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Number of items: 3.


Bayraktar, M. and Goor, F.A. van and Boller, K.J. and Bijkerk, F. (2014) Spectral purification and infrared light recycling in extreme ultraviolet lithography sources. Optics express, 22 (7). pp. 8633-8639. ISSN 1094-4087


Bayraktar, M. and Wessels, W.A. and Lee, C.J. and Goor, F.A. van and Koster, G. and Rijnders, G. and Bijkerk, F. (2012) Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths. Journal of physics D: applied physics, 45 (49). pp. 494001-1. ISSN 0022-3727

Dinger, U. and Bijkerk, F. and Bayraktar, M. and Dier, O. (2012) EUV mirror arrangement, optical system comprising EUV mirror arrangement and method for operating an optical system comprising an EUV mirror arrangement. Patent.

This list was generated on Fri Sep 19 05:40:40 2014 CEST.