Author Publications

Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: Date | Item Type
Jump to: 2001 | 2000 | 1999 | 1998
Number of items: 15.

2001

Tong, D.H. and Zwijze, R.A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2001) Platinum patterning by a modified lift-off technique and its application in a silicon load cell. Sensors and Materials, 13 (4). pp. 235-246. ISSN 0914-4935

2000

Tong, H.D. and Zwijze, R.A.F. and Berenschot, J.W. and Wiegerink, R.J. and Krijnen, G.J.M. and Elwenspoek, M.C. (2000) Characterization of platinum lift-off technique. In: SeSens workshop on Semiconductor Sensor and Actuator Technology, Nov. 30 - Dec. 1, 2000, Veldhoven, The Netherlands.

Wiegerink, Remco and Zwijze, Robert and Krijnen, Gijs and Lammerink, Theo and Elwenspoek, Miko (2000) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. Sensors and Actuators A: Physical, A80 (2). pp. 189-196. ISSN 0924-4247

Zwijze, A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Hien, T. and Elwenspoek, M.C. (2000) Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. In: Micro-Electro-Mechanical Systems, MEMS 2000, November 5-10, 2000, Orlando, USA.

Zwijze, Albert Ferdinand (2000) Micro-machined high capacity silicon load cells. thesis.

Zwijze, R.A.F. and Wiegerink, R.J. and Krijnen, G.J.M. and Berenschot, J.W. and Boer, M.J. de and Elwenspoek, M.C. (2000) High force 10 kN piezoresistive silicon force sensor with output independent of force distribution. In: Micromachining and Microfabrication 2000, 18 September 2000, Santa Clara, CA, USA (pp. pp. 47-58).

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (2000) Low-cost piezoresistive silicon load cell independent of force ditribution. Journal of Micromechanics and Microengineering, 10 (2). pp. 200-203. ISSN 0960-1317

1999

Wiegerink, R.J. and Zwijze, A.F. and Mateman, R. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with distributed capacitive sensing. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands.

Wiegerink, Remco and Zwijze, Robert and Krijnen, Gijs and Lammerink, Theo and Elwenspoek, Miko (1999) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogenous load distributions. In: Twelfth IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, January 17-21, 1999, Orlando, FL, USA (pp. pp. 558-563).

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (1999) Low creep and hysteresis load cell based on a force to fluid pressure transformation. Sensors and Actuators A: Physical, 78 (2). pp. 74-80. ISSN 0924-4247

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (1999) Low-cost piezoresistive silicon load cell independent of force distribution. In: Micromechanics Europe Conference, MME 1999, September 27-28, 1999, Gif-sur-Yvette, France.

1998

Wensink, H. and Boer, M.J. de and Wiegerink, R.J. and Zwijze, R.A.F. and Elwenspoek, M.C. (1998) First micromachined silicon load cell for loads up to 1000 kg. In: Micromachined Devices and Components IV, 21-22 Sept. 1998, Santa Clara, USA (pp. pp. 424-430).

Wensink, H. and Wiegerink, R.J. and Zwijze, A.F. and Boer, M.J. de and Elwenspoek, M.C. (1998) Design and realisation of a quasi monolithic silicon load cell. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 190-193).

Zwijze, Robert A.F. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko (1998) Low creep and hysteresis load cell based on a force to liquid pressure transformation. In: Dutch National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 287-292).

Zwijze, Robert A.F. and Wiegerink, Remco J. and Lammerink, Theo S.J. and Elwenspoek, Miko (1998) Low creep and hysteresis silicon load cell based on a force-to-liquid pressure transformation. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 260-263).

This list was generated on Wed Jul 23 05:30:29 2014 CEST.