Author Publications

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Jump to: 2009 | 2008 | 1998 | 1997 | 1996 | 1995 | 1994 | 1991 | 1990 | 1989
Number of items: 38.

2009

Wits, W.W. and Vaneker, T.H.J. and Mannak, J.H. and Legtenberg, R. (2009) Novel cooling strategy for electronic packages: Directly injected cooling. CIRP Journal of Manufarcuring Science and Technology, 1 (3). pp. 142-147. ISSN 1755-5817

2008

Wits, W.W. and Brok, G.J.H.M. and Mannak, J.H. and Legtenberg, R. (2008) Novel Cooling Strategy for Electronic Packages: Directly Injected Cooling. In: 18th CIRP Design Conference 2008, April 7-9, 2008 , Enschede, Netherlands.

1998

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of Microelectromechanical Systems, 7 (1). pp. 122-127. ISSN 1057-7157

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part I: design and modeling. Journal of Microelectromechanical Systems, 7 (1). pp. 79-86. ISSN 1057-7157

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Elwenspoek, Miko (1998) An electrostatic lower stator axial-gap polysilicon wobble motor part II: fabrication and performance. Journal of Microelectromechanical Systems, 7 (1). pp. 87-93. ISSN 1057-7157

1997

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan H. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of Microelectromechanical Systems, 6 (3). pp. 234-241. ISSN 1057-7157

Legtenberg, Rob and Gilbert, John and Senturia, Stephen D. and Elwenspoek, Miko (1997) Electrostatic curved electrode actuators. Journal of Microelectromechanical Systems, 6 (3). pp. 257-265. ISSN 1057-7157

Tas, N.R. and Vogelzang, A.H. and Elwenspoek, M.C. and Legtenberg, R. (1997) Adhesion and frinction in MEMS. In: Proceedings Micro/nana tribology and it's applications.

1996

Jansen, Henricus Venantius and Boer, Meint Jelle de and Legtenberg, Rob and Elders, Job and Elwenspoek, Miko Curt and Fluitman, Johannes Hermanus Josephus (1996) Process for producing micromechanical structures by means of reactieve ion etching. Patent.

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 204-209).

Legtenberg, Rob (1996) Electrostatic actuators fabricated by surface micromachining techniques. thesis.

Legtenberg, Rob and Groeneveld, A.W. and Elwenspoek, M. (1996) Comb-drive actuators for large displacements. Journal of Micromechanics and Microengineering, 6 (3). pp. 320-329. ISSN 0960-1317

Tas, N.R. and Elwenspoek, M.C. and Legtenberg, R. (1996) Side-wall spacers for stiction reduction in surface micromachined mechanisms. In: Micro Mechanics Europe, MME, 21-22 October 1996, Barcelona, Spain (pp. pp. 92-95).

Tas, Niels and Sonnenberg, Tonny and Jansen, Henri and Legtenberg, Rob and Elwenspoek, Miko (1996) Stiction in surface micromachining. Journal of Micromechanics and Microengineering, 6 (4). pp. 385-397. ISSN 0960-1317

1995

Elwenspoek, M. and Weustink, M. and Legtenberg, R. (1995) Static and dynamic properties of active joints. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 412-415).

Gui, Chengqun and Legtenberg, Rob and Elwenspoek, Miko and Fluitman, Jan H. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of Micromechanics and Microengineering, 5 (2). pp. 183-185. ISSN 0960-1317

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 157-162).

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic Engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of Micromechanics and Microengineering, 5 (2). pp. 115-120. ISSN 0960-1317

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Towards position control of electrostatic comb drives.

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators.

Legtenberg, R. and Berenschot, J.W. and Lammerink, T.S.J. and Elwenspoek, M.C. (1995) An electrostatic axial gap wobble motor.

Legtenberg, R. and Groneveld, A.W. and Elwenspoek, M.C. (1995) Towards position control of electrostatic comb drives. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 124-127).

Legtenberg, Rob and Berenschot, Erwin and Baar, John van and Lammerink, Theo and Elwenspoek, Miko (1995) An electrostatic lower stator axial gap wobble motor: design and fabrication. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 404-407).

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan (1995) Electrostatic curved electrode actuators. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - Feb. 1995, Amsterdam, The Netherlands (pp. pp. 37-42).

Legtenberg, Rob and Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1995) Anisotropic reactive ion etching of silicon using SF6/02/CHF3 gas mixtures. Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651

Tas, N.R. and Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) The electrostatic shuffle motor. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 128-131).

1994

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches. In: Micro and Nano Engineering (pp. pp. 312-313).

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe Conference, MME 1994, September 5-6, 1994, Pisa, Italy (pp. pp. 60-64).

Legtenberg, Rob and Tilmans, Harrie A.C. (1994) Electrostatically driven vacuum-encapsulated polysilicon resonators part I. design and fabrication. Sensors and Actuators A: Physical, 45 (1). pp. 57-66. ISSN 0924-4247

Legtenberg, Rob and Tilmans, Harrie A.C. and Elders, Job and Elwenspoek, Miko (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and Actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M. and Fluitman, J.H.J. (1994) (Electro-) mechanical characateristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 41 (1). pp. 4-6. ISSN 0885-3010

Tilmans, Harrie A.C. and Legtenberg, Rob (1994) Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance. Sensors and Actuators A: Physical, 45 (1). pp. 67-84. ISSN 0924-4247

1991

Legtenberg, Rob and Bouwstra, Siebe and Elwenspoek, Miko (1991) Low temperature glass bonding for sensor applications using boron oxide thin films. Journal of Micromechanics and Microengineering, 1 (3). pp. 157-160. ISSN 0960-1317

Legtenberg, Rob and Bouwstra, Siebe and Fluitman, Jan H.J (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and Actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247

1990

Bouwstra, Siebe and Legtenberg, Rob and Tilmans, Harrie A.C. and Elwenspoek, Miko (1990) Resonating microbridge mass flow sensor. Sensors and Actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247

Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1990) Low-temperature glass bonding for sensor applications. In: Micro Mechanics Europe Conference, MME, November 26-27, 1990, Berlin, Germany (pp. pp. 87-92).

1989

Bouwstra, Siebe and Kemna, Paul and Legtenberg, Rob (1989) Thermally Excited Resonating Membrane Mass Flow Sensor. Sensors and Actuators, 20 (3). pp. 213-223. ISSN 0250-6874

This list was generated on Sat Apr 19 05:18:52 2014 CEST.