Author Publications

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Number of items: 166.

2013

Berenschot, Erwin J.W. and Jansen, Henri V. and Tas, Niels R. (2013) Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon. Journal of micromechanics and microengineering, 23 (5). p. 10. ISSN 0960-1317

Vermeer, R. and Sarajlic, E. and Siekman, M.H. and Kawakatsu, H. and Fujita, H. and Tas, N.R. and Jansen, H.V. (2013) Electrostatically actuated double cantileverl AFM probe for high speed imaging. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers & Eurosensors XXVII, 16-20 June 2013, Barcelona, Spain (pp. pp. 912-915).

2012

Berenschot, Erwin J.W. and Burouni, Narges and Schurink, B. and Honschoten, Joost W. van and Sanders, Remco G.P. and Truckenmuller, Roman and Jansen, Henri V. and Elwenspoek, Miko C. and Apeldoorn, Aart A. van and Tas, Niels R. (2012) 3D Nanofabrication of Fluidic Components by Corner Lithography. Small, 8 (24). pp. 3823-3831. ISSN 1613-6810

Kozhummal, Rajeevan and Berenschot, Erwin and Jansen, Henri and Tas, Niels and Zacharias, Margit and Elwenspoek, Miko (2012) Fabrication of micron-sized tetrahedra by Si〈1 1 1〉 micromachining and retraction edge lithography. Journal of micromechanics and microengineering, 22 (8). 085032. ISSN 0960-1317

Pjetri, O. and Wiegerink, R.J. and Jansen, H.V. and Krijnen, G.J.M. (2012) Improved dicing method for the microflown particle velocity sensor. In: 23rd Micromechanics And Microsystems Europe Workshop, 2012, 9-12 Sep 2012, Ilmenau, Germany.

2011

Abdulla, S.M.C. and Kauppinen, L.J. and Dijkstra, M. and Boer, M.J. de and Berenschot, E. and Jansen, H.V. and Ridder, R.M. de and Krijnen, G.J.M. (2011) Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever. Optics Express, 19 (17). pp. 15864-15878. ISSN 1094-4087

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2011) Switchable capacitor. Patent.

2010

Brunets, Nataliya and Haneveld, Jeroen and Jansen, Henri and Tas, Niels (2010) Viscosity of Water in Nano-Confinement. In: Micro- and Nanofluidics for Cell Biology, 18-22 January 2010, Leiden, The Netherlands (pp. p. 1).

Elwenspoek, Miko and Abelmann, Leon and Berenschot, Erwin and Honschoten, Joost van and Jansen, Henri and Tas, Niels (2010) Self-assembly of (sub-)micron particles into supermaterials. Journal of Micromechanics and Microengineering, 20 (6). pp. 1-28. ISSN 0960-1317

Jansen, H.V. and Boer, M.J. de and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). 075027. ISSN 0960-1317

Jansen, H.V. and Boer, M.J. de and Ma, K. and Girones, M. and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2010) Black silicon method XI: oxygen pulses in SF6 plasma. Journal of Micromechanics and Microengineering, 20 (7). pp. 1-12. ISSN 0960-1317

Jong, Boudewijn R. de and Brouwer, Dannis M. and Boer, Meint J. de and Jansen, Henri V. and Soemers, Herman M.J.R. and Krijnen, Gijs J.M. (2010) Design and Fabrication of a Planar Three-DOFs MEMS-Based Manipulator. Journal of Microelectromechanical Systems, 19 (5). pp. 1116-1130. ISSN 1057-7157

Louwerse, Marcus and Jansen, Henri and Elwenspoek, Miko (2010) A modular assembly method of a feed and thruster system for Cubesats. Journal of Micromechanics and Microengineering, 20 (11). p. 115011. ISSN 0960-1317

Mogulkoc, B. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2010) Incorporation of in-plane electrical internonnects to the reflow bonding. In: 21st Micromechanics and Micro Systems Europe Workshop, MME 2010, September 26-29, 2010, Enschede, The Netherlands.

Mogulkoc, Berker and Knowles, Kevin M. and Jansen, Henri V. and Brake, Marcel ter and Elwenspoek, Miko C. (2010) Surface Devitrification and the Growth of Cristobalite in Borofloat® (Borosilicate 8330) Glass. Journal of the American Ceramic Society, 93 (9). pp. 2713-2719. ISSN 0002-7820

Sinno, I. and Sanz-Velasco, A. and Kang, S. and Jansen, H. and Olsson, E. and Enoksson, P. and Svensson, K. (2010) Fabrication of nanoscale electrostatic lenses. Journal of Micromechanics and Microengineering, 20 (9). 095031. ISSN 0960-1317

Tas, Niels R. and Escalante, Maryana and Honschoten, Joost W. van and Jansen, Henri V. and Elwenspoek, M. (2010) Capillary Negative Pressure Measured by Nanochannel Collapse. Langmuir, 26 (3). pp. 1473-1476. ISSN 0743-7463

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Yagubizade, Hadi and Berenschot, Erwin and Jansen, Henri V. and Elwenspoek, Miko and Tas, Niels R. (2010) Silicon Nanowire Fabrication Using Edge and Corner Lithography. In: IEEE Nanotechnology Materials and Devices Conference, NMDC 2010, 12-14 Oct 2010, Monterey, CA, USA (pp. pp. 128-131).

Zhao, Yiping and Jansen, Henri and Boer, Meint de and Berenschot, Erwin and Bouwes, Dominique and Girones, Miriam and Huskens, Jurriaan and Tas, Niels (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of Micromechanics and Microengineering, 20 (9). 095022. ISSN 0960-1317

Zhao, Yiping and Jansen, Henri and Boer, Meint de and Berenschot, Erwin and Bouwes, Dominique and Girones, Miriam and Huskens, Jurriaan and Tas, Niels (2010) Combining retraction edge lithography and plasma etching for arbitrary contour nanoridge fabrication. Journal of Micromechanics and Microengineering, 20 (9). pp. 1-13. ISSN 0960-1317

2009

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2009) Chemically anisotropic single-crystalline silicon nanotetrahedra. Nanotechnology, 20 (47). p. 475302. ISSN 0957-4484

Brouwer, D.M. and Jong, B.R. de and Boer, M.J. de and Jansen, H.V. and Dijk, J. van and Krijnen, G.J.M. and Soemers, H.M.J.R. (2009) MEMS-based clamp with a passive hold function for precision position retaining of micro manipulators. Journal of Micromechanics and Microengineering, 19 (6). 065027. ISSN 0960-1317

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Mogdans, J. and Krijnen, G.J.M. (2009) Fabrication of dense flow sensor arrays on flexible membranes. In: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2009, 21-25 June 2009, Denver, CO, USA (pp. pp. 1075-1078).

Jansen, H.V. and Boer, M.J. de and Unnikrishnan, S. and Louwerse, M.C. and Elwenspoek, M.C. (2009) Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment. Journal of Micromechanics and Microengineering, 19 (3). ISSN 0960-1317

Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2009) Poor man's nanofabrication. In: International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam .

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2009) Nozzle fabrication for micropropulsion of a microsatellite. Journal of Micromechanics and Microengineering, 19 (4). pp. 1-9. ISSN 0960-1317

Mogulkoc, B. and Jansen, H.V. and Berenschot, J.W. and Brake, H.J.M. ter and Knowles, K.M. and Elwenspoek, M.C. (2009) Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran ®) tubes to silicon substrates. Journal of Micromechanics and Microengineering, 19 (085027). 085027. ISSN 0960-1317

Tas, Niels and Haneveld, Jeroen and Jansen, Henri and Brunets, Nataliya and Honschoten, Joost van (2009) Capillarity effect in silicon based nanochannels. In: Second International Workshop on Nanotechnology and Application, IWNA 2009, 12-14 November 2009, Vung Tau, Vietnam.

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) MEMS within a Swagelok®: a new platform for microfluidic devices. Lab on a Chip, 9 (13). pp. 1966-1969. ISSN 1473-0197

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Mogulkoc, B. and Elwenspoek, M.C. (2009) Microfluidics within a Swagelok®: A MEMS-on-tube assembly. In: 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS, 25-29 January 2009, Sorrento, Italy (pp. pp. 1-4).

Unnikrishnan, S. and Jansen, H.V. and Falke, F.H. and Tas, N.R. and Wolferen, H.A.G.M. van and Boer, M.J. de and Sanders, R.G.P. and Elwenspoek, M.C. (2009) Transition flow through an ultra-thin nanosieve. Nanotechnology, 20 (305304). pp. 1-6. ISSN 0957-4484

Unnikrishnan, Sandeep and Jansen, Henricus Venantius and Berenschot, Johan Willem and Fazal, Imran and Louwerse, Marcus Cornelis and Sanders, Remco and Boer, Meint Jelle de and Elwenspoek, Miko Curt (2009) A method for making a glass supported system, such glass supported system, and the use of a glass support therefor. Patent.

Zhao, Y. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2009) Multi-silicon ridge nanofabrication by repeated edge lithography. Nanotechnology, 20 (315305). p. 315305. ISSN 0957-4484

2008

Berenschot, J.W. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2008) 3D-Nanomachining using corner lithography. In: 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, 6-9 Jan 2008, Sanya, China (pp. pp. 729-732).

Bruinink, Christiaan M. and Burresi, Matteo and Boer, Meint J. de and Segerink, Frans B. and Jansen, Henri V. and Berenschot, E. and Reinhoudt, David N. and Huskens, Jurriaan and Kuipers, L. (2008) Nanoimprint Lithography for Nanophotonics in Silicon. Nano Letters, 8 (9). pp. 2872-2877. ISSN 1530-6984

Haneveld, J. and Tas, N.R. and Brunets, N. and Jansen, H.V. and Elwenspoek, M.C. (2008) Capillary filling of sub- 10 nm nanochannels. Journal of applied physics, 104 (1). p. 14309. ISSN 0021-8979

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M. (2008) Erratum: “Elastocapillary filling of deformable nanochannels” [J. Appl. Phys. 101, 094310 (2007)]. Journal of Applied Physics, 103 (2). 029901. ISSN 0021-8979

Izadi, N. and Boer, M.J. de and Berenschot, J.W. and Wiegerink, R.J. and Lammerink, T.S.J. and Jansen, H.V. and Krijnen, G.J.M. (2008) Fabrication scheme for dense aquatic flow sensor arrays. In: Eurosensors XXII, European Conference on Solid-State Transducers, 7-10 September 2008, Dresden, Germany (pp. pp. 912-915).

Lerou, P.P.P.M. and Brake, H.J.M. ter and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Rogalla, H. (2008) Micromachined Joule-Thomson coolers. In: Cryogenic Engineering Conference, CEC 2007, 16-20 July 2007, Chattanooga, Tennessee, USA (pp. pp. 614-621).

Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2008) Modular Thruster and Feeding System for Micro-Satellite. In: MME 2008, 19th MicroMechanics Europe Workshop, 28-30 September 2008, Aachen, Germany (pp. pp. 17-20).

Louwerse, M.C. and Jansen, H.V. and Groenendijk, M.N.W. and Elwenspoek, M.C. (2008) Nozzle fabrication for Micro Propulsion of a Micro-Satellite. In: 19th MicroMechanics Europe Workshop, MME 2008, 28-30 September 2008, Aachen, Germany (pp. pp. 45-48).

Mogulkoc, B. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2008) Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects. In: Proceedings of the 19th micromechanics Europe conference, 28-30 Sept 2008, Aachen, Germany.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2008) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2008) Wafer scale nano-membrane supported on a silicon microsieve using thin-film transfer technology. Journal of micromechanics and microengineering, 18 (6). 064005. ISSN 0960-1317

Vanapalli, S. and Brake, H.J.M. ter and Jansen, H.V. and Zhao, Y. and Holland, H.J. and Burger, J.F. and Elwenspoek, M.C. (2008) High frequency pressure oscillator for microcryocoolers. Review of Scientific Instruments, 79 (4). 045103. ISSN 0034-6748

Woldering, Léon A. and Tjerkstra, R. Willem and Jansen, Henri V. and Setija, Irwan D. and Vos, Willem L. (2008) Periodic arrays of deep nanopores made in silicon with reactive ion etching and deep UV lithography. Nanotechnology, 19 (14). pp. 1-11. ISSN 0957-4484

Zhao, Y. and Berenschot, J.W. and Boer, M.J. de and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Fabrication of a silicon oxide stamp by edge lithography reinforced with silicon nitride for nanoimprint lithography. Journal of Micromechanics and Microengineering, 18 (18). 064013. ISSN 0960-1317

Zhao, Y. and Berenschot, J.W. and Jansen, H.V. and Tas, N.R. and Huskens, J. and Elwenspoek, M.C. (2008) Monolithics silicon nano-ridge fabrication by edge lithography and wet anisotropic etching of silicon. In: 34th International Conference on Micro & Nano Enginering, 15-18 Sept 2008, Greece (pp. p. 221).

Zhao, Yiping and Berenschot, Erwin and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2008) Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications. Microelectronic Engineering, 86 (4-6). pp. 832-835. ISSN 0167-9317

2007

Honschoten, J.W. van and Escalante, M. and Tas, N.R. and Jansen, H.V. and Elwenspoek, M.C. (2007) Elastocapillary filling of deformable nanochannels. Journal of Applied Physics, 101 . 094310. ISSN 0021-8979

Lerou, P.P.P.M. and Venhorst, G.C.F. and Veenstra, T.T. and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Brake, H.J.M. ter and Rogalla, H. (2007) All-Micromachined Joule-Thomson Cold Stage. In: 14th International Cryocooler Conference, 16-20 July 2007, Annapolis, MD, USA (pp. pp. 437-441).

Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2007) Modular Micro Propulsion System. In: National MicroNano Conference 2007, 15-16 November 2007, Wageningen, Netherlands (pp. p. 22).

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2007) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tong, H.D. and Jansen, H.V. and Tas, N.R. and Gadgil, V.J. and Carlen, E.T. and Berg, A. van den (2007) Simple technique for direct patterning of nanowires using a nanoslit shadow-mask. In: International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2007, 10-14 June 2007, Paris, France (pp. pp. 191-194).

Unnikrishnan, S. and Jansen, H.V. and Berenschot, J.W. and Elwenspoek, M.C. (2007) Wafer scale nano-membranes supported on a silicon microsieve. In: Micromechanics Europe 2007, 16-18 September 2007, Portugal (pp. pp. 127-130).

Vanapalli, S. and Brake, H.J.M. ter and Jansen, H.V. and Burger, J.F. and Holland, H.J. and Veenstra, T.T. and Elwenspoek, M.C. (2007) Pressure drop of laminar gas flow in a microchannel containing various pillar matrices. Journal of Micromechanics and Microengineering, 17 (7). pp. 1381-1386. ISSN 0960-1317

Zhao, Yiping and Berenschot, Erwin and Boer, Meint de and Jansen, Henri and Tas, Niels and Huskens, Jurriaan and Elwenspoek, Miko (2007) Silicon oxide nanoimprint stamp fabrication by edge lithography reinforced with silicon nitride. In: MicroMechanics Europe Workshop, MME 2007, 16-18 Sep 2007, Guimarães, Portugal (pp. pp. 253-256).

2006

Fazal, I. and Louwerse, M.C. and Jansen, H.V. and Elwenspoek, M.C. (2006) Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining. Journal of Micromechanics and Microengineering, 16 . pp. 1207-1214. ISSN 0960-1317

Fazal, Imran and Louwerse, Marcus and Jansen, Henri and Elwenspoek, Miko (2006) Stepper Motor Actuated Microvalve. Journal of Physics: Conference Series, 34 . pp. 1032-1037. ISSN 1742-6596

Fernandez, L.J. and Berenschot, J.W. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications. Journal of Micromechanics and Microengineering, 16 (4). pp. 862-868. ISSN 0960-1317

Fernandez, L.J. and Wiegerink, R.J. and Flokstra, J. and Sesé, J. and Jansen, H.V. and Elwenspoek, M.C. (2006) A capacitive rf power sensor based on mems technology. Journal of Micromechanics and Microengineering, 16 . S1099-S1107. ISSN 0960-1317

Gironès, M. and Akbarsyah, I.J. and Nijdam, W. and Rijn, C.J.M. van and Jansen, H.V. and Lammertink, R.G.H. and Wessling, M. (2006) Polymeric microsieves produced by phase separation micromolding. Journal of Membrane Science, 283 (1-2). pp. 411-424. ISSN 0376-7388

Haneveld, Jeroen and Berenschot, Erwin and Maury, Pascale and Jansen, Henri (2006) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. Journal of Micromechanics and Microengineering, 16 (6). S24-S28. ISSN 0960-1317

Haneveld, J. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2006) Fabrication and capillary filling of sub-10nm nanochannels. In: Proceedings of the NanoNed / MicroNed Symposium II Eindhoven 2006, 16-17 Nov, Eindhoven (pp. p. 192).

Jong, B.R. de and Brouwer, D.M. and Jansen, H.V. and Boer, M.J. de and Lammertink, T.G. and Stramigioli, S. and Krijnen, G.J.M. (2006) A planar 3 DOF sample manipulator for nano-scale characterization. In: 19th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2006, 22-26 January 2006, Istanbul, Turkey (pp. pp. 750-753).

Lerou, P.P.P.M. and Vanapalli, S. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and Brake, H.J.M. ter and Rogalla, H. (2006) Microcooling Developments at the University of Twente. In: Advances in cryogenic engineering: transactions of the cryogenic engineering. AIP Conference Proceedings, 823 . American Institute of Physics, pp. 977-984. ISBN 9780735403178

Louwerse, M.C. and Jansen, H.V. and Moerel, J.L.P.A. and Sanders, H.M. and Zandbergen, B.T.C. (2006) Design of a cold gas micro thruster. In: NanoNed/MicroNed Symposium II, 16-17 Nov 2006, Eindhoven, The Netherlands (pp. p. 180).

Louwerse, Marcus and Sanders, Berry and Jansen, Henry (2006) Microsysteemtechnologie verpakt in een buisje. Ruimtevaart . pp. 11-15. ISSN 1382-2446

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2006) Switchable capacitor and method of making the same. Patent.

Tas, Niels R. and Haneveld, Jeroen and Jansen, Henri V. and Elwenspoek, Miko (2006) Surface Tension Effects in Nanochannels: Capillary Filling and Negative Pressure. In: 210th ECS Meeting, E6-Bioelectronics, Biointerfaces, and Biomedical Applications, 29 Oct - 3 Nov 2006, Cancun, Mexico.

Vargas llona, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2006) Seedless electroplating on patterned silicon. Journal of Micromechanics and Microengineering, 16 (6). pp. 1-6. ISSN 0960-1317

2005

Fazal, I. and Berenschot, J.W. and Boer, J.H. de and Jansen, H.V. and Elwenspoek, M.C. (2005) Bond Strength Tests Between Silicon Wafers and Duran Tubes (Fusion Bonded Fluidic Interconnects). In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05 (pp. pp. 936-939).

Fernandez, L.J. and Berenschot, J.W. and Sesé, J. and Wiegerink, R.J. and Flokstra, J. and Jansen, H.V. and Elwenspoek, M.C. (2005) Fabrication of thick silicon nitride blocks for integration of RF devices. Electronics Letters, 41 (3). pp. 124-125. ISSN 0013-5194

Fernandez, Luis and Sesé, J. and Wiegerink, Remco and Flokstra, Jaap and Jansen, Henri and Elwenspoek, Miko (2005) Radio frequency power sensor based on MEMS technology with ultra low losses. In: 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 , Januari 30 - Februari 3, 2005, Miami Beach, Florida, USA (pp. pp. 191-194).

Haneveld, Jeroen and Berenschot, Erwin and Maury, Pascale and Jansen, Henri (2005) Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a mask. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 72-75).

Hoang Thi Hanh, H.T.H. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2005) The microfabrication of and fluid study on nanochannels. In: Proceedings of the 1st International Nanofluidics Workshop (pp. pp. 62-63).

Jong, B.R. de and Brouwer, D.M. and Jansen, H.V. and Boer, M.J. de and Krijnen, G.J.M. (2005) Nanometer resolution TEM sample manipulator for rotational and translational positioning. In: 19th European Conference on Solid-State Transducers, EuroSensors XIX 2005, 11-14 September 2005, Barcelona, Spain.

Jong, B.R. de and Jansen, H.V. and Boer, M.J. de and Krijnen, G.J.M. (2005) Tailored Etch-Profiles of high aspect ratio trenches to prevent voids after refill with LPCVD sirn. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

Lerou, P.P.M. and Jansen, H.V. and Venhorst, G.C.F. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Brake, H.J.M. ter and Elwenspoek, M.C. and Rogalla, H. (2005) Progress in Micro Joule-Thomson Cooling at Twente University. In: 13th International Cryocooler Conference, March 29 - April 1, 2004, New Orleans, Louisiana (pp. pp. 489-496).

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2005) Bulk Micromachining Technology for Fabrication of two-level MEMS in Standard Silicon Substrate. In: 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2005, June 5-9, 2005, Seoul, Korea (pp. pp. 1404-1405).

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2005) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2005) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tong, H.D. and Berg, A.H.J. van den and Gardeniers, J.G.E. and Jansen, H.V. and Gielens, F.C. and Elwenspoek, M.C. (2005) Preparation of palladium-silver aloy films by a dual sputtering technique and its application in hydrogen separation membrane. Thin Solid Films, 479 . pp. 89-94. ISSN 0040-6090

Tong, Hien Duy and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, Henri V. and Berenschot, J.W. and Boer, Meint J. de and Boer, J.H. de and Rijn, Cees J.M. van and Elwenspoek, Miko C. (2005) Microsieve supporting palladium-silver alloy membranes and application to hydrogen separation. Journal of Microelectromechanical Systems, 14 . pp. 113-123. ISSN 1057-7157

Vanapalli, S. and Lerou, P. and Jansen, H.V. and Burger, J.F. and Veenstra, T.T. and Venhorst, G.C.F. and Holland, H.J. and Elwenspoek, M.C. and Brake, H.J.M. ter and Rogalla, H. (2005) Microcooling developments at the University of Twente [Presentation]. In: 5th Round Table on Micro/Nano Technologies for Space : Session 11: Interface, Thermal Management and Fluidics, 3-5 October, 2005, Noordwijk, The Netherlands .

Vanapalli, S.A. and Lerou, P.P.M. and Burger, J.F. and Veenstra, T.T. and Holland, H.J. and Venhorst, G.C.F. and Jansen, H.V. and Brake, H.J.M. ter and Elwenspoek, M.C. (2005) Experimental investigation of friction factors for gas flow across dense pillar matrices in microchannels. In: 16th MicroMechanics Europe Workshop, MME 2005, 4–6 September 2005, Göteborg, Sweden (pp. pp. 354-357).

Vargas llona, L.D. and Jansen, H.V. and Elwenspoek, M.C. (2005) Direct Electroplating on Highly Doped Patterned Silicon Wafers. In: 16th MicroMechanics Europe Workshop, MME 2005, 4-6 September 2005, Göteborg, Sweden.

2004

Fernandez, Luis J. and Sesé, Javier and Jansen, Henri and Wiegerink, Remco and Flokstra, Jaap (2004) Optimization of a capacitive MEMS power sensor for radio frequency applications. In: MicroMechanics Europe Workshop, MME, September 5 - 7, 2004, Leuven, Belgium (pp. pp. 257-260).

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2004) Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing. In: Conference on Precision Electromagnetic Measurements, 2004, 27 June - 2 July 2004, London, UK (pp. pp. 117-118).

Hoang, H.T. and Tong, H.D. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2004) Fabrication and characterization of dual sputtered Pd-Cu alloy films for hydrogen separation membranes. Materials Letters, 3-4 (58). pp. 525-528. ISSN 0167-577X

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2004) Switchable capacitor and method of making the same. Patent.

Rusu, C. and Jansen, H. and Gunn, R. and Witvrouw, A. (2004) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. Microsystem Technologies, 10 (5). pp. 364-371. ISSN 0946-7076

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2004) Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers. Journal of Micromechanics and Microengineering, 14 (9). S70-S75. ISSN 0960-1317

Tas, N.R. and Haneveld, J. and Jansen, H.V. and Elwenspoek, M. and Berg, A. van den (2004) Capillary filling speed of water in nanochannels. Applied Physics Letters, 85 (15). pp. 3274-3276. ISSN 0003-6951

Tong, D.H. and Jansen, H.V. and Tas, N.R. and Elwenspoek, M.C. (2004) Nanosieves membranes. In: Proceedings of The Second International Workshop on Nanophysics and Nanotechnology, IWONN, October 22-23, 2004, Hanoi, Vietnam (pp. pp. 107-115).

Tong, Hien D. and Jansen, Henri V. and Gadgil, Vishwas J. and Bostan, Cazimir G. and Berenschot, Erwin and Rijn, Cees J.M. van and Elwenspoek, Miko (2004) Silicon nitride nanosieve membrane. Nano letters, 4 (2). pp. 283-287. ISSN 1530-6984

Tong, H.D. and Gielens, F.C. and Gardeniers, J.G.E. and Jansen, H.V. and Rijn, C.J.M. van and Elwenspoek, M.C. and Nijdam, W. (2004) Microfabricated palladium-silver alloy membranes and their application in hydrogen separation. Industrial and Engineering Chemistry Research, 43 . pp. 4182-4187. ISSN 0888-5885

2003

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Jansen, Henri and Wiegerink, Remco and Flokstra, Jaap (2003) Novel rf power sensor based on capacitive MEMS technology. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 41-44).

Fernandez, Luis J. and Visser, Eelke and Sesé, Javier and Wiegerink, Remco and Jansen, Henri and Flokstra, Jaap and Elwenspoek, Miko (2003) Radio frequency power sensor based on MEMS technology. In: IEEE Sensors Conference 2003, October 22-24, 2003, Toronto, Canada (pp. pp. 549-552).

Haneveld, Jeroen and Jansen, Henri and Berenschot, Erwin and Tas, Niels and Elwenspoek, Miko (2003) Wet anisotropic etching for fluidic 1D nanochannels. Journal of Micromechanics and Microengineering, 13 (4). S62-S66. ISSN 0960-1317

Rusu, C.R. and Jansen, H.V. and Gunn, R. and Witvrouw, A. (2003) Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process. In: Symposium on design, test, integration and packaging of MEMS 2003, 5-7 May 2003, Mandelieu-La Napoule, France (pp. pp. 245-250).

Sarajlic, E. and Boer, M.J. de and Jansen, H.V. and Arnal, N. and Puech, M. and Krijnen, G. and Elwenspoek, M. (2003) Integration of trench isolation technolgy and plasma release for advanced MEMS design on standard silicon wafers. In: MicroMechanics Europe Workshop, MME 2003, November 2-4, 2003, Delft, The Netherlands (pp. pp. 123-126).

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2003) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tong, D.H. and Gielens, F.C. and Hoang, H.T. and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2003) Thin, strong and defect free microfabricated palladium composite membranes for hydrogen separation. In: 7th International Conference on Microreaction Technology, IMRET 7, September 7-10, 2003, Lausanne, Switzerland (pp. pp. 343-345).

Tong, H.D. and Gielens, F.C. and Hoang, H.T. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2003) A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes. In: 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003, 8-12 June 2003, Boston, MA, USA (pp. pp. 1742-1745).

Tong, H.D. and Hoang Thi Hanh, H.T.H. and Gielens, F.C. and Jansen, H.V. and Elwenspoek, M.C. (2003) Preparation of a dual sputtering PD-Cu alloy film and its application in hydrogen separation. In: 14th MicroMechanics Europe Workshop, MME 2003, Nov. 2-4, 2003, Delft, The Netherlands (pp. pp. 127-130).

Tong, Hien Duy and Berenschot, J.W. (Erwin) and Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Wensink, Henk and Jansen, Henri V. and Nijdam, Wietze and Elwenspoek, Miko C. and Gielens, F.C. (Frank) and Rijn, Cees J.M. van (2003) Microfabrication of palladium-silver alloy membranes for hydrogen separation. Journal of Microelectromechanical Systems, 12 (5). pp. 622-629. ISSN 1057-7157

2002

Bartic, Carmen and Jansen, H. and Campitelli, Andrew and Borghs, Staf (2002) Ta2O5 as gate dielectric material for low-voltage organic thin-film transistors. Organic Electronics, 3 (2). pp. 65-72. ISSN 1566-1199

Boer, Meint J. de and Gardeniers, J.G.E. (Han) and Jansen, Henri V. and Gilde, Melis-Jan and Roelofs, Gerard and Sasserath, Jay N. and Elwenspoek, Miko (2002) Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures. Journal of Microelectromechanical Systems, 11 (4). pp. 385-401. ISSN 1057-7157

Haneveld, J. and Jansen, H.V. and Berenschot, J.W. and Tas, N.R. and Elwenspoek, M.C. (2002) Wet anisotropic etching for fluidic 1D nanochannels. In: Micromechanics Europe Workshop, MME 2002, 6-8 October 2002, Sinaia, Romania (pp. pp. 47-50).

Rottenberg, X. and Jansen, H. and Fiorini, P. and De Raedt, W. and Tilmans, H.A.C. (2002) Novel RF-MEMS capacitive switching structures. In: 32nd European Microwave Conference, EuMC 2002, 23-26 Sept 2002, Milan, Italy.

Tas, N.R. and Lammerink, T.S.J. and Mela, P. and Jansen, H.V. and Elwenspoek, M. and Berg, A. van den (2002) 2D-confined nanochannels fabricated by conventional micromachining. Nano Letters, 2 (9). pp. 1031-1032. ISSN 1530-6984

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2002) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tong, H.D. and Gielens, F.C. and Berenschot, J.W. and Boer, M.J. de and Gardeniers, J.G.E. and Jansen, H.V. and Nijdam, W. and Rijn, C.J.M. van and Elwenspoek, M.C. (2002) Micromachined palladium silver alloy membranes for hydrogen separation. In: SESENS 2002, November 29-30, 2002, Veldhoven, The Netherlands (pp. pp. 688-691).

2001

Jansen, Henri and Boer, Meint de and Wensink, Henk and Kloeck, Ben and Elwenspoek, Miko (2001) The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. Microelectronics Journal, 32 (9). pp. 769-777. ISSN 0026-2692

Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (2001) Packaged stainless steel flowsensor. In: Sensor Technology 2001 Conference, 14-15 May, 2001, Enschede, the Netherlands (pp. pp. 173-178).

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint J. de and Jansen, Henri V. and Berenschot, J.W. and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Elwenspoek, Miko and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2001) Direct Integration of Micromachined Pipettes in a Flow Channel for Single DNA Molecule Study by Optical Tweezers. Journal of Microelectromechanical Systems, 10 (2). pp. 238-246. ISSN 1057-7157

Tilmans, H.A.C. and Ziad, H. and Jansen, H. and Di Monaco, O. and Jourdain, A. and De Raedt, W. and Rottenberg, X. and De Backer, E. and Decoussernaeker, A. and Baert, K. (2001) Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab. In: International Electron Devices Meeting, 2-5 Dec 2001, Washington, DC, USA.

Wensink, Henk and Jansen, Henri V. and Berenschot, J.W. and Elwenspoek, Miko C. (2001) Mask materials for powder blasting. Journal of Micromechanics and Microengineering, 10 (2). pp. 175-180. ISSN 0960-1317

2000

Boer, Meint J. de and Tjerkstra, R. Willem and Berenschot, J.W. (Erwin) and Jansen, Henri V. and Burger, G.J. and Gardeniers, J.G.E. (Han) and Elwenspoek, Miko and Berg, Albert van den (2000) Micromachining of buried micro channels in silicon. Journal of Microelectromechanical Systems, 9 (1). pp. 94-103. ISSN 1057-7157

Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (2000) New: MST stainless steel flowsensor. In: Eurosensors XIV Conference, August 27-30, 2000, Copenhagen, Denmark (pp. pp. 325-326).

Neagu, Cristina and Jansen, Henri and Gardeniers, Han and Elwenspoek, Miko (2000) The electrolysis of water: an actuation principle for MEMS with a big opportunity. Mechatronics, 10 (4). pp. 571-582. ISSN 0957-4158

Oosterbroek, R.E. and Berenschot, J.W. and Jansen, H.V. and Nijdam, A.J. and Pandraud, G. and Berg, A. van den and Elwenspoek, M.C. (2000) Etching methodologies in <111>-oriented silicon wafers. Journal of Microelectromechanical Systems, 9 (3). pp. 390-396. ISSN 1057-7157

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Bennink, M.L. and Kanger, J.S. and Grooth, B.G. de and Elwenspoek, Miko and Greve, J. and Berg, A. van den and Brugger, J. (2000) Fabrication of micromachined pipettes in a flow channel for single molecule handling of DNA. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 429-434).

Rusu, Cristina and Oever, Ronny van 't and Boer, Meint de and Jansen, Henri and Berenschot, Erwin and Elwenspoek, Miko and Bennink, Martin L. and Kanger, Johannes S. and Grooth, Bart G. de and Greve, Jan and Brugger, Jürgen and Berg, Albert van den (2000) Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping. In: Micro- and Nanotechnology for Biomedical and Environmental Applications, 26-27 January 2000, San Jose, California, USA (pp. pp. 41-49).

Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (2000) High resolution powder blast micromachining. In: Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS, January 23-27, 2000, Miyazaki, Japan (pp. pp. 769-774).

1999

Bree, Hans-Elias de and Jansen, Henri V. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. and Elwenspoek, Miko (1999) Bi-directional fast flow sensor with a large dynamic range. Journal of Micromechanics and Microengineering, 9 (2). pp. 186-189. ISSN 0960-1317

Elwenspoek, M.C. and Jansen, H.V. (1999) Silicon micromachining. Cambridge University Press, United Kingdom. ISBN 9780521590549

Leussink, P.J. and Jansen, H.V. and Krijnen, G.J.M. and Elwenspoek, M. (1999) Metal thin film thermocouples for use in MST. In: Eurosensors XIII, European Conference on Solid-State Transducers, September 12-15, 1999, The Hague, the Netherlands (pp. pp. 205-206).

Wensink, Henk and Berenschot, J.W. and Jansen, Henri V. and Elwenspoek, Miko C. (1999) Mask materials in powderblasting. In: Micromechanics Europe Workshop, MME '99, 27-28 September 1999, Gif sûr Yvette, France (pp. pp. 199-202).

1998

Braber, E.T. den and Jansen, H.V. and Boer, M.J. de and Croes, H.J.E. and Elwenspoek, M. and Ginsel, L.A. and Jansen, J.A. (1998) Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk titanium substrata. Journal of Biomedical Materials Research, 40 (3). pp. 425-433. ISSN 0021-9304

Bree, Hans-Elias de and Jansen, Henri V. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. and Elwenspoek, Miko (1998) Bi-directional fast flow sensor with a large dynamic range. In: Micromechanics Europe Conference, MME 1998, June 3-5, 1998, Ulvik, Norway (pp. pp. 194-197).

Gui, C. and Boer, M. de and Gardeniers, J.G.E. and Jansen, H. and Berenschot, J.W. and Elwenspoek, M. (1998) Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures. Sensors and Actuators A: Physical, 70 (1-2). pp. 61-66. ISSN 0924-4247

Rusu, C.R. and Jansen, H.V. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1998) The electrolysis of water: an actuation principle for MEMS with a big opportunity. In: 6th International conference on New Actuators with accompanying exhibition, 17-19 June, 1998, Bremen, Germany (pp. pp. 118-121).

1997

Gui, C. and Jansen, H.V. and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multi layer substrates. In: International Conference on Solid State Sensors and Actuators, TRANSDUCERS, June 16-19, 1997, Chicago, USA (pp. pp. 633-636).

Gui, C. and Jansen, H.V. and Boer, M. de and Berenschot, J.W. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) High aspect ratio single crystalline silicon microstructures fabricated with multilayer substrates. In: International Conference on Solid-State Sensors and Actuators, TRANSDUCERS, 16-19 June 1997, Chicago, IL, USA (pp. pp. 633-636).

Jansen, Henri and Boer, Meint de and Wensink, Henk and Kloeck, Ben and Elwenspoek, Miko (1997) The black silicon method VIII: a study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source. In: Micro- and Nano-Engineering 1997, 15 September 1997, Athens, Greece.

Jansen, Henri and Boer, Meint de and Wiegerink, Remco and Tas, Niels and Smulders, Edwin and Neagu, Cristina and Elwenspoek, Miko (1997) RIE lag in high aspect ratio trench etching of silicon. Microelectronic Engineering, 35 (1-4). pp. 45-50. ISSN 0167-9317

Neagu, C.R. and Jansen, H.V. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. (1997) Characterization of a planar microcoil for implantable microsystems. Sensors and Actuators A: Physical, 62 (1-3). pp. 599-611. ISSN 0924-4247

1996

Berenschot, Erwin and Jansen, Henri and Burger, Gert-Jan and Gardeniers, Han and Elwenspoek, Miko (1996) Thermally assisted ion beam etching of polytetrafluoroethylene, a new technique for high aspect ratio etching of MEMS. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, February 11-15, 1996, San Diego, California, USA (pp. pp. 277-284).

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Jansen, Henri and Lammerink, Theo S.J. and Elwenspoek, Miko (1996) The μ-flown: a novel device for measuring acoustic flows. Sensors and Actuators A: Physical, 54 (1-3). pp. 552-557. ISSN 0924-4247

Bree, H.E. de and Korthorst, T. and Leussink, P.J. and Jansen, H.V. and Elwenspoek, M.C. (1996) A method to measure apparent acoustic pressure, flow gradient and acoustic intensity using two micromachined flow microphones. In: Proceedings Eurosensors X (pp. pp. 827-830).

Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1996) The black silicon method VI: high aspect ratio treck etching for MEMS applications. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 250-257).

Jansen, Henri and Gardeniers, Han and Boer, Meint de and Elwenspoek, Miko and Fluitman, Jan (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of Micromechanics and Microengineering, 6 (1). pp. 14-28. ISSN 0960-1317

Jansen, Henricus Venantius and Boer, Meint Jelle de and Legtenberg, Rob and Elders, Job and Elwenspoek, Miko Curt and Fluitman, Johannes Hermanus Josephus (1996) Process for producing micromechanical structures by means of reactieve ion etching. Patent.

Spiering, Vincent L. and Lammerink, Theo S.J. and Jansen, Henri V. and Berg, Albert van den and Fluitman, Jan H.J (1996) Technologies and microstructures for separation techniques in chemical analysis. In: Micromachining and Microfabrication 1996, 14-15 October, 1996, Austin, Texas, USA (pp. pp. 2882-2887).

Tas, Niels and Sonnenberg, Tonny and Jansen, Henri and Legtenberg, Rob and Elwenspoek, Miko (1996) Stiction in surface micromachining. Journal of Micromechanics and Microengineering, 6 (4). pp. 385-397. ISSN 0960-1317

1995

Boer, Meint de and Jansen, Henri and Elwenspoek, Miko (1995) The black silicon method V: a study of the fabrication of movable structure for micro electromechanical systems. In: Transducers '95 - Eurosensors IX, June 25-29, 1995, Stockholm, Sweden (pp. pp. 565-568).

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Backlund, Ylva and Jansen, Henri (1995) The Wheatstone Gadget : a simple ciruit for the measuring differential resistance variations. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 201-204).

Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Jansen, Henri and Lammerink, Theo and Elwenspoek, Miko (1995) The μ-flown: A Novel Device Measuring Acoustical Flows. In: Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden (pp. pp. 536-539).

Elders, J. and Jansen, H.V. and Elwenspoek, M. and Ehrfeld, W. (1995) Deemo: a new technology for the fabrication of microstructures. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 238-243).

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method II: the effect of mask material and loading on the reactive ion etching of deep silicon trenches. Microelectronic Engineering, 27 (1-4). pp. 475-480. ISSN 0167-9317

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1995) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. Journal of Micromechanics and Microengineering, 5 (2). pp. 115-120. ISSN 0960-1317

Jansen, Henri and Boer, Meint de and Otter, Bert and Elwenspoek, Miko (1995) The black silicon method IV: the fabrication of three dimensional structures in silicon with high aspect ratios for scanning probe microscopy and other applications. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 88-93).

Jansen, Henri and Gardeniers, Han and Fluitman, Jan (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 18-30).

Legtenberg, Rob and Jansen, Henri and Boer, Meint de and Elwenspoek, Miko (1995) Anisotropic reactive ion etching of silicon using SF6/02/CHF3 gas mixtures. Journal of the Electrochemical Society, 142 (6). pp. 2020-2028. ISSN 0013-4651

1994

Elders, J. and Jansen, H.V. and Elwenspoek, M. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS , January 25-28, 1994, Oiso, Japan (pp. pp. 170-175).

Jansen, H.V. and Verhagen, R. and Elwenspoek, M.C. (1994) The black silicon method III: design, rules, modelling, optimisation and performance of precision position systems for scanning probe, gripping and other MEMS applications. In: Proceedings of Handling and Assembly of microparts 1994 (pp. pp. 1-10).

Jansen, Henri and Boer, Meint de and Burger, Johannes and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches. In: Micro and Nano Engineering (pp. pp. 312-313).

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247

Jansen, Henri and Boer, Meint de and Legtenberg, Rob and Elwenspoek, Miko (1994) The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control. In: Micro Mechanics Europe Conference, MME 1994, September 5-6, 1994, Pisa, Italy (pp. pp. 60-64).

Jansen, Henri and Verhagen, Rudi and Elwenspoek, Miko (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparts, November 14th, 1994, Vienna, Austria.

Jansen, Henri and Verhagen, Rudi and Elwenspoek, Miko (1994) BSM 3: design rules, modelling, optimisation, and performance of precision position systems for scanning probe, gripping, and other MEMS applications. In: Seminar on Handling and Assembly of Microparths, 14 November, Vienna, Austria.

1978

Jansen, H.V. and Fluitman, J.H.J. and Wesseling, P. (1978) Some problems concerning the accuracy and efficiency of self- consistent iterative calculations in magnetic recording. IEEE transactions on magnetics, MAG-14 . pp. 1141-1148. ISSN 0018-9464

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