Author Publications

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Article

Abelmann, Leon and Tas, Niels and Berenschot, Erwin and Elwenspoek, Miko (2010) Self-assembled three-dimensional non-volatile memories. Micromachines, 1 (1). pp. 1-18. ISSN 2072-666X

Alberts, C.J. and Man, S. de and Berenschot, J.W. and Gadgil, V.J. and Elwenspoek, M.C. and Iannuzzi, D. (2009) Fiber-top refractometer. Measurement Science and Technology, 20 (3). 034005. ISSN 0957-0233

Baar, J.J. van and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2001) Micromachined structures for thermal measurements of fluid and flow parameters. Journal of Micromechanics and Microengineering, 11 (4). pp. 311-318. ISSN 0960-1317

Berenschot, Erwin J.W. and Burouni, Narges and Schurink, B. and Honschoten, Joost W. van and Sanders, Remco G.P. and Truckenmuller, Roman and Jansen, Henri V. and Elwenspoek, Miko C. and Apeldoorn, Aart A. van and Tas, Niels R. (2012) 3D Nanofabrication of Fluidic Components by Corner Lithography. Small, 8 (24). pp. 3823-3831. ISSN 1613-6810

Berenschot, J.W. and Gardeniers, J.G.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1994) New applications of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 338-343. ISSN 0924-4247

Berenschot, J.W. and Oosterbroek, R.E. and Lammerink, T.S.J. and Elwenspoek, M.C. (1998) Micromachining of \lbrace111\rbrace plates in <001> oriented silicon. Journal of Micromechanics and Microengineering, 8 (2). pp. 104-107. ISSN 0960-1317

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). p. 475302. ISSN 0957-4484

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2002) Advanced sacrificial poly-Si technology for fluidic sytems. Journal of Micromechanics and Microengineering, 12 (5). pp. 621-624. ISSN 0960-1317

Blom, F.R. and Bouwstra, S. and Elwenspoek, M. and Fluitman, J.H.J. (1992) Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. Journal of Vacuum Science and Technology B: Microelectronics, processing and phenomena, 10 (1). pp. 19-26. ISSN 0734-211X

Blom, F.R. and Bouwstra, S. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Resonating silicon beam force sensor. Sensors and Actuators, 17 (3-4). pp. 513-519. ISSN 0250-6874

Blom, F.R. and IJntema, D.J. and Pol, F.C.M. van de and Elwenspoek, M. and Fluitman, J.H.J. and Popma, Th.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and Actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M. and Tijssen, R. and Berg, A. van den (2001) Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections. Journal of Micromechanics and Microengineering, 11 (4). pp. 382-385. ISSN 0960-1317

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R. and Elwenspoek, M. and Berg, A. van den (2002) Design and fabrication of a hydrodynamic chromatography chip. Sensors and Actuators B: Chemical, 82 (1). pp. 111-116. ISSN 0925-4005

Blom, M.T. and Tas, Niels R. and Pandraud, Gregory and Chmela, Emil and Gardeniers, J.G.E. and Tijssen, Robert and Elwenspoek, Miko and Berg, Albert van den (2001) Failure mechanisms of pressurized microchannels, model and experiments. Journal of Microelectromechanical Systems, 10 (1). pp. 158-164. ISSN 1057-7157

Blom, Marko T. and Chmela, Emil and Heyden, Frank H.J. van der and Oosterbroek, R. Edwin and Tijssen, Robert and Elwenspoek, Miko and Berg, Albert van den (2005) A differential viscosity detector for use in miniaturized chemical separation systems. Journal of Microelectromechanical Systems, 14 (1). pp. 70-80. ISSN 1057-7157

Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Jansen, Henri V. and Gilde, Melis-Jan and Roelofs, Gerard and Sasserath, Jay N. and Elwenspoek, Miko (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of Microelectromechanical Systems, 11 (4). pp. 385-401. ISSN 1057-7157

Boer, Meint J. de and Tjerkstra, R. Willem and Berenschot, J.W. (Erwin) and Jansen, Henri V. and Burger, G.J. and Gardeniers, J.G.E. (Han) and Elwenspoek, Miko and Berg, Albert van den (2000) Micromachining of buried micro channels in silicon. Journal of Microelectromechanical Systems, 9 (1). pp. 94-103. ISSN 1057-7157

Boroske, E. and Elwenspoek, M. and Helfrich, W. (1981) Osmotic shrinkage of giant egg-lecithin vesicles. Biophysical Journal, 34 (1). pp. 95-109. ISSN 0006-3495

Bouwstra, S. and Blom, F.R. and Lammerink, T.S.J. and Yntema, H. and Schrap, P. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Excitation and detection of vibrations of micromechanical structures using a dielectric thin film. Sensors and Actuators, 17 (1-2). pp. 219-223. ISSN 0250-6874

Bouwstra, Siebe and Legtenberg, Rob and Tilmans, Harrie A.C. and Elwenspoek, Miko (1990) Resonating microbridge mass flow sensor. Sensors and Actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247

Bouwstra, Siebe and Weerd, Eddy de and Elwenspoek, Miko (1990) In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators. Sensors and Actuators A: Physical, 24 (3). pp. 227-235. ISSN 0924-4247

Braber, E.T. den and Jansen, H.V. and Boer, M.J. de and Croes, H.J.E. and Elwenspoek, M. and Ginsel, L.A. and Jansen, J.A. (1998) Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk titanium substrata. Journal of Biomedical Materials Research, 40 (3). pp. 425-433. ISSN 0021-9304

Bree, Hans-Elias de and Jansen, Henri V. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. and Elwenspoek, Miko (1999) Bi-directional fast flow sensor with a large dynamic range. Journal of Micromechanics and Microengineering, 9 (2). pp. 186-189. ISSN 0960-1317

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Jansen, Henri and Lammerink, Theo S.J. and Elwenspoek, Miko (1996) The μ-flown: a novel device for measuring acoustic flows. Sensors and Actuators A: Physical, 54 (1-3). pp. 552-557. ISSN 0924-4247

Bressers, P.M.M.C. and Kelly, J.J. and Gardeniers, J.G.E. and Elwenspoek, M. (1996) Surface morphology of p-type (100) silicon etched in aqueous alkaline solution. Journal of the Electrochemical Society, 143 (5). pp. 1744-1750. ISSN 0013-4651

Broek, D.M. van den and Elwenspoek, M. (2008) Explosive micro-bubble actuator. Sensors and Actuators A: Physical, 145-14 (1-2). pp. 387-393. ISSN 0924-4247

Broek, D.M. van den and Elwenspoek, M. (2009) Effect of cavity pressure on the performance of the explosive micro-bubble actuator. Microelectronic Engineering, 86 (4-6). pp. 1271-1273. ISSN 0167-9317

Broek, D.M. van den and Elwenspoek, M.C. (2008) Bubble nucleation in an explosive micro-bubble actuator. Journal of Micromechanics and Microengineering, 18 . ISSN 0960-1317

Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Boer, M.J. de and Elwenspoek, M.C. (2012) 3D force sensor for biomechanical applications. Sensors and actuators A: Physical, 182 . pp. 28-33. ISSN 0924-4247

Brugger, J. and Berenschot, J.W. and Kuiper, S. and Nijdam, W. and Otter, B. and Elwenspoek, M. (2000) Resistless patterning of sub-micron structures by evaporation through nanostencils. Microelectronic Engineering, 53 (1). pp. 403-405. ISSN 0167-9317

Bruijn, Marcel P. and Bergmann Tiest, Wouter M. and Hoevers, Henk F.C. and Krouwer, Eric and Kuur, Jan van der and Ridder, Marcel L. and Moktadir, Zakaria and Wiegerink, Remco and Gelder, Dick van and Elwenspoek, Miko (2003) Development of arrays of transition edge sensors for application in X-ray astronomy. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 513 (1-2). pp. 143-146. ISSN 0168-9002

Burger, Johannes and Berenschot, Erwin and Burger, Gert-Jan and Visscher, Harm and Elwenspoek, Miko (1998) Piezoresistive friction force sensor for tribological research. Journal of Micromechanics and Microengineering, 8 (2). pp. 138-140. ISSN 0960-1317

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Sarajlic, Edin and Leussink, Pele and Tas, Niels (2013) Wafer-scale fabrication of nanoapertures using corner lithography. Nanotechnology, 24 (28). p. 10. ISSN 0957-4484

Damean, Nicolae and Regtien, Paul P.L. and Elwenspoek, Miko (2003) Heat transfer in a MEMS for microfluidics. Sensors and Actuators A: Physical, A105 . pp. 137-149. ISSN 0924-4247

Deladi, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2005) In situ characterization technique for nanotribological investigations. Review of Scientific Instruments, 76 (1). 016102. ISSN 0034-6748

Deladi, S. and Berenschot, J.W. and Tas, N.R. and Boer, J.H. de and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Fabrication of micromachined Foutain Pen with in-situ characterization possibility of nanoscale surface modification. Journal of Micromechanics and Microengineering, 15 (3). pp. 528-534. ISSN 0960-1317

Deladi, S. and Boer, M.J. de and Krijnen, G.J.M. and Rosén, D. and Elwenspoek, M.C. (2003) Innovative process development for a new micro-tribosensor using surface micromachining. Journal of Micromechanics and Microengineering, 13 (4). S17-S22. ISSN 0960-1317

Deladi, S. and Iannuzzi, D. and Gadgil, V.J. and Schreuders, H. and Elwenspoek, M.C. (2006) Carving fiber-top optomechanical transducers from an optical fiber. Journal of micromechanics and microengineering, 16 . pp. 886-889. ISSN 0960-1317

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Parallel beams/lever electrothermal our-of-plane actuator. Microsystem Technologies, 10 (5). pp. 393-399. ISSN 0946-7076

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based electrothermal actuators. Journal of Micromechanics and Microengineering, 14 (9). S31-S36. ISSN 0960-1317

Deladi, S. and Svetovoy, V. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Flash-release - an alternative for releasing complex MEMS devices. Journal of Micromechanics and Microengineering, 14 (12). pp. 1659-1664. ISSN 0960-1317

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Krijnen, G.J.M. and Boer, M.J. de and Boer, J.H. de and Peter, M. and Elwenspoek, M.C. (2004) Micromachined fountain pen for atomic force microscope based nanopatterning. Applied Physics Letters, 85 (22). pp. 5361-5363. ISSN 0003-6951

Dijkstra, M. and Berenschot, J.W. and Boer, M.J. de and Linden, H.J. van der and Hankemeier, T. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. and Tas, N.R. (2012) Nano-slit electrospray emitters fabricated by a micro- to nanofluidic via technology. Microfluidics and nanofluidics, 13 (1). pp. 29-35. ISSN 1613-4982

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2007) A versatile surface channel concept for microfluidic applications. Journal of Micromechanics and Microengineering, 17 (10). pp. 1971-1977. ISSN 0960-1317

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels. Sensors and Actuators A: Physical, 143 (1). pp. 1-6. ISSN 0924-4247

Eijkel, C.J.M. and Branebjerg, J. and Elwenspoek, M. and Pol, F.C.M. van de (1990) A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structures. IEEE Electron Device Letters, 11 (12). pp. 588-589. ISSN 0741-3106

Ekkels, P. and Tjerkstra, R.W. and Krijnen, G.J.M. and Berenschot, J.W. and Brugger, J. and Elwenspoek, M.C. (2003) Fabrication of functional structures on thin silicon nitride membranes. Microelectronic Engineering, 67-68 . pp. 422-429. ISSN 0167-9317

Elders, J. and Kuijk, J.C.C. van and Lammerink, T.S.J. and Elwenspoek, M.C. and Leeuwis, H. (1994) Micropompen. Klinische Fysica, 3 . pp. 338-342. ISSN 0168-7026

Elwenspoek, M.C. (1997) Actuatoren op weg naar de markt. Polytechnisch tijdschrift. Werktuigbouw . pp. 7-14. ISSN 09255680

Elwenspoek, M.C. (1993) Microelectromechanical systems (MEMS). Sensornieuws (2:2). pp. 2-9. ISSN 13863002

Elwenspoek, M. (1996) The form of etch rate minima in wet chemical anisotropic etching of silicon. Journal of Micromechanics and Microengineering, 6 (4). pp. 405-409. ISSN 0960-1317

Elwenspoek, M. (1993) On the mechanism of anisotropic etching of silicon. Journal of the Electrochemical Society, 140 (7). pp. 2075-2080. ISSN 00134651

Elwenspoek, M. (1999) Stationary hillocks on etching silicon. Journal of Micromechanics and Microengineering, 9 (2). pp. 180-185. ISSN 0960-1317

Elwenspoek, M. (1991) Micromechanical resonant sensors. Journal A, 32 (3). pp. 15-22. ISSN 0771-1107

Elwenspoek, M. and Brinkmann, R. and Hartrott, M. von and Kiehl, M. and Maxim, P. and Paulick, C.A. and Willeke, F. and Quitmann, D. (1984) Association in strongly interacting liquid binary alloys and nuclear spin relaxation. Journal of Non-Crystalline Solids, 61-62 (1). pp. 153-156. ISSN 0022-3093

Elwenspoek, M. and Brinkmann, R. and Maxim, P. and Paulick, C. and Quitmann, D. (1983) Nuclear quadrupolar spin relaxation and association in binary liquid metallic alloys. Berichte der Bunsen-Gesellschaft für Physikalische Chemie, 87 (9). pp. 823-826. ISSN 0005-9021

Elwenspoek, M. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Towards integrated microliquid handling systems. Journal of Micromechanics and Microengineering, 4 (4). pp. 227-245. ISSN 0960-1317

Elwenspoek, M. and Smith, L. and Hok, B. (1992) Active joints for microrobot limbs. Journal of Micromechanics and Microengineering, 2 (3). pp. 221-223. ISSN 0960-1317

Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Silicon microstructures for fluid handling. ABB-nieuwsbrief, 1994 (9). pp. 9-12. ISSN 0925-1529

Elwenspoek, Miko and Abelmann, Leon and Berenschot, Erwin and Honschoten, Joost van and Jansen, Henri and Tas, Niels (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of Micromechanics and Microengineering, 20 (6). pp. 1-28. ISSN 0960-1317

Elwenspoek, Miko C. (2011) Long-time data storage: relevant time scales. Challanges, 2 (1). pp. 19-36. ISSN 2078-1547

Engelen, J.B.C. and Khatib, M.G. and Abelmann, L. and Elwenspoek, M.C. (2013) Nanopositioner actuator energy cost and performance. Sensors and actuators A: Physical, 199 (1). pp. 353-365. ISSN 0924-4247

Engelen, Johan B.C. and Abelmann, Leon and Elwenspoek, Miko C. (2010) Optimized comb-drive finger shape for shock-resistant actuation. Journal of Micromechanics and Microengineering, 20 (10). p. 105003. ISSN 0960-1317

Fazal, I. and Elwenspoek, M.C. (2007) Design and analysis of a high pressure piezoelectric actuated microvalve. Journal of micromechanics and microengineering, 17 (11). pp. 2366-2379. ISSN 0960-1317

Fazal, I. and Elwenspoek, M.C. (2008) Fusion-bonded fluidic interconnects. Journal of micromechanics and microengineering, 18 (5). 055011. ISSN 0960-1317

Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining. Journal of Micromechanics and Microengineering, 16 . pp. 1207-1214. ISSN 0960-1317

Fazal, Imran and Louwerse, Marcus and Jansen, Henri and Elwenspoek, Miko (2006) Stepper Motor Actuated Microvalve. Journal of Physics: Conference Series, 34 . pp. 1032-1037. ISSN 1742-6596

Fernandez, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of Micromechanics and Microengineering, 16 (4). pp. 862-868. ISSN 0960-1317

Fernandez, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of RF devices. Electronics Letters, 41 (3). pp. 124-125. ISSN 0013-5194

Fernandez, L.J. and Wiegerink, R.J. and Flokstra, J. and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of Micromechanics and Microengineering, 16 . S1099-S1107. ISSN 0960-1317

Gardeniers, J.G.E. and Verholen, A.G.B.J. and Tas, N.R. and Elwenspoek, M.C. (1998) Direct measurement of piezoelectric properties of Sol-Gel PZT films. Journal of the Korean Physical Society (32). S1573-S1577. ISSN 0374-4884

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M. and Lambeck, P.V. (1997) Fusion bonding of rough surfaces with polishing technique for silicon micromaching. Microsystem Technologies, 3 (3). pp. 122-128. ISSN 0946-7076

Gui, C. and Boer, M. de and Gardeniers, J.G.E. and Jansen, H. and Berenschot, J.W. and Elwenspoek, M. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and Actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247

Gui, C. and Elwenspoek, M. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and Future Role of Chemical Mechanical Polishing in Wafer Bonding. Journal of the Electrochemical Society, 145 (6). pp. 2198-2204. ISSN 0013-4651

Gui, C. and Elwenspoek, M. and Tas, N. and Gardeniers, J.G.E. (1999) The effect of surface roughness on direct wafer bonding. Journal of Applied Physics, 85 (10). pp. 7448-7454. ISSN 0021-8979

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (2001) Selective wafer bonding by surface roughness control. Journal of the Electrochemical Society, 148 (4). G225-G228. ISSN 0013-4651

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1999) Fabrication of nanomechanical optical devices with aligned wafer bonding. Microsystem Technologies, 5 (3). pp. 138-143. ISSN 0946-7076

Gui, Chengqun and Legtenberg, Rob and Elwenspoek, Miko and Fluitman, Jan H. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of Micromechanics and Microengineering, 5 (2). pp. 183-185. ISSN 0960-1317

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of Microelectromechanical Systems, 7 (1). pp. 122-127. ISSN 1057-7157

Haneveld, J. and Tas, N.R. and Brunets, N. and Jansen, H.V. and Elwenspoek, M.C. (2008) Capillary filling of sub- 10 nm nanochannels. Journal of applied physics, 104 (1). p. 14309. ISSN 0021-8979

Haneveld, Jeroen and Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2003) Wet anisotropic etching for fluidic 1D nanochannels. Journal of Micromechanics and Microengineering, 13 (4). S62-S66. ISSN 0960-1317

Heijden, A.E.D.M. van der and Elwenspoek, M. and Eerden, J.P. van der (1989) Size distribution of embryos produced by crystal-rod contacts. Journal of Crystal Growth, 98 (3). pp. 398-410. ISSN 0022-0248

Heijden, A.E.D.M. van der and Elwenspoek, M.C. (1990) Contact nucleation: in situ and ex situ observations of surface damaging. Journal of Crystal Growth, 100 (3). pp. 1087-1091. ISSN 0022-0248

Heyden, F.H.J. van der and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M. and Tijssen, R.P. and Berg, A. van den (2003) A low hydraulic capacitance pressure sensor for integration with a micro viscosity detector. Sensors and Actuators B: Chemical, 92 (1-2). pp. 102-109. ISSN 0925-4005

Hoang, H.T. and Tong, H.D. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2004) Fabrication and characterization of dual sputtered Pd-Cu alloy films for hydrogen separation membranes. Materials Letters, 3-4 (58). pp. 525-528. ISSN 0167-577X

Hoang, H.T. and Segers-Nolten, I.M. and Tas, N.R. and Honschoten, J.W. van and Subramaniam, V. and Elwenspoek, M.C. (2011) Analysis of single quantum-dot mobility inside 1D nanochannel devices. Nanotechnology, 22 (27). p. 275201. ISSN 0957-4484

Hoang, T.H. and Segers-Nolten, I.M. and Berenschot, J.W. and Boer, M.J. de and Tas, N.R. and Haneveld, J. and Elwenspoek, M.C. (2009) Fabrication and interfacing of nanochannel devices for single-molecule studies. Journal of Micromechanics and Microengineering, 19 (065017). 065017. ISSN 0960-1317

Hoang, T.H. and Tong, H.D. and Segers-Nolten, G.M.J. and Tas, N.R. and Subramaniam, V. and Elwenspoek, M.C. (2012) Wafer-scale thin encapsulated two-dimensional nanochannels and its application toward visualization of single molecules. Journal of colloid and interface science, 367 (1). 455 - 459. ISSN 0021-9797

Honschoten, J. van and Baar, J. van and Bree, H.E. de and Lammerink, T. and Krijnen, G. and Elwenspoek, M. (2000) Application of a microflown as a low-cost level-sensor. Journal of Micromechanics and Microengineering, 10 (2). pp. 250-253. ISSN 0960-1317

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Formation of liquid menisci in flexible nanochannels. Journal of Colloid and Interface Science, 329 (1). pp. 133-139. ISSN 0021-9797

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Elwenspoek, M.C. (2009) Corrigendum to “Formation of liquid menisci in flexible anochannels" [J. Colloid Interface Sci. 329 (2009) 133–139]. Journal of Colloid and Interface Science, 332 (2). p. 520. ISSN 0021-9797

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2007) Elastocapillary filling of deformable nanochannels. Journal of Applied Physics, 101 . 094310. ISSN 0021-8979

Honschoten, J.W. van and Krijnen, G.J.M. and Svetovoy, V.B. and Bree, H.E. de and Elwenspoek, M.C. (2004) Analytic model of a two wire thermal sensor for flow and sound measurements. Journal of Micromechanics and Microengineering, 14 (11). pp. 1468-1477. ISSN 0960-1317

Honschoten, J.W. van and Svetovoy, V.B. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Determination of the sensitivity behavior of an acoustic thermal flow sensor by electronic characterization. Sensors and Actuators A: Physical, 112 (1). pp. 1-9. ISSN 0924-4247

Honschoten, J.W. van and Tas, N.R. and Elwenspoek, M. (2010) The profile of a capillary liquid bridge between solid surfaces. American Journal of Physics, 78 (3). pp. 277-287. ISSN 0002-9505

Honschoten, J.W. van and Yntema, D.R. and Svetovoy, V. and Dijkstra, M.A. and Wiegerink, R.J. and Elwenspoek, M. (2007) Analysis of the performance of a particle velocity sensor between two cylindrical obstructions. Journal of the Acoustical Society of America, 121 (5). pp. 2711-2722. ISSN 0001-4966

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2007) Analysis of a three-dimensional particle velocity sensor for design optimization. Journal of Micromechanics and Microengineering, 17 (7). S137-S146. ISSN 0960-1317

Honschoten, Joost van and Svetovoy, Vitaly B. and Krijnen, Gijs J.M. and Elwenspoek, Miko C. (2005) Optimization of a Thermal Flow Sensor for Acoustic Particle Velocity Measurements. Journal of Microelectromechanical Systems, 14 (3). pp. 436-443. ISSN 1057-7157

Honschoten, J.W. van and Berenschot, J.W. and Ondarcuhu, T. and Sanders, R.G.P. and Sundaram, J. and Elwenspoek, M. and Tas, N.R. (2010) Elastocapillary fabrication of three-dimensional microstructures. Applied Physics Letters, 97 . 014103-1-014103-3. ISSN 0003-6951

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M. (2008) Erratum: “Elastocapillary filling of deformable nanochannels” [J. Appl. Phys. 101, 094310 (2007)]. Journal of Applied Physics, 103 (2). 029901. ISSN 0021-8979

Iannuzzi, D. and Deladi, S. and Elwenspoek, M.C. (2006) Fiber-top cantilevers: a new sensor on the tip of a fiber. Optics and Photonics News, 17 (12). p. 39. ISSN 1047-6938

Iannuzzi, D. and Deladi, S. and Berenschot, J.W. and Man, S. de and Heeck, K. and Elwenspoek, M.C. (2006) Fiber-top atomic force microscope. Review of Scientific Instruments, 77 (10). pp. 106105-1. ISSN 0034-6748

Iannuzzi, D. and Deladi, S. and Gadgil, V.J. and Sanders, R.G.P. and Schreuders, H. and Elwenspoek, M.C. (2006) Monolithic fiber-top sensor for critical environments and standard applications. Applied Physics Letters, 88 (5). ISSN 0003-6951

Iannuzzi, D. and Deladi, S. and Schreuders, H. and Slaman, M. and Rector, J.H. and Elwenspoek, M.C. (2006) Fiber-top cantilever: a new generation of micromachined sensors for multipurpose applications. Journal of the Optical Society of America B: Optical Physics . pp. 1-4. ISSN 0740-3224

Iannuzzi, D. and Heeck, K. and Slaman, M. and Man, S. de and Rector, J.H. and Schreuders, H. and Berenschot, J.W. and Gadgil, V.J. and Sanders, R.G.P. and Elwenspoek, M.C. and Deladi, S. (2007) Fibre-top cantilevers: design, fabrication and applications. Measurement Science and Technology, 18 (10). pp. 3247-3252. ISSN 0957-0233

Iannuzzi, D. and Slaman, M. and Rector, J.H. and Schreuders, H. and Deladi, S. and Elwenspoek, M.C. (2007) A fiber-top cantilever for hydrogen detection. Sensors and Actuators B: Chemical, 121 (2). pp. 706-708. ISSN 0925-4005

Jansen, H.V. and Boer, M.J. de and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). 075027. ISSN 0960-1317

Jansen, H.V. and Boer, M.J. de and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). pp. 1-12. ISSN 0960-1317

Jansen, H.V. and Boer, M.J. de and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2009) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment. Journal of Micromechanics and Microengineering, 19 (3). ISSN 0960-1317

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic Engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of Micromechanics and Microengineering, 5 (2). pp. 115-120. ISSN 0960-1317

Jansen, Henri and Boer, Meint de and Wensink, Henk and Kloeck, Ben and Elwenspoek, Miko (2001) The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. Microelectronics Journal, 32 (9). pp. 769-777. ISSN 0026-2692

Jansen, Henri and Boer, Meint de and Wiegerink, Remco and Tas, Niels and Smulders, Edwin and Neagu, Cristina and Elwenspoek, Miko (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic Engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317

Jansen, Henri and Gardeniers, Han and Boer, Meint de and Elwenspoek, Miko and Fluitman, Jan (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of Micromechanics and Microengineering, 6 (1). pp. 14-28. ISSN 0960-1317

Kasparian, Jerome and Elwenspoek, M. and Allongue, Philippe (1997) Digital computation and in situ STM approach of silicon anistropic etching. Surface Science, 388 (1-3). pp. 50-62. ISSN 0039-6028

Koelmans, W.W. and Honschoten, J. van and Vries, J. de and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2010) Parallel optical readout of cantilever arrays in dynamic mode. Nanotechnology, 21 (39). p. 395503. ISSN 0957-4484

Kozhummal, Rajeevan and Berenschot, Erwin and Jansen, Henri and Tas, Niels and Zacharias, Margit and Elwenspoek, Miko (2012) Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography. Journal of micromechanics and microengineering, 22 (8). 085032. ISSN 0960-1317

Kozhummal, Rajeevan and Yang, Yang and Güder, Firat and Hartel, Andreas and Lu, Xiaoli and Kücükbayrak, Umut M. and Mateo-Alonso, Aurelio and Elwenspoek, Miko and Zacharias, Margit (2012) Homoepitaxial branching: an unusual polymorph of zinc oxide derived from seeded solution growth. ACS nano, 6 (8). pp. 7133-7141. ISSN 1936-0851

Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Lambeck, Paul V. and Elwenspoek, Miko (1999) Optical devices based on fluidic controlled two-mode interference. Journal of Micromechanics and Microengineering, 9 (2). pp. 203-205. ISSN 0960-1317

Kuijk, J. van and Lammerink, T.S.J. and Bree, H-E. de and Elwenspoek, M. and Fluitman, J.H.J. (1995) Multi-parameter detection in fluid flows. Sensors and Actuators A: Physical, 47 (1-3). pp. 369-372. ISSN 0924-4247

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M. (2003) 2D-finite-element simulations for long-range capacitive position sensor. Journal of Micromechanics and Microengineering, 13 (4). S183-S189. ISSN 0960-1317

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M. (2006) A micromachined capacitive incremental position sensor: part 2. Experimental assessment. Journal of Micromechanics and Microengineering, 16 (6). pp. 125-134. ISSN 0960-1317

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2006) A micromachined capacitive incremental position sensor: part 1. Analysis and simulations. Journal of Micromechanics and Microengineering, 16 (6). S116-S124. ISSN 0960-1317

Kuiper, S. and Brink, R. and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Ceramic microsieves: influence of perforation shape and distribution on flow resistance and membrane strength. Journal of Membrane Science, 196 (2). pp. 149-157. ISSN 0376-7388

Kuiper, S. and Rijn, C.J.M. van and Nijdam, W. and Elwenspoek, M.C. (1998) Development and applications of very high flux microfiltration membranes. Journal of Membrane Science, 150 (1). pp. 1-8. ISSN 0376-7388

Kuiper, S. and Rijn, C.J.M. van and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Determination of particle-release conditions in microfiltration: a simple single-particle model rested on a model membrane. Journal of Membrane Science, 180 (1). pp. 15-28. ISSN 0376-7388

Kuiper, Stein and Boer, Meint de and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (2000) Wet and dry etching techniques for the release of sub-micrometre perforated membranes. Journal of Micromechanics and Microengineering, 10 (2). pp. 171-174. ISSN 0960-1317

Kuiper, Stein and Rijn, Cees van and Nijdam, Wietze and Raspe, Onno and Wolferen, Henk van and Krijnen, Gijs and Elwenspoek, Miko (2002) Filtration of lager beer with microsieves: flux, permeate, haze and in-line microscope observations. Journal of Membrane Science, 196 (2). pp. 159-170. ISSN 0376-7388

Kuiper, Stein and Wolferen, Henk van and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (2001) Fabrication of microsieves with sub-micron pore size by laser interference lithography. Journal of Micromechanics and Microengineering, 11 (1). pp. 33-37. ISSN 0960-1317

Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Thermal actuation of clamped silicon microbeans. Sensors and Materials, 5 (3-4). pp. 217-238. ISSN 0914-4935

Lammerink, T.S.J. and Elwenspoek, M. and Ouwerkerk, R.H. van and Bouwstra, S. and Fluitman, J.H.J. (1990) Performance of thermally excited resonators. Sensors and Actuators A: Physical, 21 (1-3). pp. 352-356. ISSN 0924-4247

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1991) Frequency dependence of thermal excitation of micromechanical resonators. Sensors and Actuators A: Physical, 27 (1-3). pp. 685-689. ISSN 0924-4247

Lammerink, Theo S.J. and Tas, Niels R. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Micro-liquid flow sensor. Sensors and Actuators A: Physical, 37-38 . pp. 45-50. ISSN 0924-4247

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: design and modeling. Journal of Microelectromechanical Systems, 7 (1). pp. 79-86. ISSN 1057-7157

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: fabrication and performance. Journal of Microelectromechanical Systems, 7 (1). pp. 87-93. ISSN 1057-7157

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan H. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of Microelectromechanical Systems, 6 (3). pp. 234-241. ISSN 1057-7157

Legtenberg, Rob and Bouwstra, Siebe and Elwenspoek, Miko (1991) Low temperature glass bonding for sensor applications using boron oxide thin films. Journal of Micromechanics and Microengineering, 1 (3). pp. 157-160. ISSN 0960-1317

Legtenberg, Rob and Gilbert, John and Senturia, Stephen D. and Elwenspoek, Miko (1997) Electrostatic curved electrode actuators. Journal of Microelectromechanical Systems, 6 (3). pp. 257-265. ISSN 1057-7157

Legtenberg, Rob and Groeneveld, A.W. and Elwenspoek, M. (1996) Comb-drive actuators for large displacements. Journal of Micromechanics and Microengineering, 6 (3). pp. 320-329. ISSN 0960-1317

Legtenberg, Rob and Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1995) Anisotropic reactive ion etching of silicon using SF6/02/CHF3 gas mixtures. Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651

Legtenberg, Rob and Tilmans, Harrie A.C. and Elders, Job and Elwenspoek, Miko (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and Actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247

Lindberg, Ulf and Soderkvist, Jan and Lammerink, Theo and Elwenspoek, Miko (1993) Quasi-buckling of micromachined beams. Journal of Micromechanics and Microengineering, 3 (4). pp. 183-186. ISSN 0960-1317

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2009) Nozzle fabrication for micropropulsion of a microsatellite. Journal of Micromechanics and Microengineering, 19 (4). pp. 1-9. ISSN 0960-1317

Louwerse, Marcus and Jansen, Henri and Elwenspoek, Miko (2010) A modular assembly method of a feed and thruster system for Cubesats. Journal of Micromechanics and Microengineering, 20 (11). p. 115011. ISSN 0960-1317

Lüttge, Regina and Berenschot, Erwin J.W. and Boer, Meint J. de and Altpeter, Dominique M. and Vrouwe, Elwin X. and Berg, Albert van den and Elwenspoek, Miko (2007) Integrated Lithographic Molding for Microneedle-Based Devices. Journal of Microelectromechanical Systems, 16 (4). pp. 872-884. ISSN 1057-7157

Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and Brake, H.J.M. ter and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of Micromechanics and Microengineering, 19 (085027). 085027. ISSN 0960-1317

Mogulkoc, Berker and Knowles, Kevin M. and Jansen, Henri V. and Brake, Marcel ter and Elwenspoek, Miko C. (2010) Surface Devitrification and the Growth of Cristobalite in Borofloat® (Borosilicate 8330) Glass. Journal of the American Ceramic Society, 93 (9). pp. 2713-2719. ISSN 0002-7820

Moktadir, Z. and Honschoten, J.W. van and Elwenspoek, M. (2007) Long range diffusion noise in platinum microwires with metallic adhesion layers. Applied Physics Letters, 90 (23). p. 233506. ISSN 0003-6951

Mullem, C.J. van and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M. (1991) Piezoelectrically driven silicon beam force sensor. Sensors and Actuators A: Physical, 26 (1-3). pp. 379-383. ISSN 0924-4247

Nawazuddin, M.B.S. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2010) Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance. Journal of micromechanics and microengineering, 20 (6). 064005. ISSN 0960-1317

Nazeer, H. and Nguyen, M.D. and Woldering, L.A. and Abelmann, L. and Rijnders, G. and Elwenspoek, M.C. (2011) Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin films. Journal of Micromechanics and Microengineering, 21 (0960-1). 074008-074014. ISSN 0960-1317

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, M.D. and Rijnders, G. and Elwenspoek, M.C. (2011) Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films. Microelectronic Engineering, 88 (8). pp. 2345-2348. ISSN 0167-9317

Neagu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M. and Kelly, J.J. (1997) An electrochemical active valve. Electrochimica Acta, 42 (20-22). pp. 3367-3373. ISSN 0013-4686

Neagu, C.R. and Jansen, H.V. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) Characterization of a planar microcoil for implantable microsystems. Sensors and Actuators A: Physical, 62 (1-3). pp. 599-611. ISSN 0924-4247

Neagu, Cristina and Jansen, Henri and Gardeniers, Han and Elwenspoek, Miko (2000) The electrolysis of water: an actuation principle for MEMS with a big opportunity. Mechatronics, 10 (4). pp. 571-582. ISSN 0957-4158

Neagu, Cristina R. and Gardeniers, Johannes G.E. and Elwenspoek, Miko and Kelly, John J. (1996) An electrochemical microactuator: principle and first results. Journal of Microelectromechanical Systems, 5 (1). pp. 2-9. ISSN 1057-7157

Nguyen, Q.D. and Elwenspoek, M. (2007) Influence of Applied Potentials on Anisotropic Etching of Silicon Described Using Kinematic Wave Etch Model. Journal of the Electrochemical Society, 154 (12). D684-D691. ISSN 0013-4651

Nguyen, Q.D. and Elwenspoek, M. (2006) Characterisation of anisotropic etching in KOH using network etch rate function model: influence of an applied potential in terms of microscopic properties. Journal of Physics: Conference Series, 34 . pp. 1038-1043. ISSN 1742-6596

Nijdam, A.J. and Berenschot, J.W. and Suchtelen, J. van and Gardeniers, J.G.E. and Elwenspoek, M. (1999) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. Journal of Micromechanics and Microengineering, 9 (2). pp. 135-138. ISSN 0960-1317

Nijdam, A.J. and Gardeniers, J.G.E. and Berenschot, J.W. and Veenendaal, E. van and Suchtelen, J. van and Elwenspoek, M. (2001) Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon. Journal of Micromechanics and Microengineering, 11 (5). pp. 499-503. ISSN 0960-1317

Nijdam, A.J. and Gardeniers, J.G.E. and Gui, C. and Elwenspoek, M. (2000) Etching pits and dislocations in Si{111}. Sensors and Actuators A: Physical, 86 (3). pp. 238-247. ISSN 0924-4247

Nijdam, A.J. and Suchtelen, J. van and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1999) Etching of silicon in alkaline solutions: a critical look at the {111} minimum. Journal of Crystal Growth, 198-19 (Part 1). pp. 430-434. ISSN 0022-0248

Nijdam, A.J. and Veenendaal, E. van and Cuppen, H.M. and Suchtelen, J. van and Reed, M.L. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Vlieg, E. and Elwenspoek, M. (2001) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation. Journal of Applied Physics, 89 (7). pp. 4113-4116. ISSN 0021-8979

Nijdam, A.J. and Veenendaal, E. van and Gardeniers, J.G.E. and Kentgens, A.P.M. and Nachtegaal, G.H. and Elwenspoek, M. (2000) 29 Si-Nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. Journal of the Electrochemical Society, 147 (6). pp. 2195-2198. ISSN 0013-4651

Nivelle, M.J.M.E. de and Bruijn, M.P. and Korte, P.A.J. de and Sanchez, S. and Elwenspoek, M. and Heidenblut, T. and Schwierzi, B. (1999) High-Tc bolometers with silicon-nitride spiderwebsuspension for far-infrared detection. IEEE Transactions on Applied Superconductivity, 9 (2, Par). pp. 3350-3353. ISSN 1051-8223

Nivelle, M.J.M.E. de and Bruijn, M.P. and Vries, R. de and Wijnbergen, J.J. and Korte, P.A.J. de and Sanchez, S. and Elwenspoek, M. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1997) Low noise high-Tc superconducting bolometers on silicon nitride membranes for far-infrared detection. Journal of Applied Physics, 82 (10). pp. 4719-4726. ISSN 0021-8979

Nivelle, M.J.M.E. de and Bruijn, M.P. and Vries, R. de and Wijnbergen, J.J. and Korte, P.A.J. de and Sanchez, S. and Elwenspoek, M. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. and Frericks, M. (1996) A high Tc superconductor bolometer for remote sensing of atmospheric OH. Journal de Physique IV, 6 (Colloq). pp. 423-428. ISSN 1155-4339

Oosterbroek, R.E. and Berenschot, J.W. and Jansen, H.V. and Nijdam, A.J. and Pandraud, G. and Berg, A. van den and Elwenspoek, M.C. (2000) Etching methodologies in <111>-oriented silicon wafers. Journal of Microelectromechanical Systems, 9 (3). pp. 390-396. ISSN 1057-7157

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (1999) Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of Micromechanics and Microengineering, 9 (2). pp. 194-198. ISSN 0960-1317

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. and Berg, A. van den (1999) A micromachined pressure/flow sensor. Sensors and Actuators A: Physical, 77 (3). pp. 167-177. ISSN 0924-4247

Paulick, C.A. and Brinkmann, R. and Elwenspoek, M. and Hartrott, M. von and Kiehl, M. and Maxim, P. and Quitmann, D. (1985) Electric field fluctuations in liquid tellurium alloys a hint to bond character. Journal of Non-Crystalline Solids, 77-78 (2). pp. 1359-1362. ISSN 0022-3093

Pol, F.C.M. van de and Lintel, H.T.G. van and Elwenspoek, M. and Fluitman, J.H.J. (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors and Actuators A: Physical, 21 (1-3). pp. 198-202. ISSN 0924-4247

Pol, F.C.M. van de and Wonnink, D.G.J. and Elwenspoek, M. and Fluitman, J.H.J. (1989) A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices. Sensors and Actuators, 17 (1-2). pp. 139-143. ISSN 0250-6874

Prak, Albert and Blom, Frans R. and Elwenspoek, Miko and Lammerink, Theo S.J. (1991) Q-factor and Frequency Shift of Resonating Silicon Diaphragms in Air. Sensors and Actuators A: Physical, 27 (1-3). pp. 691-698. ISSN 0924-4247

Prak, Albert and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Selective Mode Excitation And Detection Of Micromachined Resonators. Journal of Microelectromechanical Systems, 1 (4). pp. 179-186. ISSN 1057-7157

Rijn, C.J.M. van and Nijdam, W. and Elwenspoek, M.C. (1995) High flow rate microsieve for bio medical applications. Proceedings of the ASME Dynamic Systems and Control Division, 57-2 . pp. 995-1000. ISSN 0022-0434

Rijn, Cees van and Wekken, Michiel van der and Nijdam, Wietze and Elwenspoek, Miko (1997) Deflection and maximum load of microfiltration membrane sieve made with silicon micromachining. Journal of Microelectromechanical Systems, 6 (1). pp. 48-54. ISSN 1057-7157

Rijn, Cees J.M. van and Nijdam, Wietze and Kuiper, Stein and Veldhuis, Gert J. and Wolferen, Henk van and Elwenspoek, Miko (1999) Microsieves made with laser interference lithography for micro-filtration applications. Journal of Micromechanics and Microengineering, 9 (2). pp. 170-172. ISSN 0960-1317

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint J. de and Jansen, Henri V. and Berenschot, J.W. and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Elwenspoek, Miko and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2001) Direct Integration of Micromachined Pipettes in a Flow Channel for Single DNA Molecule Study by Optical Tweezers. Journal of Microelectromechanical Systems, 10 (2). pp. 238-246. ISSN 1057-7157

Sanchez, S. and Gui, C. and Elwenspoek, M. (1997) Spontaneous direct bonding of thick silicon nitride. Journal of Micromechanics and Microengineering, 7 (3). pp. 111-113. ISSN 0960-1317

Sanchez, Stefan and Elwenspoek, Miko and Gui, Chengqun and Nivelle, Martin J.M.E. de and Vries, Robert de and Korte, Piet A.J. de and Bruijn, Marcel P. and Wijnbergen, Jan J. and Michalke, Wolfgang and Steinbeiss, Erwin and Heidenblut, Torsten and Schwierzi, Bernard (1998) A high Tc superconductor bolometer on a silicon nitride membrane. Journal of Microelectromechanical Systems, 7 (1). pp. 62-69. ISSN 1057-7157

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2003) Versatile trench isolation technology for the fabrication of microactuators. Microelectronic Engineering, 67-68 . pp. 430-437. ISSN 0167-9317

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2004) Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers. Journal of Micromechanics and Microengineering, 14 (9). S70-S75. ISSN 0960-1317

Saravanan, S. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) A novel surface micromachining process to fabricate AlN unimorph suspensions and its application for RF resonators. Sensors and Actuators A: Physical, 130-13 . pp. 340-345. ISSN 0924-4247

Schlautmann, Stefan and Wensink, Henk and Schasfoort, Richard and Elwenspoek, Miko and Berg, Albert van den (2001) Powder-blasting technology as an alternative tool for micro-fabrication of CE-chip with integrated conductivity sensors. Journal of Micromechanics and Microengineering, 11 (4). pp. 386-389. ISSN 0960-1317

Schlautmann, Stefan and Wensink, Henk and Schasfoort, Richard and Elwenspoek, Miko and Berg, Albert van den (2001) Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors. Journal of Micromechanics and Microengineering, 11 (4). pp. 386-389. ISSN 0960-1317

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M. (1995) Planarization and fabrication of bridges across deep groves or holes in silicon using a dry film photoresist followed by an etch back. Journal of Micromechanics and Microengineering, 5 (2). pp. 189-192. ISSN 0960-1317

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of Micromechanics and Microengineering, 5 (2). pp. 151-157. ISSN 0960-1317

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M. (1993) Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief. Journal of Micromechanics and Microengineering, 3 (4). pp. 243-246. ISSN 0960-1317

Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. and Berg, A. van den (1996) Sistemi di microanalisi per Fluidi. Oleodinamica Pneumatica Lubrificazione (6). pp. 76-83. ISSN 0391-8645

Spiering, Vincent L. and Berenschot, J.W. and Elwenspoek, Miko and Fluitman, Jan H.J (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of Microelectromechanical Systems, 4 (3). pp. 151-157. ISSN 1057-7157

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Experimental investigation of anisotropy in isotropic silicon etching. Journal of micromechanics and microengineering, 17 (11). pp. 2344-2351. ISSN 0960-1317

Svetovoy, V. and Moktadir, Z. and Elwenspoek, M. and Mizuta, H. (2011) Tailoring the thermal Casimir force with graphene. EPL: A Letters Journal Exploring the Frontiers of Physics, 96 (1). p. 14006. ISSN 0295-5075

Svetovoy, V.B. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Precise Test of the Diffusion-Controlled Wet Isotropic Etching of Silicon via Circular Mask Openings. Journal of the Electrochemical Society, 153 (9). C641-C647. ISSN 0013-4651

Svetovoy, Vitaly B. and Sanders, Remco G.P. and Elwenspoek, Miko (2013) Transient nanobubbles in short-time electrolysis. Journal of Physics: Condensed matter, 25 (18). p. 184002. ISSN 0953-8984

Svetovoy, Vitaly B. and Sanders, Remco G.P. and Lammerink, Theo S.J. and Elwenspoek, Miko (2011) Combustion of hydrogen-oxygen mixture in electrochemically generated nanobubbles. Physical Review E: Statistical, nonlinear, and soft matter physics, 84 (3). 035302. ISSN 1539-3755

Syed Nawazuddin, M.B. and Lammerink, Theo S.J. and Berenschot, Erwin and Boer, Meint de and Ma, Ke-Chun and Elwenspoek, Miko C. and Wiegerink, Remco J. (2012) Towards a Casimir force measurement between micromachined parallel plate structures. Challenges, 3 (2). pp. 261-277. ISSN 2078-1547

Tas, N.R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2002) Nanofluidic bubble pump using surface tension directed gas injection. Analytical Chemistry, 74 (9). pp. 2224-2228. ISSN 0003-2700

Tas, N.R. and Gui, C. and Elwenspoek, M. (2003) Static friction in elastic adhesion contacts in MEMS. Journal of Adhesion Science and Technology, 17 (4). pp. 547-561. ISSN 0169-4243

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M. and Berg, A. van den (2004) Capillary filling speed of water in nanochannels. Applied Physics Letters, 85 (15). pp. 3274-3276. ISSN 0003-6951

Tas, N.R. and Lammerink, T.S.J. and Mela, P. and Jansen, H.V. and Elwenspoek, M. and Berg, A. van den (2002) 2D-confined nanochannels fabricated by conventional micromachining. Nano Letters, 2 (9). pp. 1031-1032. ISSN 1530-6984

Tas, N.R. and Sonnenberg, T. and Molenaar, R. and Elwenspoek, M. (2003) Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. Journal of Micromechanics and Microengineering, 13 (1). N6-N15. ISSN 0960-1317

Tas, Niels and Sonnenberg, Tonny and Jansen, Henri and Legtenberg, Rob and Elwenspoek, Miko (1996) Stiction in surface micromachining. Journal of Micromechanics and Microengineering, 6 (4). pp. 385-397. ISSN 0960-1317

Tas, Niels and Wissink, Jeroen and Sander, Louis and Lammerink, Theo and Elwenspoek, Miko (1998) Modeling, design and testing of the electrostatic shuffle motor. Sensors and Actuators A: Physical, 1998 (70). pp. 171-178. ISSN 0924-4247

Tas, Niels R. and Escalante, Maryana and Honschoten, Joost W. van and Jansen, Henri V. and Elwenspoek, M. (2010) Capillary Negative Pressure Measured by Nanochannel Collapse. Langmuir, 26 (3). pp. 1473-1476. ISSN 0743-7463

Tiggelaar, R.M. and Berenschot, J.W. and Boer, J.H. de and Sanders, R.G.P. and Gardeniers, J.G.E. and Oosterbroek, R.E. and Berg, A. van den and Elwenspoek, M.C. (2005) Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silion nitride tubes. Lab on a Chip, 5 (3). pp. 325-336. ISSN 1473-0197

Tiggelaar, R.M. and Berenschot, J.W. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Dorsman, R. and Kleijn, C.R. (2007) Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in si (110). Journal of Vacuum Science & Technology B: Microelectronics and nanometer structures, 25 (4). pp. 1207-1216. ISSN 1071-1023

Tiggelaar, R.M. and Loeters, P.W.H. and Male, P. van and Oosterbroek, R.E. and Gardeniers, J.G.E. and Croon, M.H.J.M. de and Schouten, J.C. and Elwenspoek, M.C. and Berg, A. van den (2004) Thermal and mechanical analysis of a microreactor for high-temperature catalytic gas phase reactions. Sensors and Actuators A: Physical, 112 (2-3). pp. 267-277. ISSN 0924-4247

Tiggelaar, R.M. and Male, P. van and Berenschot, J.W. and Gardeniers, J.G.E. and Oosterbroek, R.E. and Croon, M.H.J.M. de and Schouten, J.C. and Berg, A. van den and Elwenspoek, M.C. (2005) Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane. Sensors and Actuators A: Physical, 119 . pp. 196-205. ISSN 0924-4247

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2002) A light detection cell to be used in a micro analysis system for ammonia. Talanta, 56 (2). pp. 331-339. ISSN 0039-9140

Tiggelaar, Roald M. and Veenstra, Theo T. and Sanders, Remco G.P. and Berenschot, Erwin and Gardeniers, Han and Elwenspoek, Miko and Prak, Albert and Mateman, Richard and Wissink, Jeroen M. and Berg, Albert van den (2003) Analysis systems for the detection of ammonia based on micromachined components modular hybrid versus monolithic integrated approach. Sensors and Actuators B: Chemical, 92 (1-2). pp. 25-36. ISSN 0925-4005

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M. and Fluitman, J.H.J. (1994) (Electro-) mechanical characateristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 41 (1). pp. 4-6. ISSN 0885-3010

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A Differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Tilmans, Harrie A.C. and Elwenspoek, Miko (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. Journal of Micromechanics and Microengineering, 3 (4). pp. 193-197. ISSN 0960-1317

Tilmans, Harrie A.C. and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Micro resonant force gauges. Sensors and Actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247

Tjerkstra, R.W. and Gardeniers, J.G.E. and Berg, A. van den and Elwenspoek, M.C. (1996) Isotropically etched channels for gas chromatography. Analytical Methods and Instrumentation . pp. 247-249. ISSN 1063-5246

Tjerkstra, R.W. and Boer, M. de and Berenschot, E. and Gardeniers, J.G.E. and Berg, A. van den and Elwenspoek, M.C. (1997) Etching technology for chromatography microchannels. Electrochimica Acta, 42 (20-22). pp. 3399-3406. ISSN 0013-4686

Tong, Hien D. and Jansen, Henri V. and Gadgil, Vishwas J. and Bostan, Cazimir G. and Berenschot, Erwin and Rijn, Cees J.M. van and Elwenspoek, Miko (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984

Tong, D.H. and Zwijze, R.A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and Materials, 13 (4). pp. 235-246. ISSN 0914-4935

Tong, H.D. and Berg, A.H.J. van den and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver aloy films by a dual sputtering technique and its application in hydrogen separation membrane. Thin Solid Films, 479 . pp. 89-94. ISSN 0040-6090

Tong, H.D. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Rijn, C.J.M. van and Elwenspoek, M.C. and Nijdam, W. (2004) Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Industrial and Engineering Chemistry Research, 43 . pp. 4182-4187. ISSN 0888-5885

Tong, Hien Duy and Berenschot, J.W. (Erwin) and Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Wensink, Henk and Jansen, Henri V. and Nijdam, Wietze and Elwenspoek, Miko C. and Gielens, F.C. (Frank) and Rijn, Cees J.M. van (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of Microelectromechanical Systems, 12 (5). pp. 622-629. ISSN 1057-7157

Tong, Hien Duy and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, Henri V. and Berenschot, J.W. and Boer, Meint J. de and Boer, J.H. de and Rijn, Cees J.M. van and Elwenspoek, Miko C. (2005) Microsieve supporting palladium-silver alloy membranes and application to hydrogen separation. Journal of Microelectromechanical Systems, 14 . pp. 113-123. ISSN 1057-7157

Toor, M.W. van and Lammerink, T.S.J. and Gardeniers, J.G.E. and Elwenspoek, M. and Monsma, D. (1997) A novel micrmechanical flow controller. Journal of Micromechanics and Microengineering, 7 (3). pp. 165-169. ISSN 0960-1317

Toor, M.W. van and Lammerink, T.S.J. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Monsma, D.J. (1996) A novel micromechanical flow controller. Journal of Micromechanics and Microengineering, 7 (3). pp. 165-169. ISSN 0960-1317

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a Chip, 9 (13). pp. 1966-1969. ISSN 1473-0197

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317

Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and Wolferen, H.A.G.M. van and Boer, M.J. de and Sanders, R.G.P. and Elwenspoek, M.C. (2009) Transition flow through an ultra-thin nanosieve. Nanotechnology, 20 (305304). pp. 1-6. ISSN 0957-4484

Vanapalli, S. and Brake, H.J.M. ter and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of Micromechanics and Microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317

Vanapalli, S. and Brake, H.J.M. ter and Jansen, H.V. and Zhao, Y. and Holland, H.J. and Burger, J.F. and Elwenspoek, M.C. (2008) High frequency pressure oscillator for microcryocoolers. Review of Scientific Instruments, 79 (4). 045103. ISSN 0034-6748

Vargas llona, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2006) Seedless electroplating on patterned silicon. Journal of Micromechanics and Microengineering, 16 (6). pp. 1-6. ISSN 0960-1317

Veenendaal, E. van and Beurden, P. van and Enckevort, W.J.P. van and Vlieg, E. and Suchtelen, J. van and Elwenspoek, M. (2000) Monte Carlo study of kinetic smoothing during dissolution and etching of the Kossel (100) and silicon (111) surfaces. Journal of Applied Physics, 88 (8). pp. 4595-4604. ISSN 0021-8979

Veenendaal, E. van and Cuppen, H.M. and Enckevort, W.J.P. van and Suchtelen, J. van and Nijdam, A.J. and Elwenspoek, M. and Vlieg, E. (2001) A monte carlo study of etching in the presence of a mask junction. Journal of Micromechanics and Microengineering, 11 (4). pp. 409-415. ISSN 0960-1317

Veenendaal, E. van and Nijdam, A.J. and Suchtelen, J. van and Sato, K. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Elwenspoek, M. (2000) Simulation of anisotropic wet chemical etching using a physical model. Sensors and Actuators A: Physical, 84 (3). pp. 324-329. ISSN 0924-4247

Veenendaal, E. van and Suchtelen, J. van and Enckevort, W.J.P. van and Sato, K. and Nijdam, A.J. and Gardeniers, J.G.E. and Elwenspoek, M. (2000) The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide. Journal of Applied Physics, 87 (12). pp. 8732-8740. ISSN 0021-8979

Veenendaal, Erik van and Suchtelen, Jaap van and Beurden, Paul van and Cuppen, Herma M. and Enckevort, Willem J.P. van and Nijdam, A. Jasper and Elwenspoek, Miko and Vlieg, Elias (2001) Monte carlo simulation of wet chemical etching of silicon. Sensors and Materials, 13 (6). pp. 343-350. ISSN 0914-4935

Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and Berg, A. van den (2001) Use of selective anodic bonding to create micropump chambers with virtually no dead volume. Journal of the Electrochemical Society, 148 (2). G68-G72. ISSN 0013-4651

Veenstra, T.T. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (1999) Characterization method for a new diffusion mixer applicable in micro flow analysis systems. Journal of Micromechanics and Microengineering, 9 (2). pp. 199-202. ISSN 0960-1317

Veenstra, T.T. and Sharma, N.R. and Forster, F.K. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2002) The design of an in-plane compliance structure for microfluidical systems. Sensors and Actuators B: Chemical, 81 (2-3). pp. 377-383. ISSN 0925-4005

Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592

Vogels, L.J.P. and Bennema, P. and Hottenhuis, M.H.J. and Elwenspoek, M.C. (1991) On the morphology of ammonium nitrate (III): theory and observation. Journal of Crystal Growth, 108 (3-4). pp. 733-743. ISSN 0022-0248

Vogels, L.J.P. and Marsman, H.A.M. and Verheijen, M.A. and Bennema, P. and Elwenspoek, M. (1990) On the growth of ammonium nitrate(III) crystals. Journal of Crystal Growth, 100 (3). pp. 439-446. ISSN 0022-0248

Wensink, Henk and Elwenspoek, Miko C. (2002) Reduction of sidewall inclination and blast lag of powder blasted channels. Sensors and Actuators A: Physical, 102 (1-2). pp. 157-164. ISSN 0924-4247

Wensink, Henk and Elwenspoek, Miko C. (2002) A closer look at the ductile brittle transition in solid particle erosion. Wear, 253 (9-10). pp. 1035-1043. ISSN 0043-1648

Wensink, Henk and Jansen, Henri V. and Berenschot, J.W. and Elwenspoek, Miko C. (2001) Mask materials for powder blasting. Journal of Micromechanics and Microengineering, 10 (2). pp. 175-180. ISSN 0960-1317

Wensink, Henk and Schlautmann, Stefan and Goedbloed, Martijn H. and Elwenspoek, Miko C. (2002) Fine tuning the roughness of powder blasted surfaces. Journal of Micromechanics and Microengineering, 12 (5). pp. 616-620. ISSN 0960-1317

Wiegerink, Remco and Zwijze, Robert and Krijnen, Gijs and Lammerink, Theo and Elwenspoek, Miko (2000) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. Sensors and Actuators A: Physical, A80 (2). pp. 189-196. ISSN 0924-4247

Woldering, Léon A. and Abelmann, Leon and Elwenspoek, Miko C. (2011) Predicted photonic band gaps in diamond-lattice crystals built from silicon truncated tetrahedrons. Journal of Applied Physics, 110 (4). 043107-043114. ISSN 0021-8979

Yagubizade, H. and Darvishi, M. and Chen, Y.Y. and Nguyen, M.D. and Dekkers, J.M. and Wiegerink, R.J. and Elwenspoek, M.C. and Tas, N.R. (2013) Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation. Applied physics letters, 102 (6). 063509. ISSN 0003-6951

Yagubizade, Hadi and Darvishi, Milad and Elwenspoek, Miko C. and Tas, Niels R. (2013) A 4th-order band-pass filter using differential readout of two in-phase actuated contour-mode resonators. Applied physics letters, 103 (17). 173517. ISSN 0003-6951

Yntema, D.R. and Druyvesteyn, W.F. and Elwenspoek, M. (2006) A four particle velocity sensor device. Journal of the Acoustical Society of America, 119 (2). pp. 943-951. ISSN 00014966

Yntema, D.R. and Honschoten, J.W. van and Wiegerink, R.J. and Elwenspoek, M. (2008) A complete three-dimensional sound intensity sensor integrated on a single chip. Journal of Micromechanics and Microengineering, 18 (11). pp. 1-9. ISSN 0960-1317

Zhao, Y. and Berenschot, J.W. and Boer, M.J. de and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of Micromechanics and Microengineering, 18 (18). 064013. ISSN 0960-1317

Zhao, Y. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). p. 315305. ISSN 0957-4484

Zhao, Yiping and Berenschot, Erwin and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2008) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic Engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (1999) Low creep and hysteresis load cell based on a force to fluid pressure transformation. Sensors and Actuators A: Physical, 78 (2). pp. 74-80. ISSN 0924-4247

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (2000) Low-cost piezoresistive silicon load cell independent of force ditribution. Journal of Micromechanics and Microengineering, 10 (2). pp. 200-203. ISSN 0960-1317

Article News

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Towards position control of electrostatic comb drives.

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators.

Legtenberg, R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic axial gap wobble motor.

Book

Elwenspoek, M.C. and Blind, P. and Boer, M.J. de (1993) Etching Technology. Course book UETP MEMS, FSRM, Zwitserland.

Elwenspoek, M.C. and Jansen, H.V. (1999) Silicon micromachining. Cambridge University Press, United Kingdom. ISBN 9780521590549

Elwenspoek, M.C. (2001) Sensor Technology 2001. Kluwer Academic Publishers, Dordrecht, The Netherlands. ISBN 9780792370123

Elwenspoek, M. and Wiegerink, R. (2001) Mechanical microsensors. Microtechnology and MEMS, ISSN 1615-8326 . Springer Verlag, Berlin, Germany. ISBN 9783540675822

Elwenspoek, Miko and Wiegerink, Remco J. (1999) Mechanical microsensors. Microtechnoloy and Mems . Swiss Foundation for Research in Microtechnology (FSRM), Neuchatel, Zwitserland. ISBN 9783540675822

Reed, M.L. and Elwenspoek, M.C. and Johansson, S. and Obermeier, E. and Fujita, H. and Uenishi, Y. (1997) Materials for mechanical and optical microsystems. Materials Research Society, Pittsburgh, Pennsylvania. ISBN 9781558993488

Book Section

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: microelectromechanical systems. In: SMART structures, applications and related technologies. CISM International Centre for Mechanical Sciences (429). Springer Wien New York. ISBN 9783211836811

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: case studies. In: SMART structures: applications and related technologies. CISM International Centre for Mechanical Sciences (429). Springer Wien New York. ISBN 9783211836811

Elwenspoek, M.C. (1995) Etching technology. In: COMETT UETP MEMS. ISRM, Neuchatel, Switzerland.

Elwenspoek, M.C. (2002) Transducers science and technology. In: Impuls 2001-2002, Jaarboek Scintilla. Scintilla, Enschede, pp. 137-144.

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: small and large, scaling. In: SMART structures: applications and related technologies. Springer Wien New York, Italy. ISBN 9783211836811

Elwenspoek, M.C. and Wiegerink, R.J. (2001) Micro electro mechanical systems: principles of measurement mechanical quantities: transduction of deformation. In: SMART structures: applications and related technologies. Springer Wien New York, Italy. ISBN 9783211836811

Elwenspoek, M.C. and Wiegerink, R.W. (2001) Micro electro mechanical systems: silicon micromachining. In: SMART structures: applications and related technologies. Springer Wien New York, Italy. ISBN 9783211836811

Elwenspoek, M. (1996) Physical chemistry of wet chemical anisotropic etching of silicon. In: Proceedings of the ASME Dynamic Systems and Control Division. American Society of Mechanical Engineers, pp. 901-907. ISBN 9780791817469

Elwenspoek, M. and Bennema, P. (1984) Physical models for secondary nucleation. In: Industrial crystallization 84 : proceedings of the 9th Symposium on industrial crystallization, The Hague, The Netherlands, September 25-28, 1984. Elsevier, The Hague, The Netherlands, pp. 267-269. ISBN 9780444424068

Elwenspoek, Miko (2011) Counterfactual thinking in physics. In: Counterfactual thinking - counterfactual writing. Linguae & Litterae, 12 . De Gruyter, Berlin, Germany, pp. 62-80. ISBN 9783110268669

Gardeniers, J.G.E. and Elwenspoek, M.C. and Cobianu, C. (1994) Texture variations in sol-gel derived pzt films on substrates with platinum metallization. In: Polycrystalline thin films. Materials Research Society, Pittsburgh, pp. 451-456. ISBN 9781558992436

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1996) Silicon fusion bonding of rough surface with polishing technique. In: Micro System Technologies '96. VDE-Verlag, Berlin, pp. 205-210.

Gui, C. and Albers, H. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Lambeck, P.V. (1996) Silicon fusion bonding with chemical mechanical polishing. In: Proceedings of the 1996 National Sensor Conference. , Delft, pp. 93-97. ISBN 9789040713217

Lerou, P.P.P.M. and Vanapalli, S. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and Brake, H.J.M. ter and Rogalla, H. (2006) Microcooling Developments at the University of Twente. In: Advances in cryogenic engineering: transactions of the cryogenic engineering. AIP Conference Proceedings, 823 . American Institute of Physics, pp. 977-984. ISBN 9780735403178

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) A new fabrication method for in-plane micro fluid handling components and analysis systems. In: Sensor technology in the Netherlands : state of the art : proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2-3 March 1998. Kluwer Academic, Dordrecht, pp. 85-90. ISBN 9780792350101

Saravanan, S. and Keim, E.G. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Growth and surface characterization of piezoelectric AlN thin films on silicon (100) and (110) substrates. In: Microscopy of Semiconducting Materials. Springer Proceedings in Physics, 107 . Springer, pp. 75-78. ISBN 9783540319146

Svetovoy, V.B. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M.C. (2012) Combustion of hydrogen-oxygen mixture in nanobubbles. In: Nonequilibrium processes in plasma, combustion, and atmosphere. Torus Press, Moscow, pp. 201-208. ISBN 9785945881211

Vries, J. de and Abelmann, L. and Manz, A. and Elwenspoek, M.C. (2012) Human Document Project. In: Jaarboek E.T.S.V. Scintilla, Memories 2010-2011. E.T.S.V. Scintilla, Enschede, Netherlands, pp. 64-66.

Conference or Workshop Item

Albrechts, Björn and Hautzinger, Daniel S. and Krüger, Michael and Elwenspoek, Miko and Müller, Kristian M. and Korvink, Jan G. (2010) Adsorption studies of DNA origami on silicon dioxide. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Baar, J.J. van and Verwey, W.B. and Dijkstra, M. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2003) Micromachined two dimensional resistor arrays for determination of gas parameters. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 8-12 June 2003, Boston, MA, USA (pp. pp. 1606-1609).

Baar, J.J. van and Wiegerink, R.J. and Berenschot, J.W. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M. (2002) Pressure sensor based on distributed temperature sensing. In: IEEE Sensors Conference 2002, 12-14 June 2002 , Orlando, USA (pp. pp. 964-968).

Baar, J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2001) Pirani pressure sensor with distributed temperature sensing. In: ASME International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York .

Baar, J.J. van and Wiegerink, R.J. and Lammerink, T.S.J. and Berenschot, E. and Krijnen, G.J.M. and Elwenspoek, M. (2002) Combined -pirani/bending- membrane-pressure sensor. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, January 20-24, 2002, Las Vegas, Nevada, USA (pp. pp. 328-331).

Baar, J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2001) Flow sensing using the temperature distribution along a heated microbeam. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 13-18).

Baar, J.J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Resistive actuator sensor structures for the determination of fluid and flow parameters - first results. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

Baar, J.J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Micro-machined structures for thermal measurement of fluid and flow parameters. In: MicroMechanics Europe Conference, MME 2000, October 1-3, 2000, Uppsala, Sweden.

Baar, J.J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Determination of fluid and flow parameters using heat transfer. In: Eurosensors XIV Conference, 14th European Conference on Solid-State Transducers, August 27-30, 2000, Copenhagen, Denmark (pp. pp. 375-376).

Baar, J.J.J. van and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2001) Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array. In: 11th International Conference on Solid-State Sensors and Actuators, Transducers 2001, 10-14 June 2001, Munich, Germany (pp. pp. 1436-1439).

Berenschot, J.W. and Tas, N.R. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (2001) Advanced sacrificial poly-Si technology for fluidic systems. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 624-627).

Berenschot, Erwin and Jansen, Henri and Burger, Gert-Jan and Gardeniers, Han and Elwenspoek, Miko (1996) Thermally assisted ion beam etching of polytetrafluoroethylene, a new technique for high aspect ratio etching of MEMS. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, February 11-15, 1996, San Diego, California, USA (pp. pp. 277-284).

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China (pp. pp. 729-732).

Berg, Albert van den and Bergveld, P. and Elwenspoek, M. and Fluitman, J.H.J. (1994) Miniaturized chemical analysis systems. In: 5th International Symposium on Micro Machine and Human Science, 2-4 October 1994, Nagoya, Japan (pp. pp. 181-184).

Berg, A. van den and Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Bergveld, P. (1995) Modular concept for miniature chemical systems. In: International Conference on Integrated Micro/Nanotechnology for Space Applications, October 30 - November 3, 1995, Houston, Texas.

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Berenschot, J.W. and Elwenspoek, M.C. and Berg, A. van den and Tijssen, R.P. (2000) High pressure, solvent-resistant microfluidic connections by local anodic bonding of Kovar to Pyrex. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

Blom, M.T. and Chmela, E. and Gardeniers, J.G.E. and Tijssen, R.P. and Elwenspoek, M.C. and Berg, A. van den (2001) Design and fabrication of a hydrodynamic chromatography chip. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 794-797).

Blom, M.T. and Chmela, E. and Heyden, F.H.J. van der and Oosterbroek, R.E. and Tijssen, R.P. and Elwenspoek, M.C. and Berg, A. van den (2002) A micro viscosity detector for use in miniaturized chemical separation systems. In: MicroTAS 2002 Symposium, 3-7 November 2002, Nara, Japan (pp. pp. 639-641).

Blom, M.T. and Tas, N.R. and Pandraud, G. and Chmela, E. and Gardeniers, J.G.E. and Elwenspoek, M. and Berg, A. van den and Tijssen, R.P. (2000) Failure mechanisms of pressurized microchannels, model and experiments. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 199-204).

Boer, Meint de and Jansen, Henri and Elwenspoek, Miko (1995) The black silicon method V: a study of the fabrication of movable structure for micro electromechanical systems. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 565-568).

Bree, Hans-Elias de and Druyvesteyn, W.F. and Berenschot, E. and Elwenspoek, M. (1999) Three-dimensional sound intensity measurements using microflown particle velocity sensors. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 124-129).

Bree, Hans-Elias de and Elwenspoek, Miko (1999) The microflown, from die to product. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands (pp. pp. 459-460).

Bree, Hans-Elias de and Jansen, Henri V. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. and Elwenspoek, Miko (1998) Bi-directional fast flow sensor with a large dynamic range. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 194-197).

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Elwenspoek, Miko (1996) The two sensor µ-flown : an improved flow sensing principle. In: Eurosensors X, The 10th European Conference on Solid-State Transducers, September 8-11, 1996, Leuven, Belgium (pp. pp. 1301-1304).

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Jansen, Henri and Lammerink, Theo and Elwenspoek, Miko (1995) The μ-flown: A Novel Device Measuring Acoustical Flows. In: Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden (pp. pp. 536-539).

Bree, H-E. de and Druyvesteyn, W.F. and Berenschot, J.W. and Elwenspoek, M.C. (1999) A low noise microphone based on the microflown technology. In: Transducers '99, 10th International Conference on Solid-State Sensors and Actuators, June 7-10, 1999, Sendai, Japan.

Bree, H.E. de and Elwenspoek, M.C. (1999) Improving the signal to noise ratio of resistive sensors. In: Proceedings of Micromechanics Europe '99 Conference (pp. pp. 128-131).

Bree, H.E. de and Korthorst, T. and Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (1996) A method to measure apparent acoustic pressure, flow gradient and acoustic intensity using two micromachined flow microphones. In: Proceedings Eurosensors X (pp. pp. 827-830).

Broek, D.M. van den and Elwenspoek, M.C. (2007) Explosive micro-bubble actuator. In: International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, 10-14 June 2007, Paris, France (pp. pp. 2441-2444).

Brookhuis, R.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Boer, M.J. de and Elwenspoek, M.C. (2011) Force sensor for measuring power transfer between the human body and the environment. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 2042-2045).

Bruijn, M.P. and Ridder, M. and Hoevers, H.F.C. and Bergmann, W.M. and Korte, P.A.J. de and Moktadir, Z. and Wiegerink, R.J. and Berenschot, J.W. and Elwenspoek, M.C. (2001) Micro-machining of a cryopenic imaging array of transition edge x-ray microcalorimeters. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 179-184).

Bruijn, Marcel P. and Ridder, Marcel L. and Krouwer, Eric and Hoevers, Henk F.C. and Wiegerink, Remco and Baar, John J. van and Elwenspoek, Miko (2003) Development of cryogenic microcalorimeter array for application in X-ray astronomy. In: 4th Round Table on Micro/Nano Technologies for Space, 20-22 May 2003, ESTEC, Noordwijk.

Bruijn, M.P. and Nivelle, M.J.M.E. de and Korte, P.A.J. de and Sanchez, S. and Elwenspoek, M. and Heidenblut, T. and Schwierzi, B. and Michalke, W. and Steinbeiss, E. (1998) Low noise far-infrared detection at 90 K using high-Tc superconducting bolometers with silicon-nitride beam suspension. In: 32nd ESLAB Symposium on Remote Sensing Methodology for Earth Observation and Planetary Exploration, 15-18 September 1998, Noordwijk, The Netherlands (pp. pp. 101-106).

Burger, J.F. and Berenschot, J.W. and Visscher, H. and Elwenspoek, M.C. (1997) Piezoresistive friction force sensor for tribological research. In: Micro Mechanics Europe, MME 1997, Aug. 31 - Sept. 2, 1997, Southampton, England (pp. pp. 152-155).

Burger, J.F. and Brake, H.J.M. ter and Elwenspoek, M.C. and Rogalla, H. (1997) Microcooling: study on the application of micromechanical techniques. In: 9th International Cryocooler Conference '96, June 25-27, 1996, Waterville Valley, NH (pp. pp. 687-696).

Burger, J.F. and Holland, H.J. and Wekken, M. van der and Brake, H.J.M. ter and Wade, L. and Elwenspoek, M.C. and Rogalla, H. (1998) Development of a microminiature sorption cooler. In: Seventeenth International Cryogenic Engineering Conference, ICEC 17, 14-17 July 1998, Bournemouth, UK (pp. pp. 123-126).

Burger, J.F. and Holland, H.J. and Brake, H.J.M. ter and Elwenspoek, M.C. and Rogalla, H. (2003) Construction and Operation of a 165K Microcooler with a Sorption Compressor and a Micromachined Cold Stage. In: 12th International Cryocooler Conference, June 18-20, 2002, Cambridge, Massachusetts (pp. pp. 643-649).

Burger, J.F. and Holland, H.J. and Elwenspoek, M. and Brake, H.J.M. ter and Rogalla, H. (1999) Fast Gas-gap heat switch for a microcooler. In: 10th International Cryocooler Conference, May 26-28, 1998, Monterey, California (pp. pp. 565-574).

Burger, J.F. and Holland, H.J. and Seppenwoolde, J.H. and Berenschot, E. and Brake, H.J.M. ter and Gardeniers, J.G.E. and Elwenspoek, M. and Rogalla, H. (2001) 165 k microcooler operating with a sorption compressor and a micromachined cold stage. In: 11th International Cryocooler Conference, June 20-22, 2000, Keystone, Colorado, USA (pp. pp. 551-560).

Burger, J.F. and Wekken, M.C. van der and Berenschot, E. and Holland, H.J. and Brake, H.J.M. ter and Rogalla, H. and Gardeniers, J.G.E. and Elwenspoek, M. (1999) High pressure check valve for application in a miniature cryogenic scorption cooler. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 183-188).

Burger, Johannes and Holland, Harry and Berenschot, Erwin and Seppenwolde, Jan-Henry and Brake, Marcel ter and Gardeniers, Han and Elwenspoek, Miko (2001) 169 kelvin cryogenic microcooler empoying a condenser, evaporator, flow restriction and counterflow heat exchangers. In: 14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 21-25 Jan. 2001, Interlaken, Switzerland (pp. pp. 418-421).

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Tas, Niels (2011) Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures. In: 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, 20-23 Feb 2011, Kaohsiung, Taiwan (pp. pp. 940-943).

Burouni, Narges and Berenschot, Erwin and Elwenspoek, Miko and Tas, Niels (2012) 3D Nanofabrication of components by repeated corner lithography: Self Aligned sub-50nm apertures. In: 12th IEEE International Conference on Nanotechnology, IEEE- NANO 2012, 20-23 August 2012, Birmingham, UK.

Deladi, S. and Sarajlic, E. and Kuijpers, A.A. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Applications of the Microelectromechanical Systems in Nanoscience. In: II Eccomas Thematic Conference on Smart Structures and Materials, 18-21 July, 2005, Lisboa, Portugal.

Deladi, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) An AFM-based device for in-situ characterization of nano-wear. In: 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, January 25-29, 2004, Maastricht, the Netherlands (pp. pp. 181-184).

Deladi, S. and Boer, M.J. de and Rosén, D. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Innovative process development for a new microtribosensor using surface micromachining. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania (pp. pp. 63-66).

Deladi, S. and Krijnen, G. and Elwenspoek, M.C. (2003) Parallel beams/lever electrothermal out-of-plane actuator. In: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 5-7 May, 2003, Mandelieu-la Napoule, France (pp. pp. 103-107).

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M. (2003) FEM Assisted design and simulation of novel electrochemical actuators. In: Nanotech 2003 Nanotechnology Conference and Trade Show, Februari 23-28, 2003, San Francisco, Los Angeles, Boston (pp. pp. 400-403).

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 49-52).

Deladi, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Flash release an alternative for releasing complex MEMS devices. In: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 12-14 May, 2004, Montreux, France (pp. pp. 343-348).

Deladi, S. and Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2002) Three dimensional adhesion model for arbitrary rough surfaces. In: International Conference on Computational Nanoscience and Nanotechnology, ICCN, April 22-25, 2002, San Juan, Puerto Rico, USA (pp. pp. 326-329).

Deladi, S. and Tas, N.R. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. and Boer, J.H. de (2005) Micromachined Foutain Pen as a tool for Atomic Force Microscopebased nanoelectrochemical metal deposition. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 564-567).

Deladi, S. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) Multifunctional Tool for Expanding AFM-Based Applications. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 159-162).

Dijkstra, M. and Lammerink, T.S.J. and Boer, M.J. de and Wiegerink, R.J. and Elwenspoek, M. (2009) Ambient temperature-gradient compensated low-drift thermopile flow sensor. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 479-482).

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2006) Versatile surface channel concept for microfluidic applications. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 September 2006, Southampton, England (pp. pp. 37-40).

Dijkstra, M. and Boer, M.J. de and Berenschot, J.W. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2007) Miniaturized flow sensor with planar integrated sensor structures on semicircular surface channels. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan (pp. pp. 123-126).

Dijkstra, M. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M. (2006) Nano-flow thermal sensor applying dymamic w-2w sensing method. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME 2006, 3-5 September 2006, Southampton, England.

Dijkstra, M.A. and Lammerink, T.S.J. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift U-Shaped Thermopile Flow Sensor. In: Sensors, 2008 IEEE, 26-29 Oct 2008, Lecce, Italy (pp. pp. 66-69).

Dijkstra, M.A. and Lammerink, T.S.J. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Elwenspoek, M.C. (2008) Low-Drift flow sensor with zero-offset thermopile-based power feedback. In: Proceedings of DTIP, 9-11 Apr 2008, Nice (pp. p. 4).

Druyvesteyn, W.F. and Bree, H-E. de and Elwenspoek, M.C. (1999) A new acoustic measurement probe The Microflown. In: Proceedings of the Institute of Acoustics (pp. pp. 140-147).

Elders, J. and Jansen, H.V. and Elwenspoek, M. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS , January 25-28, 1994, Oiso, Japan (pp. pp. 170-175).

Elders, J. and Jansen, H.V. and Elwenspoek, M. and Ehrfeld, W. (1995) Deemo: a new technology for the fabrication of microstructures. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 238-243).

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA (pp. pp. 171-176).

Elwenspoek, M.C. (1998) Stationary hillocks on etching silicon. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 70-73).

Elwenspoek, M.C. (1993) Chemical physics of wet chemical etching of silicon. In: Micromachine (pp. pp. 1-28).

Elwenspoek, M.C. and Gui, C. (1998) New developments in wet chemical etching and fusion bonding. In: Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting (pp. pp. 192-205).

Elwenspoek, M. (1999) Thermal flow micro sensors. In: International Semiconductor Conference, CAS 1999, 5-9 October 1999, Sinaia, Romania (pp. pp. 423-435).

Elwenspoek, M. (1994) Some selected research items of the micro mechanics department at MESA. In: 5th International Symposium on Micro Machine and Human Science, 2-4 October 1994, Nagoya, Japan (pp. pp. 9-31).

Elwenspoek, M. and Blom, F.R. and Bouwstra, S. and Lammerink, T.S.J. and Pol, F.C.M. van de and Tilmans, H.A.C. and Popma, Th.J.A. and Fluitman, J.H.J. (1989) Transduction mechanisms and their applications in micromechanical devices. In: IEEE Micro Electro Mechanical Systems, MEMS, 20-22 Feb. 1989 , Salt Lake City, UT (pp. pp. 126-132).

Elwenspoek, M. and Lindberg, U. and Kok, H. and Smith, L. (1994) Wet chemical etching mechanism of silicon. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1994, Oiso, Japan (pp. pp. 223-228).

Elwenspoek, M. and Weustink, M. and Legtenberg, R. (1995) Static and dynamic properties of active joints. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 412-415).

Elwenspoek, M.C. and Lammerink, T.S.J. (1999) Theory of thermal flow sensors. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands (pp. pp. 157-158).

Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Micro liquid handling systems. In: Onder de loep genomen, miniturisatie en microsysteemtechnologie, 1994, Veldhoven (pp. pp. 1-14).

Elwenspoek, M.C. (1995) Physical chemistry of wetchemical anisotropic etching of silicon. In: 1995 ASME International mechanical engineering congress and exposition, gerefereed.

Engelen, J.B.C. and Boer, H. de and Beekman, J.G. and Been, A.J. and Folkertsma, G.A. and Fortgens, L. and Graaf, D. de and Vocke, S. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) A Musical instrument in MEMS. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 193-196).

Engelen, J.B.C. and Lantz, M.A. and Rothuizen, H.E. and Abelmann, L. and Elwenspoek, M.C. (2009) Improved performance of large stroke comb-drive actuators by using a stepped finger shape. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21-25 June 2009, Denver, Colorado, USA (pp. pp. 1762-1765).

Engelen, Johan B.C. and Abelmann, Leon and Elwenspoek, Miko C. (2010) Optimized comb drive finger shape for shock-resistant actuation. In: 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 , 24-28 Jan 2010 , Wanchai, Hong Kong (pp. pp. 1147-1150).

Fazal, I. and Berenschot, J.W. and Boer, J.H. de and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond Strength Tests Between Silicon Wafers and Duran Tubes (Fusion Bonded Fluidic Interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (pp. pp. 936-939).

Fazal, I. and Elwenspoek, M.C. (2008) Piezoelectric microvalve for precise control of gas flow at high pressure. In: 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007, 4-7 Sept 2007, Las Vegas, NV, United States (pp. pp. 841-844).

Fazal, I. and Elwenspoek, M.C. (2007) Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In: 18th Workshop on MicroMechanics Europe MME 2007, 16-18 September 2007, Guimaraes, Portugal (pp. pp. 219-222).

Fernandez, Luis and Sesé, J. and Wiegerink, Remco and Flokstra, Jaap and Jansen, Henri and Elwenspoek, Miko (2005) Radio frequency power sensor based on MEMS technology with ultra low losses. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 191-194).

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2003) Radio frequency power sensor based on MEMS technology. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada (pp. pp. 549-552).

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements, 2004, 27 June - 2 July 2004, London, UK (pp. pp. 117-118).

Gardeniers, J.G.E. and Burger, J.F. and Egmond, H.J. van and Holland, H.J. and Brake, H.J.M. ter and Elwenspoek, M.C. (2000) ZrNi thin films for fast reversible hydrogen pressure actuation. In: Actuator 2000, 7th International Conference on New Actuators, 19-21 June 2000, Bremen, Germany (pp. pp. 208-211).

Gardeniers, J.G.E. and Elwenspoek, M.C. and Cobianu, C. (1994) Texture variations in sol-gel derived PZT films on substrates with platinum metallization. In: Proceedings of the 1994 MRS Spring Meeting, 4-8 April 1994, San Francisco, CA, USA (pp. pp. 451-456).

Gui, C. and Elwenspoek, M.C. and Gardeniers, J.G.E. and Lambeck, P.V. (1998) Present and future role of CMP in wafer bonding. In: Fourth International Symposium on Semiconductor Wafer Bonding: Science, Technology and Applications, Paris, France (pp. pp. 114-126).

Gui, C. and Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1999) Selective fusion bonding by surface roughness control. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

Gui, C. and Elwenspoek, M. and Tas, N. and Gardeniers, J.G.E. (1999) The surface adhesion parameter: a measure for wafer bondability. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 290-295).

Gui, C. and Jansen, H.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multi layer substrates. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA (pp. pp. 633-636).

Gui, C. and Jansen, H.V. and Boer, M. de and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: International Conference on Solid-State Sensors and Actuators, TRANSDUCERS, 16-19 June 1997, Chicago, IL, USA (pp. pp. 633-636).

Gui, C. and Veldhuis, G.J. and Koster, T.M. and Lambeck, P.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1998) Nanomechanical optical devices fabricated with aligned wafer bonding. In: Eleventh Annual International Workshop on Micro Electro Mechanical Systems, MEMS, 1998, Heidelberg, Germany (pp. pp. 482-487).

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 157-162).

Hamberg, M.W. and Neagu, C.R. and Gardeniers, J.G.E. and IJntema, D.J. and Elwenspoek, M.C. (1995) An electrochemical micro actuator. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 106-110).

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania (pp. pp. 47-50).

Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven (pp. p. 192).

Heyden, F.H.J. van der and Blom, M.T. and Gardeniers, J.G.E. and Chmela, E. and Elwenspoek, M.C. and Berg, A. van den and Tijssen, R.P. (2000) A micro viscosity detector for a planar hydrodynamic chromatography (HDC) system. In: MicroTAS 2000 conference, May 14-18, 2000, Enschede, The Netherlands (pp. pp. 595-598).

Hoang, Thi Hanh and Berenschot, J.W. and Tas, Niels R. and Elwenspoek, Miko C. (2005) Fabrication of access holes to 2D nanochannels for single molecules experiment [poster]. In: NanoTech Montreux, November 15-17, 2005, Montreux, Switzerland.

Hoang, T.H. and Segers-Nolten, I. and Tas, N.R. and Boer, M.J. de and Subramaniam, V. and Elwenspoek, M.C. (2007) Fabrication of 1d nanochannels with thin glass wafers for single molecule studies. In: Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, 20-24 May 2007, Santa Clara, Californië USA (pp. pp. 260-263).

Hoang Thi Hanh, H.T.H. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2005) The microfabrication of and fluid study on nanochannels. In: Proceedings of the 1st International Nanofluidics Workshop (pp. pp. 62-63).

Honschoten, J. van and Baar, J. van and Bree, H.E. de and Lammerink, T. and Krijnen, G. and Elwenspoek, M. (1999) Application of a microflown as a low-cost level-sensor. In: Micromechanics Europe Workshop, MME '99, 27-28 September 1999, Gif sûr Yvette, France (pp. pp. 124-127).

Honschoten, J.W. van and Berenschot, J.W. and Sanders, R.G.P. and Abelmann, L. and Tas, N.R. and Elwenspoek, M. (2009) Fabrication of three-dimensional microstructures using capillary forces. In: MME 2009, The 20th Micromechanics Europe Workshop, September 20-22, 2009, Toulouse, France.

Honschoten, J.W. van and Ekkels, P. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Geometrical optimization of an acoustic thermal flow sensor. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 508-511).

Honschoten, J.W. van and Krijnen, G.J.M. and Svetovoy, V.B. and Bree, H.E. de and Elwenspoek, M.C. (2001) Optimisation of a two-wire thermal sensor for flow and sound measurements. In: 14th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 21-25 Jan. 2001, Interlaken, Switzerland (pp. pp. 523-526).

Honschoten, J.W. van and Svetovoy, V.B. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Determination of the sensitivity behaviour of an acoustic and thermal flow sensor by electronic characterisation. In: IEEE Sensors Conference 2002, 12-14 June 2002 , Orlando, USA (pp. pp. 1298-1303).

Honschoten, J.W. van and Tas, N.R. and Svetovoy, V. and Escalante, M. and Elwenspoek, M. (2008) Formation of liquid menisci in flexible nanochannels. In: MicroTas 2008, 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences, October 12-16, 2008, San Diego, California, USA (pp. pp. 1504-1506).

Honschoten, J.W. van and Yntema, D.R. and Dijkstra, M.A. and Svetovoy, V. and Wiegerink, R.J. and Elwenspoek, M.C. (2006) Analysis of packaging effects on the performance of the microflown. In: DTIP of MEMS & MOEMS 2006, 26-28 April 2006, Stresa, Italy.

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2008) Modeling and characterization of the sensitivity of a hot-wire particle velocity sensor. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany.

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2008) Analysis of the angular sensitivity of an innovative particle velocity sensor. In: IEEE Sensors 2008, 26-29 Oct. 2008, Lecce, Italy.

Honschoten, J.W. van and Yntema, D.R. and Wiegerink, R.J. and Elwenspoek, M. (2006) Directional sensitivity of a three dimensional particle velocity sensor. In: 17th Workshop on Micromachining, Micromechanics and Microsystems, MME, 3-5 Sept 2006, Southampton, England (pp. pp. 201-204).

Honschoten, J.W. van and Druyvesteyn, W.F. and Raangs, R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2002) Selfnoise Reduction in Acoustic Measurements with a Particle Velocity Sensor by Means of a Cross-Correlation Technique. In: Forum Acusticum, September 16-20, 2002, Sevilla, Spain.

Honschoten, J.W. van and Koelmans, W.W. and Konings, S.M. and Abelmann, L. and Elwenspoek, M. (2008) Nanotesla torque magnetometry using a microcantilever. In: Eurosensors XXII, European Conference on Solid-State Transducers, 7 - 10 Sept 2008, Dresden, Germany (pp. pp. 597-600).

Honschoten, J.W. van and Lammerink, T.S.J. and Bree, H.E. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) An electronical characterisation method for an acoustic and thermal flow sensor. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 1480-1483).

Honschoten, J.W. van and Svetovoy, V.B. and Krijnen, G.J.M. and Kuipers, H. and Elwenspoek, M.C. (2004) Investigation of the low-frequency noise of an acoustic thermal flow sensor. In: Eurosensors Conference XVIII, 12-15 September, 2004, Rome, Italy.

Iannuzzi, D. and De Man, S. and Alberts, C.J. and Berenschot, J.W. and Elwenspoek, M.C. and Said, A.A. and Dugan, M. (2008) Fiber-top micromachined devices. In: 19th International Conference on Optical Fibre Sensors, 15-18 April 2008, Perth, WA, Australia (pp. p. 700403).

Jansen, H.V. and Verhagen, R. and Elwenspoek, M.C. (1994) The black silicon method III: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping and other MEMS applications. In: Proceedings of Handling and Assembly of microparts 1994 (pp. pp. 1-10).

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches. In: Micro and Nano Engineering (pp. pp. 312-313).

Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam .

Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1996) The black silicon method VI: high aspect ratio treck etching for MEMS applications. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 250-257).

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe Conference, MME 1994, September 5-6, 1994, Pisa, Italy (pp. pp. 60-64).

Jansen, Henri and Boer, Meint de and Otter, Bert and Elwenspoek, Miko (1995) The black silicon method IV: the fabrication of three dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 88-93).

Jansen, Henri and Boer, Meint de and Wensink, Henk and Kloeck, Ben and Elwenspoek, Miko (1997) The black silicon method VIII: a study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. In: Micro- and Nano-Engineering 1997, 15 September 1997, Athens, Greece.

Jansen, Henri and Verhagen, Rudi and Elwenspoek, Miko (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparts, November 14th, 1994, Vienna, Austria.

Jansen, Henri and Verhagen, Rudi and Elwenspoek, Miko (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparths, 14 November, Vienna, Austria.

Koelmans, W.W. and Honschoten, J.W. van and Vettiger, P. and Abelmann, L. and Elwenspoek, M.C. (2009) Parallel optical readout of a cantilever array in dynamic mode. In: International Workshop on Nanomechanical Cantilever Sensors 2009, 20-22 May 2009, Jeju, South Korea.

Koelmans, W.W. and Peters, T. and Abelmann, L. and Elwenspoek, M.C. (2010) Fabrication of cantilever arrays with tips for parallel optical readout. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 277-280).

Krijnen, G. and Haanstra, R. and Potters, E. and Berenschot, J.W. and Harrach, S. von and Elwenspoek, M. (2003) Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, June 8-12, 2003, Boston, USA (pp. pp. 268-271).

Krijnen, G.J.M. and Kuijpers, A.A. and Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2002) Comb-drives: Versatile micro-structures for capacitive sensing and electrostatic actuation. In: Proceedings of SPIE - The International Society for Optical Engineering, 21 - 23 May 2002, Presquile de Giens, France (pp. pp. 201-206).

Krijnen, G.J.M. and Tas, N.R. and Elwenspoek, M.C. (2001) Electrostatic microactuators. In: International Conference on SMART Technology Demonstrators & Devices, 12-14 December 2001, Edinburgh, UK.

Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Lambeck, Paul V. and Elwenspoek, Miko (1998) Optical devices based on fluidic controlled two mode interference. In: 9th European Workshop on Micromechanics, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 203-205).

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2002) 2D finite element simulations for long range capacitive position sensor. In: MME 2002, The 13th Micromechanics Europe Workshop, 6-8 October 2002, Sinaia, Romania (pp. pp. 181-184).

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2002) 2D-finite element simulations for long range capacitive position sensor. In: SESENS 2002, November 29-30, 2002, Veldhoven, The Netherlands.

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2003) Capacitance measurements for micromachined capacitive long-range position sensor. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.

Kuijpers, A.A. and Krijnen, G.J.M. and Wiegerink, R.J. and Lammerink, T.S.J. and Elwenspoek, M.C. (2005) Analysis Of Micromachined Capacitive Incremental Position Sensor. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Kuijpers, A.A. and Wiegerink, R.J. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (2004) Capacitive long-range position sensor for microactuators. In: 17th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2004, January 25-29 , 2004, Maastricht, The Netherlands (pp. pp. 544-546).

Kuijpers, Toon A.A. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Wiegerink, Remco J. and Elwenspoek, Miko C. (2003) Micromachined capacitive long-range displacement sensor. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 330-331).

Kuijpers, Toon A.A. and Krijnen, Gijs J.M. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko C. (2005) Micromachined capacitive displacement sensor for long-range nano-positioning. In: International Probe Storage Workshop III , Feb. 28 - Mar. 1, 2005, Zürich, Switzerland.

Kuijpers, Toon A.A. and Krijnen, Gijs J.M. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko C. (2004) Measurements for a capacitive incremental position sensor for microactuators. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 760-763).

Kuiper, S. and Brink, R. and Rijn, C.J.M. van and Nijdam, W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Microsieves: influence of perforations on flow resistance and membrane strength. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

Kuiper, Stein and Boer, Meint de and Rijn, Cees van and Nijdam, Wietze and Krijnen, Gijs and Elwenspoek, Miko (1999) Wet and dry etching techniques for the release of submicron perforated membranes. In: 10th Micromechanics Europe Workshop, MME 1999, 27-28 September 1999, Gif-sur-Yvette, France (pp. pp. 168-171).

Lammerink, T.S.J. and Tas, N.R. and Honschoten, J.W. van and Krijnen, G.J.M. and Baar, J.J. van and Elwenspoek, M.C. (2001) AC-driven thermal-balance flow sensor. In: Transducers '01-Eurosensors XV, June 10-14th 2001, Munich, Germany (pp. pp. 1448-1451).

Lammerink, T.S.J. and Wiegerink, R.J. and Elwenspoek, M.C. (2001) Temperature balance micro flow sensor system based on a free oscillating differential power controller. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 19-24).

Lammerink, T.S.J. and Spiering, V.L. and Elwenspoek, M. and Fluitman, J.H.J. and Berg, A. van den (1996) Modular concept for fluid handling systems: a demonstrator micro analysis system. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 389-394).

Lammerink, T.S.J. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Micromachined hydraulic astable multivibrator. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - 2 Feb. 1995, Amsterdam, The Netherlands (pp. pp. 13-18).

Lammerink, T.S.J. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M. (2000) A new class of thermal flow sensors using ΔT=0 as a control signal. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000, 23-27 January 2000, Miyazaki, Japan (pp. pp. 525-530).

Lammerink, T.S.J. and Tas, N.R. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) New class of thermal flow sensors using \[\Delta\]T = 0 as a control signal. In: 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), 23 - 27 Jan 2000, Miyazaki, Japan (pp. pp. 525-530).

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Integrated micro-liquid dosing systems. In: Micro Electro Mechanical Systems, MEMS '93, Februari 7-10, 1993, Fort Lauderdale, FL, USA (pp. pp. 254-259).

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J. (1991) Optical Excitation of Micro-Mechanical Resonators. In: IEEE Micro Electro Mechanical Systems, MEMS 1991: 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots', 30 January 1991 - 2 February 1991, Nara, Japan (pp. pp. 160-165).

Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1990) Low-temperature glass bonding for sensor applications. In: Micro Mechanics Europe Conference, MME, November 26-27, 1990, Berlin, Germany (pp. pp. 87-92).

Legtenberg, R. and Groneveld, A.W. and Elwenspoek, M.C. (1995) Towards position control of electrostatic comb drives. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 124-127).

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 204-209).

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Lammerink, Theo and Elwenspoek, Miko (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 404-407).

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan (1995) Electrostatic curved electrode actuators. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - Feb. 1995, Amsterdam, The Netherlands (pp. pp. 37-42).

Lerou, P.P.M. and Jansen, H.V. and Venhorst, G.C.F. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Brake, H.J.M. ter and Elwenspoek, M.C. and Rogalla, H. (2005) Progress in Micro Joule-Thomson Cooling at Twente University. In: 13th International Cryocooler Conference, March 29 - April 1, 2004, New Orleans, Louisiana (pp. pp. 489-496).

Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (2000) New: MST stainless steel flowsensor. In: Eurosensors XIV Conference, August 27-30, 2000, Copenhagen, Denmark (pp. pp. 325-326).

Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (2001) Packaged stainless steel flowsensor. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 173-178).

Leussink, P.J. and Jansen, H.V. and Krijnen, G.J.M. and Elwenspoek, M. (1999) Metal thin film thermocouples for use in MST. In: Eurosensors XIII, European Conference on Solid-State Transducers, September 12-15, 1999, The Hague, the Netherlands (pp. pp. 205-206).

Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2008) Modular Thruster and Feeding System for Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany (pp. pp. 17-20).

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2008) Nozzle fabrication for Micro Propulsion of a Micro-Satellite. In: 19th MicroMechanics Europe Workshop, MME 2008, 28-30 September 2008, Aachen, Germany (pp. pp. 45-48).

Miyake, Ryo and Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Micro mixer with fast diffusion. In: Micro Electro Mechanical Systems, MEMS '93: 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', Februari 7-10, 1993, Fort Lauderdale, FL, USA (pp. pp. 248-253).

Mogulkoc, B. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2010) Incorporation of in-plane electrical internonnects to the reflow bonding. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Mogulkoc, B. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2008) Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In: Proceedings of the 19th micromechanics Europe conference, 28-30 Sept 2008, Aachen, Germany.

Moktadir, Z. and Bruijn, M.P. and Wiegerink, R. and Elwenspoek, M. and Ridder, M. and Mels, W.A. (2002) Limitations of heat conductivity in cryogenic sensors due to surface roughness. In: IEEE Sensors 2002, 12 - 14 June 2002, Orlando, Florida (pp. pp. 1024-1027).

Nawaz, Mubassira and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko (2009) Parallel plate structures for optical modulation and casimir force measurement. In: 20th MicroMechanics Europe Workshop, MME, 20-22 September 2009, Toulouse, France (pp. pp. 1-4).

Nawazuddin, M.B.S. and Lammerink, T.S.J. and Wiegerink, R.J. and Berenschot, J.W. and Boer, M. de and Elwenspoek, M.C. (2011) Towards measurement of the Casimir force between parallel plates separated at sub-mircon distance. In: 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011, 5-9 June, 2011, Beijing, China (pp. pp. 434-437).

Nazeer, H. and Abelmann, L. and Tas, N.R. and Honschoten, J.W. van and Siekman, M.H. and Elwenspoek, M.C. (2009) Determination of young's modulus of PZT and Co80Ni20 thin films by means of micromachined cantilevers. In: MME 2009, The 20th Micromechanics Europe Workshop, September 20-22, 2009, Toulouse, France (pp. pp. 278-281).

Nazeer, H. and Nguyen, M.D. and Rijnders, G. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2011) Pulsed laser deposited $Pb(Zr,Ti)O_3$ thin films with excellent piezoelectric and mechanical properties. In: 20th IEEE International Symposium on Applications of Ferroelectrics, International Symposium on Piezoresponse Force Microscopy & Nanoscale Phenomena in Polar Materials, 24-27 July 2011, Vancouver Canada.

Nazeer, H. and Nguyen, M.D. and Woldering, L.A. and Rijnders, G. and Elwenspoek, M.C. and Abelmann, L. (2011) Composition dependence of mechanical and piezoelectric properties of pulsed laser deposited Pb(Zr,Ti)O$_{3}$ thin films. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 238-241).

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Elwenspoek, M.C. (2010) Determination of young's modulus of PZT-influence of cantilever orientation. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 257-260).

Nazeer, H. and Woldering, L.A. and Abelmann, L. and Nguyen, M.D. and Rijnders, G. and Elwenspoek, M.C. (2010) Influence of silicon orientation and cantilever undercut on the determination of Young's modulus of pulsed laser deposited PZT. In: 36th International Micro & Nano Engineering Conference, MNE 2010, 19-22 Sept 2010, Genoa, Italy.

Nguyen, Q.D. and Elwenspoek, M. (2005) Influence of an Applied Potential on the Anisotropic Etch rates of Silicon in KOH. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 45-48).

Nijdam, A.J. and Berenschot, J.W. and Suchtelen, J. van and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 74-77).

Nijdam, A.J. and Veenendaal, E. van and Cuppen, H. and Suchtelen, J. van and Reed, M.L. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Vlieg, E. and Elwenspoek, M.C. (2000) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation. In: MicroMechanics Europe (MME) 2000, October 1-3, 2000, Uppsala, Sweden .

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) In-plane oriented fluid control components, fabricated with new etching techniques. In: Actuator 98, 6th international conference on new actuators, 17-19 June 1998, Bremen, Germany (pp. pp. 43-46).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM'98, 6-8 April, 1998, Santa Clara, CA, USA.

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In: Micromechanics Europe Conference, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 104-107).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Utilizing the {111} plane switch-over etching process for micro fluid control applications. In: Micro Total Analysis Systems '98, 13-16 October 1998, Banff, Canada.

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Krijnen, G.J.M. and Elwenspoek, M.C. and Berg, A. van den (1999) Characterization and optimization of mono-crystalline in-plane operating check valves. In: IEEE International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 99, 7-10 June 1999, Sendai, Japan (pp. pp. 1816-1819).

Oosterbroek, R.E. and Gui, C. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (2000) Bonding and etching techniques for precision frabrication of reliable microvalves. In: MicroTAS 2000 Conference, May 14-18, 2000, Enschede, The Netherlands (pp. pp. 179-182).

Oosterbroek, R.E. and Berenschot, J.W. and Nijdam, A.J. and Pandraud, G. and Elwenspoek, M.C. and Berg, A. van den (1999) New design methodologies in <111>-oriented silicon wafers. In: Micromachining and Microfabrication 1999, 20 September 1999, Santa Clara, CA, USA (pp. pp. 384-394).

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves. In: MSM International Conference on Modeling and Simulation of Microsystems, April 6-8, 1998, Santa Clara, CA, USA (pp. pp. 528-533).

Oosterbroek, R.E. and Lammerink, T.S.J. and Berenschot, J.W. and Berg, A. van den and Elwenspoek, M.C. (1997) Designing, realization and characterization of a novel capacitive pressure/flow sensor. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA (pp. pp. 151-154).

Pjetri, O. and Koelmans, W.W. and Abelmann, L. and Siekman, M.H. and Elwenspoek, M.C. (2011) Using diffraction to detect deflection of the cantilevers in an array. In: 22nd Micromechanics and Microsystems Technology Europe Workshop, MME 2011, 19-22 June 2011, Tonsberg, Norway (pp. pp. 278-281).

Pol, F.C.M. van de and Elwenspoek, M.C. and Lammerink, T.S.J. and Fluitman, J.H.J. (1990) A micromechanical viewing screen: principle and feasibility. In: 5th Sensors & Actuators Symposium, November 15-16, 1990, Enschede, The Netherlands (pp. pp. 249-253).

Popescu, Dan O. and Dascula, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1994) Silicon active microvalves using buckled membranes for actuation. In: 17th Annual Semiconductor Conference, 11-16 October, 1994, Sinaia, Romania (pp. pp. 313-316).

Popescu, Dan O. and Dascula, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1995) Silicon active microvalves using buckled membranes for actuation. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 305-308).

Popescu, Dan O. and Lammerink, Theo S.J. and Elwenspoek, Miko (1994) Buckled membranes for microstructures. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS , January 25-28, 1994, Oiso, Japan (pp. pp. 188-192).

Popescu, Dan S. and Dascalu, Dan C. and Elwenspoek, Miko and Lammerink, Theo (1996) Ultrasonic transducer with thermo mechanical excitation andpiezoresistive detection. In: International Semiconductor Conference, CAS 1999, 9-12 October 1996, Sinaia, Romania (pp. pp. 85-87).

Prak, A. and Lammerink, T.S.J. and Fluitman, J.H.J. and Elwenspoek, M.C. (1993) Dynamic response of silicon resonant sensors. In: 7th International Conference on Solid-State Sensors and Actuators, Transducers 1993, June 7-10, 1993, Yokohama, Japan (pp. pp. 206-209).

Prak, Albert and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Selective mode excitation and detection of micromachined resonators. In: Micro Electro Mechanical Systems '92, MEMS, February 4-7, 1992, Travemuende, Germany (pp. pp. 220-225).

Rijn, C.J.M. van and Nijdam, W. and Elwenspoek, M.C. (1995) High flowrate microsieve for biomedical applications. In: 1995 ASME International mechanical engineering congress and exposition (pp. pp. 995-1000).

Rijn, Cees van and Nijdam, Wietze and Elwenspoek, Miko (1996) A microsieve for leukocyte depletion of erythrocyte concentrates. In: 18th Annual International Conference of the IEEE Engineering in Medicine and Biology Society: Bridging Disciplines for Biomedicine, 31 Oct.-3 Nov. 1996, Amsterdam, Netherlands (pp. pp. 256-257).

Rijn, Cees J.M. van and Elwenspoek, Miko C. (1995) Micro filtration membrane sieve with silicon micro machining for industrial and biomedical applications. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 83-87).

Rijn, C.J.M. van and Nijdam, W. and Kuiper, S. and Veldhuis, G.J. and Wolferen, H.A.G.M. van and Elwenspoek, M.C. (1998) Microsieves made with laser interference lithography for micro filtration applications. In: Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. pp. 100-103).

Rijn, C.J.M. van and Kuiper, S. and Nijdam, W. and Elwenspoek, M.C. (1997) Microsieves: development and applications of new high flux micro filtration membranes. In: Proceedings of Euromembrane '97 Symposium (pp. pp. 437-440).

Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) An electrochemically actuated microvalve. In: ACTUATOR 96, 5th International Conference on New Actuators, 26-28 June 1996, Bremen, Germany (pp. pp. 41-44).

Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrochemical microvalve. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 21-24).

Rusu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) The electrolysis of water: an actuation principle for MEMS with a big opportunity. In: 6th International conference on New Actuators with accompanying exhibition, 17-19 June, 1998, Bremen, Germany (pp. pp. 118-121).

Rusu, C.R. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Characterisation of a planar microcoil for implantable microsystems. In: Eurosensors X, European Conference on Solid-State Transducers, 8-11 September 1996, Leuven, Belgium (pp. pp. 343-346).

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Bennink, M.L. and Kanger, J.S. and Grooth, B.G. de and Elwenspoek, Miko and Greve, J. and Berg, A. van den and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 429-434).

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Elwenspoek, Miko and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Micro- and Nanotechnology for Biomedical and Environmental Applications, 26-27 January 2000, San Jose, California, USA (pp. pp. 41-49).

Sanchez, S. and Nivelle, M.J.M.E. de and Michalke, W. and Steinbeiss, E. and Burnus, M. and Heidenblut, T. and Schwierzi, B. and Vries, R. de and Korte, P.A.J. de and Elwenspoek, M.C. (1996) A high-Tc superconductor bolometer on a Si3N4/Si membrane. In: National Sernsor Conference 1996, March 20-21, 1996, Delft, The Netherlands (pp. pp. 99-102).

Sanchez, S. and Elwenspoek, M.C. and Gui, C. and Nivelle, M.J.M.E. de and Vries, R. de and Korte, P.A.J. de and Bruijn, M.P. and Schwierzi, B. (1997) A high-Tc superconductor bolometer on a silicon nitridemembrane. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997, 26-30 Jan 1997, Nagoya, Japan (pp. pp. 506-571).

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2003) A low electrostatic inchworm microactuator with high-resolution and large force. In: Eurosensors XVII, European Conference on Solid-State Transducers, September 21-24, 2003, Guimaraes, Portugal (pp. pp. 323-326).

Sarajlic, E. and Berenschot, E. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) Bidirectional electrostatic linear shuffle motor with two degrees of freedom. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 391-394).

Sarajlic, E. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Fabrication of 3D Nanowire Frames by Conventional Micromachining Technology. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 27-30).

Sarajlic, E. and Berenschot, E. and Tas, N. and Fujita, H. and Krijnen, G. and Elwenspoek, M. (2005) High Performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 53-56).

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In: Nanotech 2003 Nanotechnology Conference and Trade Show, Februari 23-28, 2003, San Francisco, Los Angeles, Boston (pp. pp. 392-395).

Sarajlic, E. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2004) Electrostatic stepping motion microactuator with high-resolution and large force for micro Scanning Probe Array Memory (µSPAM). In: 4th European Workshop on Innovative Mass Storage Tecnologies, IMST 2004, 28-29 September 2004, Aachen, Germany.

Sarajlic, E. and Berenschot, J.W. and Tas, N.R. and Fujita, H. and Krijnen, G.J.M. and Elwenspoek, M.C. (2006) Fabrication and characterization of an electrostatic contraction beams micromotor. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 814-817).

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2003) Integration of trench isolation technolgy and plasma release for advanced MEMS design on standard silicon wafers. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 123-126).

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2005) Bulk Micromachining Technology for Fabrication of two-level MEMS in Standard Silicon Substrate. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 1404-1405).

Saravanan, S. and Berenschot, J.W. and Boer, M.J. de and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Studies of AIN growth on various substrates by RF reactive sputtering techniques. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 163-166).

Saravanan, S. and Dijkstra, M. and Berenschot, J.W. and Krijnen, G.J.M. and Elwenspoek, M.C. (2005) AlN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden (pp. pp. 320-323).

Saravanan, S. and Krijnen, G.J.M. and Elwenspoek, M.C. (2003) Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications. In: SAFE/SeSens 2003, November 25-26, 2003, Veldhoven, the Netherlands.

Saravanan, S. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Fabrication of Surface Micromachined AlN Piezoelectric Microstructures and its Potential Apllication to RF Resonators. In: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS (DTIP), 1-3 June 2005, Montreux, Switzerland.

Saravanan, S. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) Surface Micromachined Fabrication of Piezoelectric AlN Unimorph Suspension Devices for RF Resonator Applications. In: 13th International Conference on Solid-StateSensors, Actuators and Microsystems, Transducers 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 1362-1365).

Saravanan, S. and Berenschot, Erwin and Krijnen, Gijs and Elwenspoek, Miko (2004) Surface Micromachining Process for the Integration of AlN Piezoelectric Microstructures. In: SAFE 2004, 7th Annual Workshop on Semiconductor Advances for Future Electronics, 25-26 Nov 2004, Veldhoven, the Netherlands (pp. pp. 676-681).

Saravanan, S. and Dijkstra, M. and Berenschot, E. and Krijnen, G. and Elwenspoek, M. (2005) AIN thin film unimorph piezoelectric actuators on polysilicon microbridges. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden (pp. pp. 320-323).

Schlautmann, S. and Wensink, H. and Schasfoort, R.B.M. and Elwenspoek, M.C. and Berg, A. van den (2000) Powder-blasting technology as a poerful tool for micro-fabrication of CE-chips with integrated conductivity sensors. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

Smith, A. and Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Design, fabrication and characterisation of a planar microcoil inductor for power supply in and data exchange with implantable microsystems. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 35-38).

Soltwisch, M. and Elwenspoek, M. and Quitmann, D. (1977) Mössbauer scattering from a supercooled liquid. In: Workshop on New Directions in Mössbauer Spectroscopy, June 1977, Argonne, IL, USA (pp. pp. 114-117).

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Faase, F.J. (1995) Sacrificial wafer bonding: an addition to the micromachining techniques. In: Third International Symposium on Semiconductor Wafer Bonding, May 21-26, 1995, Reno, Nevada, USA (pp. pp. 642-643).

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief. In: 4th Workshop on Micromachining, Micromechanics and Microsystems, MME '93, September 7-8, 1993, Neuchatel, Switzerland (pp. pp. 223-227).

Spiering, V.L. and Burger, J.F. and Elwenspoek, M.C. and Bouwstra, S. (1993) Package stress reduction and low initial stress thanks to deep corrugations. In: 7th International Conference on Solid State, Sensors and Actuators, Transducers '93, June 7-10, 1993, Yokohama, Japan (pp. pp. 44-45).

Spiering, V.L. and Berends, H. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Sacrificial wafer bonding: a useful tool in micromachining. In: (pp. pp. 329-334).

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. (1994) Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back. In: 5th Workshop on Micromachining, Micromechanics and Microsystems (MME'94) (pp. pp. 210-213).

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M. and Fluitman, J.H.J. (1994) Low temperature sacrificial wafer bonding for planarization after very deep etching. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS, January 25-28, 1994, Oiso, Japan (pp. pp. 69-74).

Spiering, V.L. and Bergveld, P. and Elwenspoek, M.C. and Berg, A. van den (1996) A µsensor array in a fluidic system for space applications. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 143-146).

Spiering, V.L. and Bouwstra, S. and Spiering, R.M.E.J. and Elwenspoek, M.C. (1991) On-chip Decoupling Zone For Package-Stress Reduction. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA (pp. pp. 982-985).

Suchtelen, J. van and Sato, K. and Veenendaal, E. van and Nijdam, A.J. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Elwenspoek, M. (1999) Simulation of anisotropic wet-chemical etching using a physical model. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 332-337).

Svetovoy, V. and Berenschot, J.W. and Elwenspoek, M.C. (2006) Experimental verification of the diffusion theory for wet isotropic etching of si via circular mask openings. In: Fifth International Workshop on Physical Chemistry of Wet Etching of Semiconductors, 19-21 June 2006, Saarbrücken, Germany.

Syed Nawazuddin, M.B. and Boer, M.J. de and Berenschot, J.W. and Ma, K.C. and Elwenspoek, M. and Wiegerink, R.J. (2013) Design, fabrication and characterization of a suspended plate mechano-optical modulator. In: 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, 20-24 January 2013, Taipeh, Taiwan (pp. pp. 560-563).

Sánchez, S. and Elwenspoek, M.C. and Gui, C. and Nivelle, M.J.M.E. de and Vries, R.J. de and Korte, P.A.J. de and Bruijn, M.P. and Wijnbergen, J.J. and Michalke, W. and Steinbeiss, E. and Heidenblut, T. and Schwierzi, B. (1997) A high-Tc superconductor bolometer on a silicon nitride membrane. In: 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997, 26-30 Jan 1997, Nagoya, Japan (pp. pp. 506-571).

Tas, N.R. and Elwenspoek, M.C. and Legtenberg, R. (1996) Side-wall spacers for stiction reduction in surface micromachined mechanisms. In: Micro Mechanics Europe, MME, 21-22 October 1996, Barcelona, Spain (pp. pp. 92-95).

Tas, N.R. and Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) The electrostatic shuffle motor. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 128-131).

Tas, N.R. and Molenaar, R. and Sonnenberg, T. and Koster, M.P. and Elwenspoek, M.C. (2000) Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. In: 2000 International Mechanical Engineering Congress & Exposition, IMECE, November 5-10, 2000, Orlando, FL, USA.

Tas, N.R. and Vogelzang, A.H. and Elwenspoek, M.C. and Legtenberg, R. (1997) Adhesion and frinction in MEMS. In: Proceedings Micro/nana tribology and it's applications.

Tas, Niels R. and Haneveld, Jeroen and Jansen, Henri V. and Elwenspoek, Miko (2006) Surface Tension Effects in Nanochannels: Capillary Filling and Negative Pressure. In: 210th ECS Meeting, E6-Bioelectronics, Biointerfaces, and Biomedical Applications, 29 Oct - 3 Nov 2006, Cancun, Mexico.

Tas, N.R. and Berenschot, J.W. and Sanders, R.G.P. and Lammerink, T.S.J. and Elwenspoek, M. and Berg, A. van den (2001) Bubble pump for integrated nanofluidics. In: 1st IEEE Conference on Nanotechnology 2001, IEEE-NANO, October 28–30, 2001, Maui, Hawaii, USA (pp. pp. 454-458).

Tas, N.R. and Gui, C. and Elwenspoek, M. (2000) Static friction in elastic adhesive MEMS contacts, models and experiment. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 193-198).

Tas, N.R. and Lammerink, T.S.J. and Berenschot, J.W. and Elwenspoek, M.C. and Berg, A. van den (2002) Scaling behaviour of pressure driven micro hydraulic systems. In: International Conference on Modeling and Simulation of Microsystems, MSM, April 22-25, 2002, Puerto Rico, USA (pp. pp. 174-177).

Tas, N.R. and Lammerink, T.S.J. and Leussink, P.J. and Berenschot, J.W. and Bree, H-E. de and Elwenspoek, M. (2000) Towards thermal flowsensing with pL/s resolution. In: Micromachining and Microfabrication 2000, 18 September 2000, Santa Clara, CA, USA (pp. pp. 106-121).

Tas, N.R. and Sonnenberg, A.H. and Sander, A.F.M. and Elwenspoek, M.C. (1997) Surface micromachined linear electrostatic stepper motor. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan (pp. pp. 215-220).

Tas, Niels and Wissink, Jeroen and Sander, Louis and Lammerink, Theo and Elwenspoek, Miko (1997) The shuffle motor: a high force, high precision linear electrostatic stepper motor. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS 1997, June 16-19, 1997, Chicago, USA (pp. pp. 777-780).

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2000) A light absorption cell for microTAS with KOH/IPA etched 450 mirrors in silicon. In: MicroMechanics Europe, MME, October 1-3, 2000, Uppsala, Sweden .

Tiggelaar, R.M. and Veenstra, T.T. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2001) A light absorption cell for microTAS with KOH/IPA etched 45 degrees mirrors in silicon. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 137-142).

Tilmans, H.A.C. and Elwenspoek, M.C. (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. In: 4th Workshop on Micromachining, Micromechanics and Microsystems (MME '93) (pp. pp. 133-137).

Tjerkstra, R.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (1998) Electrochemical fabrication of multi walled microchannels. In: Micro Total Analysis Systems '98, 13-16 October 1998, Banff, Canada (pp. pp. 133-136).

Tjerkstra, R. Willem and Boer, Meint de and Berenschot, Erwin and Gardeniers, J.G.E. and Berg, Albert van den and Elwenspoek, Miko (1997) Etching technology for microchannels. In: Tenth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, January 26-30, 1997, Nagoya, Japan (pp. pp. 147-152).

Tong, D.H. and Gielens, F.C. and Hoang, H.T. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2003) Thin, strong and defect free microfabricated palladium composite membranes for hydrogen separation. In: 7th International Conference on Microreaction Technology, IMRET 7, September 7-10, 2003, Lausanne, Switzerland (pp. pp. 343-345).

Tong, D.H. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2004) Nanosieves membranes. In: Proceedings of The Second International Workshop on Nanophysics and Nanotechnology, IWONN, October 22-23, 2004, Hanoi, Vietnam (pp. pp. 107-115).

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Micromachined palladium silver alloy membranes for hydrogen separation. In: SESENS 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 688-691).

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Fabrication and characterization of MEMS based wafer scale palladium silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions. In: 15th IEEE International Conference on Micro Electro Mechanical Systems, MEMS, January 20-24, 2002, Las Vegas, Nevada, USA (pp. pp. 264-268).

Tong, H.D. and Gielens, F.C. and Hoang, H.T. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, MA, USA (pp. pp. 1742-1745).

Tong, H.D. and Hoang Thi Hanh, H.T.H. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2003) Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation. In: 14th MicroMechanics Europe Workshop, MME 2003, Nov. 2-4, 2003, Delft, The Netherlands (pp. pp. 127-130).

Tong, H.D. and Zwijze, R.A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Characterization of platinum lift-off technique. In: SeSens workshop on Semiconductor Sensor and Actuator Technology, Nov. 30 - Dec. 1, 2000, Veldhoven, The Netherlands.

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal (pp. pp. 127-130).

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 1-4).

Vanapalli, S. and Lerou, P. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and Brake, H.J.M. ter and Rogalla, H. (2005) Microcooling developments at the University of Twente [Presentation]. In: 5th Round Table on Micro/Nano Technologies for Space : Session 11: Interface, Thermal Management and Fluidics, 3-5 October, 2005, Noordwijk, The Netherlands .

Vanapalli, S.A. and Lerou, P.P.M. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Venhorst, G.C.F. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2005) Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 354-357).

Vargas llona, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2005) Direct Electroplating on Highly Doped Patterned Silicon Wafers. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Veenendaal, E. van and Cuppen, H. and Enckevort, W.J.P. van and Suchtelen, J. van and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2000) A Monte Carlo study of etching in the presence of a mask junction. In: MicroMechanics Europe (MME) 2000, October 1-3, 2000, Uppsala, Sweden .

Veenstra, T.T. and Berenschot, J.W. and Gardeniers, J.G.E. and Sanders, R.G.P. and Elwenspoek, M.C. and Berg, A. van den (1999) The use of selective anodic bonding to create near-zero dead volume membranes. In: 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, October 17-22, 1999, Honolulu, Hawai.

Veenstra, T.T. and Berenschot, J.W. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2000) A simple selfpriming bubble tolerant peristaltic micropump. In: Eurosensors XIV Conference, August 27-31, 2000, Copenhagen, Denmark (pp. pp. 371-372).

Veenstra, T.T. and Berenschot, J.W. and Sanders, R.G.P. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Berg, A. van den (2001) A simple selfpriming bubble-tolerant peristaltic micropump. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 125-129).

Veenstra, T.T. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) A mixer based on diffusion mixing designed for the MAFIAS-project. In: Dutch Sensor Conference, 2-3 March 1998, Enschede, The Netherlands (pp. pp. 263-267).

Veenstra, T.T. and Lammerink, T.S.J. and Berg, A. van den and Elwenspoek, M.C. (1998) Characterisation method for a new diffusion-mixer applicable in micro flow injection analysis system. In: Micromechanics Europe Workshop, MME, June 3–5, 1998, Ulvik, Norway (pp. pp. 186-189).

Veenstra, T.T. and Tiggelaar, R.M. and Mateman, R. and Sanders, R.G.P. and Wissink, J. and Prak, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (2000) MAFIAS in modules. In: 3rd Symposium on Microsystems in Practice, January 20-21, 2000, Utrecht, The Netherlands.

Veenstra, T.T. and Tiggelaar, R.M. and Sanders, R.G.P. and Berenschot, J.W. and Gardeniers, J.G.E. and Wissink, J. and Mateman, R. and Elwenspoek, M.C. and Berg, A. van den (2001) Monolithic versus modular integration of a micro-fia system for ammonium determination. In: MicroTAS 2001 Symposium, October 21–25, 2001, Monterey, CA, USA (pp. pp. 664-666).

Vries, J. de and Abelmann, L. and Manz, A. and Elwenspoek, M.C. (2012) Tungsten-siliconnitride medium for Mega- to Gigayear data storage. In: 23rd Micromechanics and Microsystems Europe Workshop, MME 2012, 9-12 September 2012, Ilmenau, Germany.

Vries, Jeroen de and Abelmann, Leon and Manz, Andreas and Elwenspoek, Miko (2010) Tungsten-siliconnitride medium for mega- to gigayear data storage. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands (pp. pp. 261-264).

Wensink, H. and Elwenspoek, M.C. (2001) Radial oblique powder blasting. In: MME 2001, The 12th Micromechanics Europe Workshop, 16–18th September 2001, Cork, Ireland (pp. pp. 50-53).

Wensink, H. and Elwenspoek, M.C. (2001) New developments in bulk micromachining by powder blasting. In: MicroTAS 2001 Symposium, October 21–25, 2001, Monterey, CA, USA (pp. pp. 393-394).

Wensink, H. and Schlautmann, S. and Goedbloed, M.H. and Elwenspoek, M.C. (2001) Fine tuning the surface roughness of powder blasting glass surfaces. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 101-106).

Wensink, H. and Boer, M.J. de and Wiegerink, R.J. and Zwijze, R.A.F. and Elwenspoek, M.C. (1998) First micromachined silicon load cell for loads up to 1000 kg. In: Micromachined Devices and Components IV, 21-22 Sept. 1998, Santa Clara, USA (pp. pp. 424-430).

Wensink, H. and Wiegerink, R.J. and Zwijze, A.F. and Boer, M.J. de and Elwenspoek, M.C. (1998) Design and realisation of a quasi monolithic silicon load cell. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 190-193).

Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (2000) High resolution powder blast micromachining. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 769-774).

Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 September 1999, Gif sûr Yvette, France (pp. pp. 199-202).

Wiegerink, R.J. and Zwijze, A.F. and Mateman, R. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands.

Wiegerink, Remco and Zwijze, Robert and Krijnen, Gijs and Lammerink, Theo and Elwenspoek, Miko (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogenous load distributions. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, January 17-21, 1999, Orlando, FL, USA (pp. pp. 558-563).

Yagubizade, Hadi and Berenschot, Erwin and Jansen, Henri V. and Elwenspoek, Miko and Tas, Niels R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA (pp. pp. 128-131).

Yagubizade, Hadi and Darvishi, Milad and Elwenspoek, Miko C. and Tas, Niels R. (2014) A UHF 4th-order band-pass filter based on contour-mode PZT-on-silicon resonators. In: 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, 26-30 January 2014, San Francisco, CA, USA (pp. pp. 1237-1240).

Yntema, D.R. and Haneveld, J. and Engelen, J.B.C. and Brookhuis, R.A. and Sanders, R.G.P. and Wiegerink, R.J. and Elwenspoek, M. (2010) Listening to MEMS: An acoustic vibrometer. In: IEEE 23rd International Conference on Micro Electro Mechanical Systems, MEMS 2010, 24-28 Jan 2010, Hong Kong (pp. pp. 663-666).

Yntema, D.R. and Honschoten, J.W. van and Bree, H-E. de and Wiegerink, R.J. and Elwenspoek, M.C. (2006) A Three Dimensional Microflown. In: IEEE 19th annual International Conference on Micro Electro Mechanical Systems, MEMS, 22-26 January 2006, Istanbul, Turkey (pp. pp. 654-657).

Yntema, D.R. and Wiegerink, R.J. and Honschoten, J.W. van and Elwenspoek, M. (2007) Fully integrated three dimensional sound intensity sensor. In: 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, 21-25 January 2007, Kobe, Japan (pp. pp. 51-54).

Zhao, Y. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece (pp. p. 221).

Zhao, Yiping and Berenschot, Erwin and Boer, Meint de and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: MicroMechanics Europe Workshop, MME 2007, 16-18 Sep 2007, Guimarães, Portugal (pp. pp. 253-256).

Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Hien, T. and Elwenspoek, M.C. (2000) Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. In: Micro-Electro-Mechanical Systems, MEMS 2000, November 5-10, 2000, Orlando, USA.

Zwijze, R.A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and Boer, M.J. de and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Micromachining and Microfabrication 2000, 18 September 2000, Santa Clara, CA, USA (pp. pp. 47-58).

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (1999) Low-cost piezoresistive silicon load cell independent of force distribution. In: Micromechanics Europe Conference, MME 1999, September 27-28, 1999, Gif-sur-Yvette, France.

Zwijze, Robert A.F. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko (1998) Low creep and hysteresis load cell based on a force to liquid pressure transformation. In: Dutch National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 287-292).

Zwijze, Robert A.F. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko (1998) Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 260-263).

Lecture

Elwenspoek, M.C. (1996) Bruggen bouwen, grenzen uberwinden. [Lecture]

Patent

Iannuzzi, Davide and Deladi, Szabolcs and Elwenspoek, Michael Curt (2009) Optical device comprising a cantilever and method of fabrication and use thereof. Patent.

Iannuzzi, Davide and Deladi, Szabolcs and Elwenspoek, Michael Curt (2011) Optical device comprising a cantilever and method of fabrication and use thereof. Patent.

Jansen, Henricus Venantius and Boer, Meint Jelle de and Legtenberg, Rob and Elders, Job and Elwenspoek, Miko Curt and Fluitman, Johannes Hermanus Josephus (1996) Process for producing micromechanical structures by means of reactieve ion etching. Patent.

Unnikrishnan, Sandeep and Jansen, Henricus Venantius and Berenschot, Johan Willem and Fazal, Imran and Louwerse, Marcus Cornelis and Sanders, Remco and Boer, Meint Jelle de and Elwenspoek, Miko Curt (2009) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent.

Report

Abelmann, Leon and Tas, Niels and Berenschot, Erwin and Elwenspoek, Miko (2009) Self assembled three-dimensional nonvolatile memories. [Report]

This list was generated on Wed Sep 17 05:23:12 2014 CEST.