Author Publications

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Number of items: 10.

Article

Blom, F.R. and Bouwstra, S. and Elwenspoek, M. and Fluitman, J.H.J. (1992) Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. Journal of Vacuum Science and Technology B: Microelectronics, processing and phenomena, 10 (1). pp. 19-26. ISSN 0734-211X

Blom, F.R. and Bouwstra, S. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Resonating silicon beam force sensor. Sensors and Actuators, 17 (3-4). pp. 513-519. ISSN 0250-6874

Blom, F.R. and IJntema, D.J. and Pol, F.C.M. van de and Elwenspoek, M. and Fluitman, J.H.J. and Popma, Th.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and Actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247

Blom, F.R. and Pol, F.C.M. van de and Bauhuis, G. and Popma, Th.J.A. (1991) R.F. planar magnetron sputtered ZnO films II: Electrical properties. Thin solid films, 204 (2). pp. 365-376. ISSN 0040-6090

Bouwstra, S. and Blom, F.R. and Lammerink, T.S.J. and Yntema, H. and Schrap, P. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Excitation and detection of vibrations of micromechanical structures using a dielectric thin film. Sensors and Actuators, 17 (1-2). pp. 219-223. ISSN 0250-6874

Mullem, C.J. van and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M. (1991) Piezoelectrically driven silicon beam force sensor. Sensors and Actuators A: Physical, 26 (1-3). pp. 379-383. ISSN 0924-4247

Pol, F.C.M. van de and Blom, F.R. and Popma, Th.J.A. (1991) R.F. planar magnetron sputtered ZnO films I: structural properties. Thin Solid Films, 204 (2). pp. 349-364. ISSN 0040-6090

Prak, Albert and Blom, Frans R. and Elwenspoek, Miko and Lammerink, Theo S.J. (1991) Q-factor and Frequency Shift of Resonating Silicon Diaphragms in Air. Sensors and Actuators A: Physical, 27 (1-3). pp. 691-698. ISSN 0924-4247

Suskia, J. and Largeaua, D. and Steyer, A. and Pol, F.C.M. van de and Blom, F.R. (1990) Optically activated ZnO/Sio2/Si cantilever beams. Sensors and Actuators A: Physical, 24 (3). pp. 221-225. ISSN 0924-4247

Conference or Workshop Item

Elwenspoek, M. and Blom, F.R. and Bouwstra, S. and Lammerink, T.S.J. and Pol, F.C.M. van de and Tilmans, H.A.C. and Popma, Th.J.A. and Fluitman, J.H.J. (1989) Transduction mechanisms and their applications in micromechanical devices. In: IEEE Micro Electro Mechanical Systems, MEMS, 20-22 Feb. 1989 , Salt Lake City, UT (pp. pp. 126-132).

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