Author Publications

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Jump to: 1995
Number of items: 1.

1995

Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) An electrochemical micro actuator. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands.

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