Author Publications

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Number of items: 4.


Nguyen, Q.D. and Elwenspoek, M. (2007) Influence of Applied Potentials on Anisotropic Etching of Silicon Described Using Kinematic Wave Etch Model. Journal of the Electrochemical Society, 154 (12). D684-D691. ISSN 0013-4651

Nguyen, Quoc Duy (2007) Electrochemistry in anisotropic etching of silicon in alkaline solutions : a kinetic wave analysis. thesis.


Nguyen, Q.D. and Elwenspoek, M. (2006) Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties. Journal of Physics: Conference Series, 34 . pp. 1038-1043. ISSN 1742-6596


Nguyen, Q.D. and Elwenspoek, M. (2005) Influence of an Applied Potential on the Anisotropic Etch rates of Silicon in KOH. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 45-48).

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