Author Publications

2006

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and Actuators A: Physical, 130-13 . pp. 340-345. ISSN 0924-4247

2005

Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AlN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Saravanan, S. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Fabrication of Surface Micromachined AlN Piezoelectric Microstructures and its Potential Apllication to RF Resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland.

Saravanan, S. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Surface Micromachined Fabrication of Piezoelectric AlN Unimorph Suspension Devices for RF Resonator Applications. In: 13th International Conference on Solid-StateSensors, Actuators and Microsystems, Transducers 2005, June 5-9, 2005, Seoul, Korea.

Saravanan, S. and Dijkstra, M. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates. In: Microscopy of Semiconducting Materials. Springer Proceedings in Physics, 107 . Springer, pp. 75-78. ISBN 9783540319146

2004

Saravanan, S. and Berenschot, Erwin and Krijnen, Gijs and Elwenspoek, Miko (2004) Surface Micromachining Process for the Integration of AlN Piezoelectric Microstructures. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands.

2003

Saravanan, S. and Berenschot, J.W. and Boer de, M.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Studies of AIN growth on various substrates by RF reactive sputtering techniques. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands.

Saravanan, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.