Author Publications

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Jump to: 2011 | 2010 | 2009
Number of items: 7.

2011

Chen, Juequan and Louis, Eric and Wormeester, Herbert and Harmsen, Rob and Kruijs, Robbert van de and Lee, Chris J. and Schaik, Willem van and Bijkerk, Fred (2011) Carbon-induced extreme ultraviolet reflectance loss characterized using visible-light ellipsometry. Measurement Science and Technology, 22 (10). p. 105705. ISSN 0957-0233

2010

Tsarfati, T. and Kruijs, R.W.E. van de and Zoethout, E. and Bijkerk, F. (2010) Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics. Thin Solid Films, 518 (24). pp. 7249-7252. ISSN 0040-6090

2009

Tsarfati, T. and Kruijs, R.W.E. van de and Zoethout, E. and Louis, E. and Bijkerk, F. (2009) Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography. Thin Solid Films, 518 (5). pp. 1365-1368. ISSN 0040-6090

Tsarfati, T. and Zoethout, E. and Kruijs, R.W.E. van de and Bijkerk, F. (2009) Atomic O and H exposure of C-covered and oxidized d-metal surfaces. Surface Science, 603 (16). pp. 2594-2599. ISSN 0039-6028

Tsarfati, Tim and Zoethout, Erwin and Kruijs, Robbert van de and Bijkerk, Fred (2009) In-depth agglomeration of d-metals at Si-on-Mo interfaces. Journal of Applied Physics, 105 (06). 064314. ISSN 0021-8979

Tsarfati, Tim and Zoethout, Erwin and Kruijs, Robbert van de and Bijkerk, Fred (2009) Growth and sacrificial oxidation of transition metal nanolayers. Surface Science Letters, 603 (7). pp. 1041-1045. ISSN 0167-2584

Tsarfati, Tim and Zoethout, Erwin and Louis, Eric and Kruijs, Robbert van de and Yakshin, Andrey and Müllender, Stephan and Bijkerk, Fred (2009) Improved contrast and reflectivity of multilayer reflective optics for wavelengths beyond the extreme UV. In: Alternative Lithographic Technologies. Proceedings of SPIE, 7271 . SPIE, 72713V. ISBN 9780819475244

This list was generated on Tue Sep 23 05:25:44 2014 CEST.