Author Publications

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Jump to: 1998 | 1997 | 1996 | 1995
Number of items: 8.

1998

Pedersen, Michael and Olthuis, Wouter and Bergveld, Piet (1998) An integrated silicon capacitive microphone with frequency-modulated digital output. Sensors and Actuators A: Physical, 69 (3). pp. 267-275. ISSN 0924-4247

Pedersen, Michael and Olthuis, Wouter and Bergveld, Piet (1998) High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter. Journal of Microelectromechanical Systems, 7 (4). pp. 387-394. ISSN 1057-7157

1997

Pedersen, M. and Meijerink, M.G.H. and Olthuis, W. and Bergveld, P. (1997) An IC-compatible polyimide pressure sensor with capacitive readout. Sensors and Actuators A: Physical, 63 (3). pp. 163-168. ISSN 0924-4247

Pedersen, Michael (1997) A polymer condenser micorphone realised on silicon containing preprocessed integrated circuits. thesis.

Pedersen, Michael and Olthuis, Wouter and Bergveld, Piet (1997) A silicon condenser microphone with polyimide diaphragm and backplate. Sensors and Actuators A: Physical, 63 (2). pp. 97-104. ISSN 0924-4247

Pedersen, Michael and Olthuis, Wouter and Bergveld, Piet (1997) A polymer condenser microphone on silicon with on-chip cmos amplifier. In: Transducers '97, International Conference on Solid State Sensors and Actuators, June 16-19, 1997, Chicago, USA (pp. pp. 445-446).

1996

Pedersen, M. and Olthuis, W. and Bergveld, P. (1996) On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones. Sensors and Actuators A: Physical, 54 (1-3). pp. 499-504. ISSN 0924-4247

1995

Pedersen, M. and Olthuis, W. and Bergveld, P. (1995) On The Electromechanical Behaviour Of Thin Perforated Backplates In Silicon Condenser Microphones. In: 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX. Transducers, June 25-29, 1995 , Stockholm, Sweden (pp. 234A7-13).

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