Author Publications

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Number of items: 34.

Article

Bouwstra, Siebe and Legtenberg, Rob and Tilmans, Harrie A.C. and Elwenspoek, Miko (1990) Resonating microbridge mass flow sensor. Sensors and Actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247

Bouwstra, Siebe and Rooijen, Jeroen van and Tilmans, Harrie A.C. and Selvakumar, Arjun and Najafi, Khahl (1993) Thermal base drive for micromechanical resonators employing deep-diffusion bases. Sensors and Actuators A: Physical, 37-38 . pp. 38-44. ISSN 0924-4247

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of Microelectromechanical Systems, 7 (1). pp. 122-127. ISSN 1057-7157

IJntema, Dominicus J. and Tilmans, Harrie A.C. (1992) Static and dynamic aspects of an air gap capacitor. Sensors and Actuators A: Physical, 35 (2). pp. 121-128. ISSN 0924-4247

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247

Legtenberg, Rob and Tilmans, Harrie A.C. (1994) Electrostatically driven vacuum-encapsulated polysilicon resonators part I. design and fabrication. Sensors and Actuators A: Physical, 45 (1). pp. 57-66. ISSN 0924-4247

Legtenberg, Rob and Tilmans, Harrie A.C. and Elders, Job and Elwenspoek, Miko (1994) Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms. Sensors and Actuators A: Physical, 43 (1-3). pp. 230-238. ISSN 0924-4247

Mullem, C.J. van and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators the resonant silicon beam force sensor. Sensors and Actuators A: Physical, 31 (1-3). pp. 168-173. ISSN 0924-4247

Smits, J.G. and Tilmans, H.A.C. and Hoen, K. and Mulder, H. and Vuuren, J. van and Boom, G. (1983) Resonant diaphragm pressure measurement system with ZnO on Si excitation. Sensors and Actuators, 4 . pp. 565-571. ISSN 0250-6874

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M. and Fluitman, J.H.J. (1994) (Electro-) mechanical characateristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 41 (1). pp. 4-6. ISSN 0885-3010

Tilmans, Harrie A.C. and Bouwstra, Siebe and Fluitman, Jan H.J and Spence, Scott L. (1990) Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges. Sensors and Actuators A: Physical, 25 (1-3). pp. 79-86. ISSN 0924-4247

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A Differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Tilmans, Harrie A.C. and Elwenspoek, Miko (1993) Quasi-monolithic planar load cells using built-in resonant strain gauges. Journal of Micromechanics and Microengineering, 3 (4). pp. 193-197. ISSN 0960-1317

Tilmans, Harrie A.C. and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Micro resonant force gauges. Sensors and Actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247

Tilmans, Harrie A.C. and Legtenberg, Rob (1994) Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance. Sensors and Actuators A: Physical, 45 (1). pp. 67-84. ISSN 0924-4247

Conference or Workshop Item

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA (pp. pp. 171-176).

Elwenspoek, M. and Blom, F.R. and Bouwstra, S. and Lammerink, T.S.J. and Pol, F.C.M. van de and Tilmans, H.A.C. and Popma, Th.J.A. and Fluitman, J.H.J. (1989) Transduction mechanisms and their applications in micromechanical devices. In: IEEE Micro Electro Mechanical Systems, MEMS, 20-22 Feb. 1989 , Salt Lake City, UT (pp. pp. 126-132).

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 157-162).

Oude Nijhuis, M.H.H. and Basten, T.G.H. and Wijnant, Y.H. and Tijdeman, H. and Tilmans, H.A.C. (1999) Transient non-linear response of 'pull-in MEMS devices' including squeeze film effects. In: 13th European Conference on Solid-State Transducers, EUROSENSORS XIII, September 12-15, 1999, The Hague, The Netherlands.

Rottenberg, X. and Jansen, H. and Fiorini, P. and De Raedt, W. and Tilmans, H.A.C. (2002) Novel RF-MEMS capacitive switching structures. In: 32nd European Microwave Conference, EuMC 2002, 23-26 Sept 2002, Milan, Italy.

Tilmans, H.A.C. and Ziad, H. and Jansen, H. and Di Monaco, O. and Jourdain, A. and De Raedt, W. and Rottenberg, X. and De Backer, E. and Decoussernaeker, A. and Baert, K. (2001) Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab. In: International Electron Devices Meeting, 2-5 Dec 2001, Washington, DC, USA.

Tilmans, Harrie A.C. and IJntema, Dominicus .J. and Fluitman, Jan H.J (1991) Single Element Excitation and Detection of (Micro-)Mechanical Resonators. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA (pp. pp. 533-537).

Patent

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2004) Switchable capacitor and method of making the same. Patent.

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2006) Switchable capacitor and method of making the same. Patent.

Rottenberg, Xavier and Jansen, Henri and Tilmans, Hendrikus and De Raedt, Walter (2011) Switchable capacitor. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2002) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2005) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2003) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2005) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2008) Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2010) System for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

Tilmans, Hendrikus and Beyne, Eric and Jansen, Henri and De Raedt, Walter (2007) Fabrication of integrated tunable/switchable passive microwave and millimeter wave modules. Patent.

This list was generated on Fri Apr 18 05:11:07 2014 CEST.