Author Publications

2012

Tjepkema, D. and Dijk van, J. and Soemers, H.M.J.R. (2012) A mode shaping modal controller for six DOFs active vibration isolation. In: Proceedings of the International Conference and Exhibition on New Actuators and Drive Systems, Bremen, Germany.

Tjepkema, D. and Dijk van, J. and Soemers, H.M.J.R. (2012) Sensor fusion for active vibration isolation in precision equipment. Journal of sound and vibration, 331 (4). 735 - 749. ISSN 0022-460X

2011

Krijnen, B. and Hogervorst, R.P. and Dijk van, J.W. and Engelen, J.B.C. and Woldering, L.A. and Brouwer, D.M. and Abelmann, L. and Soemers, H.M.J.R. (2011) A single-mask thermal displacement sensor in MEMS. Journal of Micromechanics and Microengineering, 21 (7). 074007-074019. ISSN 0960-1317

Krijnen, Bram and Hogervorst, Richard and Dijkstra, Jan Willem and Engelen, Johan and Woldering, Léon and Brouwer, Dannis and Abelmann, Leon and Soemers, Herman (2011) A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation]. Mikroniek, 51 (4). pp. 5-11. ISSN 0026-3699

2010

Brouwer, D.M. and Otten, A. and Engelen, J.B.C. and Krijnen, B. and Soemers, H.M.J.R. (2010) Long-range elastic guidance mechanisms for electrostatic comb-drive actuators. In: Tenth International Conference of the European Society for Precision Engineering & Nanotechnology, May 31 - June 4, 2010, Delft, the Netherlands.

Brouwer, D.M. and Jong de, B.R. and Soemers, H.M.J.R. (2010) Design and modeling of a six DOFs MEMS-based precision manipulator. Precision Engineering, 34 (2). pp. 307-319. ISSN 0141-6359

Jong de, Boudewijn R. and Brouwer, Dannis M. and Boer de, Meint J. and Jansen, Henri V. and Soemers, Herman M.J.R. and Krijnen, Gijs J.M. (2010) Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator. Journal of Microelectromechanical Systems, 19 (5). pp. 1116-1130. ISSN 1057-7157

2009

Brouwer, D.M. and Jong de, B.R. and Boer de, M.J. and Jansen, H.V. and Dijk van, J. and Krijnen, G.J.M. and Soemers, H.M.J.R. (2009) MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators. Journal of Micromechanics and Microengineering, 19 (6). 065027. ISSN 0960-1317

2006

Brouwer, D.M. and Jong de, B.R. and Soemers, H.M.J.R. and Dijk van, J. (2006) Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application. Journal of Micromechanics and Microengineering, 16 (6). S7-S12. ISSN 0960-1317

Brouwer, Dannis M. and Jong de, B.R. and Boer de, M.J. and Soemers, H.M.J.R. (2006) Rotational precision mems-based clamping mechanism for stable fixation of elastic mechanisms. In: Annual Meeting of the American Society of Precision Engineering, ASPE, October 15-20, 2006, Monterey CA, USA.

2005

Brouwer, D.M. and Jong de, B.R. and Soemers, H.M.J.R. and Dijk van, J. (2005) Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application. In: 16th MicroMechanics Europe Workshop, MME, 4–6 September 2005, Göteborg, Sweden.

2002

Soemers, H.M.J.R. (2002) De ontwikkeling in het mechatronisch ontwerpen. [Lecture]