Author Publications

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Number of items: 24.

2012

Makhotkin, I.A. and Zoethout, E. and Louis, E. and Yakunin, A.M. and Muellender, S. and Bijkerk, F. (2012) Spectral properties of La/B - Based multilayer mirrors near the boron K absorption edge. Optics express, 20 (11). 11778 - 11786. ISSN 1094-4087

Makhotkin, I.A. and Zoethout, E. and Louis, E. and Yakunin, A.M. and Muellender, S. and Bijkerk, F. (2012) Wavelength selection for multilayer coatings for the lithography generation beyond EUVL. In: Extreme Ultraviolet (EUV) Lithography III (San Jose, California, USA), Amsterdam.

Makhotkin, I.A. and Zoethout, E. and Louis, E. and Yakunin, A.M. and Muellender, S. and Bijkerk, F. (2012) Wavelength selection for multilayer coatings for the lithography generation beyond EUVL. Journal of micro/nanolithography, MEMS, and MOEMS, 11 (4). 040501-1 - 040501-3. ISSN 1932-5150

2010

Boogaard, A.J.R. van den and Louis, E. and Zoethout, E. and Mullender, S. and Bijkerk, F. (2010) Surface morphology of Kr+-polished amorphous Si layers. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 28 (4). p. 552. ISSN 0734-2101

Bruijn, S. and Kruijs, R.W.E. van de and Yakshin, A.E. and Zoethout, E. and Bijkerk, F. (2010) Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures. Surface and Coatings Technology, 205 (7). pp. 2469-2473. ISSN 0257-8972

Louis, E. and Hattum, E.D. van and Westen, S. Alonso van der and Salle, P. and Grootkarzijn, K.T. and Zoethout, E. and Bijkerk, F. and Blanckenhagen, G. von and Mullender, S. (2010) High reflectance multilayers for EUVL HVM-projection optics. In: Extreme Ultraviolet (EUV) Lithography. Proceedings of SPIE, 7636 . SPIE--The International Society for Optical Engineering, 76362T. ISBN 9780819480507

Rooij-Lohmann, V.I.T.A. de and Yakshin, A.E. and Kruijs, R.W.E. van de and Zoethout, E. and Kleyn, A.W. and Keim, E.G. and Gorgoi, M. and Schäfers, F. and Brongersma, H.H. and Bijkerk, F. (2010) Enhanced diffusion upon amorphous-to-nanocrystalline phase transition in Mo/B4C/Si layered systems. Journal of Applied Physics, 108 (1). 014314. ISSN 0021-8979

Tsarfati, T. and Kruijs, R.W.E. van de and Zoethout, E. and Bijkerk, F. (2010) Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics. Thin Solid Films, 518 (24). pp. 7249-7252. ISSN 0040-6090

Yakshin, A.E. and Kozhevnikov, I.V. and Zoethout, E. and Louis, E. and Bijkerk, F. (2010) Properties of broadband depth-graded multilayer mirrors for EUV optical systems. Optics Express, 18 (7). pp. 6957-6971. ISSN 1094-4087

2009

Tsarfati, T. and Kruijs, R.W.E. van de and Zoethout, E. and Louis, E. and Bijkerk, F. (2009) Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography. Thin Solid Films, 518 (5). pp. 1365-1368. ISSN 0040-6090

Tsarfati, T. and Zoethout, E. and Kruijs, R.W.E. van de and Bijkerk, F. (2009) Atomic O and H exposure of C-covered and oxidized d-metal surfaces. Surface Science, 603 (16). pp. 2594-2599. ISSN 0039-6028

Tsarfati, Tim and Zoethout, Erwin and Kruijs, Robbert van de and Bijkerk, Fred (2009) In-depth agglomeration of d-metals at Si-on-Mo interfaces. Journal of Applied Physics, 105 (06). 064314. ISSN 0021-8979

Tsarfati, Tim and Zoethout, Erwin and Kruijs, Robbert van de and Bijkerk, Fred (2009) Growth and sacrificial oxidation of transition metal nanolayers. Surface Science Letters, 603 (7). pp. 1041-1045. ISSN 0167-2584

Tsarfati, Tim and Zoethout, Erwin and Louis, Eric and Kruijs, Robbert van de and Yakshin, Andrey and Müllender, Stephan and Bijkerk, Fred (2009) Improved contrast and reflectivity of multilayer reflective optics for wavelengths beyond the extreme UV. In: Alternative Lithographic Technologies. Proceedings of SPIE, 7271 . SPIE, 72713V. ISBN 9780819475244

Wu, Shiou-Min and Kruijs, Robbert van de and Zoethout, Erwin and Bijkerk, Fred (2009) Sputtering yields of Ru, Mo, and Si under low energy Ar+ bombardment. Journal of applied physics, 106 (054902). 054902. ISSN 0021-8979

2004

Esser, Marcus and Zoethout, Erwin and Zandvliet, Harold J.W. and Wormeester, Herbert and Poelsema, Bene (2004) Kinetic growth manipulation of Si(0 0 1) homoepitaxy. Surface Science, 552 (1-3). pp. 35-45. ISSN 0039-6028

2002

Zoethout, E. and Hoogenhof, P.W. van den and Zandvliet, H.J.W. and Poelsema, Bene (2002) Antiphase boundary network: A route to extract the island nucleation density. Journal of Applied Physics, 92 (10). pp. 5785-5787. ISSN 0021-8979

2001

Zandvliet, H.J.W. and Zoethout, E. and Wulfhekel, W. and Poelsema, Bene (2001) Origin of roughening in epitaxial growth of silicon on Si(0 0 1) and Ge(0 0 1) surfaces. Surface Science, 482-48 (1). pp. 391-395. ISSN 0039-6028

Zoethout, E. and Zandvliet, H.J.W. and Poelsema, Bene (2001) Adatom assisted stabilization of ad dimers on Ge(001). Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 19 (4). pp. 1868-1870. ISSN 0734-2101

2000

Galea, T.M. and Ordas, C. and Zoethout, E. and Zandvliet, H.J.W. and Poelsema, Bene (2000) Formation and decay of metastable Ge clusters on Ge(001). Physical Review B: Condensed matter and materials physics, 62 (11). pp. 7206-7212. ISSN 1098-0121

Zandvliet, H.J.W. and Galea, T.M. and Zoethout, E. and Poelsema, Bene (2000) Diffusion Driven Concerted Motion of Surface Atoms: Ge on Ge(001). Physical Review Letters, 84 (7). pp. 1523-1526. ISSN 0031-9007

Zoethout, E. and Gürlü, O. and Zandvliet, H.J.W. and Poelsema, Bene (2000) The influence of strain on the diffusion of Si dimers on Si(001). Surface Science, 452 (1-3). pp. 247-252. ISSN 0039-6028

1998

Fried, M. and Wormeester, H. and Zoethout, E. and Lohner, T. and Polgar, O. and Barsony, I. (1998) In situ spectroscopic ellipsometric investigation of vacuum annealed and oxidized porous silicon layers. Thin Solid Films, 313-31 . pp. 459-463. ISSN 0040-6090

Zoethout, E. and Zandvliet, H.J.W. and Wulfhekel, W. and Rosenfeld, Georg and Poelsema, Bene (1998) Diffusion mechanisms and the nature of Si ad-dimers on Ge(001). Physical Review B: Condensed matter and materials physics, 58 (24). p. 16167. ISSN 1098-0121

This list was generated on Sat Aug 30 05:19:23 2014 CEST.