Author Publications

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Jump to: 2006 | 2005 | 2004 | 2003
Number of items: 10.

2006

Fernandez, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of Micromechanics and Microengineering, 16 (4). pp. 862-868. ISSN 0960-1317

Fernandez, L.J. and Wiegerink, R.J. and Flokstra, J. and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of Micromechanics and Microengineering, 16 . S1099-S1107. ISSN 0960-1317

2005

Fernandez, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of RF devices. Electronics Letters, 41 (3). pp. 124-125. ISSN 0013-5194

Fernandez, Luis and Sesé, J. and Wiegerink, Remco and Flokstra, Jaap and Jansen, Henri and Elwenspoek, Miko (2005) Radio frequency power sensor based on MEMS technology with ultra low losses. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 191-194).

Fernandez, Luis J. and Arz, Uwe and Schubert, Dirk and Berenschot, E. and Wiegerink, Remco and Flokstra, J. (2005) A CMOS compatible Process for Improved RF Performance on Highly Doped Substrates. In: 9th IEEE Workshop on Signal Propagation on Interconnects, 2005, 10-13 May 2005, Garmisch-Partenkirchen, Germany (pp. pp. 167-170).

Fernandez, Luis Jose (2005) A capacitive RF power sensor based on MEMS technology. thesis.

2004

Fernandez, Luis J. and Sesé, Javier and Jansen, Henri and Wiegerink, Remco and Flokstra, Jaap (2004) Optimization of a capacitive MEMS power sensor for radio frequency applications. In: MicroMechanics Europe Workshop, MME, September 5 - 7, 2004, Leuven, Belgium (pp. pp. 257-260).

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements, 2004, 27 June - 2 July 2004, London, UK (pp. pp. 117-118).

2003

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Jansen, Henri and Wiegerink, Remco and Flokstra, Jaap (2003) Novel rf power sensor based on capacitive MEMS technology. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 41-44).

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2003) Radio frequency power sensor based on MEMS technology. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada (pp. pp. 549-552).

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