Author Publications

1996

Jansen, Henricus Venantius and Boer de, Meint Jelle and Legtenberg, Rob and Elders, Job and Elwenspoek, Miko Curt and Fluitman, Johannes Hermanus Josephus (1996) Process for producing micromechanical structures by means of reactieve ion etching. Patent.

1995

Craciun, V. and Amirhaghi, S. and Craciun, D. and Elders, J. and Gardeniers, J.G.E. and Boyd, Ian W. (1995) Effects of laser wavelength and fluence on the growth of ZnO thin films by pulsed laser deposition. Applied Surface Science, 86 (1-4). pp. 99-106. ISSN 0169-4332

Craciun, V. and Elders, J. and Gardeniers, J.G.E. and Geretovsky, J. and Boyd, Ian W. (1995) Growth of ZnO thin films on GaAs by pulsed laser deposition. Thin Solid Films, 259 (1). pp. 1-4. ISSN 0040-6090

Elders, J. and Jansen, H.V. and Elwenspoek, M. and Ehrfeld, W. (1995) Deemo: a new technology for the fabrication of microstructures. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands.

1994

Amirhaghi, S. and Craciun, V. and Craciun, D. and Elders, J. and Boyd, I.W. (1994) Low temperature growth of highly transparent c-axis oriented ZnO thin films by pulsed laser deposition. Microelectronic Engineering, 25 (2-4). pp. 321-326. ISSN 0167-9317

Craciun, V. and Elders, J. and Gardeniers, J.G.E. and Boyd, Ian W. (1994) Characteristics of high quality ZnO thin films deposited by pulsed laser deposition. Applied Physics Letters, 65 (23). pp. 2963-2965. ISSN 0003-6951

Elders, J. and Kuijk van, J.C.C. and Lammerink, T.S.J. and Elwenspoek, M.C. and Leeuwis, H. (1994) Micropompen. Klinische Fysica, 3 . pp. 338-342. ISSN 0168-7026

Elders, J. and Jansen, H.V. and Elwenspoek, M. (1994) Materials analysis of fluorocarbon films for MEMS applications. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS , January 25-28, 1994, Oiso, Japan.

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247

Legtenberg, Rob and Tilmans, Harrie A.C. and Elders, Job and Elwenspoek, Miko (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and Actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247

1993

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA.