Author Publications

Conference or Workshop Item

Popescu, Dan O. and Dascula, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1994) Silicon active microvalves using buckled membranes for actuation. In: 17th Annual Semiconductor Conference, 11-16 October, 1994, Sinaia, Romania.

Popescu, Dan O. and Dascula, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1995) Silicon active microvalves using buckled membranes for actuation. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden.

Popescu, Dan O. and Lammerink, Theo S.J. and Elwenspoek, Miko (1994) Buckled membranes for microstructures. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS , January 25-28, 1994, Oiso, Japan.