Research Group: Industrial Focus Group XUV Optics (XUV)

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Number of items: 125.

2017

Pachecka, M. and Sturm, J.M. and Lee, C.J. and Bijkerk, F. (2017) Adsorption and Dissociation of CO2 on Ru (0001). Journal of physical chemistry . ISSN 0022-3654

Liu, F. and Sturm, J.M. and Lee, C.J. and Bijkerk, F. (2017) Coexistence of ice clusters and liquid-like water clusters on the Ru(0001) surface. Physical chemistry chemical physics (PCCP), 19 (12). 8288 - 8299. ISSN 1463-9076

Huber, S.P. and Gullikson, E. and Meyer-Ilse, J. and Frye, C.D. and Edgar, J.H. and Kruijs, R.W.E. van de and Bijkerk, F. and Prendergast, D. (2017) Detection of defect populations in superconductor boron subphosphide B12P2 through X-ray absorption spectroscopy. Journal of materials chemistry. A, 5 . 5737 - 5749. ISSN 2050-7488

Huber, S.P. and Medvedev, V.V. and Gullikson, E. and Padavala, B. and Edgar, J.H. and Kruijs, R.W.E. van de and Bijkerk, F. and Prendergast, D. (2017) Determining crystal phase purity in c-BP through X-ray absorption spectroscopy. Physical chemistry chemical physics (PCCP), 19 (12). 8174 - 8187. ISSN 1463-9076

Coloma Ribera, Roger (2017) Growth and thermal oxidation of Ru and ZrO2 thin films as oxidation protective layers. thesis.

Coloma Ribera, R. and Kruijs, R.W.E. van de and Sturm, J.M. and Yakshin, A. and Bijkerk, F. (2017) Intermixing and thermal oxidation of ZrO2 thin films grown on a-Si, SiN, and SiO2 by metallic and oxidic mode magnetron sputtering. Journal of applied physics, 121 . ISSN 0021-8979

Barreaux, J.L.P. and Kozhevnikov, I.V. and Bayraktar, M. and Kruijs, R.W.E. van de and Bastiaens, H.M.J. and Bijkerk, F. and Boller, K-J. (2017) Narrowband and tunable anomalous transmission filters for special monitoring in the extreme ultraviolet wavelength region. Optics express, 25 (3). 1993 - 2008. ISSN 1094-4087

Huang, Q. and Medvedev, V.V. and Kruijs, R.W.E. van de and Yakshin, A. and Louis, E. and Bijkerk, F. (2017) Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics. Applied physics reviews, 4 (011104). ISSN 1931-9401

Garcia Porcel, M.A. and Schepers, F. and Epping, J.P. and Hellwig, T. and Hoekman, M. and Heideman, R.G. and Slot, P.J.M. van der and Lee, C.J. and Schmidt, R. and Bratschitsch, R. and Fallnich, C. and Boller, K-J. (2017) Two-octave spanning supercontinuum generation in stoichiometric silicon nitride waveguides pumped at telecom wavelengths. Optics express, 25 (2). 1542 - 1554. ISSN 1094-4087

2016

Bos, R.A.J.M. van den and Reshetniak, V. and Lee, C.J. and Benschop, J.P.H. and Bijkerk, F. (2016) A model for pressurized hydrogen induced thin film blisters. Journal of applied physics, 120 (23). 235304 -. ISSN 0021-8979

Bayraktar, Muharrem and Bastiaens, Bert and Bruineman, Caspar and Vratzov, Boris and Bijkerk, Fred (2016) Broadband transmission grating spectrometer for measuring the emission spectrum of EUV sources. NEVAC blad, 54 (1). 14 - 19. ISSN 0169-9431

Dinger, U. and Bijkerk, F. and Bayraktar, M. and Dier, O. (2016) EUV-mirror, optical system with EUV-mirror and associated operating method. Patent.

Pachecka, M. and Sturm, J.M. and Kruijs, R.W.E. van de and Lee, C.J. and Bijkerk, F. (2016) Electronegativity-dependent tin etching from thin films. AIP advances, 6 (7). ISSN 2158-3226

Huber, S.P. and Medvedev, V.V. and Meyer-Ilse, J. and Gullikson, E. and Padavala, B. and Edgar, J.H. and Sturm, J.M. and Kruijs, R.W.E. van de and Prendergast, D. and Bijkerk, F. (2016) Exploiting the P L2,3 absorption edge for optics: spectroscopic and structural characterization of cubic boron phosphide thin films. Optical materials express, 6 . 3946 - 3959. ISSN 2159-3930

Horst, R.M. and Beckers, J. and Osorio, E.A. and Astakhov, D. and Goedheer, W.J. and Lee, C.J. and Ivanov, V.V. and Krivtsum, V.M. and Koshelev, K.N. and Lopaev, D.V. (2016) Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen. Journal of physics D: applied physics, 49 (14). ISSN 0022-3727

Astakhov, D. and Goedheer, W.J. and Lee, C.J. and Ivanov, V.V. and Krivtsun, V.M. and Koshelev, K.N. and Lopaev, D.V. and Horst, R.M. and Beckers, J. and Osorio, E.A. and Bijkerk, F. (2016) Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen. Journal of physics D: applied physics, 49 (29). p. 295204. ISSN 0022-3727

Liu, F. and Sturm, J.M. and Lee, C.J. and Bijkerk, F. (2016) Extreme UV induced dissociation of amorphous solid water and crystalline water bilayers on Ru(0001). Surface science, 646 . 101 - 107. ISSN 0039-6028

Liu, F. and Sturm, J.M. and Lee, C.J. and Bijkerk, F. (2016) Extreme UV induced dissociation of amorphous solid water and crystalline water bilayers on Ru(0001). Surface science, 646 . 101 - 107. ISSN 0039-6028

Senf, F. and Bijkerk, F. and Eggenstein, F. and Gwalt, G. and Huang, Q. and Kruijs, R.W.E. van de and Kutz, O. and Lemke, S. and Louis, E. and Mertin, M. and Packe, I. and Rudolph, I. and Schafers, F. and Siewert, F. and Sokolov, A. and Sturm, J.M. and Waberski, C. and Wang, Z. and Wolf, J. and Zeschke, T. and Erko, A. (2016) Highly efficient blazed grating with multilayer coating for tender X-ray energies. Optics express, 24 (12). 13220 - 13230. ISSN 1094-4087

Huber, Sebastiaan Philippe (2016) Illuminating the structure of borides through X-ray absorption spectroscopy. thesis.

Zoethout, E. and Louis, E. and Bijkerk, F. (2016) In depth study of molybdenum silicon compound formation at buried interfaces. Journal of applied physics, 120 (11). ISSN 0021-8979

Coloma Ribera, R. and Kruijs, R.W.E. van de and Sturm, J.M. and Yakshin, A.E. and Bijkerk, F. (2016) In vacuo growth studies of Ru thin films on Si, SiN, and SiO2 by high-sensitivity low energy ion scattering. Journal of applied physics, 120 (6). 065303 -. ISSN 0021-8979

Makhotkin, I.A. and Soroka, O. and Yakunin, S.N. and Nikolaev, K. and Hendrikx, S.P. and Lee, C.J. (2016) In-situ study of the YH2-YH3+x transition during hydrogenation by GI-DAFS and HAXPEX. [Report]

Loch, R.A. and Ceccotti, T. and Quere, F. and George, H. and Bonnaud, G. and Réau, F. and D'Oliviera, P. and Luttikhof, M.J.H. and Bijkerk, F. and Boller, K-J. and Blaclard, G. and Combis, P. (2016) Ion acceleration in the transparent regime and the critical influence of the plasma density scale length. Physics of plasmas, 23 (9). ISSN 1070-664X

Tas, S. and Zoetebier, B. and Sardan Sukas, Ö. and Bayraktar, M. and Hempenius, M.A. and Vancso, G.J. and Nijmeijer, D.C. (2016) Ion-Selective Ionic Polymer Metal Composite (IPMC) Actuator Based on Crown Ether Containing Sulfonated Poly(Arylene Ether Ketone). Macromolecular materials and engineering . 1600381 - 1600381. ISSN 1438-7492

Medvedev, V.V. and Yakshin, A. and Krivtsun, V.M. and Bijkerk, F. (2016) Kombinierter Reflektor und Filter für Licht underschiedlicher Wellenlängen. Patent.

Astakhov, D. and Goedheer, W.J. and Lee, C.J. and Ivanov, V.V. and Krivtsun, V.M. and Yakushev, O. and Koshelev, K.N. and Lopaev, D.V. and Bijkerk, F. (2016) Numerical and experimental studies of the carbon etching in EUV-induced plasma. Arxiv.org, 1507.02705 .

Astakhov, Dmitry (2016) Numerical study of extreme-ultra-violet generated plasmas in hydrogen. thesis.

Huber, S.P. and Gullikson, E. and Kruijs, R.W.E. van de and Bijkerk, F. and Prendergast, D. (2016) Oxygen-stabilized triangular defects in hexagonal boron nitride. Physical review B: Condensed matter and materials physics, 92 . 1 - 7. ISSN 1098-0121

Bayraktar, M. and Chopra, A. and Rijnders, A.J.H.M. and Boller, K-J. and Bijkerk, F. (2016) Piezoelectric Based Adaptive Optics for Extreme Ultraviolet Wavelenghts. In: SPIE Advanced Lithography Conference, 22-02-2015, San Jose, California.

Chopra, A. and Bayraktar, M. and Nijland, M. and Elshof, J.E. ten and Bijkerk, F. and Rijnders, A.J.H.M. (2016) Polarizaton recovery in lead zirconate titanate thin films deposited on nanosheets-beffered Si (oo1). AIP advances, 6 (125209). ISSN 2158-3226

Zameshin, Andrey and Makhotkin, Igor A. and Yakunin, Sergey N. and Kruijs, Robbert W.E. van de and Yakshin, Andrey E. and Bijkerk, F. (2016) Reconstruction of interfaces of periodic multilayers from X-ray reflectivity using a free-form approach. Journal of applied crystallography, 49 (4). 1300 - 1307. ISSN 0021-8898

Lee, C.J. and Bijkerk, F. (2016) Reflectivity tuning through controlled hydrogenation. Patent.

Sobierajski, R. and Jacyna, I. and Dluzewski, P. and Klepka, M. and Klinger, D. and Pelka, J.B. and Burian, T. and Hajkova, V. and Juha, L. and Saksl, K. and Vozda, V. and Makhotkin, I.A. and Louis, E. and Faatz, B. and Tiedtke, K. and Toleikis, S. and Enkisch, H. and Hermann, M. and Strobel, S. and Loch, R.A. and Chalupsky, J. (2016) Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 Mhz repetition rate. Optics express, 24 (14). 15468 - 15477. ISSN 1094-4087

Huber, S.P. and Gullikson, E. and Frye, C.D. and Edgar, J.H. and Kruijs, R.W.E. van de and Bijkerk, F. and Prendergast, D. (2016) Self-healing in B12P2 through Mediated Defect Recombination. Chemistry of materials, 28 (22). 8415 - 8428. ISSN 0897-4756

Goh, S.J. and Reinink, J. and Tao, Y. and Slot, P.J.M. van der and Bastiaens, H.M.J. and Herek, J.L. and Biedron, S.G. and Milton, S.V. and Boller, K-J. (2016) Spectral control of high-harmonic generation via drive laser pulse shaping in a wide-diameter capillary. Optics express, 24 (2). 1604 - 1605. ISSN 1094-4087

Medvedev, V.V. and Yakshin, A. and Bijkerk, F. (2016) Spiegel, insbesondere für eine mikrolithographische Projektionsbelichtungsanlage. Patent.

Kuznetsov, D. and Yakshin, A. and Sturm, J.M. and Kruijs, R.W.E. van de and Bijkerk, F. (2016) Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation. AIP advances, 6 . ISSN 2158-3226

Huber, S.P. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Boller, K-J. and Bijkerk, F. (2016) Subwavelength single layer absorption resonance antireflection coatings. Optics express, 22 (1). 490 - 497. ISSN 1094-4087

Porcel, M.A. and Schepers, Florian and Epping, J.P. and Hellwig, T. and Hoekman, M. and Heideman, R.G. and Slot, P.J.M. van der and Lee, C.J. and Schmidt, A.R. and Bratschitsch, R. and Fallnich, C. and Boller, K-J. (2016) Two-octave spanning supercontiinuum generation in stoichiometric silicon nitride waveguides pumped at telecom wavelengths. Optics express, 25 (2). 1542 - 1554. ISSN 1094-4087

Schepers, F. and Porcel, M.A. and Epping, J.P. and Hellwig, T. and Hoekman, M. and Mateman, R. and Leinse, A. and Heideman, R.G. and Rees, A. van and Slot, P.J.M. van der and Lee, C.J. and Schmidt, R. and Bratschitsch, R. and Boller, K-J. and Fallnich, C. (2016) Ultra-broadband Supercontinuum Generation at Telecommunication Wavelengths in Dispersion Engineered Stoichiometric Si3N4 Waveguides. In: CLEO: 2016 - the Premier International Laser and Electro-Optics Event, 05-06-2016, San Jose, California, USA (pp. AM3J.5 -).

Belsey, N.A. and Cant, D.J.H. and Minelli, C. and Araujo, J.R. and Bock, B. and Brüner, P. and Castner, D.G. and Ceccone, C. and Counsell, J.D.P. and Dietrich, P.M. and Engelhard, M.H. and Fearn, S. and Galhardo, C.E. and Kalbe, H. and Kim, J.W. and Lartundo-Rojas, L. and Luftman, H.S. and Nunney, T.S. and Pseiner, J. and Smith, E.F. and Spampinato, V. and Sturm, J.M. and Thomas, A.G. and Treacy, J.P.W. and Veith, L. and Wagstaffe, M. and Wang, H. and Wang, M.. and Wang, Y.C. and Werner, W. and Yang, L. and Shard, A.G. (2016) Versailles Project on Advanced Materials and Standards Interlaboratory Study on Measuring the Thickness and Chemistry of Nanoparticle Coatings Using XPS and LEIS. Journal of physical chemistry C, 120 (42). 24070 - 24079. ISSN 1932-7447

2015

Gao, An (2015) Analysis of extreme ultraviolet induced surface defect processes. thesis.

Medvedev, V.V. and Yang, J. and Schmidt, A.J. and Yakshin, A. and Kruijs, R.W.E. van de and Zoethout, E. and Bijkerk, F. (2015) Anisotropy of heat conduction in Mo/Si multilayers. Journal of applied physics, 118 (8). ISSN 0021-8979

Dolgov, A. and Lopaev, D. and Lee, C.J. and Zoethout, E. and Medvedev, V.V. and Yakushev, O. and Bijkerk, F. (2015) Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source. Applied surface science, 353 . 708 - 713. ISSN 0169-4332

Makhotkin, I.A. and Zameshin, A. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2015) Characterization of nanoscale multilayer structures upon thermal annealing. Proceedings of SPIE - the international society for optical engineering, 9510 . ISSN 0277-786X

Chopra, A. and Bayraktar, M. and Bijkerk, F. and Rijnders, A.J.H.M. (2015) Controlled growth of PbZr0.52Ti0.48O3 using nanosheet coated Si (001). Thin solid films, 589 . 13 - 16. ISSN 0040-6090

Coloma Ribera, R. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2015) Determination of oxygen diffusion kinetics during thin film ruthenium oxidation. Journal of applied physics, 118 . 055303 -. ISSN 0021-8979

Zwol, P.J. van and Vles, D.F. and Voorthuijzen, W.P. and Péter, M. and Vermeulen, H. and Zande, W.J. and Sturm, J.M. and Kruijs, R.W.E. van de and Bijkerk, F. (2015) Emissivity of freestanding membranes with thin metal coatings. Journal of applied physics, 118 . 213107 -. ISSN 0021-8979

Dolgov, A. and Yakushev, O. and Abrikosov, A. and Snegirev, E. and Krivtsun, V.M. and Lee, C.J. and Bijkerk, F. (2015) Extreme ultraviolet (EUV) source and ultra-high vacuum chamber for studying EUV-induced processes. Plasma sources science and technology, 24 (3). 035003. ISSN 0963-0252

Goh, S.J. and Bastiaens, H.J.M. and Vratzov, B. and Huang, Q. and Bijkerk, F. and Boller, K-J. (2015) Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range. Optics express, 23 (4). 4421 - 4434. ISSN 1094-4087

Goh, S.J. and Bastiaens, H.J.M. and Vratzov, B. and Huang, Q. and Bijkerk, F. and Boller, K-J. (2015) Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range. Virtual journal for biomedical optics, 10 (3). 4421 - 4434. ISSN 1931-1532

Epping, J.P. and Hoekman, M. and Mateman, R. and Leinse, A. and Heideman, R.G. and Rees, A. van and Slot, P.J.M. van der and Lee, C.J. and Boller, K-J. (2015) High confinement, high yield Si3N4 waveguides for nonlinear optical applications. Optics express, 23 (2). 642 - 648. ISSN 1094-4087

Kuznetsov, D. and Yakshin, A. and Sturm, J.M. and Kruijs, R.W.E. van de and Louis, E. and Bijkerk, F. (2015) High-reflectance La/B-based multilayer mirror for 6.x  nm wavelength. Optics letters, 40 (16). 3378 - 3781. ISSN 0146-9592

Medvedev, V.V. and Yakshin, A. and Krivtsun, V.M. and Bijkerk, F. (2015) Multi-layered structure for an EUV Mirror. Patent.

Barreaux, J.L.P. and Kozhevnikov, I.V. and Bastiaens, H.M.J. and Kruijs, R.W.E. van de and Bijkerk, F. and Boller, K-J. (2015) Multilayer Filter Using the Borrmann Effect for EUV Source Monitoring. In: CLEO/Europe-EQEC 2015, 21-06-2015 - 25-06-2015, Munich, Germany (pp. CH_P_35 -).

Epping, J.P. and Hellwig, T. and Hoekman, M. and Mateman, R. and Leinse, A. and Heideman, R.G. and Rees, A. van and Slot, P.J.M. van der and Lee, C.J. and Fallnich, C. and Boller, K-J. (2015) On-chip visible-to-infrared supercontinuum generation with more than 495 THz spectral bandwidth. Optics express, 23 (15). 19596 - 19604. ISSN 1094-4087

Banerjee, Sourish and Aarnink, Antonius A.I. and Kruijs, Robbert van de and Kovalgin, Alexey Y. and Schmitz, Jurriaan (2015) PEALD AlN: controlling growth and film crystallinity. Physica Status Solidi C: Conferences and critical reviews, 12 (7). pp. 1036-1042. ISSN 1610-1634

Medvedev, V.V. and Yakshin, A.E. and Kruijs, R.W.E. van de and Bijkerk, F. (2015) Phosphorus-based compounds for EUV multilayer optics materials. Optical materials express, 5 (6). 1450 - 1459. ISSN 2159-3930

Gao, A. and Rizo, P.J. and Scaccabarozzi, L. and Lee, C.J. and Banine, V.Y. and Bijkerk, F. (2015) Photoluminescence-based detection of particle contamination on extreme ultraviolet reticles. Review of scientific instruments, 86 (063109). ISSN 0034-6748

Astakhov, D. and Goedheer, W.J. and Lee, C.J. and Ivanov, V.V. and Krivtsun, V.M. and Zotovich, A.I. and Zyryanov, S.M. and Lopaev, D. and Bijkerk, F. (2015) Plasma probe characteristics in low density hydrogen pulsed plasmas. Plasma sources science and technology, 24 (5). 1 - 10. ISSN 0963-0252

Epping, J.P. and Hellwig, T. and Mateman, R. and Rees, A. van and Hoekman, M. and Leinse, A. and Heideman, R.G. and Slot, P.J.M. van der and Lee, C.J. and Fallnich, C. and Boller, K-J. (2015) Simultaneous supercontinuum and third harmonic generation in Si3N4 waveguides. In: CLEO/Europe-EQEC, 21-06-2015 - 25-06-2015, Munich, Germany (pp. CK_5_4 -).

Hoang, T.M.C. and Geerdink, B. and Sturm, J.M. and Lefferts, L. and Seshan, K. (2015) Steam reforming of acetic acid - A major component in the volatiles formed during gasification of humin. Applied catalysis B: environmental, 163 . 74 - 82. ISSN 0926-3373

Medvedev, Viacheslav Valerievich (2015) Tailoring spectral properties of Extreme UV multilayer optics. thesis.

Kozhevnikov, I.V. and Yakshin, A. and Bijkerk, F. (2015) Wideband multilayer mirrors with minimal layer thicknesses variation. Optics express, 23 (7). 9276 - 9283. ISSN 1094-4087

2014

Yakunin, S.N. and Makhotkin, I.A. and Nikolaev, K.V. and Kruijs, R.W.E. van de and Chuev, M.A. and Bijkerk, F. (2014) Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures. Optics express, 22 (17). 20076 - 20086. ISSN 1094-4087

Dolgov, A. and Lopaev, D. and Rachimova, T. and Kovalev, A. and Vasilyeva, A. and Lee, C.J. and Krivtsun, V.M. and Yakushev, O. and Bijkerk, F. (2014) Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas. Journal of physics D: applied physics, 47 (6). ISSN 0022-3727

Gao, A. and Zoethout, E. and Sturm, J.M. and Lee, C.J. and Bijkerk, F. (2014) Defect formation in single layer graphene under extreme ultraviolet irradiation. Applied surface science, 317 . 745 - 751. ISSN 0169-4332

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Makhotkin, I.A. and Bosgra, J. and Bijkerk, F. (2014) Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation. Journal of micro/nanolithography, MEMS, and MOEMS, 13 (1). 013014 - 013014-5. ISSN 1932-5150

Gao, A. and Lee, C.J. and Bijkerk, F. (2014) Graphene defect formation by extreme ultraviolet generated photoelectrons. Journal of applied physics, 116 (5). ISSN 0021-8979

Kuznetsov, Alexey Sergeevich and Gleeson, M.A. and Kruijs, R.W.E. van de and Bijkerk, F. (2014) Method for producing a reflective optical element for EUV-lithography. Patent.

Yakunin, S.N. and Makhotkin, I.A. and Chuev, M.A. and Pashaev, E.M. and Zoethout, E. and Louis, E. and Kruijs, R.W.E. van de and Seregin, S.Y. and Subbotin, I.A. and Novikov, D. and Bijkerk, F. and Kovalchuk, M.V. (2014) Model independent X-ray standing wave analysis of periodic multilayer structures. Journal of applied physics, 115 (13). ISSN 0021-8979

Bayraktar, M. and Chopra, A. and Bijkerk, F. and Rijnders, G. (2014) Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates. Applied physics letters, 105 (13). 132904 -. ISSN 0003-6951

Barreaux, J.L.P. and Bastiaens, H.M.J. and Kozhevnikov, I.V. and Bijkerk, F. and Boller, K-J. (2014) Narrow-band Borrmann multilayer filters for monitoring of EUV sources. In: Nanocity 2014, 14-10-2014 - 16-10-2014, Utrecht.

Kruijs, R.W.E. van de and Nyabero, S.L. and Yakshin, A. and Bijkerk, F. (2014) Optical element comprising a multilayer coating, and optical arrangement comprising same. Patent.

Fan, Y. and Oldenbeuving, R.M. and Khan, M.R.H. and Roeloffzen, C.G.H. and Klein, E.J. and Lee, C.J. and Offerhaus, H.L. and Boller, K.J. (2014) Q-factor measurements through injection locking of a semiconductor-glass hybrid laser with unknown intracavity losses. Optics letters, 39 (7). 1748 - 1751. ISSN 0146-9592

Bayraktar, M. and Goor, F.A. van and Boller, K-J. and Bijkerk, F. (2014) Spectral purification and infrared light recycling in extreme ultraviolet lithography sources. Optics express, 22 (7). 8633 - 8639. ISSN 1094-4087

Huber, S.P. and Kruijs, R.W.E. van de and Yakshin, A.E. and Zoethout, E. and Boller, Klaus-J. and Bijkerk, F. (2014) Subwavelength single layer absorption resonance antireflection coatings. Optics express, 22 (1). 490 - 497. ISSN 1094-4087

Coloma Ribera, R. and Kruijs, R.W.E. van de and Sturm, J.M. and Yakshin, A.E. and Bijkerk, F. (2014) Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering. In: LEIS Workshop 2014, 22-05-2014 - 22-05-2014, Enschede.

Coloma Ribera, R. and Kruijs, R.W.E. van de and Kokke, S. and Zoethout, E. and Yakshin, A.E. and Bijkerk, F. (2014) Surface and sub-surface thermal oxidation of thin ruthenium films. Applied physics letters, 105 (13). 131601 -. ISSN 0003-6951

Kuznetsov, Alexey Sergeevich and Gleeson, M.A. and Bijkerk, F. (2014) Temperature dependencies of hydrogen- induced blistering of thin film multilayers. Journal of applied physics, 115 (173510). ISSN 0021-8979

Huang, Q. and Paardekooper, D.M. and Zoethout, E. and Medvedev, V.V. and Kruijs, R.W.E. van de and Bosgra, J. and Louis, E. and Bijkerk, F. (2014) UV spectral filtering by surface structures multilayer mirrors. Optics letters, 39 (5). 1185 - 1188. ISSN 0146-9592

Bayraktar, M. and Chopra, A. and Rijnders, G. and Boller, K-J. and Bijkerk, F. (2014) Wavefront correction in the extreme ultraviolet wavelength range using piezoelectric thin films. Optics express, 22 (25). 30623 - 30632. ISSN 1094-4087

2013

Oldenbeuving, R.M. and Klein, E.J. and Offerhaus, H.L. and Lee, C.J. and Song, H. and Boller, K-J. (2013) 25 kHz narrow spectral bandwidth of a wavelength tunable diode laser with a short waveguide-based external cavity. Laser physics letters, 10 (1). 015804-1. ISSN 1612-2011

Medvedev, V.V. and Yakshin, A. and Kruijs, R.W.E. van de and Krivtsun, V.M. and Louis, E. and Bijkerk, F. (2013) EUV optical elements with enhanced spectral selectivity for IR radiation. In: 2013 International Workshop in EUV and Soft X-ray Sources, Dublin, Ireland.

Huber, S.P. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Bijkerk, F. (2013) Engineering optical constants for broadband single layer antireflection coatings. In: SPIE Advances in X-Ray/EUV Optics and Components VIII, 27-09-2013, San Diego (pp. 884814-1 - 884814-4).

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2013) Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes. Applied physics letters, 103 (9). ISSN 0003-6951

Sobierajski, R. and Jurek, M. and Chalupsky, J. and Krzywinski, J. and Burian, T. and Farahani, S. Dastjani and Hajkova, V. and Harmand, M. and Juha, L. and Klinger, D. and Loch, R.A. and Ozkan, C. and Pelka, J.B. and Sokolowski-Tinten, K. and Sinn, H. and Toleikis, S. and Tiedtke, K. and Tschentscher, T. and Wabnitz, H. and Gaudin, J. (2013) Experimental set-up and procedures for the investigation of XUV free electron laser interactions with solids. Journal of instrumentation, 8 (2). 1 - 14. ISSN 1748-0221

Gao, A. and Rizo, P.J. and Zoethout, E. and Scaccabarozzi, L. and Lee, C.J. and Banine, V. and Bijkerk, F. (2013) Extreme Ultraviolet (EUV) induced defects on few-layer graphene. Journal of applied physics, 114 (4). ISSN 0021-8979

Kuznetsov, A. and Gleeson, M.A. and Bijkerk, F. (2013) Hydrogen-induced blistering of Mo/Si multilayers: Uptake and distribution. Thin solid films, 545 . 571 - 579. ISSN 0040-6090

Medvedev, V.V. and Boogaard, A.J.R. van den and Meer, R. van der and Yakshin, A. and Krivtsun, V.M. and Louis, E. and Bijkerk, F. (2013) Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors. Optics express, 21 (14). 16964 - 16974. ISSN 1094-4087

Bosgra, J. and Veldhuizen, L.W. and Zoethout, E. and Verhoeven, J. and Loch, R.A. and Yakshin, A. and Bijkerk, F. (2013) Interactions of C in layered Mo–Si structures. Thin solid films, 542 . 210 - 213. ISSN 0040-6090

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Blanckenhage, G. von and Bosgra, J. and Loch, R.A. and Bijkerk, F. (2013) Interlayer growth in Mo/B4C multilayered structures upon thermal annealing. Journal of applied physics, 113 (14). 144310-1 - 144310-6. ISSN 0021-8979

Kuznetsov, A. and Gleeson, M.A. and Bijkerk, F. (2013) Ion effects in hydrogen-induced blistering of Mo/Si multilayers. Journal of applied physics, 114 (11). 113507-1 - 113507-12. ISSN 0021-8979

Sobierajski, R. and Loch, R.A. and Kruijs, R.W.E. van de and Louis, E. and Blanckenhagen, G. von and Gullikson, E.M. and Siewert, F. and Wawro, A. and Bijkerk, F. (2013) Mo/Si multilayer-coated amplitude division beam splitters for XUV radiation sources. Journal of synchrotron radiation, 20 (2). 249 - 257. ISSN 0909-0495

Medvedev, V.V. and Kruijs, R.W.E. van de and Yakshin, A. and Novikova, N.N. and Krivtsun, V.M. and Yakunin, A.M. and Bijkerk, F. (2013) Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography. Applied physics letters, 103 (22). 221114-1 - 21114-4. ISSN 0003-6951

Zaharia, T. and Ueta, H. and Kleyn, A.W. and Gleeson, M.A. (2013) Nitrogen Scattering at Ru(0001) Surfaces. Zeitschrift für physikalische Chemie, 227 (11). 1511 - 1522. ISSN 0942-9352

Makhotkin, I.A. and Kruijs, R.W.E. van de and Zoethout, E. and Louis, E. and Bijkerk, F. (2013) Optimization of LaN/B multilayer mirrors for 6.x nm wavelength. In: Advances in X-Ray/EUV Optics and Components VIII, 25-08-2013 (pp. 1 - 5).

Zoethout, E. and Louis, E. and Bijkerk, F. (2013) Real-space insight in the nanometer scale roughness development during growth and ion beam polishing of molybdenum silicon multilayer films. Applied surface science, 285 (Part B). 293 - 299. ISSN 0169-4332

Meer, R. van der and Kozhevnikov, I.V. and Krishnan, B. and Huskens, J. and Hegeman, P.E. and Brons, C. and Vratzov, B. and Bastiaens, H.M.J. and Boller, K-J. and Bijkerk, F. (2013) Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range. AIP advances, 3 (1). 012103 - 012109. ISSN 2158-3226

Huang, Q. and Boogaard, A.J.R. van den and Kruijs, R.W.E. van de and Zoethout, E. and Medvedev, V.V. and Louis, E. and Bijkerk, F. (2013) Suppression of long wavelength reflection from extreme-UV multilayer optics. In: SPIE Advances in X-Ray/EUV Optics and Components VIII, 88480N, 25-08-2013, San Diego, California (pp. 5 -).

Sturm, J.M. and Liu, F. and Grecea, M.L. and Gleeson, M.A. and Lee, C.J. and Bijkerk, F. (2013) UHV-opstelling voor het bestuderen van de contaminatie van EUV-spiegels. NEVAC blad, 5 (1). 12 - 15. ISSN 0169-9431

Oldenbeuving, R.M. and Fan, Y. and Song, H. and Verhaegen, M. and Agbana, T. and Schitter, G. and Klein, E.J. and Lee, C.J. and Offerhaus, H.L. and Voorst, P.D. van and Slot, P.J.M. van der and Boller, K.-J. (2013) Waveguide-based External Cavity Semiconductor Laser Arrays [Poster]. In: Smart Optics Systems 4th Annual Meeting, 30 October 2013, Delft.

2012

Liu, F. and Lee, C.J. and Chen, J. and Louis, E. and Slot, P.J.M. van der and Boller, K-J. and Bijkerk, F. (2012) Correction to article “Ellipsometry with randomly varying polarization states”. Optics express, 20 (28). 29308 - 29308. ISSN 1094-4087

Chen, X. and Lu, X.D. and He, P.N. and Zhao, C.L. and Sun, W. and Zhang, P. and Gou, F. (2012) Deposition and Etching of SiF2 on Si Surface: MD Study. Physics procedia, 32 . 885 - 890. ISSN 1875-3892

Zameshin, A. and Popov, M. and Medvedev, V.V. and Perfilov, S. and Lomakin, R. and Buga, S. and Denisov, V. and Kirichenko, A. and Skryleva, E. and Tatyanin, E. and Aksenenkov, V. and Blank, V. (2012) Electrical conductivity of nanostructured and C60-modified aluminum. Applied physics A: Materials science and processing, 107 (4). 863 - 869. ISSN 0947-8396

Liu, F. and Lee, C.J. and Chen, J. and Louis, E. and Slot, P.J.M. van der and Boller, K-J. and Bijkerk, F. (2012) Ellipsometry with randomly varying polarization states. Optics express, 20 (2). 870 - 878. ISSN 1094-4087

Hahn, C. and Shan, J. and Liu, Y. and Berg, O. van den and Kleijn, A.W. and Juurlink, L.B.F. (2012) Employing a cylindrical single crystal in gas-surface dynamics. Journal of chemical physics, 136 (11). ISSN 0021-9606

Ueta, H. and Groot, I.M.N. and Kleijn, A.W. and Gleeson, M.A. (2012) Evidence of stable high-temperature Dx-CO intermediates on the Ru(0001) surface. Journal of chemical physics, 136 . pp. 114710-1. ISSN 0021-9606

Boogaard, A.J.R. van den and Zoethout, E. and Makhotkin, I.A. and Louis, E. and Bijkerk, F. (2012) Influence of noble gas ion polishing species on extreme ultraviolet mirrors. Journal of applied physics, 112 (12). ISSN 0021-8979

Medvedev, V.V. and Yakshin, A. and Kruijs, R.W.E. van de and Krivtsun, V.M. and Yakunin, A.M. and Koshelev, K.N. and Bijkerk, F. (2012) Infrared antifreflective filtering for extreme ultraviolet multilayer Bragg reflectors. Optics letters, 37 (7). 1169 - 1171. ISSN 0146-9592

Gaudin, J. and Ozkan, C. and Chalupsky, J. and Bajt, S. and Burian, T. and Vysin, L. and Coppola, N. and Farahani, S. Dastjani and Chapman, H. and Galasso, G. and Hajkova, V. and Harmand, M. and Juha, L. and Jurek, M. and Loch, R.A. and Möller, S. and Nagasono, M. and Störmer, M. and Sinn, H. and Saksl, K. and Sobierajski, R. and Schulz, J. and Sovak, P. and Toleikis, S. and Tschentscher, T. and Krzywinski, J. (2012) Investigating the interaction of x-ray free electron laser radiation with grating structure. Optics letters, 37 (15). 3033 - 3035. ISSN 0146-9592

Loch, R.A. and Sobierajski, R. and Louis, E. and Bosgra, J. and Bijkerk, F. (2012) Modelling single shot damage thresholds of multilayer optics for high-intensity short-wavelength radiation sources. Optics express, 20 (27). 28200 - 28215. ISSN 1094-4087

Sun, W. and Liu, H. and Lin, L. and Zhao, C. and Lu, X. and Gou, F. (2012) Molecular Dynamics Simulations of Atomic H Etching SiC Surface. Physics procedia, 32 . 539 - 544. ISSN 1875-3892

Koshelev, K.N. and Krivtsun, V.M. and Ivanov, V. and Yakushev, O. and Chekmarev, A. and Koloshnikov, V. and Snegirev, E. and Medvedev, V.V. (2012) New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes. Journal of micro/nanolithography, MEMS, and MOEMS, 11 (2). 021103-1 - 021103-6. ISSN 1932-5150

Bosgra, J. and Verhoeven, J. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2012) Non-constant diffusion characteristics of nanoscopic Mo-Si interlayer growth. Thin solid films, 522 . 228 - 232. ISSN 0040-6090

Koshelev, K. and Noivkov, V.G. and Medvedev, V.V. and Grushin, A.S. and Krivtsun, V.M. (2012) RZLINE code modelling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation. Journal of micro/nanolithography, MEMS, and MOEMS, 11 (2). 021112-1. ISSN 1932-5150

Yakunin, S.N. and Makhotkin, I. and Chuyev, M.A. and Seregin, A.Y. and Pashayev, E.M. and Louis, E. and Kruijs, R.W.E. van de and Bijkerk, F. and Kovalchuk, M.V. (2012) Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems. In: 11th Biennial Conference on High Resolution X-Ray Diffraction and Imaging, XTOP 2012, St. Petersburg, Russia, 15-09-2012 - 20-09-2012, St. Petersburg, Russia (pp. 115 - 115).

Veen, W. van der and Bijkerk, F. (2012) Spiegeling en Daad. Universiteit Twente / Magazine voor alumni en relaties . 32 - 33.

Bosgra, J. and Zoethout, E. and Eerden, A.M.J. and Verhoeven, J. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2012) Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors. Applied optics, 51 (36). 8541 - 8548. ISSN 0003-6935

Barradas, A.M.C. and Lachmann, K. and Hlawacek, G. and Frielink, C. and Truckenmuller, R.K. and Boerman, O.C. and Gastel, R. van and Garritsen, H.S.P. and Thomas, M. and Moroni, L. and Blitterswijk, C.A. van and Boer, J. de (2012) Surface modifications by gas plasma control osteogenic differentiation of MC3T3-E1 cells. Acta biomaterialia, 8 (8). 2969 - 2977. ISSN 1742-7061

Lee, C.J. and Boller, K-J. (2012) The noise-limited-resolution for stimulated emission depletion microscopy of diffusing particles. Optics express, 20 (12). 12793 - 12798. ISSN 1094-4087

Blank, V.D. and Buga, S.G. and Kulbachinskii, V.A. and Kytin, V.G. and Medvedev, V.V. and Popov, Y.M. and Stepanov, P.B. and Skok, V.F. (2012) Thermoelectric properties of Bi0.5Sb1.5Te3/C60 nanocomposites. Physical review B: Condensed matter and materials physics, 86 (7). 075426-1. ISSN 1098-0121

Makhotkin, I.A. and Zoethout, E. and Louis, E. and Yakunin, S.N. and Muellender, S. and Bijkerk, F. (2012) Wavelength selection for multilayer coatings for the lithography generation beyond EUVL. In: Extreme Ultraviolet (EUV) Lithography III, 13-03-2012, San Jose, CA, US (pp. 832213-1 - 832213-5).

2001

Meij, H. van der and Boersma, K.T. and Graft, M. van (2001) Integrating e-mail use in design & technology lessons. In: Proceedings from the PATT-11 Conference: New media in Technology Education, 08-03-2001 t/m 13-03-2001.

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