Author Publications

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Jump to: 1994 | 1992 | 1991
Number of items: 9.

1994

Donk, A.G.H. van der and Scheeper, P.R. and Olthuis, W. and Bergveld, P. (1994) Modelling of silicon condenser microphones. Sensors and Actuators A: Physical, 40 (3). pp. 203-216. ISSN 0924-4247

Scheeper, P.R. and Donk, A.G.H. van der and Olthuis, W. and Bergveld, P. (1994) A review of silicon microphones. Sensors and Actuators A: Physical, 44 (1). pp. 1-11. ISSN 0924-4247

Scheeper, P.R. and Olthuis, W. and Bergveld, P. (1994) Improvement of the performance of microphones with a silicon nitride diaphragm and backplate. Sensors and Actuators A: Physical, 40 (3). pp. 179-186. ISSN 0924-4247

Scheeper, Patrick R. and Olthuis, Wouter and Bergveld, Piet (1994) The design, fabrication, and testing of corrugated silicon nitride diaphragms. Journal of Microelectromechanical Systems, 3 (1). pp. 36-42. ISSN 1057-7157

1992

Scheeper, P.R. and Donk, A.G.H. van der and Olthuis, W. and Bergveld, P. (1992) Fabrication of silicon condenser microphones using single wafer technology. Journal of Microelectromechanical Systems, 1 (3). pp. 147-154. ISSN 1057-7157

Scheeper, P.R. and Voorthuyzen, J.A. and Olthuis, W. and Bergveld, P. (1992) Investigation of attractive forces between PECVD silicon nitride microstructures and an oxidized silicon substrate. Sensors and Actuators A: Physical, 30 (3). pp. 231-239. ISSN 0924-4247

1991

Scheeper, P.R. and Olthuis, W. and Bergveld, P. (1991) Fabrication of a subminiature silicon condenser microphone using the sacrificial layer technique. In: International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, TRANSDUCERS, June 24-27, 1991, San Fransisco, USA (pp. pp. 408-411).

Scheeper, P.R. and Voorthuyzen, J.A. and Bergveld, P. (1991) PECVD silicon nitride diaphragms for condenser microphones. Sensors and Actuators B: Chemical, 4 (1-2). pp. 79-84. ISSN 0925-4005

Voorthuyzen, J.A. and Sprenkels, A.J. and Donk, A.G.H. van der and Scheeper, P.R. and Bergveld, P. (1991) Optimization of capactive microphone and pressure sensor performance by capacitor-electrode shaping. Sensors and Actuators A: Physical, 26 (1-3). pp. 331-336. ISSN 0924-4247

This list was generated on Sat Nov 22 05:31:24 2014 CET.