Bayraktar, M. and Wessels, W.A. and Lee, C.J. and Goor, F.A. van and Koster, G. and Rijnders, G. and Bijkerk, F.
Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths.
Journal of physics D: applied physics, 45
Dinger, U. and Bijkerk, F. and Bayraktar, M. and Dier, O.
EUV mirror arrangement, optical system comprising EUV mirror arrangement and method for operating an optical system comprising an EUV mirror arrangement.