Author Publications

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Number of items: 62.

2017

Barreaux, J.L.P. and Kozhevnikov, I.V. and Bayraktar, M. and Kruijs, R.W.E. van de and Bastiaens, H.M.J. and Bijkerk, F. and Boller, K-J. (2017) Narrowband and tunable anomalous transmission filters for special monitoring in the extreme ultraviolet wavelength region. Optics express, 25 (3). 1993 - 2008. ISSN 1094-4087

Coloma Ribera, R. and Kruijs, R.W.E. van de and Sturm, J.M. and Yakshin, A. and Bijkerk, F. (2017) Intermixing and thermal oxidation of ZrO2 thin films grown on a-Si, SiN, and SiO2 by metallic and oxidic mode magnetron sputtering. Journal of applied physics, 121 . ISSN 0021-8979

Huang, Q. and Medvedev, V.V. and Kruijs, R.W.E. van de and Yakshin, A. and Louis, E. and Bijkerk, F. (2017) Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics. Applied physics reviews, 4 (011104). ISSN 1931-9401

Huber, S.P. and Gullikson, E. and Meyer-Ilse, J. and Frye, C.D. and Edgar, J.H. and Kruijs, R.W.E. van de and Bijkerk, F. and Prendergast, D. (2017) Detection of defect populations in superconductor boron subphosphide B12P2 through X-ray absorption spectroscopy. Journal of materials chemistry. A, 5 . 5737 - 5749. ISSN 2050-7488

Huber, S.P. and Medvedev, V.V. and Gullikson, E. and Padavala, B. and Edgar, J.H. and Kruijs, R.W.E. van de and Bijkerk, F. and Prendergast, D. (2017) Determining crystal phase purity in c-BP through X-ray absorption spectroscopy. Physical chemistry chemical physics (PCCP), 19 (12). 8174 - 8187. ISSN 1463-9076

2016

Coloma Ribera, R. and Kruijs, R.W.E. van de and Sturm, J.M. and Yakshin, A.E. and Bijkerk, F. (2016) In vacuo growth studies of Ru thin films on Si, SiN, and SiO2 by high-sensitivity low energy ion scattering. Journal of applied physics, 120 (6). 065303 -. ISSN 0021-8979

Huber, S.P. and Gullikson, E. and Frye, C.D. and Edgar, J.H. and Kruijs, R.W.E. van de and Bijkerk, F. and Prendergast, D. (2016) Self-healing in B12P2 through Mediated Defect Recombination. Chemistry of materials, 28 (22). 8415 - 8428. ISSN 0897-4756

Huber, S.P. and Gullikson, E. and Kruijs, R.W.E. van de and Bijkerk, F. and Prendergast, D. (2016) Oxygen-stabilized triangular defects in hexagonal boron nitride. Physical review B: Condensed matter and materials physics, 92 . 1 - 7. ISSN 1098-0121

Huber, S.P. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Boller, K-J. and Bijkerk, F. (2016) Subwavelength single layer absorption resonance antireflection coatings. Optics express, 22 (1). 490 - 497. ISSN 1094-4087

Huber, S.P. and Medvedev, V.V. and Meyer-Ilse, J. and Gullikson, E. and Padavala, B. and Edgar, J.H. and Sturm, J.M. and Kruijs, R.W.E. van de and Prendergast, D. and Bijkerk, F. (2016) Exploiting the P L2,3 absorption edge for optics: spectroscopic and structural characterization of cubic boron phosphide thin films. Optical materials express, 6 . 3946 - 3959. ISSN 2159-3930

Kuznetsov, D. and Yakshin, A. and Sturm, J.M. and Kruijs, R.W.E. van de and Bijkerk, F. (2016) Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation. AIP advances, 6 . ISSN 2158-3226

Pachecka, M. and Sturm, J.M. and Kruijs, R.W.E. van de and Lee, C.J. and Bijkerk, F. (2016) Electronegativity-dependent tin etching from thin films. AIP advances, 6 (7). ISSN 2158-3226

Senf, F. and Bijkerk, F. and Eggenstein, F. and Gwalt, G. and Huang, Q. and Kruijs, R.W.E. van de and Kutz, O. and Lemke, S. and Louis, E. and Mertin, M. and Packe, I. and Rudolph, I. and Schafers, F. and Siewert, F. and Sokolov, A. and Sturm, J.M. and Waberski, C. and Wang, Z. and Wolf, J. and Zeschke, T. and Erko, A. (2016) Highly efficient blazed grating with multilayer coating for tender X-ray energies. Optics express, 24 (12). 13220 - 13230. ISSN 1094-4087

Zameshin, Andrey and Makhotkin, Igor A. and Yakunin, Sergey N. and Kruijs, Robbert W.E. van de and Yakshin, Andrey E. and Bijkerk, F. (2016) Reconstruction of interfaces of periodic multilayers from X-ray reflectivity using a free-form approach. Journal of applied crystallography, 49 (4). 1300 - 1307. ISSN 0021-8898

2015

Banerjee, Sourish and Aarnink, Antonius A.I. and Kruijs, Robbert van de and Kovalgin, Alexey Y. and Schmitz, Jurriaan (2015) PEALD AlN: controlling growth and film crystallinity. Physica Status Solidi C: Conferences and critical reviews, 12 (7). pp. 1036-1042. ISSN 1610-1634

Barreaux, J.L.P. and Kozhevnikov, I.V. and Bastiaens, H.M.J. and Kruijs, R.W.E. van de and Bijkerk, F. and Boller, K-J. (2015) Multilayer Filter Using the Borrmann Effect for EUV Source Monitoring. In: CLEO/Europe-EQEC 2015, 21-06-2015 - 25-06-2015, Munich, Germany (pp. CH_P_35 -).

Coloma Ribera, R. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2015) Determination of oxygen diffusion kinetics during thin film ruthenium oxidation. Journal of applied physics, 118 . 055303 -. ISSN 0021-8979

Kuznetsov, D. and Yakshin, A. and Sturm, J.M. and Kruijs, R.W.E. van de and Louis, E. and Bijkerk, F. (2015) High-reflectance La/B-based multilayer mirror for 6.x  nm wavelength. Optics letters, 40 (16). 3378 - 3781. ISSN 0146-9592

Makhotkin, I.A. and Zameshin, A. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2015) Characterization of nanoscale multilayer structures upon thermal annealing. Proceedings of SPIE - the international society for optical engineering, 9510 . ISSN 0277-786X

Medvedev, V.V. and Yakshin, A.E. and Kruijs, R.W.E. van de and Bijkerk, F. (2015) Phosphorus-based compounds for EUV multilayer optics materials. Optical materials express, 5 (6). 1450 - 1459. ISSN 2159-3930

Medvedev, V.V. and Yang, J. and Schmidt, A.J. and Yakshin, A. and Kruijs, R.W.E. van de and Zoethout, E. and Bijkerk, F. (2015) Anisotropy of heat conduction in Mo/Si multilayers. Journal of applied physics, 118 (8). ISSN 0021-8979

Zwol, P.J. van and Vles, D.F. and Voorthuijzen, W.P. and Péter, M. and Vermeulen, H. and Zande, W.J. and Sturm, J.M. and Kruijs, R.W.E. van de and Bijkerk, F. (2015) Emissivity of freestanding membranes with thin metal coatings. Journal of applied physics, 118 . 213107 -. ISSN 0021-8979

2014

Coloma Ribera, R. and Kruijs, R.W.E. van de and Kokke, S. and Zoethout, E. and Yakshin, A.E. and Bijkerk, F. (2014) Surface and sub-surface thermal oxidation of thin ruthenium films. Applied physics letters, 105 (13). 131601 -. ISSN 0003-6951

Coloma Ribera, R. and Kruijs, R.W.E. van de and Sturm, J.M. and Yakshin, A.E. and Bijkerk, F. (2014) Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering. In: LEIS Workshop 2014, 22-05-2014 - 22-05-2014, Enschede.

Huang, Q. and Paardekooper, D.M. and Zoethout, E. and Medvedev, V.V. and Kruijs, R.W.E. van de and Bosgra, J. and Louis, E. and Bijkerk, F. (2014) UV spectral filtering by surface structures multilayer mirrors. Optics letters, 39 (5). 1185 - 1188. ISSN 0146-9592

Huber, S.P. and Kruijs, R.W.E. van de and Yakshin, A.E. and Zoethout, E. and Boller, Klaus-J. and Bijkerk, F. (2014) Subwavelength single layer absorption resonance antireflection coatings. Optics express, 22 (1). 490 - 497. ISSN 1094-4087

Kruijs, R.W.E. van de and Nyabero, S.L. and Yakshin, A. and Bijkerk, F. (2014) Optical element comprising a multilayer coating, and optical arrangement comprising same. Patent.

Kuznetsov, Alexey Sergeevich and Gleeson, M.A. and Kruijs, R.W.E. van de and Bijkerk, F. (2014) Method for producing a reflective optical element for EUV-lithography. Patent.

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Makhotkin, I.A. and Bosgra, J. and Bijkerk, F. (2014) Diffusion-induced structural changes in La/B-based multilayers for 6.7-nm radiation. Journal of micro/nanolithography, MEMS, and MOEMS, 13 (1). 013014 - 013014-5. ISSN 1932-5150

Yakunin, S.N. and Makhotkin, I.A. and Chuev, M.A. and Pashaev, E.M. and Zoethout, E. and Louis, E. and Kruijs, R.W.E. van de and Seregin, S.Y. and Subbotin, I.A. and Novikov, D. and Bijkerk, F. and Kovalchuk, M.V. (2014) Model independent X-ray standing wave analysis of periodic multilayer structures. Journal of applied physics, 115 (13). ISSN 0021-8979

Yakunin, S.N. and Makhotkin, I.A. and Nikolaev, K.V. and Kruijs, R.W.E. van de and Chuev, M.A. and Bijkerk, F. (2014) Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures. Optics express, 22 (17). 20076 - 20086. ISSN 1094-4087

2013

Huang, Q. and Boogaard, A.J.R. van den and Kruijs, R.W.E. van de and Zoethout, E. and Medvedev, V.V. and Louis, E. and Bijkerk, F. (2013) Suppression of long wavelength reflection from extreme-UV multilayer optics. In: SPIE Advances in X-Ray/EUV Optics and Components VIII, 88480N, 25-08-2013, San Diego, California (pp. 5 -).

Huber, S.P. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Bijkerk, F. (2013) Engineering optical constants for broadband single layer antireflection coatings. In: SPIE Advances in X-Ray/EUV Optics and Components VIII, 27-09-2013, San Diego (pp. 884814-1 - 884814-4).

Makhotkin, I.A. and Kruijs, R.W.E. van de and Zoethout, E. and Louis, E. and Bijkerk, F. (2013) Optimization of LaN/B multilayer mirrors for 6.x nm wavelength. In: Advances in X-Ray/EUV Optics and Components VIII, 25-08-2013 (pp. 1 - 5).

Medvedev, V.V. and Kruijs, R.W.E. van de and Yakshin, A. and Novikova, N.N. and Krivtsun, V.M. and Yakunin, A.M. and Bijkerk, F. (2013) Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography. Applied physics letters, 103 (22). 221114-1 - 21114-4. ISSN 0003-6951

Medvedev, V.V. and Yakshin, A. and Kruijs, R.W.E. van de and Krivtsun, V.M. and Louis, E. and Bijkerk, F. (2013) EUV optical elements with enhanced spectral selectivity for IR radiation. In: 2013 International Workshop in EUV and Soft X-ray Sources, Dublin, Ireland.

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2013) Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes. Applied physics letters, 103 (9). ISSN 0003-6951

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Blanckenhage, G. von and Bosgra, J. and Loch, R.A. and Bijkerk, F. (2013) Interlayer growth in Mo/B4C multilayered structures upon thermal annealing. Journal of applied physics, 113 (14). 144310-1 - 144310-6. ISSN 0021-8979

Sobierajski, R. and Loch, R.A. and Kruijs, R.W.E. van de and Louis, E. and Blanckenhagen, G. von and Gullikson, E.M. and Siewert, F. and Wawro, A. and Bijkerk, F. (2013) Mo/Si multilayer-coated amplitude division beam splitters for XUV radiation sources. Journal of synchrotron radiation, 20 (2). 249 - 257. ISSN 0909-0495

2012

Bosgra, J. and Verhoeven, J. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2012) Non-constant diffusion characteristics of nanoscopic Mo-Si interlayer growth. Thin solid films, 522 . 228 - 232. ISSN 0040-6090

Bosgra, J. and Zoethout, E. and Eerden, A.M.J. and Verhoeven, J. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2012) Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors. Applied optics, 51 (36). 8541 - 8548. ISSN 0003-6935

Bruijn, S. and Kruijs, R.W.E. van de and Yakshin, A. and Bijkerk, F. (2012) Ion assisted growth of B4C diffusion barrier layers in Mo/Si multilayered structures. Journal of applied physics, 111 (6). 064303-1 - 064303-5. ISSN 0021-8979

Kruijs, R.W.E. van de (2012) “ABC Physics” or (solid state) physics in the nanometer range. In: Lecture. Van de Kruijs, R.W.E., University Twente.

Kruijs, R.W.E. van de and Bosgra, J. and Bruijn, S. and Yakshin, A. and Bijkerk, F. (2012) Solid state diffusion in multilayered structures on a picometer lengthscale. In: 11th Biennial Conference on High Resolution X-Ray Diffraction and Imaging, XTOP 2012, 15-20 September 2912, St. Petersburg, Russia (pp. p. 376).

Makhotkin, I.A. and Yakunin, S.N. and Chuev, M.A. and Zoethout, E. and Louis, E. and Kruijs, R.W.E. van de and Bijkerk, F. and Kovalchuk, M.V. (2012) The X-ray Standing Waves analysis of short period La/B- based multilayers. In: 11th Biennial Conference on High Resolution X-Ray Diffraction and Imaging, XTOP 2012, 15-20 September 2912, St. Petersburg, Russia (pp. p. 115).

Medvedev, V.V. and Yakshin, A. and Kruijs, R.W.E. van de and Krivtsun, V.M. and Yakunin, A.M. and Koshelev, K.N. and Bijkerk, F. (2012) Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors. Optics letters, 37 (7). 1169 - 1171. ISSN 0146-9592

Medvedev, V.V. and Yakshin, A. and Kruijs, R.W.E. van de and Krivtsun, V.M. and Yakunin, A.M. and Koshelev, K.N. and Bijkerk, F. (2012) Infrared antifreflective filtering for extreme ultraviolet multilayer Bragg reflectors. Optics letters, 37 (7). 1169 - 1171. ISSN 0146-9592

Nyabero, S.L. and Kruijs, R.W.E. van de and Yakshin, A. and Zoethout, E. and Bijkerk, F. (2012) Thermally induced interface chemistry in Mo/B 4C/Si/B 4C multilayered films. Journal of applied physics, 112 (5). 054317-1 - 054317-5. ISSN 0021-8979

Yakunin, S.N. and Makhotkin, I. and Chuyev, M.A. and Seregin, A.Y. and Pashayev, E.M. and Louis, E. and Kruijs, R.W.E. van de and Bijkerk, F. and Kovalchuk, M.V. (2012) Simultaneous analysis of Grazing Incidence X-Ray reflectivity and X-ray standing waves from periodic multilayer systems. In: 11th Biennial Conference on High Resolution X-Ray Diffraction and Imaging, XTOP 2012, St. Petersburg, Russia, 15-09-2012 - 20-09-2012, St. Petersburg, Russia (pp. 115 - 115).

2011

Chen, Juequan and Louis, Eric and Wormeester, Herbert and Harmsen, Rob and Kruijs, Robbert van de and Lee, Chris J. and Schaik, Willem van and Bijkerk, Fred (2011) Carbon-induced extreme ultraviolet reflectance loss characterized using visible-light ellipsometry. Measurement Science and Technology, 22 (10). p. 105705. ISSN 0957-0233

2010

Bruijn, S. and Kruijs, R.W.E. van de and Yakshin, A.E. and Zoethout, E. and Bijkerk, F. (2010) Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures. Surface and Coatings Technology, 205 (7). pp. 2469-2473. ISSN 0257-8972

Kuznetsov, A.S. and Kruijs, R.W.E. van de and Gleeson, M.A. and Schmid, K. and Bijkerk, F. (2010) Hydrogen interaction with EUVL-relevant optical materials. Journal of Surface Investigation. X-ay, Synchrotron and Neutron Techniques, 4 (4). pp. 563-566. ISSN 1027-4510

Rooij-Lohmann, V.I.T.A. de and Yakshin, A.E. and Kruijs, R.W.E. van de and Zoethout, E. and Kleyn, A.W. and Keim, E.G. and Gorgoi, M. and Schäfers, F. and Brongersma, H.H. and Bijkerk, F. (2010) Enhanced diffusion upon amorphous-to-nanocrystalline phase transition in Mo/B4C/Si layered systems. Journal of Applied Physics, 108 (1). 014314. ISSN 0021-8979

Tsarfati, T. and Kruijs, R.W.E. van de and Zoethout, E. and Bijkerk, F. (2010) Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics. Thin Solid Films, 518 (24). pp. 7249-7252. ISSN 0040-6090

2009

Gou, F. and Gleeson, M.A. and Kleyn, A.W. and Kruijs, R.W.E. van de and Yakshin, A.E. and Bijkerk, F. (2009) Growth of silicon nitride films by bombarding amorphous silicon with N+ ions: MD simulation. Nuclear Instruments and Methods in Physics Research. Section B: Beam interactions with materials and atoms, 267 (18). pp. 3245-3248. ISSN 0168-583X

Tsarfati, T. and Kruijs, R.W.E. van de and Zoethout, E. and Louis, E. and Bijkerk, F. (2009) Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography. Thin Solid Films, 518 (5). pp. 1365-1368. ISSN 0040-6090

Tsarfati, T. and Zoethout, E. and Kruijs, R.W.E. van de and Bijkerk, F. (2009) Atomic O and H exposure of C-covered and oxidized d-metal surfaces. Surface Science, 603 (16). pp. 2594-2599. ISSN 0039-6028

Tsarfati, Tim and Zoethout, Erwin and Kruijs, Robbert van de and Bijkerk, F. (2009) Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces. Journal of applied physics, 105 (104305). p. 104305. ISSN 0021-8979

Tsarfati, Tim and Zoethout, Erwin and Kruijs, Robbert van de and Bijkerk, Fred (2009) In-depth agglomeration of d-metals at Si-on-Mo interfaces. Journal of Applied Physics, 105 (06). 064314. ISSN 0021-8979

Tsarfati, Tim and Zoethout, Erwin and Kruijs, Robbert van de and Bijkerk, Fred (2009) Growth and sacrificial oxidation of transition metal nanolayers. Surface Science Letters, 603 (7). pp. 1041-1045. ISSN 0167-2584

Tsarfati, Tim and Zoethout, Erwin and Louis, Eric and Kruijs, Robbert van de and Yakshin, Andrey and Müllender, Stephan and Bijkerk, Fred (2009) Improved contrast and reflectivity of multilayer reflective optics for wavelengths beyond the extreme UV. In: Frank M. Schellenberg & Bruno M. La Fontaine (Eds.), Alternative Lithographic Technologies. Proceedings of SPIE, 7271 . SPIE, 72713V. ISBN 9780819475244

Wu, Shiou-Min and Kruijs, Robbert van de and Zoethout, Erwin and Bijkerk, Fred (2009) Sputtering yields of Ru, Mo, and Si under low energy Ar+ bombardment. Journal of applied physics, 106 (054902). 054902. ISSN 0021-8979

This list was generated on Sun Apr 23 05:45:26 2017 CEST.