Author Publications

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Number of items: 126.

2014

Brookhuis, R.A. and Droogendijk, H. and de Boer, M.J. and Sanders, R.G.P. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2014) Six-axis force-torque sensor with a large range for biomechanical applications. Journal of micromechanics and microengineering, 24 (3). pp. 1-10. ISSN 0960-1317

Droogendijk, H. and Boer, M.J. de and Sanders, R.G.P. and Krijnen, G.J.M. (2014) A biomimetic accelerometer inspired by the cricket's clavate hair. Journal of the Royal Society interface, 11 (97). p. 20140438. ISSN 1742-5689

Groenesteijn, J. and Droogendijk, H. and Boer, M.J. de and Sanders, R.G.P. and Wiegerink, R.J. and Krijnen, G.J.M. (2014) An angular acceleration sensor inspired by the vestibular system with a fully circular fluid-channel and thermal read-out. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 January 2014, San Francisco, CA, USA (pp. pp. 696-699).

2013

Droogendijk, H. and Boer, M.J. de and Brookhuis, R.A. and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 16-20 June 2013, Barcelona, Spain (pp. pp. 1707-1710).

Droogendijk, H. and Brookhuis, R.A. and Boer, M.J. de and Sanders, R.G.P. and Krijnen, G.J.M. (2013) Design and fabrication of a biomimetic gyroscope inspired by the fly’s haltere. In: Sense of Contact 15, 10 April 2013, Soesterberg, The Netherlands.

Droogendijk, Harmen and Boer, Meint J. de and Sanders, Remco G.P. and Krijnen, Gijs J.M. (2013) Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket's clavate hair. In: IEEE Sensors 2013, 3-6 November 2013, Baltimore, MD, USA (pp. pp. 167-170).

Lötters, J.C. and Lammerink, T.S.J. and Pap, M.G. and Sanders, R.G.P. and Boer, M.J. de and Mouris, A.J. and Wiegerink, R.J. (2013) Integrated micro Wobbe index meter towards on-chip energy content measurement. In: IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, 20-24 January 2013, Taipei, Taiwan (pp. pp. 965-968).

Syed Nawazuddin, M.B. and Boer, M.J. de and Berenschot, J.W. and Ma, K.C. and Elwenspoek, M. and Wiegerink, R.J. (2013) Design, fabrication and characterization of a suspended plate mechano-optical modulator. In: 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 20-24 January 2013, Taipeh, Taiwan (pp. pp. 560-563).

2012

Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Boer, M.J. de and Elwenspoek, M.C. (2012) 3D force sensor for biomechanical applications. Sensors and actuators A: Physical, 182 . pp. 28-33. ISSN 0924-4247

Brookhuis, R.A. and Wiegerink, R.J. and Lammerink, T.S.J. and Boer, M.J. de (2012) Scalable six-axis force-torque sensor with a large range for biomechanical applications. In: 25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012, 29 January - 2 February 2012, Paris, France (pp. pp. 595-598).

Dijkstra, M. and Berenschot, J.W. and Boer, M.J. de and Linden, H.J. van der and Hankemeier, T. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. and Tas, N.R. (2012) Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology. Microfluidics and nanofluidics, 13 (1). pp. 29-35. ISSN 1613-4982

Droogendijk, H. and Brookhuis, R.A. and Boer, M.J. de and Sanders, R.G.P. and Krijnen, G.J.M. (2012) Design and fabrication of a biomimetic gyroscope inspired by the fly's haltere. In: IEEE Sensors 2012, 28-31 October 2012, Taipei, Taiwan (pp. pp. 1400-1403).

Groenesteijn, J. and Boer, M.J. de and Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. (2012) Integrated wafer-through fluidic connection for surface channel technology. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany.

Groenesteijn, J. and Boer, M.J. de and Lammerink, T.S.J. and Lötters, J.C. and Wiegerink, R.J. (2012) Wafer-through access trenches for surface channel technology. In: 1st International Conference on Microfluidic Handling Systems, MFHS 2012, 10-12 October 2012, Enschede, The Netherlands.

Koelmans, W.W. and Peters, T. and Berenschot, J.W. and Boer, M.J. de and Siekman, M.H. and Abelmann, L. (2012) Cantilever arrays with self-aligned nanotips of uniform height. Nanotechnology, 23 (13). pp. 135301-135309. ISSN 0957-4484

Sardan Sukas, Ö. and Yagubizade, H. and Berenschot, J.W. and Boer, M.J. de and Nguyen, M.D. and Abelmann, L. (2012) Characterization of piezoelectrically actuated PLD Pb(Zr,Ti)$O_3$ thin film membranes. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany (pp. C9).

Syed Nawazuddin, M.B. and Lammerink, Theo S.J. and Berenschot, Erwin and Boer, Meint de and Ma, Ke-Chun and Elwenspoek, Miko C. and Wiegerink, Remco J. (2012) Towards a Casimir force measurement between micromachined parallel plate structures. Challenges, 3 (2). pp. 261-277. ISSN 2078-1547

2011

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Jansen, H.V. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics Express, 19 (17). pp. 15864-15878. ISSN 1094-4087

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filter. Journal of Micromechanics and Microengineering, 21 (7). 0740041. ISSN 0960-1317

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning. Journal of Micromechanics and Microengineering, 21 (12). p. 125010. ISSN 0960-1317

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M.A. and Berenschot, J.W. and Boer, M.J. de and Ridder, R.M. de and Krijnen, G.J.M. (2011) Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In: 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, 23-27 January 2011, Cancun, Mexico (pp. pp. 9-12).

Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Boer, M.J. de and Elwenspoek, M.C. (2011) Force sensor for measuring power transfer between the human body and the environment. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 2042-2045).

Droogendijk, H. and Boer, M.J. de and Krijnen, G.J.M. (2011) Stochastic Resonance in an Electrostatically Controlled MEMS-slider. In: Sense of Contact 13, April 7, 2011, Zeist, the Netherlands.

Kauppinen, L.J. and Abdulla, S.M.C. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Krijnen, G.J.M. and Pollnau, M. and Ridder, R.M. de (2011) Micromechanically tuned ring resonator in silicon on insulator. In: International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim, 28 August - 1 September 2011, Sydney, Australia (pp. Paper 4240-IT).

Kauppinen, Lasse J. and Abdulla, Shahina M.C. and Dijkstra, Meindert and Boer, Meint J. de and Berenschot, Erwin and Krijnen, Gijs J.M. and Pollnau, Markus and Ridder, René M. de (2011) Micromechanically tuned ring resonator in silicon on insulator. Optics Letters, 36 (7). pp. 1047-1049. ISSN 0146-9592

Meer, R. van der and Krishnan, B. and Kozhevnikov, I.V. and Boer, M.J. de and Vratzov, B. and Bastiaens, H.M.J. and Huskens, J. and Wiel, W.G. van der and Hegeman, P.E. and Brons, G.C.S. and Boller, K.-J. and Bijkerk, F. (2011) Improved resolution for soft-x-ray monochromatization using lamellar multilayer gratings. In: Advances in X-ray/EUV Optics and Components VI, 22 August 2011 , San Diego, CA, USA (pp. 81390Q).

Nawazuddin, M.B.S. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and Boer, M. de and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 434-437).

Sardan Sukas, Ö. and Berenschot, J.W. and Boer, M.J. de and Nguyen, M.D. and Zalk, M. van and Abelmann, L. (2011) Towards in-situ tem analysis of PLD Pb(Zr,Ti)O$_{3}$ thin film membranes. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 287-290).

2010

Brookhuis, R.A. and Boer, M.J. de and Dijkstra, M. and Kuijpers, A.A. and Lierop, D. van and Wiegerink, R.J. (2010) A micromirror for optical projection displays. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Ridder, R.M. de and Krijnen, G.J.M. (2010) Fabrication of integrated bimorphs with self aligned tips for optical switching in 2-d photonic crystal waveguides. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Ridder, R.M. de and Krijnen, G.J.M. (2010) Mechanical tuning of optical race-track ring resonators. Procedia Engineering, 5 . pp. 424-427. ISSN 1877-7058

Chakkalakkal Abdulla, S.M. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Ridder, R.M. de and Krijnen, G.J.M. (2010) Micro bimorph cantilever switches for tuning integrated optical systems. In: The Sense of Contact 12, April 8, 2010, Zeist, The Netherlands.

Haneveld, J. and Lammerink, T.S.J. and Boer, M.J. de and Sanders, R.G.P. and Mehendale, Aditya and Lotters, J.C. and Dijkstra, M.A. and Wiegerink, R.J. (2010) Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor. Journal of Micromechanics and Microengineering, 20 (6). p. 125001. ISSN 0960-1317

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Krijnen, G.J.M. (2010) Fabrication of superficial neuromast inspired capacitive flow sensors. Journal of Micromechanics and Microengineering, 20 (8). 085041. ISSN 0960-1317

Jansen, H.V. and Boer, M.J. de and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). 075027. ISSN 0960-1317

Jansen, H.V. and Boer, M.J. de and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). pp. 1-12. ISSN 0960-1317

Jong, Boudewijn R. de and Brouwer, Dannis M. and Boer, Meint J. de and Jansen, Henri V. and Soemers, Herman M.J.R. and Krijnen, Gijs J.M. (2010) Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator. Journal of Microelectromechanical Systems, 19 (5). pp. 1116-1130. ISSN 1057-7157

Zhao, Yiping and Jansen, Henri and Boer, Meint de and Berenschot, Erwin and Bouwes, Dominique and Girones, Miriam and Huskens, Jurriaan and Tas, Niels (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of Micromechanics and Microengineering, 20 (9). 095022. ISSN 0960-1317

Zhao, Yiping and Jansen, Henri and Boer, Meint de and Berenschot, Erwin and Bouwes, Dominique and Girones, Miriam and Huskens, Jurriaan and Tas, Niels (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of Micromechanics and Microengineering, 20 (9). pp. 1-13. ISSN 0960-1317

2009

Berenschot, Johan Willem and Wissink, Jeroen Mathijn and Tas, Niels Roelof and Boer, Meint Jelle de (2009) Microneedle, Microneedle array and production method therefor. Patent.

Berenschot, Johan Willem and Wissink, Jeroen Mathijn and Tas, Niels Roelof and Boer, Meint Jelle de (2009) Microneedle, microneedle array and production method therefor. Patent.

Brouwer, D.M. and Jong, B.R. de and Boer, M.J. de and Jansen, H.V. and Dijk, J. van and Krijnen, G.J.M. and Soemers, H.M.J.R. (2009) MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators. Journal of Micromechanics and Microengineering, 19 (6). 065027. ISSN 0960-1317

Bruinink, C.M. and Jaganatharaja, R.K. and Boer, M.J. de and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Advancements in technology and design of biomimetic flow-sensor arrays. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, 25-29 January 2009, Sorrento, Italy (pp. pp. 152-155).

Bruinink, C.M. and Jaganatharaja, R.K. and Boer, M.J. de and Berenschot, J.W. and Kolster, M.L. and Lammerink, T.S.J. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Developing the ultimate biomimetic flow-sensor array. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany (pp. p. 65).

Chakkalakkal Abdulla, S. and Berenschot, E. and Boer, M.J. de and Kauppinen, L.J. and Ridder, R.M. de and Krijnen, G.J.M. (2009) Optimisation study of micro cantilevers for switching of photonic band gap crystals. In: International Conference on Photonics in Switching, PS 2009, 15-19 September 2009, Pisa, Italy.

Dijkstra, M. and Lammerink, T.S.J. and Boer, M.J. de and Wiegerink, R.J. and Elwenspoek, M. (2009) Ambient temperature-gradient compensated low-drift thermopile flow sensor. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 479-482).

Haneveld, J. and Lammerink, T.S.J. and Boer, M.J. de and Wiegerink, R.J. (2009) Micro coriolis mass flow sensor with integrated capacitive readout. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 463-466).

Hoang, T.H. and Segers-Nolten, I.M. and Berenschot, J.W. and Boer, M.J. de and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of Micromechanics and Microengineering, 19 (065017). 065017. ISSN 0960-1317

Izadi, N. and Boer, M. de and Berenschot, E. and Wiegerink, R. and Krijnen, G.J.M. (2009) A fabrication scheme for biomimetic aquatic hair sensors. In: First International Conference on Natural and Biomimetic Mechanosensing, 26-28 October 2009, Dresden, Germany (pp. p. 66).

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. (2009) Biomimetic aquatic hair sensors fabrication. In: The Sense of Contact 11, 8 April 2009, Zeist, The Netherlands.

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2009, 21-25 June 2009, Denver, CO, USA (pp. pp. 1075-1078).

Jansen, H.V. and Boer, M.J. de and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2009) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment. Journal of Micromechanics and Microengineering, 19 (3). ISSN 0960-1317

Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and Wolferen, H.A.G.M. van and Boer, M.J. de and Sanders, R.G.P. and Elwenspoek, M.C. (2009) Transition flow through an ultra-thin nanosieve. Nanotechnology, 20 (305304). pp. 1-6. ISSN 0957-4484

Unnikrishnan, Sandeep and Jansen, Henricus Venantius and Berenschot, Johan Willem and Fazal, Imran and Louwerse, Marcus Cornelis and Sanders, Remco and Boer, Meint Jelle de and Elwenspoek, Miko Curt (2009) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent.

2008

Bruinink, Christiaan M. and Burresi, Matteo and Boer, Meint J. de and Segerink, Frans B. and Jansen, Henri V. and Berenschot, E. and Reinhoudt, David N. and Huskens, Jurriaan and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984

Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift U-Shaped Thermopile Flow Sensor. In: Sensors, 2008 IEEE, 26-29 Oct 2008, Lecce, Italy (pp. pp. 66-69).

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and Actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247

Dijkstra, M.A. and Lammerink, T.S.J. and de Boer, M.J. and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift flow sensor with zero-offset thermopile-based power feedback. In: Proceedings of DTIP, 9-11 Apr 2008, Nice (pp. p. 4).

Haneveld, J. and Brouwer, D.M. and Mehendale, A. and Zwikker, R. and Lammerink, T.S.J. and Boer, M.J. de and Wiegerink, R.J. (2008) MEMS-based Micro Coriolis mass flow sensor. In: 10th Anniversary International EUSPEN Conference, 18-22 May 2008, Wein (pp. pp. 560-564).

Haneveld, J. and Lammerink, T.S.J. and Dijkstra, M.A. and Droogendijk, H. and de Boer, M.J. and Wiegerink, R.J. (2008) Highly sensitive micro coriolis mass flow sensor. In: MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems, 13-17 Jan 2008, Tucson, AZ, United States (pp. pp. 920-923).

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Eurosensors XXII, European Conference on Solid-State Transducers, 7-10 September 2008, Dresden, Germany (pp. pp. 912-915).

Izadi, Nima and Verlaat, Bas and Berenschot, Erwin and Wiegerink, Remco and Boer, Meint de and Mogdans, Joachim and Krijnen, Gijs (2008) Design and fabrication process for artificial lateral line flow sensors. In: International Conference on Sensor and Sensing in Biology and Engineering, 12-16 October 2008, Cetraro, Italy.

Zhao, Y. and Berenschot, J.W. and Boer, M.J. de and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of Micromechanics and Microengineering, 18 (18). 064013. ISSN 0960-1317

2007

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2007) A versatile surface channel concept for microfluidic applications. Journal of Micromechanics and Microengineering, 17 (10). pp. 1971-1977. ISSN 0960-1317

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan (pp. pp. 123-126).

Hoang, T.H. and Segers-Nolten, I. and Tas, N.R. and de Boer, M.J. and Subramaniam, V. and Elwenspoek, M.C. (2007) Fabrication of 1d nanochannels with thin glass wafers for single molecule studies. In: Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, 20-24 May 2007, Santa Clara, Californië USA (pp. pp. 260-263).

Lüttge, Regina and Berenschot, Erwin J.W. and Boer, Meint J. de and Altpeter, Dominique M. and Vrouwe, Elwin X. and Berg, Albert van den and Elwenspoek, Miko (2007) Integrated Lithographic Molding for Microneedle-Based Devices. Journal of Microelectromechanical Systems, 16 (4). pp. 872-884. ISSN 1057-7157

Patrascu, Mihail and Stramigioli, Stefano and Boer, Meint de and Krijnen, Gijs (2007) Nanometer range closed-loop control of a stepper micro-motor for data storage. In: ASME 2007 International Mechanical Engineering Congress and Exposition, IMECE 2007, 11-15 November 2007, Seattle, WA, USA.

Zhao, Yiping and Berenschot, Erwin and Boer, Meint de and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: MicroMechanics Europe Workshop, MME 2007, 16-18 Sep 2007, Guimarães, Portugal (pp. pp. 253-256).

2006

Brouwer, Dannis M. and Jong, B.R. de and Boer, M.J. de and Soemers, H.M.J.R. (2006) Rotational precision MEMS-based clamping mechanism for stable fixation of elastic mechanisms. In: Annual Meeting of the American Society of Precision Engineering, ASPE, October 15-20, 2006, Monterey CA, USA (pp. pp. 275-278).

Brouwer, Dannis M. and Jong, B.R. de and Boer, M.J. de and Soemers, H.M.J.R. (2006) Rotational precision MEMS-based clamping mechanism for stable fixation of elastic mechanisms. In: Philips Precision Technology Conference, October 2006, Groenendael, Hilvarenbeek.

Bruinink, Christiaan M. and Peter, Mária and Maury, Pascale A. and Boer, Meint de and Kuipers, Laurens and Huskens, Jurriaan and Reinhoudt, David N. (2006) Capillary Force Lithography: Fabrication of Functional Polymer Templates as Versatile Tools for Nanolithography. Advanced Functional Materials, 16 (12). pp. 1555-1565. ISSN 1616-301X

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2006) Versatile surface channel concept for microfluidic applications. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 September 2006, Southampton, England (pp. pp. 37-40).

Jong, B.R. de and Brouwer, D.M. and Jansen, H.V. and Boer, M.J. de and Lammertink, T.G. and Stramigioli, S. and Krijnen, G.J.M. (2006) A planar 3 DOF sample manipulator for nano-scale characterization. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 750-753).

2005

Deladi, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2005) In situ characterization technique for nanotribological investigations. Review of Scientific Instruments, 76 (1). 016102. ISSN 0034-6748

Deladi, S. and Berenschot, J.W. and Tas, N.R. and Boer, J.H. de and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of micromachined Foutain Pen with in-situ characterization possibility of nanoscale surface modification. Journal of Micromechanics and Microengineering, 15 (3). pp. 528-534. ISSN 0960-1317

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. and Boer, J.H. de (2005) Micromachined Foutain Pen as a tool for Atomic Force Microscopebased nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 564-567).

Jong, B.R. de and Brouwer, D.M. and Jansen, H.V. and Boer, M.J. de and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: 19th European Conference on Solid-State Transducers, EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain.

Jong, B.R. de and Jansen, H.V. and Boer, M.J. de and Krijnen, G.J.M. (2005) Tailored Etch-Profiles of high aspect ratio trenches to prevent voids after refill with LPCVD sirn. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2005) Bulk Micromachining Technology for Fabrication of two-level MEMS in Standard Silicon Substrate. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 1404-1405).

Tong, Hien Duy and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, Henri V. and Berenschot, J.W. and Boer, Meint J. de and Boer, J.H. de and Rijn, Cees J.M. van and Elwenspoek, Miko C. (2005) Microsieve supporting palladium-silver alloy membranes and application to hydrogen separation. Journal of Microelectromechanical Systems, 14 . pp. 113-123. ISSN 1057-7157

Yeshurun, Yehoshua and Hefetz, Meir and Berenschot, Erwin and Boer, Meint de and Altpeter, Dominique and Boom, Garrit (2005) Polymer Microneedles. Patent.

2004

Bruinink, Christiaan M. and Peter, Mária and Boer, Meint de and Kuipers, Laurens and Huskens, Jurriaan and Reinhoudt, David N. (2004) Stamps for submicron soft lithography fabricated by capillary force lithography. Advanced Materials, 16 (13). pp. 1086-1090. ISSN 0935-9648

Deladi, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) An AFM-based device for in-situ characterization of nano-wear. In: 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, January 25-29, 2004, Maastricht, the Netherlands (pp. pp. 181-184).

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and Boer, M.J. de and Boer, J.H. de and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope based nanopatterning. Applied Physics Letters, 85 (22). pp. 5361-5363. ISSN 0003-6951

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2004) Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers. Journal of Micromechanics and Microengineering, 14 (9). S70-S75. ISSN 0960-1317

2003

Deladi, S. and Boer, M.J. de and Krijnen, G.J.M. and Rosén, D. and Elwenspoek, M.C. (2003) Innovative process development for a new micro-tribosensor using surface micromachining. Journal of Micromechanics and Microengineering, 13 (4). S17-S22. ISSN 0960-1317

Gardeniers, Han J.G.E. and Lüttge, Regina and Berenschot, Erwin J.W. and Boer, Meint J. de and Yeshurun, Shuki Y. and Hefetz, Meir and Oever, Ronny van 't and Berg, Albert van den (2003) Silicon micromachined hollow microneedles for transdermal liquid transport. Journal of Microelectromechanical Systems, 12 (6). pp. 855-862. ISSN 1057-7157

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2003) Integration of trench isolation technolgy and plasma release for advanced MEMS design on standard silicon wafers. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 123-126).

Saravanan, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Studies of AIN growth on various substrates by RF reactive sputtering techniques. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 163-166).

Tong, H.D. and Gielens, F.C. and Hoang, H.T. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, MA, USA (pp. pp. 1742-1745).

Tong, Hien Duy and Berenschot, J.W. (Erwin) and Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Wensink, Henk and Jansen, Henri V. and Nijdam, Wietze and Elwenspoek, Miko C. and Gielens, F.C. (Frank) and Rijn, Cees J.M. van (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of Microelectromechanical Systems, 12 (5). pp. 622-629. ISSN 1057-7157

2002

Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Jansen, Henri V. and Gilde, Melis-Jan and Roelofs, Gerard and Sasserath, Jay N. and Elwenspoek, Miko (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of Microelectromechanical Systems, 11 (4). pp. 385-401. ISSN 1057-7157

Deladi, S. and Boer, M.J. de and Rosén, D. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Innovative process development for a new microtribosensor using surface micromachining. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania (pp. pp. 63-66).

Gardeniers, J.G.E. and Berenschot, J.W. and Boer, M.J. de and Yeshurun, Y. and Hefetz, M. and Oever, R. van 't and Berg, A. van den (2002) Silicon micromachined hollow microneedles for transdermal liquid transfer. In: Micro Electro Mechanical Systems (MEMS) Conference 2002, January 20-24 , 2002, Las Vegas, Nevada, USA (pp. pp. 268-271).

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Micromachined palladium silver alloy membranes for hydrogen separation. In: SESENS 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 688-691).

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer scale palladium silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, January 20-24, 2002, Las Vegas, Nevada, USA (pp. pp. 264-268).

2001

Jansen, Henri and Boer, Meint de and Wensink, Henk and Kloeck, Ben and Elwenspoek, Miko (2001) The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. Microelectronics Journal, 32 (9). pp. 769-777. ISSN 0026-2692

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint J. de and Jansen, Henri V. and Berenschot, J.W. and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Elwenspoek, Miko and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2001) Direct Integration of Micromachined Pipettes in a Flow Channel for Single DNA Molecule Study by Optical Tweezers. Journal of Microelectromechanical Systems, 10 (2). pp. 238-246. ISSN 1057-7157

2000

Boer, Meint J. de and Tjerkstra, R. Willem and Berenschot, J.W. (Erwin) and Jansen, Henri V. and Burger, G.J. and Gardeniers, J.G.E. (Han) and Elwenspoek, Miko and Berg, Albert van den (2000) Micromachining of buried micro channels in silicon. Journal of Microelectromechanical Systems, 9 (1). pp. 94-103. ISSN 1057-7157

Kuiper, Stein and Boer, Meint de and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (2000) Wet and dry etching techniques for the release of sub-micrometre perforated membranes. Journal of Micromechanics and Microengineering, 10 (2). pp. 171-174. ISSN 0960-1317

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Bennink, M.L. and Kanger, J.S. and Grooth, B.G. de and Elwenspoek, Miko and Greve, J. and Berg, A. van den and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 429-434).

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Elwenspoek, Miko and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Micro- and Nanotechnology for Biomedical and Environmental Applications, 26-27 January 2000, San Jose, California, USA (pp. pp. 41-49).

Zwijze, R.A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and Boer, M.J. de and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Micromachining and Microfabrication 2000, 18 September 2000, Santa Clara, CA, USA (pp. pp. 47-58).

1999

Kuiper, Stein and Boer, Meint de and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (1999) Wet and dry etching techniques for the release of submicron perforated membranes. In: 10th Micromechanics Europe Workshop, MME 1999, 27-28 September 1999, Gif-sur-Yvette, France (pp. pp. 168-171).

1998

Braber, E.T. den and Jansen, H.V. and Boer, M.J. de and Croes, H.J.E. and Elwenspoek, M. and Ginsel, L.A. and Jansen, J.A. (1998) Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk titanium substrata. Journal of Biomedical Materials Research, 40 (3). pp. 425-433. ISSN 0021-9304

Gui, C. and Boer, M. de and Gardeniers, J.G.E. and Jansen, H. and Berenschot, J.W. and Elwenspoek, M. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and Actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247

Wensink, H. and Boer, M.J. de and Wiegerink, R.J. and Zwijze, R.A.F. and Elwenspoek, M.C. (1998) First micromachined silicon load cell for loads up to 1000 kg. In: Micromachined Devices and Components IV, 21-22 Sept. 1998, Santa Clara, USA (pp. pp. 424-430).

Wensink, H. and Wiegerink, R.J. and Zwijze, A.F. and Boer, M.J. de and Elwenspoek, M.C. (1998) Design and realisation of a quasi monolithic silicon load cell. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 190-193).

1997

Gui, C. and Jansen, H.V. and Boer, M. de and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: International Conference on Solid-State Sensors and Actuators, TRANSDUCERS, 16-19 June 1997, Chicago, IL, USA (pp. pp. 633-636).

Jansen, Henri and Boer, Meint de and Wensink, Henk and Kloeck, Ben and Elwenspoek, Miko (1997) The black silicon method VIII: a study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. In: Micro- and Nano-Engineering 1997, 15 September 1997, Athens, Greece.

Jansen, Henri and Boer, Meint de and Wiegerink, Remco and Tas, Niels and Smulders, Edwin and Neagu, Cristina and Elwenspoek, Miko (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic Engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317

Tjerkstra, R. Willem and Boer, Meint de and Berenschot, Erwin and Gardeniers, J.G.E. and Berg, Albert van den and Elwenspoek, Miko (1997) Etching technology for microchannels. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan (pp. pp. 147-152).

Tjerkstra, R.W. and Boer, M. de and Berenschot, E. and Gardeniers, J.G.E. and Berg, A. van den and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica Acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686

1996

Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1996) The black silicon method VI: high aspect ratio treck etching for MEMS applications. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 250-257).

Jansen, Henri and Gardeniers, Han and Boer, Meint de and Elwenspoek, Miko and Fluitman, Jan (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of Micromechanics and Microengineering, 6 (1). pp. 14-28. ISSN 0960-1317

Jansen, Henricus Venantius and Boer, Meint Jelle de and Legtenberg, Rob and Elders, Job and Elwenspoek, Miko Curt and Fluitman, Johannes Hermanus Josephus (1996) Process for producing micromechanical structures by means of reactieve ion etching. Patent.

Ruiter, A.G.T. and Moers, M.H.P. and Hulst, N.F. van and Boer, M. de (1996) Microfabrication of near-field optical probes. Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 14 (2). pp. 597-601. ISSN 1071-1023

1995

Boer, Meint de and Jansen, Henri and Elwenspoek, Miko (1995) The black silicon method V: a study of the fabrication of movable structure for micro electromechanical systems. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 565-568).

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic Engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of Micromechanics and Microengineering, 5 (2). pp. 115-120. ISSN 0960-1317

Jansen, Henri and Boer, Meint de and Otter, Bert and Elwenspoek, Miko (1995) The black silicon method IV: the fabrication of three dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 88-93).

Legtenberg, Rob and Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1995) Anisotropic reactive ion etching of silicon using SF6/02/CHF3 gas mixtures. Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651

1994

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches. In: Micro and Nano Engineering (pp. pp. 312-313).

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe Conference, MME 1994, September 5-6, 1994, Pisa, Italy (pp. pp. 60-64).

1993

Elwenspoek, M.C. and Blind, P. and Boer, M.J. de (1993) Etching Technology. Course book UETP MEMS, FSRM, Zwitserland.

This list was generated on Wed Jul 23 05:29:18 2014 CEST.