Author Publications

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Jump to: 1994 | 1992
Number of items: 5.

1994

Liefting, J.R. and Custer, J.S. and Saris, F.W. (1994) Time evolution of dislocation formation in ion implanted silicon. Materials Science and Engineering B: Solid-state materials for advanced technology, 25 (1). pp. 60-67. ISSN 0921-5107

Liefting, Reinoud and Wijburg, Rutger C. and Custer, Jonathan S. and Wallinga, Hans and Saris, Frans W. (1994) Improved device performance by multistep or carbon co-implants. IEEE Transactions on Electron Devices, 41 (1). pp. 50-55. ISSN 0018-9383

1992

Liefting, J.R. and Custer, J.S. and Schreutelkamp, R.J. and Saris, F.W. (1992) Dislocation formation in silicon implanted at different temperatures. Materials Science and Engineering B: Solid-state materials for advanced technology, 15 (2). pp. 173-186. ISSN 0921-5107

Saris, F.W. and Custer, J.S. and Schreutelkamp, R.J. and Liefting, J.R. and Wijburg, R. and Wallinga, H. (1992) Avoiding dislocations in ion-implanted silicon. Microelectronic Engineering, 19 (1-4). pp. 357-362. ISSN 0167-9317

Wijburg, R.C.M. and Liefting, J.R. and Custer, J.S. and Wallinga, H. and Saris, F.W. (1992) Improvement of device characteristics by multiple step implants or introducing a C gettering layer. Microelectronic Engineering, 19 (1-4). pp. 543-546. ISSN 0167-9317

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