Author Publications

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Number of items: 18.

2014

Friedlein, R. and Fleurence, A. and Aoyagi, K. and Jong, M.P. de and Van Bui, H. and Wiggers, F.B. and Yoshimoto, S. and Koitaya, T. and Shimizu, S. and Noritake, H. and Mukai, K. and Yoshinobu, J. and Yamada-Takamura, Y. (2014) Core level excitations — A fingerprint of structural and electronic properties of epitaxial silicene. The journal of Chemical Physics, 140 (18). pp. 1-6. ISSN 0021-9606

Friedlein, R. and Van Bui, H. and Wiggers, F.B. and Yamada-Takamura, Y. and Kovalgin, A.Y. and Jong, M.P. de (2014) Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules. Journal of chemical physics, 140 . pp. 2047051-2047054. ISSN 0021-9606

Kovalgin, Alexey Y. and Van Bui, Hao and Schmitz, Jurriaan and Wolters, Rob A.M. (2014) Growth and properties of subnanometer thin titanium nitride films. In: Nano & Giga 2014, 10-14 March 2014, Phoenix, AZ, USA (pp. p. 1).

Van Bui, H. and Nguyen, M.D. and Wiggers, F.B. and Aarnink, A.A.I. and Jong, M.P. de and Kovalgin, A.Y. (2014) Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films. ECS journal of solid state science and technology, 3 (4). pp. 101-106. ISSN 2162-8769

Van Bui, H. and Wiggers, F.B. and Aarnink, A.A.I. and Nguyen, M.D. and Jong, M.P. de and Kovalgin, A.Y. and Gupta, A.Y. (2014) Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AIN films. In: 14th International Conference on Atomic Layer Deposition, SLD 2014, 15-18 June 2014, Kyoto, Japan (pp. p. 113).

Van Bui, H. and Wiggers, F.B. and Jong, M.P. de and Kovalgin, A.Y. (2014) An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer. In: International Conference on Microelectronic Test Structures, ICMTS 2014, 24-27 March 2014, Udine, Italy (pp. pp. 53-57).

Van Bui, Hao and Wiggers, Frank B. and Gupta, Anubha and Nguyen, Minh D. and Aarnink, Antonius A.I. and Jong, Michel P. de and Kovalgin, Alexey Y. (2014) Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 33 . 01A111. ISSN 0734-2101

2013

Van Bui, H. and Aarnink, A.A.I. and Jong, M.P. de and Kovalgin, A.Y. (2013) In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films. NEVAC Blad, 51 (3). pp. 24-31. ISSN 0169-9431

Van Bui, H. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. (2013) Hot-Wire generated atomic hydrogen and its impact on thermal ALD in $TiCl_4/NH_3$ system. ECS journal of solid state science and technology, 2 (4). pp. 149-155. ISSN 2162-8777

Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2013) On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films. Applied surface science, 269 . pp. 45-49. ISSN 0169-4332

Van Bui, Hao (2013) Atomic layer deposition of TiN films : growth and electrical behavior down to sub-nanometer scale. thesis.

Van Bui, Hao and Kovalgin, Alexey and Schmitz, Jurriaan and Wolters, Rob A.M. (2013) Conduction and electric field effect in ultra-thin TiN films. Applied physics letters, 103 (5). 051904. ISSN 0003-6951

2012

Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2012) Growth of sub-nanometer thin continuous TiN films by atomic layer deposition. ECS journal of solid state science and technology, 1 (6). pp. 285-290. ISSN 2162-8777

Van Bui, Hao and Wolters, Rob A.M. and Kovalgin, Alexey Y. (2012) TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness. In: Proceedings of the International Conference on Anvanced Materials and Nanotechnology (ICAMN 2012), 13-14 Dec 2012, Hanoi, Vietnam (pp. pp. 7-12).

2011

Van Bui, H. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 . pp. 214-220. ISSN 0013-4651

Van Bui, H. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8120-8125. ISSN 1533-4880

2009

Aarnink, A.A.I. and Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen. In: 9th International Conference on Atomic Layer Deposition, 19-22 July 2009, Monterey, CA, USA.

Van Bui, Hao and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2009) Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 59-62).

This list was generated on Sat Nov 29 05:29:27 2014 CET.