures. Journal of the Electrochemical Society, 140 (7). pp. 2089-2097. ISSN 0013-4651

Holleman, J. and Kuiper, A.E.T. and Verweij, J.F. (1993) Kinetics of the Low Pressure Chemical Vapor Deposition of Polycrystalline Germanium-Silicon Alloys from SiH4 and GeH4. Journal of the Electrochemical Society, 140 (6). pp. 1717-1722. ISSN 0013-4651

Holleman, Jisk and Hasper, Albert and Kleijn, Chris R. (1993) Loading Effects on Kinetical and Electrical Aspects of Silane-Reduced Low-Pressure Chemical Vapor Deposited Selective Tungsten. Journal of the Electrochemical Society, 140 (3). pp. 818-825. ISSN 0013-4651

Schmitz, J.E.J. and Hasper, A. (1993) On the Mechanism of the Step Coverage of Blanket Tungsten Chemical Vapor Deposition. Journal of the Electrochemical Society, 140 (7). pp. 2112-2116. ISSN 0013-4651

Luchies, Jan Marc and Kuper, Fred and Verweij, Jan (1993) On the use of DC measurements for ESD-related process monitoring. Quality and Reliability Engineering International, 9 (4). pp. 309-313. ISSN 0748-8017

Klappe, J.G.E. and Barsony, I. and Liefting, J.R. and Ryan, T.W. (1993) Optimization of ion implantation damage annealing by means of high-resolution X-ray diffraction. Thin Solid Films, 235 (1-2). pp. 189-197. ISSN 0040-6090

Verweij, Jan F. (1993) VLSI Reliability in Europe. Proceedings of the IEEE, 81 (5). pp. 675-681. ISSN 0018-9219

1992

Saris, F.W. and Custer, J.S. and Schreutelkamp, R.J. and Liefting, J.R. and Wijburg, R. and Wallinga, H. (1992) Avoiding dislocations in ion-implanted silicon. Microelectronic Engineering, 19 (1-4). pp. 357-362. ISSN 0167-9317

Mullem, C.J. van and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators the resonant silicon beam force sensor. Sensors and Actuators A: Physical, 31 (1-3). pp. 168-173. ISSN 0924-4247

Wijburg, R.C.M. and Liefting, J.R. and Custer, J.S. and Wallinga, H. and Saris, F.W. (1992) Improvement of device characteristics by multiple step implants or introducing a C gettering layer. Microelectronic Engineering, 19 (1-4). pp. 543-546. ISSN 0167-9317

Krabbenborg, Benno and Beltman, R.A.M. and Wolbert, P.B.M. and Mouthaan, A.J. (1992) Physics of electro-thermal effects in ESD protection devices. Journal of Electrostatics, 28 (3). pp. 285-299. ISSN 0304-3886

1991

Holleman, J. and Hasper, A. and Middelhoek, J. (1991) A Reflectometric Study of the Reaction between Si and WF6 during W-LPCVD on Si and of the Renucleation during the H2 Reduction of WF6. Journal of the Electrochemical Society, 138 (3). pp. 783-788. ISSN 0013-4651

Ragay, F.W. and Aarnink, A.A.I. and Wallinga, H. (1991) Complementary vertical bipolar transistor process using high-energy ion implantation. Electronics Letters, 27 (23). pp. 2141-2143. ISSN 0013-5194

Haart, L.G.J. de and Kuipers, R.A. and Vries, K.J. de and Burggraaf, A.J. (1991) Deposition and Electrical Properties of Thin Porous Ceramic Electrode Layers for Solid Oxide Fuel Cell Application. Journal of the Electrochemical Society, 138 (7). pp. 1970-1975. ISSN 0013-4651

Holleman, J. and Hasper, A. and Middelhoek, J. (1991) In Situ Growth Rate Measurement of Selective LPCVD of Tungsten. Journal of the Electrochemical Society, 138 (4). pp. 989-993. ISSN 0013-4651

Hasper, A. and Holleman, J. and Middelhoek, J. and Kleijn, C.R. and Hoogendoorn, C.J. (1991) Modeling and Optimization of the Step Coverage of Tungsten LPCVD in Trenches and Contact Holes. Journal of the Electrochemical Society, 138 (6). pp. 1728-1738. ISSN 0013-4651

Hemink, G.J. and Wijburg, R.C.M. and Wolbert, P.B.M. and Wallinga, H. (1991) Modeling of VIPMOS hot electron gate currents. Microelectronic Engineering, 15 (1-4). pp. 65-68. ISSN 0167-9317

Wijburg, Rutger C. and Ragay, Frederik W. (1991) On the recombination in the quasi-neutral base of polysilicon emitter transistors with interfacial oxides. Solid-State Electronics, 34 (12). pp. 1469-1471. ISSN 0038-1101

Ning, Zhen-Qiu and Mouthaan, Ton and Wallinga, Hans (1991) SEAS: A simulated evolution approach for analog circuit synthesis. In: IEEE Custom Integrated Circuits Conference, CICC, 12-15 May, 1991, San Diego, California, USA (pp. 5.2.1-5.2.4).

Aïte, K. and Hári, P. and Bijker, W. and Middelhoek, J. (1991) Simulation, design and fabrication of large area implanted silicon two-dimensional position sensitive radiation detectors. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 305 (3). pp. 533-540. ISSN 0168-9002

Kleijn, C.R. and Hoogendoorn, C.J. and Hasper, A. and Holleman, J. and Middelhoek, J. (1991) Transport Phenomena in Tungsten LPCVD in a Single-Wafer Reactor. Journal of the Electrochemical Society, 138 (2). pp. 509-517. ISSN 0013-4651

Wijburg, Rutger C. and Hemink, Gertjan J. and Middelhoek, Jan and Wallinga, Hans and Mouthaan, Ton J. (1991) VIPMOS-A novel buried injector structure for EPROM applications. IEEE Transactions on Electron Devices, 38 (1). pp. 111-120. ISSN 0018-9383

1990

Wolbert, Ph. and Schie, E. van and Wijburg, R.C.M. and Hemink, G. and Middelhoek, J. (1990) Simulation of a novel EPROM structure using the energy-balance equations. In: Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits, NUPAD III, June 3-4, 1990, Honolulu, Hawaii (pp. pp. 51-52).

Wijburg, Rutger C. and Hemink, Gertjan J. and Middelhoek, Jan (1990) Strongly asymmetric doping profiles at mask edges in high energy ion implantation. IEEE Transactions on Electron Devices, 37 (1). pp. 79-87. ISSN 0018-9383

1989

Keim, Enrico G. and Aïte, Kamal (1989) Quantitative Auger depth profiling of LPCVD and PECVD silicon nitride films. Fresenius' Zeitschrift für Analytische Chemie, 333 (4-5). pp. 319-321. ISSN 0016-1152

Schie, Eddie van and Middelhoek, Jan (1989) Two methods to improve the performance of Monte Carlo simulations of ion implantation in amorphous targets. IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 8 (2). pp. 108-113. ISSN 0278-0070

1988

Hendriks, E.A. and Zijlstra, R.J.J. and Middelhoek, J. (1988) Current noise in (111) n-channel Si-MOSFET's at T = 4.2 K. Physica B+C, 147 (2-3). pp. 297-304. ISSN 0378-4363

1974

Middelhoek, J. and Holleman, J. (1974) Low Phosphorus Concentrations in Si by Diffusion from Doped Oxide Layers. Journal of the Electrochemical Society, 121 (1). pp. 132-137. ISSN 0013-4651

This list was generated on Thu Oct 23 06:04:37 2014 CEST.