Author Publications

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Jump to: 1997 | 1995 | 1994 | 1993
Number of items: 11.

1997

Kranenburg, Herma van and Corbach, Herman D. van and Woerlee, Pierre H. and Lohmeier, Martin (1997) W-CMP for sub-micron inverse metallisation. Microelectronic Engineering, 33 (1-4). pp. 239-246. ISSN 0167-9317

1995

Haanappel, V.A.C. and Gellings, P.J. and Vendel, D. van de and Metselaar, H.S.C. and Corbach, H.D. van and Fransen, T. (1995) The mechanical properties of thin alumina film deposited by metal-organic chemical vapour deposition. Thin Solid Films, 254 (1-2). pp. 153-163. ISSN 0040-6090

Haanappel, V.A.C. and Rem, J.B. and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1995) Properties of alumina films prepared by metal-organic chemical vapour deposition at atmospheric pressure in hte presence of small amounts of water. Surface and Coatings Technology, 72 (1-2). pp. 1-12. ISSN 0257-8972

Haanappel, V.A.C. and Vendel, D. van de and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1995) The effect of thermal annealing on the properties of thin alumina films prepared by low pressure MOCVD. Thin Solid Films, 256 (1-2). pp. 8-12. ISSN 0040-6090

Haanappel, V.A.C. and Vendel, D. van de and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1995) The effect of thermal annealing on the adherence of $Al_2O_3$-films deposited by low-pressure, metal-organic, chemical-vapor deposition on AISI 304. Oxidation of metals, 43 (5-6). pp. 459-478. ISSN 0030-770X

1994

Corbach, H.D. van and Haanappel, V.A.C. and Fransen, T. and Gellings, P.J. (1994) Al2O3 coatings against high temperature corrosion deposited by metal-organic low pressure chemical vapour deposition. Thin Solid Films, 239 (1). pp. 31-36. ISSN 0040-6090

Haanappel, V.A.C. and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1994) The pyrolytic decomposition of ATSB during chemical vapour deposition of thin alumina films. Thermochimica Acta, 240 . pp. 67-77. ISSN 0040-6031

Haanappel, V.A.C. and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1994) Properties of alumina films by atmospheric pressure metal-organic chemical vapour deposition. Surface and Coatings Technology, 63 (3). pp. 145-153. ISSN 0257-8972

Haanappel, V.A.C. and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1994) The effect of thermal annealing on the properties of alumina films prepared by metal organic chemical vapour deposition at atmospheric pressure. Surface and Coatings Technology, 64 (3). pp. 183-193. ISSN 0257-8972

1993

Haanappel, V.A.C. and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1993) Cracking and delamination of metal organic vapour deposited alumina and silica films. Materials Science and Engineering A: Structural materials, 1993 (167). pp. 179-185. ISSN 0025-5416

Haanappel, V.A.C. and Corbach, H.D. van and Fransen, T. and Gellings, P.J. (1993) Corrosion resistant coatings (Al2O3) produced by metal organic chemical vapour deposition using aluminium-tri-sec-butoxide. Thin Solid Films, 230 (2). pp. 138-144. ISSN 0040-6090

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