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Altena, G. and Dijkstra, M. and Elzakker, G. van and Venhorst, G.C.F. and Hoekstra, H.J.W.M. and Lambeck, P.V. (2003) A Novel MOENS device: detection of MEMS movements using free-standing Si3N4 suspended optical waveguides. In: IEEE/LEOS Benelux Chapter 2003 Annual Symposium, November 20-21, 2003, Enschede, The Netherlands (pp. pp. 25-28).

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