Author Publications

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Number of items: 224.

2014

Geerlings, J. and Sarajlic, E. and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. (2014) Electrospray deposition from AFM probes with nanoscale apertures. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 January 2014, San Francisco, CA, USA (pp. pp. 100-103).

Geerlings, J. and Sarajlic, E. and Berenschot, J.W. and Siekman, M.H. and Jansen, H.V. and Abelmann, L. and Tas, N.R. (2014) Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds. Journal of Micromechanics and Microengineering, 24 (10). p. 105013. ISSN 0960-1317

Legrain, A. and Janson, T.G. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2014) Controllable elastocapillary folding of three-dimensional micro-objects by through-wafer filling. Journal of applied physics, 115 . p. 214905. ISSN 0021-8979

Vermeer, Rolf and Berenschot, Erwin and Sarajlic, Edin and Tas, Niels and Jansen, Henri (2014) Fabrication of novel AFM probe with high-aspect-ratio ultra-sharp three-face silicon nitride tips. In: 14th IEEE International Conference on Nanotechnology, NANO 2014, 18-21 August 2014, Toronto, Canada (pp. pp. 229-233).

2013

Berenschot, Erwin J.W. and Jansen, Henri V. and Tas, Niels R. (2013) Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon. Journal of micromechanics and microengineering, 23 (5). p. 10. ISSN 0960-1317

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Sarajlic, Edin and Leussink, Pele and Tas, Niels (2013) Wafer-scale fabrication of nanoapertures using corner lithography. Nanotechnology, 24 (28). p. 10. ISSN 0957-4484

Legrain, A. and Janson, T.G. and Berenschot, J.W. and Krijnen, G.J.M. and Abelmann, L. and Tas, N.R. (2013) Controllable elastocapillary folding of silicon nitride 3D structures by through-wafer filling. In: 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, 7-10 April 2013, Suzhou, China (pp. pp. 538-541).

Syed Nawazuddin, M.B. and Boer, M.J. de and Berenschot, J.W. and Ma, K.C. and Elwenspoek, M. and Wiegerink, R.J. (2013) Design, fabrication and characterization of a suspended plate mechano-optical modulator. In: 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 20-24 January 2013, Taipeh, Taiwan (pp. pp. 560-563).

2012

Berenschot, Erwin J.W. and Burouni, Narges and Schurink, B. and Honschoten, Joost W. van and Sanders, Remco G.P. and Truckenmuller, Roman and Jansen, Henri V. and Elwenspoek, Miko C. and Apeldoorn, Aart A. van and Tas, Niels R. (2012) 3D Nanofabrication of Fluidic Components by Corner Lithography. Small, 8 (24). pp. 3823-3831. ISSN 1613-6810

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Tas, Niels (2012) 3D Nanofabrication of components by repeated corner lithography: Self Aligned sub-50nm apertures. In: 12th IEEE International Conference on Nanotechnology, IEEE- NANO 2012, 20-23 August 2012, Birmingham, UK.

Dijkstra, M. and Berenschot, J.W. and Boer, M.J. de and Linden, H.J. van der and Hankemeier, T. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. and Tas, N.R. (2012) Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology. Microfluidics and nanofluidics, 13 (1). pp. 29-35. ISSN 1613-4982

Geerlings, J. and Sarajlic, E. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2012) Electrospray deposition from fountain pen AFM probes. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany (pp. C19).

Koelmans, W.W. and Peters, T. and Berenschot, J.W. and Boer, M.J. de and Siekman, M.H. and Abelmann, L. (2012) Cantilever arrays with self-aligned nanotips of uniform height. Nanotechnology, 23 (13). pp. 135301-135309. ISSN 0957-4484

Kozhummal, Rajeevan and Berenschot, Erwin and Jansen, Henri and Tas, Niels and Zacharias, Margit and Elwenspoek, Miko (2012) Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography. Journal of micromechanics and microengineering, 22 (8). 085032. ISSN 0960-1317

Sardan Sukas, Ö. and Yagubizade, H. and Berenschot, J.W. and Boer, M.J. de and Nguyen, M.D. and Abelmann, L. (2012) Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)$O_3$ thin film membranes. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany (pp. C9).

Sardan Sukas, Ö. and Yagubizade, H. and Berenschot, J.W. and Boer, M.J. de and Nguyen, Minh Duc and Abelmann, L. (2012) Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)O3 thin film membranes. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, Ilmenau, Germany, 01-01-2012, Ilmenau (pp. C9 - C9).

Syed Nawazuddin, M.B. and Lammerink, Theo S.J. and Berenschot, Erwin and Boer, Meint de and Ma, Ke-Chun and Elwenspoek, Miko C. and Wiegerink, Remco J. (2012) Towards a Casimir force measurement between micromachined parallel plate structures. Challenges, 3 (2). pp. 261-277. ISSN 2078-1547

2011

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Jansen, H.V. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics Express, 19 (17). pp. 15864-15878. ISSN 1094-4087

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter. Journal of Micromechanics and Microengineering, 21 (7). 0740041. ISSN 0960-1317

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning. Journal of Micromechanics and Microengineering, 21 (12). p. 125010. ISSN 0960-1317

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M.A. and Berenschot, J.W. and Boer, M.J. de and Ridder, R.M. de and Krijnen, G.J.M. (2011) Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 9-12).

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Tas, Niels (2011) Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures. In: 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, 20-23 Feb 2011, Kaohsiung, Taiwan (pp. pp. 940-943).

Honschoten, J.W. van and Legrain, A. and Berenschot, J.W. and Abelmann, L. and Tas, N.R. (2011) Micro-assembly of three dimensional tetrahedra by capillary forces. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 288-291).

Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and Ridder, R.M. de (2011) Micromechanically tuned ring resonator in silicon on insulator. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia (pp. Paper 4240-IT).

Kauppinen, Lasse J. and Abdulla, Shahina M.C. and Dijkstra, Meindert and Boer, Meint J. de and Berenschot, Erwin and Krijnen, Gijs J.M. and Pollnau, Markus and Ridder, René M. de (2011) Micromechanically tuned ring resonator in silicon on insulator. Optics Letters, 36 (7). pp. 1047-1049. ISSN 0146-9592

Legrain, A. and Berenschot, J.W. and Sanders, R.G.P. and Ma, K. and Tas, N.R. and Abelmann, L. (2011) Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 250-253).

Nawazuddin, M.B.S. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and Boer, M. de and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 434-437).

Sardan Sukas, Ö. and Berenschot, J.W. and Boer, M.J. de and Nguyen, M.D. and Zalk, M. van and Abelmann, L. (2011) Towards in-situ tem analysis of PLD Pb(Zr,Ti)O$_{3}$ thin film membranes. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 287-290).

2010

Abelmann, Leon and Tas, Niels and Berenschot, Erwin and Elwenspoek, Miko (2010) Self-assembled three-dimensional non-volatile memories. Micromachines, 1 (1). pp. 1-18. ISSN 2072-666X

Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Ridder, R.M. de and Krijnen, G.J.M. (2010) Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-d photonic crystal waveguides. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Ridder, R.M. de and Krijnen, G.J.M. (2010) Mechanical tuning of optical race-track ring resonators. Procedia Engineering, 5 . pp. 424-427. ISSN 1877-7058

Duan, Xuexin and Zhao, Yiping and Berenschot, Erwin and Tas, Niels R. and Reinhoudt, David N. and Huskens, Jurriaan (2010) Large-Area Nanoscale Patterning of Functional Materials by Nanomolding in Capillaries. Advanced Materials, 20 (15). pp. 2519-2526. ISSN 0935-9648

Elwenspoek, Miko and Abelmann, Leon and Berenschot, Erwin and Honschoten, Joost van and Jansen, Henri and Tas, Niels (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of Micromechanics and Microengineering, 20 (6). pp. 1-28. ISSN 0960-1317

Honschoten, J.W. van and Berenschot, J.W. and Ondarcuhu, T. and Sanders, R.G.P. and Sundaram, J. and Elwenspoek, M. and Tas, N.R. (2010) Elastocapillary fabrication of three-dimensional microstructures. Applied Physics Letters, 97 . 014103-1-014103-3. ISSN 0003-6951

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Krijnen, G.J.M. (2010) Fabrication of superficial neuromast inspired capacitive flow sensors. Journal of Micromechanics and Microengineering, 20 (8). 085041. ISSN 0960-1317

Sarajlic, E. and Geerlings, J. and Berenschot, J.W. and Siekman, M.H. and Tas, N.R. and Abelmann, L. (2010) Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 24-27).

Sarajlic, Edin and Yamahata, Christophe and Berenschot, Erwin and Tas, Niels and Fujita, Hiroyuki and Krijnen, Gijs (2010) High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology. Micromachines, 1 (2). pp. 48-67. ISSN 2072-666X

Yagubizade, Hadi and Berenschot, Erwin and Jansen, Henri V. and Elwenspoek, Miko and Tas, Niels R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA (pp. pp. 128-131).

Zhao, Yiping and Jansen, Henri and Boer, Meint de and Berenschot, Erwin and Bouwes, Dominique and Girones, Miriam and Huskens, Jurriaan and Tas, Niels (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of Micromechanics and Microengineering, 20 (9). 095022. ISSN 0960-1317

Zhao, Yiping and Jansen, Henri and Boer, Meint de and Berenschot, Erwin and Bouwes, Dominique and Girones, Miriam and Huskens, Jurriaan and Tas, Niels (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of Micromechanics and Microengineering, 20 (9). pp. 1-13. ISSN 0960-1317

2009

Abelmann, Leon and Tas, Niels and Berenschot, Erwin and Elwenspoek, Miko (2009) Self assembled three-dimensional nonvolatile memories. [Report]

Alberts, C.J. and Man, S. de and Berenschot, J.W. and Gadgil, V.J. and Elwenspoek, M.C. and Iannuzzi, D. (2009) Fiber-top refractometer. Measurement Science and Technology, 20 (3). 034005. ISSN 0957-0233

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). p. 475302. ISSN 0957-4484

Berenschot, Johan Willem and Tas, Niels Roelof (2009) A method for making a 3D nanostructure having a nanosubsructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanowires obtainable by this method. Patent.

Berenschot, Johan Willem and Tas, Niels Roelof (2009) A method for making a 3D nanostructure having a nanosubstructure, and an insulating pyramid having a metallic tip, a pyramid having nano-apertures and horizontal and/or vertical nanovires obtainable by this method. Patent.

Berenschot, Johan Willem and Wissink, Jeroen Mathijn and Tas, Niels Roelof and Boer, Meint Jelle de (2009) Microneedle, microneedle array and production method therefor. Patent.

Berenschot, Johan Willem and Wissink, Jeroen Mathijn and Tas, Niels Roelof and Boer, Meint Jelle de (2009) Microneedle, Microneedle array and production method therefor. Patent.

Bruinink, C.M. and Jaganatharaja, R.K. and Boer, M.J. de and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Advancements in technology and design of biomimetic flow-sensor arrays. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, 25-29 January 2009, Sorrento, Italy (pp. pp. 152-155).

Bruinink, C.M. and Jaganatharaja, R.K. and Boer, M.J. de and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Developing the ultimate biomimetic flow-sensor array. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany (pp. p. 65).

Chakkalakkal Abdulla, S. and Berenschot, E. and Boer, M.J. de and Kauppinen, L.J. and Ridder, R.M. de and Krijnen, G.J.M. (2009) Optimisation study of micro cantilevers for switching of photonic band gap crystals. In: International Conference on Photonics in Switching, PS 2009, 15-19 September 2009, Pisa, Italy.

Duan, Xuexin and Zhao, Yiping and Perl, András and Berenschot, Erwin and Reinhoudt, David N. and Huskens, Jurriaan (2009) High-Resolution Contact Printing with Chemically Patterned Flat Stamps Fabricated by Nanoimprint Lithography. Advanced Materials, 21 (27). pp. 2798-2802. ISSN 0935-9648

Hoang, T.H. and Segers-Nolten, I.M. and Berenschot, J.W. and Boer, M.J. de and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of Micromechanics and Microengineering, 19 (065017). 065017. ISSN 0960-1317

Honschoten, J.W. van and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. and Elwenspoek, M. (2009) Fabrication of three-dimensional microstructures using capillary forces. In: MME 2009, The 20th Micromechanics Europe Workshop, September 20-22, 2009, Toulouse, France.

Izadi, N. and Boer, M. de and Berenschot, E. and Wiegerink, R. and Krijnen, G.J.M. (2009) A fabrication scheme for biomimetic aquatic hair sensors. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany (pp. p. 66).

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Biomimetic aquatic hair sensors fabrication. In: The Sense of Contact 11, 8 April 2009, Zeist, The Netherlands.

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2009, 21-25 June 2009, Denver, CO, USA (pp. pp. 1075-1078).

Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam .

Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and Brake, H.J.M. ter and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of Micromechanics and Microengineering, 19 (085027). 085027. ISSN 0960-1317

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a Chip, 9 (13). pp. 1966-1969. ISSN 1473-0197

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 1-4).

Unnikrishnan, Sandeep and Jansen, Henricus Venantius and Berenschot, Johan Willem and Fazal, Imran and Louwerse, Marcus Cornelis and Sanders, Remco and Boer, Meint Jelle de and Elwenspoek, Miko Curt (2009) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent.

Zhao, Y. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). p. 315305. ISSN 0957-4484

2008

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China (pp. pp. 729-732).

Bruinink, Christiaan M. and Burresi, Matteo and Boer, Meint J. de and Segerink, Frans B. and Jansen, Henri V. and Berenschot, E. and Reinhoudt, David N. and Huskens, Jurriaan and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and Actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247

Dijkstra, M.A. and Lammerink, T.S.J. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift U-Shaped Thermopile Flow Sensor. In: Sensors, 2008 IEEE, 26-29 Oct 2008, Lecce, Italy (pp. pp. 66-69).

Dijkstra, M.A. and Lammerink, T.S.J. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift flow sensor with zero-offset thermopile-based power feedback. In: Proceedings of DTIP, 9-11 Apr 2008, Nice (pp. p. 4).

Escalante, Maryana and Zhao, Yiping and Ludden, Manon J.W. and Vermeij, Rolf and Olsen, John D. and Berenschot, Erwin and Hunter, C. Neil and Huskens, Jurriaan and Subramaniam, Vinod and Otto, Cees (2008) Nanometer arrays of functional light harvesting antenna complexes by nanoimprint lithography and host-guest interactions. Journal of the American Chemical Society, 130 (28). pp. 8892-8893. ISSN 0002-7863

Iannuzzi, D. and De Man, S. and Alberts, C.J. and Berenschot, J.W. and Elwenspoek, M.C. and Said, A.A. and Dugan, M. (2008) Fiber-top micromachined devices. In: 19th International Conference on Optical Fibre Sensors, 15-18 April 2008, Perth, WA, Australia (pp. p. 700403).

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Eurosensors XXII, European Conference on Solid-State Transducers, 7-10 September 2008, Dresden, Germany (pp. pp. 912-915).

Izadi, Nima and Verlaat, Bas and Berenschot, Erwin and Wiegerink, Remco and Boer, Meint de and Mogdans, Joachim and Krijnen, Gijs (2008) Design and fabrication process for artificial lateral line flow sensors. In: International Conference on Sensor and Sensing in Biology and Engineering, 12-16 October 2008, Cetraro, Italy.

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317

Wissink, J. and Berenschot, J.W. and Tas, N.R. (2008) Atom sharp needles, the missing link in microneedle drug delivery. In: Proceedings of Medical Devices Conference, 6-October-2008, Kopenhagen (pp. pp. 23-26).

Zhao, Y. and Berenschot, J.W. and Boer, M.J. de and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of Micromechanics and Microengineering, 18 (18). 064013. ISSN 0960-1317

Zhao, Y. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece (pp. p. 221).

Zhao, Yiping and Berenschot, Erwin and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2008) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic Engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317

2007

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2007) A versatile surface channel concept for microfluidic applications. Journal of Micromechanics and Microengineering, 17 (10). pp. 1971-1977. ISSN 0960-1317

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan (pp. pp. 123-126).

Iannuzzi, D. and Heeck, K. and Slaman, M. and Man, S. de and Rector, J.H. and Schreuders, H. and Berenschot, J.W. and Gadgil, V.J. and Sanders, R.G.P. and Elwenspoek, M.C. and Deladi, S. (2007) Fibre-top cantilevers: design, fabrication and applications. Measurement Science and Technology, 18 (10). pp. 3247-3252. ISSN 0957-0233

Lüttge, Regina and Berenschot, Erwin J.W. and Boer, Meint J. de and Altpeter, Dominique M. and Vrouwe, Elwin X. and Berg, Albert van den and Elwenspoek, Miko (2007) Integrated Lithographic Molding for Microneedle-Based Devices. Journal of Microelectromechanical Systems, 16 (4). pp. 872-884. ISSN 1057-7157

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Experimental investigation of anisotropy in isotropic silicon etching. Journal of micromechanics and microengineering, 17 (11). pp. 2344-2351. ISSN 0960-1317

Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R. (2007) Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110). Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 25 (4). pp. 1207-1216. ISSN 1071-1023

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal (pp. pp. 127-130).

Zhao, Yiping and Berenschot, Erwin and Boer, Meint de and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: MicroMechanics Europe Workshop, MME 2007, 16-18 Sep 2007, Guimarães, Portugal (pp. pp. 253-256).

2006

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2006) Versatile surface channel concept for microfluidic applications. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 September 2006, Southampton, England (pp. pp. 37-40).

Fernandez, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of Micromechanics and Microengineering, 16 (4). pp. 862-868. ISSN 0960-1317

Haneveld, Jeroen and Berenschot, Erwin and Maury, Pascale and Jansen, Henri (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of Micromechanics and Microengineering, 16 (6). S24-S28. ISSN 0960-1317

Iannuzzi, D. and Deladi, S. and Berenschot, J.W. and Man, S. de and Heeck, K. and Elwenspoek, M.C. (2006) Fiber-top atomic force microscope. Review of Scientific Instruments, 77 (10). pp. 106105-1. ISSN 0034-6748

Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 814-817).

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and Actuators A: Physical, 130-13 . pp. 340-345. ISSN 0924-4247

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Experimental verification of the diffusion theory for wet isotropic etching of si via circular mask openings. In: Fifth International Workshop on Physical Chemistry of Wet Etching of Semiconductors, 19-21 June 2006, Saarbrücken, Germany.

Svetovoy, V.B. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Precise Test of the Diffusion-Controlled Wet Isotropic Etching of Silicon via Circular Mask Openings. Journal of the Electrochemical Society, 153 (9). C641-C647. ISSN 0013-4651

2005

Deladi, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2005) In situ characterization technique for nanotribological investigations. Review of Scientific Instruments, 76 (1). 016102. ISSN 0034-6748

Deladi, S. and Berenschot, J.W. and Tas, N.R. and Boer, J.H. de and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of micromachined Foutain Pen with in-situ characterization possibility of nanoscale surface modification. Journal of Micromechanics and Microengineering, 15 (3). pp. 528-534. ISSN 0960-1317

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. and Boer, J.H. de (2005) Micromachined Foutain Pen as a tool for Atomic Force Microscopebased nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 564-567).

Fazal, I. and Berenschot, J.W. and Boer, J.H. de and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond Strength Tests Between Silicon Wafers and Duran Tubes (Fusion Bonded Fluidic Interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (pp. pp. 936-939).

Fernandez, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of RF devices. Electronics Letters, 41 (3). pp. 124-125. ISSN 0013-5194

Fernandez, Luis J. and Arz, Uwe and Schubert, Dirk and Berenschot, E. and Wiegerink, Remco and Flokstra, J. (2005) A CMOS compatible Process for Improved RF Performance on Highly Doped Substrates. In: 9th IEEE Workshop on Signal Propagation on Interconnects, 2005, 10-13 May 2005, Garmisch-Partenkirchen, Germany (pp. pp. 167-170).

Haneveld, Jeroen and Berenschot, Erwin and Maury, Pascale and Jansen, Henri (2005) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 72-75).

Hoang, Thi Hanh and Berenschot, J.W. and Tas, Niels R. and Elwenspoek, Miko C. (2005) Fabrication of access holes to 2D nanochannels for single molecules experiment [poster]. In: NanoTech Montreux, November 15-17, 2005, Montreux, Switzerland.

Sarajlic, E. and Berenschot, E. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) Bidirectional electrostatic linear shuffle motor with two degrees of freedom. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 391-394).

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Fabrication of 3D Nanowire Frames by Conventional Micromachining Technology. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 27-30).

Sarajlic, E. and Berenschot, E. and Tas, N. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) High Performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 53-56).

Sarajlic, Edin and Berenschot, Johan Willem (2005) Method for manufacturing a nanstructure. Patent.

Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AlN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden (pp. pp. 320-323).

Saravanan, S. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Fabrication of Surface Micromachined AlN Piezoelectric Microstructures and its Potential Apllication to RF Resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland.

Saravanan, S. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Surface Micromachined Fabrication of Piezoelectric AlN Unimorph Suspension Devices for RF Resonator Applications. In: 13th International Conference on Solid-StateSensors, Actuators and Microsystems, Transducers 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 1362-1365).

Saravanan, S. and Dijkstra, M. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden (pp. pp. 320-323).

Tiggelaar, R.M. and Berenschot, J.W. and Boer, J.H. de and Sanders, R.G.P. and Gardeniers, J.G.E. and Oosterbroek, R.E. and Berg, A. van den and Elwenspoek, M.C. (2005) Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silion nitride tubes. Lab on a Chip, 5 (3). pp. 325-336. ISSN 1473-0197

Tiggelaar, R.M. and Male, P. van and Berenschot, J.W. and Gardeniers, J.G.E. and Oosterbroek, R.E. and Croon, M.H.J.M. de and Schouten, J.C. and Berg, A. van den and Elwenspoek, M.C. (2005) Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane. Sensors and Actuators A: Physical, 119 . pp. 196-205. ISSN 0924-4247

Tong, Hien Duy and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, Henri V. and Berenschot, J.W. and Boer, Meint J. de and Boer, J.H. de and Rijn, Cees J.M. van and Elwenspoek, Miko C. (2005) Microsieve supporting palladium-silver alloy membranes and application to hydrogen separation. Journal of Microelectromechanical Systems, 14 . pp. 113-123. ISSN 1057-7157

Yeshurun, Yehoshua and Hefetz, Meir and Berenschot, Erwin and Boer, Meint de and Altpeter, Dominique and Boom, Garrit (2005) Polymer Microneedles. Patent.

2004

Deladi, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) An AFM-based device for in-situ characterization of nano-wear. In: 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, January 25-29, 2004, Maastricht, the Netherlands (pp. pp. 181-184).

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and Boer, M.J. de and Boer, J.H. de and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope based nanopatterning. Applied Physics Letters, 85 (22). pp. 5361-5363. ISSN 0003-6951

Mela, Petra and Tas, Niels R. and Berenschot, Erwin J.W. and Nieuwkasteele, Jan van and Berg, Albert van den (2004) Electrokinetic pumping and detection of low-volume flows in nanochannels. Electrophoresis, 25 (21-22). pp. 3687-3693. ISSN 0173-0835

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Electrostatic stepping motion microactuator with high-resolution and large force for micro Scanning Probe Array Memory (µSPAM). In: 4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004, 28-29 September 2004, Aachen, Germany.

Saravanan, S. and Berenschot, Erwin and Krijnen, Gijs and Elwenspoek, Miko (2004) Surface Micromachining Process for the Integration of AlN Piezoelectric Microstructures. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 676-681).

Tong, Hien D. and Jansen, Henri V. and Gadgil, Vishwas J. and Bostan, Cazimir G. and Berenschot, Erwin and Rijn, Cees J.M. van and Elwenspoek, Miko (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984

2003

Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C. (2003) Fabrication of functional structures on thin silicon nitride membranes. Microelectronic Engineering, 67-68 . pp. 422-429. ISSN 0167-9317

Gardeniers, Han J.G.E. and Lüttge, Regina and Berenschot, Erwin J.W. and Boer, Meint J. de and Yeshurun, Shuki Y. and Hefetz, Meir and Oever, Ronny van 't and Berg, Albert van den (2003) Silicon micromachined hollow microneedles for transdermal liquid transport. Journal of Microelectromechanical Systems, 12 (6). pp. 855-862. ISSN 1057-7157

Haneveld, Jeroen and Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2003) Wet anisotropic etching for fluidic 1D nanochannels. Journal of Micromechanics and Microengineering, 13 (4). S62-S66. ISSN 0960-1317

Krijnen, G. and Haanstra, R. and Potters, E. and Berenschot, J.W. and Harrach, S. von and Elwenspoek, M. (2003) Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, June 8-12, 2003, Boston, USA (pp. pp. 268-271).

LeMinh, P. and Holleman, J. and Wallinga, H. and Berenschot, J.W. and Tas, N.R. and Berg, A. van den (2003) Novel integration of a microchannel with a silicon light emitting diode antifuse. Journal of Micromechanics and Microengineering, 13 (3). pp. 425-429. ISSN 0960-1317

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2003) A low electrostatic inchworm microactuator with high-resolution and large force. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 323-326).

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2003) Versatile trench isolation technology for the fabrication of microactuators. Microelectronic Engineering, 67-68 . pp. 430-437. ISSN 0167-9317

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In: Nanotech 2003 Nanotechnology Conference and Trade Show, Februari 23-28, 2003, San Francisco, Los Angeles, Boston (pp. pp. 392-395).

Saravanan, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Studies of AIN growth on various substrates by RF reactive sputtering techniques. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 163-166).

Tas, N.R. and Mela, P. and Kramer, E. and Berenschot, J.W. and Berg, A. van den (2003) Water plugs in nanochannels under negative pressure. In: MicroTAS 2003: Seventh International Conference on Micro Total Analysis Systems, 5-9 October 2003 , Squaw Valley, CA, USA (pp. pp. 13-16).

Tas, Niels R. and Mela, Petra and Kramer, Tobias and Berenschot, J.W. and Berg, Albert van den (2003) Capillarity Induced Negative Pressure of Water Plugs in Nanochannels. Nano Letters, 3 (11). pp. 1537-1540. ISSN 1530-6984

Tiggelaar, R.M. and Berenschot, J.W. and Oosterbroek, R.E. and Male, P. van and Croon, M.H.J.M. de and Schouten, J.C. and Berg, A. van den (2003) A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high-temperature gas microreactors. In: Transducers 2003: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, June 9-12, 2003, Boston, MA, USA (pp. pp. 746-749).

Tiggelaar, Roald M. and Veenstra, Theo T. and Sanders, Remco G.P. and Berenschot, Erwin and Gardeniers, Han and Elwenspoek, Miko and Prak, Albert and Mateman, Richard and Wissink, Jeroen M. and Berg, Albert van den (2003) Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach. Sensors and Actuators B: Chemical, 92 (1-2). pp. 25-36. ISSN 0925-4005

Tjerkstra, R.W. and Ekkels, P. and Krijnen, G.J.M. and Egger, S. and Berenschot, J.W. and Ma, K.C. and Brugger, J. (2003) Fabrication of an active nanostencil with integrated microshutters. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, June 8-12, 2003, Boston, USA (pp. pp. 1651-1654).

Tong, H.D. and Gielens, F.C. and Hoang, H.T. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, MA, USA (pp. pp. 1742-1745).

Tong, Hien Duy and Berenschot, J.W. (Erwin) and Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Wensink, Henk and Jansen, Henri V. and Nijdam, Wietze and Elwenspoek, Miko C. and Gielens, F.C. (Frank) and Rijn, Cees J.M. van (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of Microelectromechanical Systems, 12 (5). pp. 622-629. ISSN 1057-7157

2002

Baar, J.J. van and Wiegerink, R.J. and Berenschot, J.W. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2002) Pressure sensor based on distributed temperature sensing. In: IEEE Sensors Conference 2002, 12-14 June 2002 , Orlando, USA (pp. pp. 964-968).

Baar, J.J. van and Wiegerink, R.J. and Lammerink, T.S.J. and Berenschot, E. and Krijnen, G.J.M. and Elwenspoek, M. (2002) Combined -pirani/bending- membrane-pressure sensor. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, January 20-24, 2002, Las Vegas, Nevada, USA (pp. pp. 328-331).

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2002) Advanced sacrificial poly-Si technology for fluidic sytems. Journal of Micromechanics and Microengineering, 12 (5). pp. 621-624. ISSN 0960-1317

Gardeniers, J.G.E. and Berenschot, J.W. and Boer, M.J. de and Yeshurun, Y. and Hefetz, M. and Oever, R. van 't and Berg, A. van den (2002) Silicon micromachined hollow microneedles for transdermal liquid transfer. In: Micro Electro Mechanical Systems (MEMS) Conference 2002, January 20-24 , 2002, Las Vegas, Nevada, USA (pp. pp. 268-271).

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania (pp. pp. 47-50).

LeMinh, P. and Holleman, J. and Berenschot, J.W. and Tas, N.R. and Berg, A. van den (2002) Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector. In: SeSens 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 644-648).

LeMinh, P. and Holleman, J. and Berenschot, J.W. and Tas, N.R. and Berg, A. van den (2002) Monolithic Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector. In: 32nd European Solid-State Device Research Conference, ESSDERC, 24-26 September 2002, Firenze, Italy (pp. pp. 451-454).

Tas, N.R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2002) Nanofluidic bubble pump using surface tension directed gas injection. Analytical Chemistry, 74 (9). pp. 2224-2228. ISSN 0003-2700

Tas, N.R. and Lammerink, T.S.J. and Berenschot, J.W. and Elwenspoek, M.C. and Berg, A. van den (2002) Scaling behaviour of pressure driven micro hydraulic systems. In: International Conference on Modeling and Simulation of Microsystems, MSM, April 22-25, 2002, Puerto Rico, USA (pp. pp. 174-177).

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Micromachined palladium silver alloy membranes for hydrogen separation. In: SESENS 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 688-691).

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer scale palladium silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, January 20-24, 2002, Las Vegas, Nevada, USA (pp. pp. 264-268).

2001

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (2001) Advanced sacrificial poly-Si technology for fluidic systems. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 624-627).

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M. and Tijssen, R. and Berg, A. van den (2001) Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections. Journal of Micromechanics and Microengineering, 11 (4). pp. 382-385. ISSN 0960-1317

Bruijn, M.P. and Ridder, M. and Hoevers, H.F.C. and Bergmann, W.M. and Korte, P.A.J. de and Moktadir, Z. and Wiegerink, R.J. and Berenschot, J.W. and Elwenspoek, M.C. (2001) Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 179-184).

Burger, J.F. and Holland, H.J. and Seppenwoolde, J.H. and Berenschot, E. and Brake, H.J.M. ter and Gardeniers, J.G.E. and Elwenspoek, M. and Rogalla, H. (2001) 165 k microcooler operating with a sorption compressor and a micromachined cold stage. In: 11th International Cryocooler Conference, June 20-22, 2000, Keystone, Colorado, USA (pp. pp. 551-560).

Burger, Johannes and Holland, Harry and Berenschot, Erwin and Seppenwolde, Jan-Henry and Brake, Marcel ter and Gardeniers, Han and Elwenspoek, Miko (2001) 169 kelvin cryogenic microcooler empoying a condenser, evaporator, flow restriction and counterflow heat exchangers. In: 14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 21-25 Jan. 2001, Interlaken, Switzerland (pp. pp. 418-421).

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (2001) Selective wafer bonding by surface roughness control. Journal of the Electrochemical Society, 148 (4). G225-G228. ISSN 0013-4651

Nijdam, A.J. and Gardeniers, J.G.E. and Berenschot, J.W. and Veenendaal, E. van and Suchtelen, J. van and Elwenspoek, M. (2001) Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon. Journal of Micromechanics and Microengineering, 11 (5). pp. 499-503. ISSN 0960-1317

Oosterbroek, R.E. and Goedbloed, M.H. and Trautmann, A. and Veen, N.J. van der and Schlautmann, S. and Berenschot, J.W. and Berg, A. van den (2001) Electro-osmotic flow control in microfluidics systems. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 7-12).

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint J. de and Jansen, Henri V. and Berenschot, J.W. and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Elwenspoek, Miko and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2001) Direct Integration of Micromachined Pipettes in a Flow Channel for Single DNA Molecule Study by Optical Tweezers. Journal of Microelectromechanical Systems, 10 (2). pp. 238-246. ISSN 1057-7157

Tas, N.R. and Berenschot, J.W. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2001) Bubble pump for integrated nanofluidics. In: 1st IEEE Conference on Nanotechnology 2001, IEEE-NANO, October 28–30, 2001, Maui, Hawaii, USA (pp. pp. 454-458).

Tong, D.H. and Zwijze, R.A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and Materials, 13 (4). pp. 235-246. ISSN 0914-4935

Veenstra, T.T. and Berenschot, J.W. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2001) A simple selfpriming bubble-tolerant peristaltic micropump. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 125-129).

Veenstra, T.T. and Tiggelaar, R.M. and Sanders, R.G.P. and Berenschot, J.W. and Gardeniers, J.G.E. and Wissink, J. and Mateman, R. and Elwenspoek, M.C. and Berg, A. van den (2001) Monolithic versus modular integration of a micro-fia system for ammonium determination. In: MicroTAS 2001 Symposium, October 21–25, 2001, Monterey, CA, USA (pp. pp. 664-666).

Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and Berg, A. van den (2001) Use of selective anodic bonding to create micropump chambers with virtually no dead volume. Journal of the Electrochemical Society, 148 (2). G68-G72. ISSN 0013-4651

Wensink, Henk and Jansen, Henri V. and Berenschot, J.W. and Elwenspoek, Miko C. (2001) Mask materials for powder blasting. Journal of Micromechanics and Microengineering, 10 (2). pp. 175-180. ISSN 0960-1317

2000

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Berg, A. van den and Tijssen, R.P. (2000) High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

Boer, Meint J. de and Tjerkstra, R. Willem and Berenschot, J.W. (Erwin) and Jansen, Henri V. and Burger, G.J. and Gardeniers, J.G.E. (Han) and Elwenspoek, Miko and Berg, Albert van den (2000) Micromachining of buried micro channels in silicon. Journal of Microelectromechanical Systems, 9 (1). pp. 94-103. ISSN 1057-7157

Brugger, J. and Berenschot, J.W. and Kuiper, S. and Nijdam, W. and Otter, B. and Elwenspoek, M. (2000) Resistless patterning of sub-micron structures by evaporation through nanostencils. Microelectronic Engineering, 53 (1). pp. 403-405. ISSN 0167-9317

Oosterbroek, R.E. and Gui, C. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (2000) Bonding and etching techniques for precision frabrication of reliable microvalves. In: MicroTAS 2000 Conference, May 14-18, 2000, Enschede, The Netherlands (pp. pp. 179-182).

Oosterbroek, R.E. and Berenschot, J.W. and Jansen, H.V. and Nijdam, A.J. and Pandraud, G. and Berg, A. van den and Elwenspoek, M.C. (2000) Etching methodologies in <111>-oriented silicon wafers. Journal of Microelectromechanical Systems, 9 (3). pp. 390-396. ISSN 1057-7157

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Bennink, M.L. and Kanger, J.S. and Grooth, B.G. de and Elwenspoek, Miko and Greve, J. and Berg, A. van den and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 429-434).

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Elwenspoek, Miko and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Micro- and Nanotechnology for Biomedical and Environmental Applications, 26-27 January 2000, San Jose, California, USA (pp. pp. 41-49).

Tas, N.R. and Lammerink, T.S.J. and Leussink, P.J. and Berenschot, J.W. and Bree, H-E. de and Elwenspoek, M. (2000) Towards thermal flowsensing with pL/s resolution. In: Micromachining and Microfabrication 2000, 18 September 2000, Santa Clara, CA, USA (pp. pp. 106-121).

Tong, H.D. and Zwijze, R.A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Characterization of platinum lift-off technique. In: SeSens workshop on Semiconductor Sensor and Actuator Technology, Nov. 30 - Dec. 1, 2000, Veldhoven, The Netherlands.

Veenstra, T.T. and Berenschot, J.W. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2000) A simple selfpriming bubble tolerant peristaltic micropump. In: Eurosensors XIV Conference, August 27-31, 2000, Copenhagen, Denmark (pp. pp. 371-372).

Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (2000) High resolution powder blast micromachining. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 769-774).

Zwijze, R.A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and Boer, M.J. de and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Micromachining and Microfabrication 2000, 18 September 2000, Santa Clara, CA, USA (pp. pp. 47-58).

1999

Bree, Hans-Elias de and Druyvesteyn, W.F. and Berenschot, E. and Elwenspoek, M. (1999) Three-dimensional sound intensity measurements using microflown particle velocity sensors. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 124-129).

Bree, H-E. de and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) A low noise microphone based on the microflown technology. In: Transducers '99, 10th International Conference on Solid-State Sensors and Actuators, June 7-10, 1999, Sendai, Japan.

Burger, J.F. and Wekken, M.C. van der and Berenschot, E. and Holland, H.J. and Brake, H.J.M. ter and Rogalla, H. and Gardeniers, J.G.E. and Elwenspoek, M. (1999) High pressure check valve for application in a miniature cryogenic scorption cooler. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 183-188).

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1999) Selective fusion bonding by surface roughness control. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem Technologies, 5 (3). pp. 138-143. ISSN 0946-7076

Nijdam, A.J. and Berenschot, J.W. and Suchtelen, J. van and Gardeniers, J.G.E. and Elwenspoek, M. (1999) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. Journal of Micromechanics and Microengineering, 9 (2). pp. 135-138. ISSN 0960-1317

Nijdam, A.J. and Suchtelen, J. van and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Etching of silicon in alkaline solutions: a critical look at the {111} minimum. Journal of Crystal Growth, 198-19 (Part 1). pp. 430-434. ISSN 0022-0248

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. and Berg, A. van den (1999) Characterization and optimization of mono-crystalline in-plane operating check valves. In: IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99, 7-10 June 1999, Sendai, Japan (pp. pp. 1816-1819).

Oosterbroek, R.E. and Berenschot, J.W. and Nijdam, A.J. and Pandraud, G. and Elwenspoek, M.C. and Berg, A. van den (1999) New design methodologies in <111>-oriented silicon wafers. In: Micromachining and Microfabrication 1999, 20 September 1999, Santa Clara, CA, USA (pp. pp. 384-394).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (1999) Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of Micromechanics and Microengineering, 9 (2). pp. 194-198. ISSN 0960-1317

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. and Berg, A. van den (1999) A micromachined pressure/flow sensor. Sensors and Actuators A: Physical, 77 (3). pp. 167-177. ISSN 0924-4247

Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and Berg, A. van den (1999) The use of selective anodic bonding to create near-zero dead volume membranes. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

Veldhuis, G.J. and Nauta, T. and Gui, C. and Berenschot, J.W. and Lambeck, P.V. (1999) Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage. IEEE Journal of Selected Topics in Quantum Electronics, 5 (1). pp. 60-66. ISSN 1077-260X

Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 September 1999, Gif sûr Yvette, France (pp. pp. 199-202).

1998

Berenschot, J.W. and Oosterbroek, R.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1998) Micromachining of \lbrace111\rbrace plates in <001> oriented silicon. Journal of Micromechanics and Microengineering, 8 (2). pp. 104-107. ISSN 0960-1317

Burger, Johannes and Berenschot, Erwin and Burger, Gert-Jan and Visscher, Harm and Elwenspoek, Miko (1998) Piezoresistive friction force sensor for tribological research. Journal of Micromechanics and Microengineering, 8 (2). pp. 138-140. ISSN 0960-1317

Gui, C. and Boer, M. de and Gardeniers, J.G.E. and Jansen, H. and Berenschot, J.W. and Elwenspoek, M. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and Actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 1998, Heidelberg, Germany (pp. pp. 482-487).

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: design and modeling. Journal of Microelectromechanical Systems, 7 (1). pp. 79-86. ISSN 1057-7157

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: fabrication and performance. Journal of Microelectromechanical Systems, 7 (1). pp. 87-93. ISSN 1057-7157

Nijdam, A.J. and Berenschot, J.W. and Suchtelen, J. van and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 74-77).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) In-plane oriented fluid control components, fabricated with new etching techniques. In: Actuator 98, 6th international conference on new actuators, 17-19 June 1998, Bremen, Germany (pp. pp. 43-46).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM'98, 6-8 April, 1998, Santa Clara, CA, USA.

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) A new fabrication method for in-plane micro fluid handling components and analysis systems. In: Sensor technology in the Netherlands : state of the art : proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2-3 March 1998. Kluwer Academic, Dordrecht, pp. 85-90. ISBN 9780792350101

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 104-107).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Utilizing the {111} plane switch-over etching process for micro fluid control applications. In: Micro Total Analysis Systems '98, 13-16 October 1998, Banff, Canada.

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves. In: MSM International Conference on Modeling and Simulation of Microsystems, April 6-8, 1998, Santa Clara, CA, USA (pp. pp. 528-533).

Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592

1997

Burger, J.F. and Berenschot, J.W. and Visscher, H. and Elwenspoek, M.C. (1997) Piezoresistive friction force sensor for tribological research. In: Micro Mechanics Europe, MME 1997, Aug. 31 - Sept. 2, 1997, Southampton, England (pp. pp. 152-155).

Gui, C. and Jansen, H.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multi layer substrates. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA (pp. pp. 633-636).

Gui, C. and Jansen, H.V. and Boer, M. de and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: International Conference on Solid-State Sensors and Actuators, TRANSDUCERS, 16-19 June 1997, Chicago, IL, USA (pp. pp. 633-636).

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan H. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of Microelectromechanical Systems, 6 (3). pp. 234-241. ISSN 1057-7157

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Berg, A. van den and Elwenspoek, M.C. (1997) Designing, realization and characterization of a novel capacitive pressure/flow sensor. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA (pp. pp. 151-154).

Tjerkstra, R. Willem and Boer, Meint de and Berenschot, Erwin and Gardeniers, J.G.E. and Berg, Albert van den and Elwenspoek, Miko (1997) Etching technology for microchannels. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan (pp. pp. 147-152).

Tjerkstra, R.W. and Boer, M. de and Berenschot, E. and Gardeniers, J.G.E. and Berg, A. van den and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica Acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686

1996

Berenschot, Erwin and Jansen, Henri and Burger, Gert-Jan and Gardeniers, Han and Elwenspoek, Miko (1996) Thermally assisted ion beam etching of polytetrafluoroethylene, a new technique for high aspect ratio etching of MEMS. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, February 11-15, 1996, San Diego, California, USA (pp. pp. 277-284).

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1996) High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through. Sensors and Actuators A: Physical, 54 (1-3). pp. 669-673. ISSN 0924-4247

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 204-209).

1995

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1995) High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through. In: Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden (pp. pp. 573-576).

Lammerink, T.S.J. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Micromachined hydraulic astable multivibrator. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - 2 Feb. 1995, Amsterdam, The Netherlands (pp. pp. 13-18).

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Towards position control of electrostatic comb drives.

Legtenberg, R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic axial gap wobble motor.

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Lammerink, Theo and Elwenspoek, Miko (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 404-407).

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan (1995) Electrostatic curved electrode actuators. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - Feb. 1995, Amsterdam, The Netherlands (pp. pp. 37-42).

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Faase, F.J. (1995) Sacrificial wafer bonding: an addition to the micromachining techniques. In: Third International Symposium on Semiconductor Wafer Bonding, May 21-26, 1995, Reno, Nevada, USA (pp. pp. 642-643).

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M. (1995) Planarization and fabrication of bridges across deep groves or holes in silicon using a dry film photoresist followed by an etch back. Journal of Micromechanics and Microengineering, 5 (2). pp. 189-192. ISSN 0960-1317

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of Micromechanics and Microengineering, 5 (2). pp. 151-157. ISSN 0960-1317

Spiering, Vincent L. and Berenschot, J.W. and Elwenspoek, Miko and Fluitman, Jan H.J (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of Microelectromechanical Systems, 4 (3). pp. 151-157. ISSN 1057-7157

Tas, N.R. and Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) The electrostatic shuffle motor. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 128-131).

1994

Berenschot, J.W. and Gardeniers, J.G.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) New applications of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 338-343. ISSN 0924-4247

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. (1994) Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back. In: 5th Workshop on Micromachining, Micromechanics and Microsystems (MME'94) (pp. pp. 210-213).

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M. and Fluitman, J.H.J. (1994) Low temperature sacrificial wafer bonding for planarization after very deep etching. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS, January 25-28, 1994, Oiso, Japan (pp. pp. 69-74).

This list was generated on Sat Nov 22 05:38:16 2014 CET.