Author Publications

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Number of items: 17.

2012

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2012) Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE Transactions on Semiconductor Manufacturing, 25 (2). pp. 1-24. ISSN 0894-6507

Groenland, A.W. and Vereshchagina, E. and Kovalgin, A.Y. and Wolters, R.A.M. and Gardeniers, J.G.E. and Schmitz, J. (2012) Micro- and nano-link ultra-low power heaters for sensors. In: European Solid-State Device Research Conference, ESSDERC 2012, Bordeaux, 17 September, 17-09-2012, USA (pp. 169 - 172).

2011

Groenland, A.W. and Kovalgin, A.Y. and Schmitz, J. and Wolters, R.A.M. (2011) Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators. ECS Transactions, 35 (30). pp. 25-34. ISSN 1938-5862

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2011) A Difference in Using Atomic Layer Deposition or Physical Vapour Deposition TiN as Electrode Material in Metal-Insulator-Metal and Metal-Insulator-Silicon Capacitors. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8368-8373. ISSN 1533-4880

Groenland, Alfons Wouter (2011) Nanolink-based thermal devices: integration of ALD TiN thin films. thesis.

Van Bui, H. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 . pp. 214-220. ISSN 0013-4651

2010

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2010) On the leakage problem of MIM capacitors due to improper etching of titanium nitride. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 89-92).

2009

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2009, 30 March - 2 April 2009, Oxnard, CA, USA (pp. pp. 191-195).

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 150-152).

Tiggelaar, R.M. and Groenland, A.W. and Sanders, R.G.P. and Gardeniers, J.G.E. (2009) Electrical properties of low pressure chemical vapor deposited silicon nitride thin films for temperatures up to 650 °C. Journal of Applied Physics, 105 (3). 033714. ISSN 0021-8979

Tiggelaar, R.M. and Sanders, R.G.P. and Groenland, A.W. and Gardeniers, J.G.E. (2009) Stability of thin platinum films implemented in high-temperature microdevices. Sensors and Actuators A: Physical, 152 (1). pp. 39-47. ISSN 0924-4247

2008

Agiral, Anil and Groenland, Alforns W. and Kumar Chinthaginjala, J. and Seshan, K. and Lefferts, Leon and Gardeniers, J.G.E. (Han) (2008) On-chip microplasma reactors using carbon nanofibres and tungsten oxide nanowires as electrodes. Journal of Physics D: Applied Physics, 41 (19). p. 194009. ISSN 0022-3727

Brunets, I. and Groenland, A.W. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. (2008) A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers. In: 18th International Conference on Atomical Layer Deposition, ALD 2008, 29 June - 2 July 2008, Bruges, Belgium (pp. P-54).

Groenland, A.W. and Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Schmitz, J. (2008) Thermal and plasma-enhanced oxidation of ALD TiN. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 468-471).

2007

Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 November 2007, Veldhoven, The Netherlands (pp. pp. 581-583).

Hurley, P.K. and Cherkaoui, K. and McDonnell, S. and Hughes, G. and Groenland, A.W. (2007) Characterisation and passivation of interface defects in (1 0 0)/Si/SiO2/HfO2/TiN gate stacks. Microelectronics Reliability, 47 (8). pp. 1195-1201. ISSN 0026-2714

2006

Hurley, P.K. and Cherkaoui, K. and Groenland, A.W. (2006) Electrically active interface defects in the (100)Si/SiOx/HfO2/TiN system: Origin, instabilities and passivation. In: 210th Meeting of The Electrochemical Society (ECS), October 29-November 3, 2006, Cancun, Mexico.

This list was generated on Sat Aug 23 05:09:16 2014 CEST.