Author Publications

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Number of items: 104.

2014

Friedlein, R. and Van Bui, H. and Wiggers, F.B. and Yamada-Takamura, Y. and Kovalgin, A.Y. and Jong, M.P. de (2014) Interaction of epitaxial silicene with overlayers formed by exposure to Al atoms and O2 molecules. Journal of chemical physics, 140 . pp. 2047051-2047054. ISSN 0021-9606

Kovalgin, Alexey Y. and Van Bui, Hao and Schmitz, Jurriaan and Wolters, Rob A.M. (2014) Growth and properties of subnanometer thin titanium nitride films. In: Nano & Giga 2014, 10-14 March 2014, Phoenix, AZ, USA (pp. p. 1).

Schmitz, Jurriaan and Rangarajan, Balaji and Kovalgin, Alexey Yu (2014) Materials and integration schemes for above-IC integrated optics. In: 15th International Conference on Ultimate Integration on Silicon, ULIS 2014, 7-9 April 2014, Stockholm, Sweden (pp. pp. 153-156).

Van Bui, H. and Nguyen, M.D. and Wiggers, F.B. and Aarnink, A.A.I. and Jong, M.P. de and Kovalgin, A.Y. (2014) Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films. ECS journal of solid state science and technology, 3 (4). pp. 101-106. ISSN 2162-8769

Van Bui, H. and Wiggers, F.B. and Aarnink, A.A.I. and Nguyen, M.D. and Jong, M.P. de and Kovalgin, A.Y. and Gupta, A.Y. (2014) Growth characteristics, optical properties, and crystallinity of thermal and plasma-enhanced ALD AIN films. In: 14th International Conference on Atomic Layer Deposition, SLD 2014, 15-18 June 2014, Kyoto, Japan (pp. p. 113).

Van Bui, H. and Wiggers, F.B. and Jong, M.P. de and Kovalgin, A.Y. (2014) An approach to characterize ultra-thin conducting films protected against native oxidation by an in-situ capping layer. In: International Conference on Microelectronic Test Structures, ICMTS 2014, 24-27 March 2014, Udine, Italy (pp. pp. 53-57).

Van Bui, Hao and Wiggers, Frank B. and Gupta, Anubha and Nguyen, Minh D. and Aarnink, Antonius A.I. and Jong, Michel P. de and Kovalgin, Alexey Y. (2014) Initial growth, refractive index, and crystallinity of thermal and plasma-enhanced atomic layer deposition AlN films. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 33 . 01A111. ISSN 0734-2101

2013

Kovalgin, Alexey Y. and Aarnink, Antonius A.I. (2013) Semiconductor processing apparatus with compact free radical source. Patent.

Rangarajan, B. and Kovalgin, A.Y. and Wörhoff, K. and Schmitz, J. (2013) Low-temperature deposition of high-quality siliconoxynitride films for CMOS-integrated optics. Optics letters, 38 (6). pp. 941-943. ISSN 0146-9592

Rangarajan, Balaji and Kovalgin, Alexey Y. and Schmitz, Jurriaan (2013) Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150 °C. Surface and coatings technology, 230 . pp. 46-50. ISSN 0257-8972

Van Bui, H. and Aarnink, A.A.I. and Jong, M.P. de and Kovalgin, A.Y. (2013) In situ spectroscopic ellipsometry for studying the growth and optical constants of ALD AlN films. NEVAC Blad, 51 (3). pp. 24-31. ISSN 0169-9431

Van Bui, H. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. (2013) Hot-Wire generated atomic hydrogen and its impact on thermal ALD in $TiCl_4/NH_3$ system. ECS journal of solid state science and technology, 2 (4). pp. 149-155. ISSN 2162-8777

Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2013) On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films. Applied surface science, 269 . pp. 45-49. ISSN 0169-4332

Van Bui, Hao and Kovalgin, Alexey and Schmitz, Jurriaan and Wolters, Rob A.M. (2013) Conduction and electric field effect in ultra-thin TiN films. Applied physics letters, 103 (5). 051904. ISSN 0003-6951

2012

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2012) Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE Transactions on Semiconductor Manufacturing, 25 (2). pp. 1-24. ISSN 0894-6507

Groenland, A.W. and Vereshchagina, E. and Kovalgin, A.Y. and Wolters, R.A.M. and Gardeniers, J.G.E. and Schmitz, J. (2012) Micro- and nano-link ultra-low power heaters for sensors. In: European Solid-State Device Research Conference, ESSDERC 2012, Bordeaux, 17 September, 17-09-2012, USA (pp. 169 - 172).

Kazmi, S.N.R. and Kovalgin, A.Y. and Aarnink, A.A.I. and Salm, C. and Schmitz, J. (2012) Low-stress highly-conductive in-situ boron doped Ge$_{0.7}$Si$_{0.3}$ films by LPCVD. ECS journal of solid state science and technology, 1 (5). P222-P226. ISSN 2162-8777

Kovalgin, Alexey Y. and Tiggelman, Natalie and Wolters, Rob A.M. (2012) An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance. IEEE Transactions on Electron Devices, 59 (2). 426-432 . ISSN 0018-9383

Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2012) Nanoscale carrier injectors for high luminescence Si-based LEDs. Solid-state electronics, 74 (Special Issue). pp. 43-48. ISSN 0038-1101

Rangarajan, B. and Kovalgin, A.Y. and Oesterlin, P. and Kloe, R. de and Brunets, I. and Schmitz, J. (2012) Laterally confined large-grained Poly-GeSi films: crystallization and dopant activation using green laser. ECS journal of solid state science and technology, 1 (6). pp. 263-268. ISSN 2162-8777

Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2012) Growth of sub-nanometer thin continuous TiN films by atomic layer deposition. ECS journal of solid state science and technology, 1 (6). pp. 285-290. ISSN 2162-8777

Van Bui, Hao and Wolters, Rob A.M. and Kovalgin, Alexey Y. (2012) TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness. In: Proceedings of the International Conference on Anvanced Materials and Nanotechnology (ICAMN 2012), 13-14 Dec 2012, Hanoi, Vietnam (pp. pp. 7-12).

2011

Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Negative Charge in Plasma Oxidized SiO2 Layers. ECS Transactions, 35 (4). pp. 259-272. ISSN 1938-5862

Brunets, Ihor and Walters, Robert J. and Kovalgin, Alexey Y. and Polman, Albert and Schmitz, Jurriaan (2011) Realization of Silicon-Nanodots-Based CMOS Backend-Compatible Electrical SPP Source. In: 219th ECS Meeting, 1-6 May 2011, Montreal, QC, Canada.

Groenland, A.W. and Kovalgin, A.Y. and Schmitz, J. and Wolters, R.A.M. (2011) Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators. ECS Transactions, 35 (30). pp. 25-34. ISSN 1938-5862

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2011) A Difference in Using Atomic Layer Deposition or Physical Vapour Deposition TiN as Electrode Material in Metal-Insulator-Metal and Metal-Insulator-Silicon Capacitors. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8368-8373. ISSN 1533-4880

Kazmi, S.N.R. and Aarnink, A.A.I. and Kovalgin, A.Y. and Salm, C. and Schmitz, J. (2011) Low Stress In Situ Boron Doped Poly SiGe Layers for MEMS Modular Integration with CMOS. ECS Transactions, 35 (30). pp. 45-52. ISSN 1938-5862

Lu, J. and Liu, W. and Kovalgin, A.Y. and Sun, Y. and Schmitz, J. (2011) Materials Characterization of CIGS solar cells on Top of CMOS chips. In: MRS Spring Meeting - Symposium E – Energy Harvesting, 25-29 April 2011, San Francisco, CA, USA (pp. e06-23).

Lu, Jiwu and Kovalgin, Alexey Y. and Werf, Karine H.M. van der and Schropp, Ruud E.I. and Schmitz, Jurriaan (2011) Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells. IEEE Transactions on Electron Devices, 58 (5). pp. 2014-2021. ISSN 0018-9383

Lu, Jiwu and Liu, Wei and Kovalgin, Alexey Y. and Sun, Yun and Schmitz, Jurriaan (2011) Integration of Solar Cells on Top of CMOS Chips - Part II: CIGS Solar Cells. IEEE Transactions on Electron Devices, 58 (8). pp. 2620-2627. ISSN 0018-9383

Piccolo, G. and Puliyankot, V. and Kovalgin, A.Y. and Hueting, R.J.E. and Heringa, A. and Schmitz, J. (2011) Light emission enhancement by geometrical scaling of carrier injectors in Si-based LEDs. In: 41st European Solid-State Device Research Conference, ESSDERC 2011, 12-16 September 2011, Helsinki, Finland (pp. pp. 175-178).

Puliyankot, V. and Piccolo, G. and Hueting, R.J.E. and Heringa, A. and Kovalgin, A. and Schmitz, J. (2011) Increased light emission by geometrical changes in Si LEDs. In: 8th International Conference on Group IV Photonics, GFP 2011, 14-16 September 2011, London, UK (pp. pp. 287-289).

Rangarajan, Balaji and Brunets, Ihor and Oesterlin, Peter and Kovalgin, Alexey and Schmitz, Jurriaan (2011) Characterization of Green Laser Crystallized GeSi Thin Films. In: 2011 MRS Spring Meeting, 25-29 April 2011, San Francisco, CA, USA (pp. a06-04).

Van Bui, H. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 . pp. 214-220. ISSN 0013-4651

Van Bui, H. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8120-8125. ISSN 1533-4880

2010

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2010) On the leakage problem of MIM capacitors due to improper etching of titanium nitride. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 89-92).

Lu, J. and Liu, W. and Werf, C.H.M. van der and Kovalgin, A.Y. and Sun, Y. and Schropp, R.E.I. and Schmitz, J. (2010) Above-CMOS a-Si and CIGS Solar Cells for Powering Autonomous Microsystems. In: IEEE International Electron Devices Meeting, IEDM 2010, 6-8 December 2010, San Francisco, CA, USA (pp. 31.3.1.-31.3.4).

Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2010) On the effect of nano-injectors on conduction in silicon p-i-n diodes. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 140-142).

Tiggelman, N. and Kovalgin, A.Y. and Brennan, R. and Wolters, R.A.M. (2010) Low specific contact resistance of NiSi and PtSi to Si: impact of interface. Electrochemical and Solid-State Letters, 13 (12). H450-H453. ISSN 1099-0062

2009

Aarnink, A.A.I. and Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen. In: 9th International Conference on Atomic Layer Deposition, 19-22 July 2009, Monterey, CA, USA.

Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Net Negative Charge in low-temperature SiO2 gate dielectric layers. Microelectronic Engineering, 86 (7-9). pp. 1707-1710. ISSN 0167-9317

Brunets, I. and Boogaard, A. and Smits, S.M. and Vries, H. de and Aarnink, A.A.I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2009) Low temperature TFTs with poly-stripes. In: Proceedings of the 5th International Thin Film Transistor Conference ITC'09, 5-6 Mar 2009, Palaiseau, France (pp. pp. 62-65).

Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Boogaard, A. and Schmitz, J. (2009) Low-temperature fabricated TFTs on polysilicon stripes. IEEE Transactions on Electron Devices, 56 (8). pp. 1637-1644. ISSN 0018-9383

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2009, 30 March - 2 April 2009, Oxnard, CA, USA (pp. pp. 191-195).

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 150-152).

Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. (2009) Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling. ECS Transactions, 25 (8). pp. 23-32. ISSN 1938-5862

Kovalgin, A.Y. and Boogaard, A. and Wolters, R.A.M. (2009) Impact of small deviations in EEDF on silane-based plasma chemistry. ECS Transactions, 25 (8). pp. 429-436. ISSN 1938-5862

Lu, Jiwu and Kovalgin, Alexey Y. and Schmitz, Jurriaan (2009) Influence of passivation process on chip performance. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 542-544).

Piccolo, G. and Kovalgin, A.Y. and Schmitz, J. (2009) Effect of carrier injector size on silicon LED performance. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 167-169).

Rangarajan, Balaji and Brunets, Ihor and Holleman, Jisk and Kovalgin, Alexey Y. and Schmitz, Jurriaan (2009) TFTs as photodetectors for optical interconnects. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 26-27 Nov 2009, Veldhoven, The Netherlands (pp. pp. 52-54).

Stavitski, N. and Klootwijk, J.H. and Zeijl, H.W. van and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 146-152. ISSN 0894-6507

Van Bui, Hao and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2009) Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 59-62).

2008

Boogaard, A. and Roesthuis, R. and Brunets, I. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2008) Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 452-456).

Brunets, I. and Groenland, A.W. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. (2008) A study of thermal oxidation and plasma-enhanced oxidation/reduction of ALD TiN layers. In: 18th International Conference on Atomical Layer Deposition, ALD 2008, 29 June - 2 July 2008, Bruges, Belgium (pp. P-54).

Brunets, I. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Poly-Si stripe TFTs by Grain-Boundary controlled crystallization of Amorphous-Si. In: Proceedings of the 38th European Solid-State Device Research Conference, 15-19 September 2008, Edinburgh, Schotland (pp. pp. 87-90).

Brunets, I. and Loon, R.V.A. van and Walters, R.J. and Polman, A. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2008) Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 399-402).

Groenland, A.W. and Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Schmitz, J. (2008) Thermal and plasma-enhanced oxidation of ALD TiN. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 468-471).

Kovalgin, Alexey Y. and Isai, Gratiela and Holleman, Jisk and Schmitz, Jurriaan (2008) Low-Temperature SiO2 Layers Deposited by Combination of ECR Plasma and Supersonic Silane/Helium Jet. Journal of the Electrochemical Society, 155 (2). G21-G28. ISSN 0013-4651

Lu, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Functional layers for CIGS solar cell on-chip fabrication during post-processing. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 487-490).

Piccolo, G. and Hoang, T. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Silicon LEDs with antifuse injection. In: 5th IEEE International Conference on Group IV Photonics, 2008, 17-19 Sept 2008, Sorrento, Italy (pp. pp. 49-51).

Piccolo, G. and Hoang, T. and Holleman, J. and Kovalgin, A.Y. and Schmitz, J. (2008) Antifuse injectors for SOI LEDs. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 573-575).

Stavitski, N. and Dal, M.J.H. van and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range. IEEE electron device letters, 29 (4). pp. 378-381. ISSN 0741-3106

Stavitski, N. and Klootwijk, J.H. and Zeijl, H.W. van and Kovalgin, A.Y. and Wolters, R.A.M. (2008) A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland (pp. pp. 199-204).

Stavitski, Natalie and Dal, Mark J.H. van and Lauwers, Anne and Vrancken, Christa and Kovalgin, Alexey Y. and Wolters, Rob A.M. (2008) Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction. IEEE Transactions on Electron Devices, 55 (5). pp. 1170-1176. ISSN 0018-9383

2007

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2007) Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD. Surface & Coatings Technology, 201 (22-23). pp. 8976-8980. ISSN 0257-8972

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) On the verification of EEDFs in plasmas with silane using optical emission spectroscopy. ECS Transactions, 6 (1). pp. 259-270. ISSN 1938-5862

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD. In: Proceedings of the 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, 29 - 30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 404-407).

Brunets, I. and Aarnink, A.A.I. and Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices. Surface & Coatings Technology, 201 . pp. 9209-9214. ISSN 0257-8972

Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature process steps for realization of non-volatile memory devices. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 504-508).

Groenland, A.W. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2007) Simulation of a Nanolink Hot-Plate Device. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 November 2007, Veldhoven, The Netherlands (pp. pp. 581-583).

Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Holleman, J. and Schmitz, J. (2007) Chemical modeling of a high-density inductively-coupled plasma reactor containing silane. Surface & Coatings Technology, 201 . pp. 8849-8853. ISSN 0257-8972

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2007) A pillar-shaped antifuse-based silicon chemical sensor and actuator. IEEE sensors journal, 7 (1). pp. 18-27. ISSN 1530-437X

Lu, J. and Kovalgin, A.Y. and Schmitz, J. (2007) Modeling of an Integrated Electromagnetic Generator for Energy Scavenging. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 603-607).

Stavitski, N. and Klootwijk, J.H. and Zeijl, H.W. van and Boksteen, B.K. and Kovalgin, A.Y. and Wolters, R.A.M. (2007) Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 551-554).

2006

Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 412-418).

Boogaard, Arjen and Kovalgin, Alexey and Aarnink, Tom and Wolters, Rob and Holleman, Jisk and Brunets, Ihor and Schmitz, Jurriaan (2006) Langmuir-probe Characterization of an Inductively-Coupled Remote Plasma System intended for CVD and ALD. ECS Transactions, 2 (7). pp. 181-191. ISSN 1938-5862

Brunets, I. and Hemert, T. van and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2006) Memory devices with encapsulated Si nano-crystals: Realization and Characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 419-422).

Brunets, Ihor and Holleman, Jisk and Kovalgin, Alexey Y. and Aarnink, Tom and Boogaard, Arjen and Oesterlin, Peter (2006) Green Laser Crystallization of a-Si Films Using Preformed a-Si Lines. ECS Transactions, 3 (8). pp. 185-191. ISSN 1938-5862

Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, A.J.S.M. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-power micro-scale CMOS-compatible silicon sensor on a suspended membrane. In: Microfabricated systems and MEMS VII: Proceedings of the 206th ECS Meeting, 2004, Honolulu, Hawaii (pp. pp. 173-183).

Kovalgin, A.Y. and Holleman, J. and Iordache, G. and Jenneboer, T. and Falke, F. and Zieren, V. and Goossens, M.J. (2006) Low-Power, Antifuse-Based Silicon Chemical Sensor on a Suspended Membrane. Journal of the Electrochemical Society, 153 (9). H181-H188. ISSN 0013-4651

Kovalgin, A.Y. and Zinine, A. and Bankras, R.G. and Wormeester, H. and Poelsema, B. and Schmitz, J. (2006) On the growth of native oxides on hydrogen-terminated silicon surfaces in dark and under illumination with light. In: Proceedings of the Electrochemical Society, 29 okt - 3 nov 2006, Cancun, Mexico (pp. pp. 191-202).

Kovalgin, Alexey and Holleman, Jisk (2006) Low-Temperature LPCVD of Polycrystalline GexSi1-��x Films with High Germanium Content. Journal of the Electrochemical Society, 153 (5). G363-G371. ISSN 0013-4651

Stavitski, N. and Dal, M.J.H. van and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Specific contact resistance measurements of metal-semiconductor junctions. In: Microelectronic Test Structures, 2006 IEEE International Conference on (pp. pp. 13-17).

Stavitski, N. and Dal, M.J.H. van and Klootwijk, J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 436-438).

2005

Aarnink, A.A.I. and Boogaard, A. and Brunets, I. and Isai, I.G. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2005) A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 67-69).

Brunets, I. and Boogaard, A. and Isai, I.G. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Schmitz, J. (2005) Three-dimensional IC's prolong the life of Moore's law. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 76-78).

Hof, A.J. and Hoekstra, E. and Kovalgin, A.Y. and Schaijk, R. van and Baks, W.M. and Schmitz, J. (2005) The Impact of Deuterated CMOS processing on Gate Oxide Reliability. IEEE Transactions on Electron Devices, 52 (9). pp. 2111-2115. ISSN 0018-9383

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. and Schmitz, J. (2005) On the Oxidation Kinetics of Silicon in Ultradiluted H2O and D2O Ambient. Journal of the Electrochemical Society, 152 (9). F133-F137. ISSN 0013-4651

Kovalgin, A.Y. and Hof, A.J. and Schmitz, J. (2005) An approach to modeling of silicon oxidation in a wet ultra-diluted ambient. Microelectronic Engineering, 80 . pp. 432-435. ISSN 0167-9317

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2005) A Versatile Micro-Scale Silicon Sensor/Actuator with Low Power Consumption. In: IEEE Sensors, 2005, 30 Oct .- 3 Nov. 2005 , Irvine, CA, USA (pp. pp. 1225-1228).

Stavitski, N. and Dal, M.J.H. van and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2005) Specific contact resistance measurements of metal-semiconductor junctions. In: SAFE 2005, 8th Annual Workshop on Circuits, Systems and Signal Processing, 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 52-55).

2004

Hof, A.J. and Kovalgin, A.Y. and Schmitz, J. and Schaijk, R. van and Baks, W.M. (2004) Gate Oxide Reliability and Deuterated CMOS Processing. In: IEEE International Integrated Reliability Workshop, 18-21 October 2004, Lake Tahoe, USA (pp. pp. 7-10).

Kovalgin, A.Y. and Holleman, J. and Iordache, G. (2004) A micro-scale hot-surface device based on non-radiative carrier recombination. In: 34th European Solid-State Device Research Conference, ESSDERC, 21-23 September 2004, Leuven, Belgium (pp. pp. 353-356).

2003

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. and Schmitz, J. (2003) On oxidation kinetics and electrical quality of gate oxide grown in H2O or D2O ambient. In: 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands (pp. pp. 743-747).

Iordache, G. and Holleman, J. and Kovalgin, A.Y. and Jenneboer, A.J.S.M. (2003) Antifuse nano-hot-spot device on a suspended membrane for gas sensing applications. In: Proceedings of the 6th annual workshop on Semiconductor Advances for Future Electronics and Sensors SAFE 2003, 25 - 26 November 2003, Veldhoven, The Netherlands (pp. pp. 693-696).

2002

Hof, A.J. and Kovalgin, A.Y. and Woerlee, P.H. (2002) Comparison of H2O and D2O oxidation kinetics of <100> silicon. In: 5th Annual Workshop on Semiconductors Advances for Future Electronics, SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands (pp. pp. 35-38).

Kim, G.M. and Kovalgin, A.Y. and Holleman, J. and Brugger, J. (2002) Replication molds having nanometer-scale shape control fabricated by means of oxidation and etching. Journal of Nanoscience and Nanotechnology, 2 (1). pp. 55-59. ISSN 1533-4880

Kovalgin, A.Y. and Holleman, J. and Berg, A. van den (2002) Combined light/heat/gas sensors with decoupled electrical and thermal resistances. In: SeSens 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 635-648).

Kovalgin, A.Y. and Holleman, J. and Berg, A. van den (2002) A novel approach to low-power hot-surface devices with decoupled electrical and thermal resistances. In: Eurosensors XVI, European Conference on Solid-State Transducers, September 15-18, 2002, Prague, Czech Republic (pp. pp. 88-91).

2001

Kovalgin, A.Y. and Holleman, J. and Berg, A. van den and Wallinga, H. (2001) Thin-film Antifuses for Pellistor Type Gas Sensors. In: Semiconductor Sensor and Actuator Technology, SeSens, November 30, 2001, Veldhoven, The Netherlands (pp. pp. 809-812).

Kovalgin, A.Y. and Holleman, J. (2001) A study of morphology and texture of LPCVD germanium-silicon films. Journal de physique, IV . pp. 47-54. ISSN 1155-4339

Kovalgin, Alexey and Holleman, Jisk and Salm, Cora and Woerlee, Pierre (2001) Low-Pressure CVD of Germanium-Silicon films using Silane and Germane sources. In: Thin Film Transistors Technologies V, 23-25 Oct 2000, Phoenix, Arizona, USA (pp. pp. 269-275).

2000

Isai, G.I. and Kovalgin, A.Y. and Holleman, J. and Woerlee, P.H. and Wallinga, H. and Cobianu, C. (2000) Electrical Characterisation of Gate Dielectrics Deposited with Multipolar Electron Cyclotron Resonance Plasma Source. In: 30th European Solid State Device Research Conference, 11-13 September 2000, Cork, Ireland (pp. pp. 424-427).

Kovalgin, A.Y. and Akil, N.A. and Le Minh, P. and Holleman, J. and Berg, A. van den and Houtsma, V.E. and Wallinga, H. (2000) Nano-scale hotspots: a route to fast, real time and reliable gas sensing. In: SeSens workshop on Semiconductor Sensor and Actuator Technology, Nov. 30 - Dec. 1, 2000, Veldhoven, The Netherlands (pp. pp. 651-654).

This list was generated on Fri Dec 19 05:33:00 2014 CET.