Author Publications

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Number of items: 24.

Article

Blom, F.R. and Bouwstra, S. and Elwenspoek, M. and Fluitman, J.H.J. (1992) Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. Journal of Vacuum Science and Technology B: Microelectronics, processing and phenomena, 10 (1). pp. 19-26. ISSN 0734-211X

Blom, F.R. and Bouwstra, S. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Resonating silicon beam force sensor. Sensors and Actuators, 17 (3-4). pp. 513-519. ISSN 0250-6874

Bouwstra, S. and Blom, F.R. and Lammerink, T.S.J. and Yntema, H. and Schrap, P. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Excitation and detection of vibrations of micromechanical structures using a dielectric thin film. Sensors and Actuators, 17 (1-2). pp. 219-223. ISSN 0250-6874

Bouwstra, Siebe and Kemna, Paul and Legtenberg, Rob (1989) Thermally Excited Resonating Membrane Mass Flow Sensor. Sensors and Actuators, 20 (3). pp. 213-223. ISSN 0250-6874

Bouwstra, Siebe and Legtenberg, Rob and Tilmans, Harrie A.C. and Elwenspoek, Miko (1990) Resonating microbridge mass flow sensor. Sensors and Actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247

Bouwstra, Siebe and Rooijen, Jeroen van and Tilmans, Harrie A.C. and Selvakumar, Arjun and Najafi, Khahl (1993) Thermal base drive for micromechanical resonators employing deep-diffusion bases. Sensors and Actuators A: Physical, 37-38 . pp. 38-44. ISSN 0924-4247

Bouwstra, Siebe and Weerd, Eddy de and Elwenspoek, Miko (1990) In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators. Sensors and Actuators A: Physical, 24 (3). pp. 227-235. ISSN 0924-4247

Lammerink, T.S.J. and Elwenspoek, M. and Ouwerkerk, R.H. van and Bouwstra, S. and Fluitman, J.H.J. (1990) Performance of thermally excited resonators. Sensors and Actuators A: Physical, 21 (1-3). pp. 352-356. ISSN 0924-4247

Legtenberg, Rob and Bouwstra, Siebe and Elwenspoek, Miko (1991) Low temperature glass bonding for sensor applications using boron oxide thin films. Journal of Micromechanics and Microengineering, 1 (3). pp. 157-160. ISSN 0960-1317

Legtenberg, Rob and Bouwstra, Siebe and Fluitman, Jan H.J (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and Actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247

Lintel, H.T.G. van and Pol, F.C.M. van de and Bouwstra, S. (1988) A piezoelectric micropump based on micromachining of silicon. Sensors and Actuators, 15 (2). pp. 153-167. ISSN 0250-6874

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M. (1993) Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief. Journal of Micromechanics and Microengineering, 3 (4). pp. 243-246. ISSN 0960-1317

Spiering, V.L. and Bouwstra, S. and Fluitman, J.H.J. (1993) Realization of mechanical decoupling zones for package-stress reduction. Sensors and Actuators A: Physical, 37-38 . pp. 800-804. ISSN 0924-4247

Spiering, Vincent L. and Bouwstra, Siebe and Spiering, Ruud M.E.J. (1993) On-chip decoupling zone for package-stress reduction. Sensors and Actuators A: Physical, 39 (2). pp. 149-157. ISSN 0924-4247

Tilmans, Harrie A.C. and Bouwstra, Siebe and Fluitman, Jan H.J and Spence, Scott L. (1990) Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges. Sensors and Actuators A: Physical, 25 (1-3). pp. 79-86. ISSN 0924-4247

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A Differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Tilmans, Harrie A.C. and Bouwstra, Siebe and IJntema, Dominicus J. and Elwenspoek, Miko and Klein, Carl F. (1991) A differential resonator design using a bossed structure for applications in mechanical sensors. Sensors and Actuators A: Physical, 26 (1-3). pp. 385-393. ISSN 0924-4247

Conference or Workshop Item

Bouwstra, Siebe and Geijselaers, Bert (1991) On the Resonance Frequencies of Microbridges. In: International Conference on Solid-State Sensors and Actuators, TRANSDUCERS, 24-27 June1991, San Fransisco, USA (pp. pp. 538-542).

Elders, J. and Tilmans, H.A.C. and Bouwstra, S. and Elwenspoek, M.C. (1993) Mechanical parameter extraction using resonant structures. In: 1993 Spring Meeting of the Materials Research Society, 12-16 April 1993, San Francisco, CA, USA (pp. pp. 171-176).

Elwenspoek, M. and Blom, F.R. and Bouwstra, S. and Lammerink, T.S.J. and Pol, F.C.M. van de and Tilmans, H.A.C. and Popma, Th.J.A. and Fluitman, J.H.J. (1989) Transduction mechanisms and their applications in micromechanical devices. In: IEEE Micro Electro Mechanical Systems, MEMS, 20-22 Feb. 1989 , Salt Lake City, UT (pp. pp. 126-132).

Legtenberg, R. and Bouwstra, S. and Elwenspoek, M.C. (1990) Low-temperature glass bonding for sensor applications. In: Micro Mechanics Europe Conference, MME, November 26-27, 1990, Berlin, Germany (pp. pp. 87-92).

Spiering, V.L. and Bouwstra, S. and Burger, J.F. and Elwenspoek, M.C. (1993) Membranes fabricated with a deep singel corrugation for package stress reduction and residual stress relief. In: 4th Workshop on Micromachining, Micromechanics and Microsystems, MME '93, September 7-8, 1993, Neuchatel, Switzerland (pp. pp. 223-227).

Spiering, V.L. and Burger, J.F. and Elwenspoek, M.C. and Bouwstra, S. (1993) Package stress reduction and low initial stress thanks to deep corrugations. In: 7th International Conference on Solid State, Sensors and Actuators, Transducers '93, June 7-10, 1993, Yokohama, Japan (pp. pp. 44-45).

Spiering, V.L. and Bouwstra, S. and Spiering, R.M.E.J. and Elwenspoek, M.C. (1991) On-chip Decoupling Zone For Package-Stress Reduction. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA (pp. pp. 982-985).

This list was generated on Tue Oct 21 05:22:45 2014 CEST.