Author Publications

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Number of items: 19.

2002

Veenendaal, E. van and Nijdam, A.J. and Suchtelen, J. van (2002) Simulation of crystal shape evolution in two dimensions. Journal of Crystal Growth, 235 (1-4). pp. 603-618. ISSN 0022-0248

Veenendaal, E. van and Theije, F.K. de and Suchtelen, J. van and Enckevort, W.J.P. van (2002) Simulation of step patterns on natural diamond {111} surfaces. Diamond and Related Materials, 11 (2). pp. 145-152. ISSN 0925-9635

2001

Nijdam, A.J. and Gardeniers, J.G.E. and Berenschot, J.W. and Veenendaal, E. van and Suchtelen, J. van and Elwenspoek, M. (2001) Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon. Journal of Micromechanics and Microengineering, 11 (5). pp. 499-503. ISSN 0960-1317

Nijdam, A.J. and Veenendaal, E. van and Cuppen, H.M. and Suchtelen, J. van and Reed, M.L. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Vlieg, E. and Elwenspoek, M. (2001) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation. Journal of Applied Physics, 89 (7). pp. 4113-4116. ISSN 0021-8979

Veenendaal, E. van and Cuppen, H.M. and Enckevort, W.J.P. van and Suchtelen, J. van and Nijdam, A.J. and Elwenspoek, M. and Vlieg, E. (2001) A monte carlo study of etching in the presence of a mask junction. Journal of Micromechanics and Microengineering, 11 (4). pp. 409-415. ISSN 0960-1317

Veenendaal, E. van and Sato, K. and Shikida, M. and Nijdam, A.J. and Suchtelen, J. van (2001) Micro-morphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH: velocity source forests. Sensors and Actuators A: Physical, 93 (3). pp. 232-242. ISSN 0924-4247

Veenendaal, E. van and Sato, K. and Shikida, M. and Suchtelen, J. van (2001) Micromorphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH and TMAH. Sensors and Actuators A: Physical, 93 (3). pp. 219-231. ISSN 0924-4247

Veenendaal, Erik van and Suchtelen, Jaap van and Beurden, Paul van and Cuppen, Herma M. and Enckevort, Willem J.P. van and Nijdam, A. Jasper and Elwenspoek, Miko and Vlieg, Elias (2001) Monte carlo simulation of wet chemical etching of silicon. Sensors and Materials, 13 (6). pp. 343-350. ISSN 0914-4935

2000

Cuppen, H.M. and Veenendaal, E. van and Suchtelen, J. van and Enckevort, W.J.P. van and Vlieg, E. (2000) A Monte Carlo study of dislocation growth and etching of crystals. Journal of Crystal Growth, 219 (1-2). pp. 165-175. ISSN 0022-0248

Nijdam, A.J. and Veenendaal, E. van and Cuppen, H. and Suchtelen, J. van and Reed, M.L. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Vlieg, E. and Elwenspoek, M.C. (2000) Formation and stabilization of pyramidal etch hillocks on silicon {100} in anisotropic etchants: experiments and Monte Carlo simulation. In: MicroMechanics Europe (MME) 2000, October 1-3, 2000, Uppsala, Sweden .

Nijdam, A.J. and Veenendaal, E. van and Gardeniers, J.G.E. and Kentgens, A.P.M. and Nachtegaal, G.H. and Elwenspoek, M. (2000) 29 Si-Nuclear magnetic resonance on the etching products of silicon in potassium hydroxide solutions. Journal of the Electrochemical Society, 147 (6). pp. 2195-2198. ISSN 0013-4651

Veenendaal, E. van and Beurden, P. van and Enckevort, W.J.P. van and Vlieg, E. and Suchtelen, J. van and Elwenspoek, M. (2000) Monte Carlo study of kinetic smoothing during dissolution and etching of the Kossel (100) and silicon (111) surfaces. Journal of Applied Physics, 88 (8). pp. 4595-4604. ISSN 0021-8979

Veenendaal, E. van and Nijdam, A.J. and Suchtelen, J. van and Sato, K. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Elwenspoek, M. (2000) Simulation of anisotropic wet chemical etching using a physical model. Sensors and Actuators A: Physical, 84 (3). pp. 324-329. ISSN 0924-4247

Veenendaal, E. van and Suchtelen, J. van and Enckevort, W.J.P. van and Sato, K. and Nijdam, A.J. and Gardeniers, J.G.E. and Elwenspoek, M. (2000) The construction of orientation-dependent crystal growth and etch rate functions II: Application to wet chemical etching of silicon in potassium hydroxide. Journal of Applied Physics, 87 (12). pp. 8732-8740. ISSN 0021-8979

Veenendaal, E. van and Cuppen, H. and Enckevort, W.J.P. van and Suchtelen, J. van and Nijdam, A.J. and Elwenspoek, M.C. and Vlieg, E. (2000) A Monte Carlo study of etching in the presence of a mask junction. In: MicroMechanics Europe (MME) 2000, October 1-3, 2000, Uppsala, Sweden .

1999

Suchtelen, J. van and Nijdam, A.J. and Veenendaal, E. van (1999) The velocity source concept. Journal of Crystal Growth, 198-19 (Part 1). pp. 17-21. ISSN 0022-0248

Suchtelen, J. van and Sato, K. and Veenendaal, E. van and Nijdam, A.J. and Gardeniers, J.G.E. and Enckevort, W.J.P. van and Elwenspoek, M. (1999) Simulation of anisotropic wet-chemical etching using a physical model. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS , January 17-21, 1999, Orlando, Florida, USA (pp. pp. 332-337).

Veenendaal, E. van and Hoof, P.J.C.M. van and Suchtelen, J. van and Enckevort, W.J.P. van and Bennema, P. (1999) Kinetic roughening of the Kossel (1 0 0) surface. Journal of Crystal Growth, 198-19 (Part 1). pp. 22-26. ISSN 0022-0248

1998

Veenendaal, E. van and Hoof, P.J.C.M. van and Suchtelen, J. van and Enckevort, W.J.P. van and Bennema, P. (1998) Kinetic roughening of the Kossel (100) surface: comparison of classical criteria with Monte Carlo results. Surface Science, 417 (1). pp. 121-138. ISSN 0039-6028

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