Research Chair: XUV FOM-ers

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Number of items: 55.

2017

Liu, F. and Sturm, J.M. and Lee, C.J. and Bijkerk, F. (2017) Coexistence of ice clusters and liquid-like water clusters on the Ru(0001) surface. Physical chemistry chemical physics (PCCP), 19 (12). 8288 - 8299. ISSN 1463-9076

2016

Loch, R.A. and Ceccotti, T. and Quere, F. and George, H. and Bonnaud, G. and Réau, F. and D'Oliviera, P. and Luttikhof, M.J.H. and Bijkerk, F. and Boller, K-J. and Blaclard, G. and Combis, P. (2016) Ion acceleration in the transparent regime and the critical influence of the plasma density scale length. Physics of plasmas, 23 (9). ISSN 1070-664X

Sobierajski, R. and Jacyna, I. and Dluzewski, P. and Klepka, M. and Klinger, D. and Pelka, J.B. and Burian, T. and Hajkova, V. and Juha, L. and Saksl, K. and Vozda, V. and Makhotkin, I.A. and Louis, E. and Faatz, B. and Tiedtke, K. and Toleikis, S. and Enkisch, H. and Hermann, M. and Strobel, S. and Loch, R.A. and Chalupsky, J. (2016) Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 Mhz repetition rate. Optics express, 24 (14). 15468 - 15477. ISSN 1094-4087

2014

Dolgov, A. and Lopaev, D. and Rachimova, T. and Kovalev, A. and Vasilyeva, A. and Lee, C.J. and Krivtsun, V.M. and Yakushev, O. and Bijkerk, F. (2014) Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas. Journal of physics D: applied physics, 47 (6). ISSN 0022-3727

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Makhotkin, I.A. and Bosgra, J. and Bijkerk, F. (2014) Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation. Journal of micro/nanolithography, MEMS, and MOEMS, 13 (1). 013014 - 013014-5. ISSN 1932-5150

Kuznetsov, Alexey Sergeevich and Gleeson, M.A. and Kruijs, R.W.E. van de and Bijkerk, F. (2014) Method for producing a reflective optical element for EUV-lithography. Patent.

Yakunin, S.N. and Makhotkin, I.A. and Chuev, M.A. and Pashaev, E.M. and Zoethout, E. and Louis, E. and Kruijs, R.W.E. van de and Seregin, S.Y. and Subbotin, I.A. and Novikov, D. and Bijkerk, F. and Kovalchuk, M.V. (2014) Model independent X-ray standing wave analysis of periodic multilayer structures. Journal of applied physics, 115 (13). ISSN 0021-8979

Boller, K-J. and Beeker, W.P. and Cleff, C. and Kruse, K. and Lee, C.J. and Groß, P. and Offerhaus, H.L. and Fallnich, C. and Herek, J.L. (2014) Nonlinear Optics Approaches Towards Subdiffraction Resolution in CARS Imaging. In: E.F. Fornasiero & S.O. Rizzoli (Eds.), Super-Resolution Microscopy Techniques in the Neurosciences. 86 . Humana Press by Springer, 291 - 324. ISBN 9781627039826

Fan, Y. and Oldenbeuving, R.M. and Khan, M.R.H. and Roeloffzen, C.G.H. and Klein, E.J. and Lee, C.J. and Offerhaus, H.L. and Boller, K.J. (2014) Q-factor measurements through injection locking of a semiconductor-glass hybrid laser with unknown intracavity losses. Optics letters, 39 (7). 1748 - 1751. ISSN 0146-9592

Huber, S.P. and Kruijs, R.W.E. van de and Yakshin, A.E. and Zoethout, E. and Boller, Klaus-J. and Bijkerk, F. (2014) Subwavelength single layer absorption resonance antireflection coatings. Optics express, 22 (1). 490 - 497. ISSN 1094-4087

Kuznetsov, Alexey Sergeevich and Gleeson, M.A. and Bijkerk, F. (2014) Temperature dependencies of hydrogen- induced blistering of thin film multilayers. Journal of applied physics, 115 (173510). ISSN 0021-8979

Huang, Q. and Paardekooper, D.M. and Zoethout, E. and Medvedev, V.V. and Kruijs, R.W.E. van de and Bosgra, J. and Louis, E. and Bijkerk, F. (2014) UV spectral filtering by surface structures multilayer mirrors. Optics letters, 39 (5). 1185 - 1188. ISSN 0146-9592

2013

Oldenbeuving, R.M. and Klein, E.J. and Offerhaus, H.L. and Lee, C.J. and Song, H. and Boller, K-J. (2013) 25 kHz narrow spectral bandwidth of a wavelength tunable diode laser with a short waveguide-based external cavity. Laser physics letters, 10 (1). 015804-1. ISSN 1612-2011

Medvedev, V.V. and Yakshin, A. and Kruijs, R.W.E. van de and Krivtsun, V.M. and Louis, E. and Bijkerk, F. (2013) EUV optical elements with enhanced spectral selectivity for IR radiation. In: 2013 International Workshop in EUV and Soft X-ray Sources, Dublin, Ireland.

Huber, S.P. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Bijkerk, F. (2013) Engineering optical constants for broadband single layer antireflection coatings. In: SPIE Advances in X-Ray/EUV Optics and Components VIII, 27-09-2013, San Diego (pp. 884814-1 - 884814-4).

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2013) Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes. Applied physics letters, 103 (9). ISSN 0003-6951

Gao, A. and Rizo, P.J. and Zoethout, E. and Scaccabarozzi, L. and Lee, C.J. and Banine, V. and Bijkerk, F. (2013) Extreme Ultraviolet (EUV) induced defects on few-layer graphene. Journal of applied physics, 114 (4). ISSN 0021-8979

Kuznetsov, A. and Gleeson, M.A. and Bijkerk, F. (2013) Hydrogen-induced blistering of Mo/Si multilayers: Uptake and distribution. Thin solid films, 545 . 571 - 579. ISSN 0040-6090

Medvedev, V.V. and Boogaard, A.J.R. van den and Meer, R. van der and Yakshin, A. and Krivtsun, V.M. and Louis, E. and Bijkerk, F. (2013) Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors. Optics express, 21 (14). 16964 - 16974. ISSN 1094-4087

Epping, J.P. and Kues, M. and Slot, P.J.M. van der and Lee, C.J. and Fallnich, C. and Boller, Klaus-J. (2013) Integrated CARS source based on seeded four-wave mixing in silicon nitride. Optics express, 21 (26). 32123 - 32129. ISSN 1094-4087

Bosgra, J. and Veldhuizen, L.W. and Zoethout, E. and Verhoeven, J. and Loch, R.A. and Yakshin, A. and Bijkerk, F. (2013) Interactions of C in layered Mo–Si structures. Thin solid films, 542 . 210 - 213. ISSN 0040-6090

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Blanckenhage, G. von and Bosgra, J. and Loch, R.A. and Bijkerk, F. (2013) Interlayer growth in Mo/B4C multilayered structures upon thermal annealing. Journal of applied physics, 113 (14). 144310-1 - 144310-6. ISSN 0021-8979

Kuznetsov, A. and Gleeson, M.A. and Bijkerk, F. (2013) Ion effects in hydrogen-induced blistering of Mo/Si multilayers. Journal of applied physics, 114 (11). 113507-1 - 113507-12. ISSN 0021-8979

Sobierajski, R. and Loch, R.A. and Kruijs, R.W.E. van de and Louis, E. and Blanckenhagen, G. von and Gullikson, E.M. and Siewert, F. and Wawro, A. and Bijkerk, F. (2013) Mo/Si multilayer-coated amplitude division beam splitters for XUV radiation sources. Journal of synchrotron radiation, 20 (2). 249 - 257. ISSN 0909-0495

Medvedev, V.V. and Kruijs, R.W.E. van de and Yakshin, A. and Novikova, N.N. and Krivtsun, V.M. and Yakunin, A.M. and Bijkerk, F. (2013) Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography. Applied physics letters, 103 (22). 221114-1 - 21114-4. ISSN 0003-6951

Zaharia, T. and Ueta, H. and Kleyn, A.W. and Gleeson, M.A. (2013) Nitrogen Scattering at Ru(0001) Surfaces. Zeitschrift für physikalische Chemie, 227 (11). 1511 - 1522. ISSN 0942-9352

Makhotkin, I.A. and Kruijs, R.W.E. van de and Zoethout, E. and Louis, E. and Bijkerk, F. (2013) Optimization of LaN/B multilayer mirrors for 6.x nm wavelength. In: Advances in X-Ray/EUV Optics and Components VIII, 25-08-2013 (pp. 1 - 5).

Zoethout, E. and Louis, E. and Bijkerk, F. (2013) Real-space insight in the nanometer scale roughness development during growth and ion beam polishing of molybdenum silicon multilayer films. Applied surface science, 285 (Part B). 293 - 299. ISSN 0169-4332

Cleff, C. and Gross, P. and Fallnich, C. and Offerhaus, H.L. and Herek, J.L. and Kruse, K. and Beeker, W.P. and Lee, C.J. and Boller, K-J. (2013) Stimulated-emission pumping enabling sub-diffraction-limited spatial resolution in coherent anti-Stokes Raman scattering microscopy. Physical review A: Atomic, molecular, and optical physics, 87 (3). 033830-1 - 033830-9. ISSN 1050-2947

Huang, Q. and Boogaard, A.J.R. van den and Kruijs, R.W.E. van de and Zoethout, E. and Medvedev, V.V. and Louis, E. and Bijkerk, F. (2013) Suppression of long wavelength reflection from extreme-UV multilayer optics. In: SPIE Advances in X-Ray/EUV Optics and Components VIII, 88480N, 25-08-2013, San Diego, California (pp. 5 -).

Sturm, J.M. and Liu, F. and Grecea, M.L. and Gleeson, M.A. and Lee, C.J. and Bijkerk, F. (2013) UHV-opstelling voor het bestuderen van de contaminatie van EUV-spiegels. NEVAC blad, 5 (1). 12 - 15. ISSN 0169-9431

2012

Zhao, C. and Lu, X. and He, P. and Zhang, P. and Sun, W. and Zhang, J. and Chen, F. and Gou, F. (2012) CF3+ etching silicon surface: A molecular dynamics study. Vacuum, 86 (7). 913 - 916. ISSN 0042-207X

Chen, X. and Lu, X.D. and He, P.N. and Zhao, C.L. and Sun, W. and Zhang, P. and Gou, F. (2012) Deposition and Etching of SiF2 on Si Surface: MD Study. Physics procedia, 32 . 885 - 890. ISSN 1875-3892

Zameshin, A. and Popov, M. and Medvedev, V.V. and Perfilov, S. and Lomakin, R. and Buga, S. and Denisov, V. and Kirichenko, A. and Skryleva, E. and Tatyanin, E. and Aksenenkov, V. and Blank, V. (2012) Electrical conductivity of nanostructured and C60-modified aluminum. Applied physics A: Materials science and processing, 107 (4). 863 - 869. ISSN 0947-8396

Liu, F. and Lee, C.J. and Chen, J. and Louis, E. and Slot, P.J.M. van der and Boller, K-J. and Bijkerk, F. (2012) Ellipsometry with randomly varying polarization states. Optics express, 20 (2). 870 - 878. ISSN 1094-4087

Hahn, C. and Shan, J. and Liu, Y. and Berg, O. van den and Kleijn, A.W. and Juurlink, L.B.F. (2012) Employing a cylindrical single crystal in gas-surface dynamics. Journal of chemical physics, 136 (11). ISSN 0021-9606

Ueta, H. and Groot, I.M.N. and Kleijn, A.W. and Gleeson, M.A. (2012) Evidence of stable high-temperature Dx-CO intermediates on the Ru(0001) surface. Journal of chemical physics, 136 . pp. 114710-1. ISSN 0021-9606

Cleff, C. and Gross, P. and Fallnich, C. and Offerhaus, H.L. and Herek, J.L. and Kruse, K. and Beeker, W.P. and Lee, C.J. and Boller, K-J. (2012) Ground-state depletion for subdiffraction-limited spatial resolution in coherent anti-Stokes Raman scattering microscopy. Physical review A: Atomic, molecular, and optical physics, 86 (2). 1 - 11. ISSN 1050-2947

Kuznetsov, A. and Gleeson, M.A. and Bijkerk, F. (2012) Hydrogen-induced blistering mechanisms in thin film coatings. Journal of physics: Condensed matter, 24 (5). ISSN 0953-8984

Boogaard, A.J.R. van den and Zoethout, E. and Makhotkin, I.A. and Louis, E. and Bijkerk, F. (2012) Influence of noble gas ion polishing species on extreme ultraviolet mirrors. Journal of applied physics, 112 (12). ISSN 0021-8979

Medvedev, V.V. and Yakshin, A. and Kruijs, R.W.E. van de and Krivtsun, V.M. and Yakunin, A.M. and Koshelev, K.N. and Bijkerk, F. (2012) Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors. Optics letters, 37 (7). 1169 - 1171. ISSN 0146-9592

Gaudin, J. and Ozkan, C. and Chalupsky, J. and Bajt, S. and Burian, T. and Vysin, L. and Coppola, N. and Farahani, S. Dastjani and Chapman, H. and Galasso, G. and Hajkova, V. and Harmand, M. and Juha, L. and Jurek, M. and Loch, R.A. and Möller, S. and Nagasono, M. and Störmer, M. and Sinn, H. and Saksl, K. and Sobierajski, R. and Schulz, J. and Sovak, P. and Toleikis, S. and Tschentscher, T. and Krzywinski, J. (2012) Investigating the interaction of x-ray free electron laser radiation with grating structure. Optics letters, 37 (15). 3033 - 3035. ISSN 0146-9592

Bruijn, S. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2012) Ion assisted growth of B4C diffusion barrier layers in Mo/Si multilayered structures. Journal of applied physics, 111 (6). 064303-1 - 064303-5. ISSN 0021-8979

Sun, W. and Liu, H. and Lin, L. and Zhao, C. and Lu, X. and Gou, F. (2012) Molecular Dynamics Simulations of Atomic H Etching SiC Surface. Physics procedia, 32 . 539 - 544. ISSN 1875-3892

Bosgra, J. and Verhoeven, J. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2012) Non-constant diffusion characteristics of nanoscopic Mo-Si interlayer growth. Thin solid films, 522 . 228 - 232. ISSN 0040-6090

Koshelev, K. and Noivkov, V.G. and Medvedev, V.V. and Grushin, A.S. and Krivtsun, V.M. (2012) RZLINE code modelling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation. Journal of micro/nanolithography, MEMS, and MOEMS, 11 (2). 021112-1. ISSN 1932-5150

Yakunin, S.N. and Makhotkin, I. and Chuyev, M.A. and Seregin, A.Y. and Pashayev, E.M. and Louis, E. and Kruijs, R.W.E. van de and Bijkerk, F. and Kovalchuk, M.V. (2012) Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems. In: 11th Biennial Conference on High Resolution X-Ray Diffraction and Imaging, XTOP 2012, St. Petersburg, Russia, 15-09-2012 - 20-09-2012, St. Petersburg, Russia (pp. 115 - 115).

Kuznetsov, A. and Stuik, R. and Bijkerk, F. and Shevelko, A.P. (2012) Spectral and spatial structure of extreme ultraviolet radiation in laser plasma-wall interactions. Plasma physics and controlled fusion, 54 (8). 1 - 6. ISSN 0741-3335

Makhotkin, I.A. and Zoethout, E. and Louis, E. and Yakunin, A.M. and Muellender, S. and Bijkerk, F. (2012) Spectral properties of La/B - Based multilayer mirrors near the boron K absorption edge. Optics express, 20 (11). 11778 - 11786. ISSN 1094-4087

Bosgra, J. and Zoethout, E. and Eerden, A.M.J. and Verhoeven, J. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2012) Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors. Applied optics, 51 (36). 8541 - 8548. ISSN 0003-6935

Lee, C.J. and Boller, K-J. (2012) The noise-limited-resolution for stimulated emission depletion microscopy of diffusing particles. Optics express, 20 (12). 12793 - 12798. ISSN 1094-4087

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Bijkerk, F. (2012) Thermally induced interface chemistry in Mo/B 4C/Si/B 4C multilayered films. Journal of applied physics, 112 (5). 054317-1 - 054317-5. ISSN 0021-8979

Blank, V.D. and Buga, S.G. and Kulbachinskii, V.A. and Kytin, V.G. and Medvedev, V.V. and Popov, Y.M. and Stepanov, P.B. and Skok, V.F. (2012) Thermoelectric properties of Bi0.5Sb1.5Te3/C60 nanocomposites. Physical review B: Condensed matter and materials physics, 86 (7). 075426-1. ISSN 1098-0121

Makhotkin, I.A. and Zoethout, E. and Louis, E. and Yakunin, S.N. and Muellender, S. and Bijkerk, F. (2012) Wavelength selection for multilayer coatings for the lithography generation beyond EUVL. In: Extreme Ultraviolet (EUV) Lithography III, 13-03-2012, San Jose, CA, US (pp. 832213-1 - 832213-5).

Makhotkin, I.A. and Zoethout, E. and Louis, E. and Yakunin, A.M. and Muellender, S. and Bijkerk, F. (2012) Wavelength selection for multilayer coatings for the lithography generation beyond extreme ultraviolet. Journal of micro/nanolithography, MEMS, and MOEMS, 11 (4). 040501-1 - 040501-3. ISSN 1932-5150

This list was generated on Mon Apr 24 06:48:44 2017 CEST.