Author Publications

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Number of items: 8.

2009

Knotter, D. Martin and Wali, Faisal (2009) Particles in Semiconductor Processing. In: Developments in Surface Contamination and Cleaning - Methods for Removal of Particle Contaminants. Elsevier, Amsterdam, the Netherlands, pp. 81-120. ISBN 9781437778304

Rink, Ingrid and Wali, Faisal and Knotter, D.M. (2009) Impact of metal-ion contaminated silica particles on gate oxide integrity. Solid State Phenomena, 145-14 . pp. 131-134. ISSN 1012-0394

Wali, Faisal and Knotter, D. Martin and Bearda, Twan and Mertens, Paul W. (2009) Local distribution of particles deposited on patterned surfaces. Solid State Phenomena, 145-14 . pp. 65-68. ISSN 1012-0394

Wali, Faisal and Knotter, D. Martin and Mud, Auke and Kuper, Fred G. (2009) Impact of particles in ultra pure water on random yield loss in IC production. Microelectronic Engineering, 86 (2). pp. 140-144. ISSN 0167-9317

2008

Wali, Faisal and Knotter, D. Martin and Kuper, F.G. (2008) Liquid-borne nano particles impact on the random yield during critical processes in IC’s production. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 513-515).

Wali, Faisal and Knotter, D.M. and Kuper, F.G. (2008) Impact of nano particles on semiconductor manufacturing. In: Proceedings of 12th IEEE International Multitopic Conference (INMIC) 2008, 23-24 Dec 2008, Karachi (pp. pp. 97-99).

2007

Wali, Faisal and Knotter, D. Martin and Wortelboer, Ronald and Mud, Auke (2007) Statistical relation between particle contaminations in ultra pure water and defects generated by process tools. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 555-557).

2006

Wali, Faisal and Knotter, D. Martin and Kelly, John J. and Kuper, Fred G. (2006) Deposition and detection of particles during integrated circuit manufacturing. In: 9th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 483-487).

This list was generated on Sat Dec 20 05:16:57 2014 CET.