Author Publications

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Jump to: 2007 | 2006 | 2005
Number of items: 4.

2007

Nguyen, Quoc Duy (2007) Electrochemistry in anisotropic etching of silicon in alkaline solutions : a kinetic wave analysis. thesis.

Nguyen, Q.D. and Elwenspoek, M. (2007) Influence of Applied Potentials on Anisotropic Etching of Silicon Described Using Kinematic Wave Etch Model. Journal of the Electrochemical Society, 154 (12). D684-D691. ISSN 0013-4651

2006

Nguyen, Q.D. and Elwenspoek, M. (2006) Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties. Journal of Physics: Conference Series, 34 . pp. 1038-1043. ISSN 1742-6596

2005

Nguyen, Q.D. and Elwenspoek, M. (2005) Influence of an Applied Potential on the Anisotropic Etch rates of Silicon in KOH. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 45-48).

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