Author Publications

2013

Syed Nawazuddin, M.B. and Boer de, M.J. and Berenschot, J.W. and Ma, K.C. and Elwenspoek, M. and Wiegerink, R.J. (2013) Design, fabrication and characterization of a suspended plate mechano-optical modulator. In: 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 20-24 January 2013, Taipeh, Taiwan.

2012

Syed Nawazuddin, M.B. and Lammerink, Theo S.J. and Berenschot, Erwin and Boer de, Meint and Ma, Ke-Chun and Elwenspoek, Miko C. and Wiegerink, Remco J. (2012) Towards a Casimir force measurement between micromachined parallel plate structures. Challenges, 3 (2). pp. 261-277. ISSN 2078-1547

2011

Legrain, A. and Berenschot, J.W. and Sanders, R.G.P. and Ma, K. and Tas, N.R. and Abelmann, L. (2011) Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway.

2010

Jansen, H.V. and Boer de, M.J. and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). 075027. ISSN 0960-1317

Jansen, H.V. and Boer de, M.J. and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). pp. 1-12. ISSN 0960-1317

2003

Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, K.C. and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, June 8-12, 2003, Boston, USA.