Author Publications

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Jump to: 1997 | 1996 | 1995
Number of items: 3.

1997

Jansen, Henri and Boer, Meint de and Wiegerink, Remco and Tas, Niels and Smulders, Edwin and Neagu, Cristina and Elwenspoek, Miko (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic Engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317

1996

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1996) High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through. Sensors and Actuators A: Physical, 54 (1-3). pp. 669-673. ISSN 0924-4247

1995

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1995) High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through. In: Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden (pp. pp. 573-576).

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