Author Publications

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Number of items: 10.

Article

Blom, F.R. and IJntema, D.J. and Pol, F.C.M. van de and Elwenspoek, M. and Fluitman, J.H.J. and Popma, Th.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and Actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247

Blom, F.R. and Pol, F.C.M. van de and Bauhuis, G. and Popma, Th.J.A. (1991) R.F. planar magnetron sputtered ZnO films II: Electrical properties. Thin solid films, 204 (2). pp. 365-376. ISSN 0040-6090

Eijkel, C.J.M. and Branebjerg, J. and Elwenspoek, M. and Pol, F.C.M. van de (1990) A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structures. IEEE Electron Device Letters, 11 (12). pp. 588-589. ISSN 0741-3106

Lintel, H.T.G. van and Pol, F.C.M. van de and Bouwstra, S. (1988) A piezoelectric micropump based on micromachining of silicon. Sensors and Actuators, 15 (2). pp. 153-167. ISSN 0250-6874

Pol, F.C.M. van de and Blom, F.R. and Popma, Th.J.A. (1991) R.F. planar magnetron sputtered ZnO films I: structural properties. Thin Solid Films, 204 (2). pp. 349-364. ISSN 0040-6090

Pol, F.C.M. van de and Lintel, H.T.G. van and Elwenspoek, M. and Fluitman, J.H.J. (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors and Actuators A: Physical, 21 (1-3). pp. 198-202. ISSN 0924-4247

Pol, F.C.M. van de and Wonnink, D.G.J. and Elwenspoek, M. and Fluitman, J.H.J. (1989) A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices. Sensors and Actuators, 17 (1-2). pp. 139-143. ISSN 0250-6874

Suskia, J. and Largeaua, D. and Steyer, A. and Pol, F.C.M. van de and Blom, F.R. (1990) Optically activated ZnO/Sio2/Si cantilever beams. Sensors and Actuators A: Physical, 24 (3). pp. 221-225. ISSN 0924-4247

Conference or Workshop Item

Elwenspoek, M. and Blom, F.R. and Bouwstra, S. and Lammerink, T.S.J. and Pol, F.C.M. van de and Tilmans, H.A.C. and Popma, Th.J.A. and Fluitman, J.H.J. (1989) Transduction mechanisms and their applications in micromechanical devices. In: IEEE Micro Electro Mechanical Systems, MEMS, 20-22 Feb. 1989 , Salt Lake City, UT (pp. pp. 126-132).

Pol, F.C.M. van de and Elwenspoek, M.C. and Lammerink, T.S.J. and Fluitman, J.H.J. (1990) A micromechanical viewing screen: principle and feasibility. In: 5th Sensors & Actuators Symposium, November 15-16, 1990, Enschede, The Netherlands (pp. pp. 249-253).

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