Author Publications

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Group by: Date | Item Type
Jump to: 1995 | 1994 | 1992 | 1991 | 1990
Number of items: 7.

1995

Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) An electrochemical micro actuator. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 106-110).

1994

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M. and Fluitman, J.H.J. (1994) (Electro-) mechanical characateristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 41 (1). pp. 4-6. ISSN 0885-3010

1992

IJntema, Dominicus J. and Tilmans, Harrie A.C. (1992) Static and dynamic aspects of an air gap capacitor. Sensors and Actuators A: Physical, 35 (2). pp. 121-128. ISSN 0924-4247

1991

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A Differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Tilmans, Harrie A.C. and IJntema, Dominicus .J. and Fluitman, Jan H.J (1991) Single Element Excitation and Detection of (Micro-)Mechanical Resonators. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA (pp. pp. 533-537).

1990

Blom, F.R. and IJntema, D.J. and Pol, F.C.M. van de and Elwenspoek, M. and Fluitman, J.H.J. and Popma, Th.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and Actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247

This list was generated on Fri Dec 19 05:19:49 2014 CET.