Author Publications

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Number of items: 73.

2013

Kaleli, B. and Hemert, T. van and Hueting, R.J.E. and Wolters, R.A.M. (2013) Strain characterization of FinFETs using Raman spectroscopy. Thin solid films, 541 . pp. 57-61. ISSN 0040-6090

Van Bui, H. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. (2013) Hot-Wire generated atomic hydrogen and its impact on thermal ALD in $TiCl_4/NH_3$ system. ECS journal of solid state science and technology, 2 (4). pp. 149-155. ISSN 2162-8777

Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2013) On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films. Applied surface science, 269 . pp. 45-49. ISSN 0169-4332

Van Bui, Hao and Kovalgin, Alexey and Schmitz, Jurriaan and Wolters, Rob A.M. (2013) Conduction and electric field effect in ultra-thin TiN films. Applied physics letters, 103 (5). 051904. ISSN 0003-6951

2012

Faber, Erik J. and Wolters, Rob A.M. and Schmitz, Jurriaan (2012) Novel test structures for dedicated temperature budget determination. IEEE Transactions on Semiconductor Manufacturing, 25 (3). pp. 339-345. ISSN 0894-6507

Groenland, A.W. and Vereshchagina, E. and Kovalgin, A.Y. and Wolters, R.A.M. and Gardeniers, J.G.E. and Schmitz, J. (2012) Micro- and nano-link ultra-low power heaters for sensors. In: European Solid-State Device Research Conference, ESSDERC 2012, 17-21 September 2012, Bordeaux, France (pp. pp. 169-172).

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2012) Four point probe structures with buried and surface electrodes for the electrical characterization of ultrathin conducting films. IEEE Transactions on Semiconductor Manufacturing, 25 (2). pp. 1-24. ISSN 0894-6507

Kovalgin, Alexey Y. and Tiggelman, Natalie and Wolters, Rob A.M. (2012) An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance. IEEE Transactions on Electron Devices, 59 (2). 426-432 . ISSN 0018-9383

Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2012) Growth of sub-nanometer thin continuous TiN films by atomic layer deposition. ECS journal of solid state science and technology, 1 (6). pp. 285-290. ISSN 2162-8777

Van Bui, Hao and Wolters, Rob A.M. and Kovalgin, Alexey Y. (2012) TiN films by Atomic Layer Deposition: Growth and electrical characterization down to sub-nm thickness. In: Proceedings of the International Conference on Anvanced Materials and Nanotechnology (ICAMN 2012), 13-14 Dec 2012, Hanoi, Vietnam (pp. pp. 7-12).

2011

Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Negative Charge in Plasma Oxidized SiO2 Layers. ECS Transactions, 35 (4). pp. 259-272. ISSN 1938-5862

Faber, Erik J. and Wolters, Rob A.M. and Schmitz, Jurriaan (2011) On the kinetics of platinum silicide formation. Applied Physics Letters, 98 (8). 082102. ISSN 0003-6951

Faber, Erik J. and Wolters, Rob A.M. and Schmitz, Jurriaan (2011) Gap-closing test structures for temperature budget determination. In: 24th International Conference on Microelectronic Test Structures, ICMTS 2011, 4-7 April 2011, Amsterdam, the Netherlands (pp. pp. 165-169).

Groenland, A.W. and Kovalgin, A.Y. and Schmitz, J. and Wolters, R.A.M. (2011) Nano-Link Based Ultra Low Power Micro Electronic Hotplates for Sensors and Actuators. ECS Transactions, 35 (30). pp. 25-34. ISSN 1938-5862

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2011) A Difference in Using Atomic Layer Deposition or Physical Vapour Deposition TiN as Electrode Material in Metal-Insulator-Metal and Metal-Insulator-Silicon Capacitors. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8368-8373. ISSN 1533-4880

Roy, Deepu and Klootwijk, Johan H. and Gravesteijn, Dirk J. and Wolters, Rob A.M. (2011) Contact resistance of TiW to ultra-thin phase change material layers. In: 41st European Solid-State Device Research Conference, ESSDERC 2011, 12-16 September 2011, Helsinki, Finland (pp. pp. 87-90).

Roy, Deepu and Pijper, Ralf M.T. and Tiemeijer, Luuk F. and Wolters, Rob A.M. (2011) Contact resistance measurement structures for high frequencies. In: 24th International Conference on Microelectronic Test Structures, ICMTS, 4-7 April 2011, Amsterdam, the Netherlands (pp. pp. 49-54).

Roy, Deepu and Wolters, Rob A.M. (2011) Interface Characterization of Metals and Metal-nitrides to Phase Change Materials. In: 2011 MRS Spring Meeting, 25-29 April 2011, San Francisco, CA, USA (pp. q03-02).

Roy, Deepu and Zandt, Micha A.A. in 't and Wolters, Rob A.M. (2011) Electrical characterization of Thin-Film structures with redeposited sidewall. IEEE Transactions on Electron Devices, 58 (4). pp. 924-930. ISSN 0018-9383

Van Bui, H. and Groenland, A.W. and Aarnink, A.A.I. and Wolters, R.A.M. and Schmitz, J. and Kovalgin, A.Y. (2011) Growth Kinetics and Oxidation Mechanism of ALD TiN Thin Films Monitored by In Situ Spectroscopic Ellipsometry. Journal of the Electrochemical Society, 158 . pp. 214-220. ISSN 0013-4651

Van Bui, H. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. (2011) Ultra-Thin Atomic Layer Deposited TiN Films: Non-Linear I–V Behaviour and the Importance of Surface Passivation. Journal of Nanoscience and Nanotechnology, 11 (9). pp. 8120-8125. ISSN 1533-4880

Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) The development of titanium silicide–boron-doped polysilicon resistive temperature sensors. Journal of Micromechanics and Microengineering, 21 (10). p. 105022. ISSN 0960-1317

Vereshchagina, E. and Wolters, R.A.M. and Gardeniers, J.G.E. (2011) Measurement of reaction heats using a polysilicon-based microcalorimetric sensor. Sensors and Actuators A: Physical, 169 (2). pp. 308-316. ISSN 0924-4247

2010

Faber, E.J. and Wolters, R.A.M. and Schmitz, J. (2010) Novel test structures for temperature budget determination during wafer processing. In: IEEE International Conference on Microelectronic Test Structures (ICMTS), 2010, 22-25 Mar 2010, Hirosjima, Japan (pp. pp. 30-33).

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2010) On the leakage problem of MIM capacitors due to improper etching of titanium nitride. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 89-92).

Kaleli, B. and Aarnink, A.A.I. and Smits, S.M. and Hueting, R.J.E. and Wolters, R.A.M. and Schmitz, J. (2010) Electron Beam Lithography of HSQ and PMMA Resists and Importance of their Properties to Link the Nano World to the Micro World. In: STW.ICT Conference 2010, 18-19 Nov 2010, Veldhoven, The Netherlands (pp. pp. 105-108).

Oosthoek, Jasper L.M. and Kooi, Bart J. and Hosson, Jeff T.M. de and Wolters, Rob A.M. and Gravesteijn, Dirk J. and Attenborough, Karen (2010) Growth rate determination through automated TEM image analysis: crystallization studies of doped SbTe phase-change thin films. Microscopy and microanalysis, 16 (3). pp. 291-299. ISSN 1431-9276

Rajasekharan, B. and Hueting, R.J.E. and Salm, C. and Hemert, T. van and Wolters, R.A.M. and Schmitz, J. (2010) Fabrication and characterization of the charge-plasma diode. IEEE electron device letters, 31 (6). pp. 528-530. ISSN 0741-3106

Roy, Deepu and Zandt, Micha in 't and Wolters, Rob (2010) Bias dependent specic contact resistance of phase change material to metal contacts. In: STW.ICT Conference 2010, 18-19 November 2010, Veldhoven, The Netherlands (pp. pp. 147-149).

Roy, Deepu and Zandt, Micha A.A. in 't and Wolters, Rob A.M. (2010) Specific contact resistance of phase change materials to metal electrode. IEEE Electron Device Letters, 31 (11). pp. 1293-1295. ISSN 0741-3106

Tiggelman, N. and Kovalgin, A.Y. and Brennan, R. and Wolters, R.A.M. (2010) Low specific contact resistance of NiSi and PtSi to Si: impact of interface. Electrochemical and Solid-State Letters, 13 (12). H450-H453. ISSN 1099-0062

2009

Aarnink, A.A.I. and Van Bui, H. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) In-situ monitoring of growth and oxidation of ALD TiN layers followed by reduction in atomic hydrogen. In: 9th International Conference on Atomic Layer Deposition, 19-22 July 2009, Monterey, CA, USA.

Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Net Negative Charge in low-temperature SiO2 gate dielectric layers. Microelectronic Engineering, 86 (7-9). pp. 1707-1710. ISSN 0167-9317

Faber, Erik J. and Wolters, Rob A.M. and Rajasekharan, Bijoy and Salm, Cora and Schmitz, Jurriaan (2009) Monitoring silicide formation via in situ resistance measurements. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 67-70).

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Four point probe structures with buried electrodes for the electrical characterization of ultrathin conducting films. In: IEEE International Conference on Microelectronic Test Structures, ICMTS 2009, 30 March - 2 April 2009, Oxnard, CA, USA (pp. pp. 191-195).

Groenland, A.W. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2009) Contact chain measurements for ultrathin conducting films. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 150-152).

Kovalgin, A.Y. and Boogaard, A. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. (2009) Electrical properties of plasma-deposited silicon oxide clarified by chemical modeling. ECS Transactions, 25 (8). pp. 23-32. ISSN 1938-5862

Kovalgin, A.Y. and Boogaard, A. and Wolters, R.A.M. (2009) Impact of small deviations in EEDF on silane-based plasma chemistry. ECS Transactions, 25 (8). pp. 429-436. ISSN 1938-5862

Melai, Joost and Salm, Cora and Wolters, Rob and Schmitz, Jurriaan (2009) Qualitative and quantitative characterization of outgassing from SU-8. Microelectronic Engineering, 86 (4-6). pp. 761-764. ISSN 0167-9317

Rajasekharan, B. and Salm, C. and Wolters, R.A.M. and Aarnink, A.A.I. and Boogaard, A. and Schmitz, J. (2009) Metal contacts to lowly doped Si and ultra thin SOI. In: Proceedings of Fifth Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circuits, 19-21 Jan 2009, Gotheburg, Sweden (pp. pp. 29-30).

Rajasekharan, Bijoy and Salm, Cora and Hueting, Ray and Wolters, Rob and Schmitz, Jurriaan (2009) Metal contacts to lowly doped Si and ultra thin SOI. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 103-104).

Roy, D. and Klootwijk, J.H. and Verhaegh, N.A.M. and Roosen, H.H.A.J. and Wolters, R.A.M. (2009) Comb Capacitor Structures for On-Chip Physical Uncloneable Function. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 96-102. ISSN 0894-6507

Roy, D. and Zandt, M.A.A. in 't and Wolters, R.A.M. and Timmering, C.E. and Klootwijk, J.H. (2009) Contact resistance of TiW to phase change material in the amorphous and crystalline states. In: 10th Non-Volatile Memory Technology Symposium, NVMTS 2009, 25-28 October 2009, Portland, OR, USA (pp. pp. 12-15).

Roy, Deepu and Zandt, Micha in 't and Wolters, Rob (2009) Impact of sidewalls on electrical characterization. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 105-107).

Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2009) Cross-Bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization. IEEE Transactions on Semiconductor Manufacturing, 22 (1). pp. 146-152. ISSN 0894-6507

Van Bui, Hao and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Schmitz, J. (2009) Thermal atomic layer deposition and oxidation of TiN monitored by in-situ spectroscopic ellipsometry. In: 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE, 26-27 November 2009, Veldhoven, The Netherlands (pp. pp. 59-62).

Zandt, M.A.A. in ‘t and Jedema, F.J. and Gravesteijn, D.J. and Attenborough, K. and Wolters, R.A.M. (2009) Doped SbTe phase change material in memory cells. In: International Materials Research Congress, IMRC 2009, 16-21 August 2009, Cancun, Mexico.

2008

Boogaard, A. and Roesthuis, R. and Brunets, I. and Aarnink, A.A.I. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2008) Deposition of High-Quality SiO2 Insulating Films at Low Temperatures by means of Remote PECVD. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 452-456).

Brunets, I. and van Loon, R.V.A. and Walters, R.J. and Polman, A. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2008) Light emission from silicon nanocrystals embedded in ALD-alumina at low temperatures. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 399-402).

Jedema, F.J. and Zandt, M.A.A. in 't and Wolters, R.A.M. and Tio Castro, D. and Hurkx, G.A.M. and Delhounge, R. and Gravesteijn, D.J. and Attenborough, K. (2008) Scaling properties of doped Sb2Te phase change line cells. In: 2008 Joint Non-Volatile Semiconductor Memory Workshop and International Conference on Memory Technology and Design, NVSMW/ICMTD, 18-22 May 2008, Ogura, Taku (pp. pp. 43-45).

Jinesh, K.B. and Lamy, Y. and Wolters, R.A.M. and Klootwijk, J.H. and Tois, E. and Roozeboom, F. and Besling, W.F.A. (2008) Silicon out-diffusion and aluminum in-diffusion in devices with atomic-layer deposited La2O3 thin films. Applied physics letters, 93 (19). p. 192912. ISSN 0003-6951

Melai, Joost and Blanco Carballo, Víctor M. and Salm, Cora and Wolters, Rob and Schmitz, Jurriaan (2008) Further outgassing studies on SU-8. In: 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, 27-28 November 2008, Veldhoven, The Netherlands (pp. pp. 491-494).

Roy, D. and In 't Zand, M.A.A. and Delhounge, R. and Klootwijk, J.H. and Wolters, R.A.M. (2008) Influence of interfacial layer on contact resistance. In: Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008), 27-28 Nov 2008, Veldhoven, The Netherlands (pp. pp. 499-500).

Roy, D. and Klootwijk, J.H. and Verhaegh, N.A.M. and Roosen, H.H.A.J. and Wolters, R.A.M. (2008) Comb capacitor structures for measurement of post-processed layers. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland (pp. pp. 205-209).

Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances. In: Proceedings of the 21st ICMTS 2008 IEEE Conference on Microelectronic Test Structures, 24-28 Mar 2008, Edinburgh, Schotland (pp. pp. 199-204).

Stavitski, N. and van Dal, M.J.H. and Lauwers, A. and Vrancken, C. and Kovalgin, A.Y. and Wolters, R.A.M. (2008) Systematic TLM Measurements of NiSi and PtSi Specific Contact Resistance to n- and p-Type Si in a Broad Doping Range. IEEE electron device letters, 29 (4). pp. 378-381. ISSN 0741-3106

Stavitski, Natalie and Dal, Mark J.H. van and Lauwers, Anne and Vrancken, Christa and Kovalgin, Alexey Y. and Wolters, Rob A.M. (2008) Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction. IEEE Transactions on Electron Devices, 55 (5). pp. 1170-1176. ISSN 0018-9383

2007

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2007) Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD. Surface & Coatings Technology, 201 (22-23). pp. 8976-8980. ISSN 0257-8972

Boogaard, A. and Kovalgin, A.Y. and Brunets, I. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) On the verification of EEDFs in plasmas with silane using optical emission spectroscopy. ECS Transactions, 6 (1). pp. 259-270. ISSN 1938-5862

Brunets, I. and Aarnink, A.A.I. and Boogaard, A. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature LPCVD of Si nanocrystals from disilane and trisilane (Silcore®) embedded in ALD-alumina for non-volatile memory devices. Surface & Coatings Technology, 201 . pp. 9209-9214. ISSN 0257-8972

Brunets, I. and Boogaard, A. and Aarnink, A.A.I. and Kovalgin, A.Y. and Wolters, R.A.M. and Holleman, J. and Schmitz, J. (2007) Low-temperature process steps for realization of non-volatile memory devices. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 504-508).

Castro, D.T. and Goux, L. and Hurkx, G.A.M. and Attenborough, K. and Delhounge, R. and Lisoni, J. and Jedema, F.J. and Zandt, M.A.A. in 't and Wolters, R.A.M. and Gravesteijn, D.J. and Verheijen, M. and Kaiser, M. and Weemaes, R.G.R. (2007) Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells. In: International Electron Devices Meeting, IEDM 2007, 10-12 December 2007, Washington, DC, USA (pp. pp. 315-318).

Stavitski, N. and Klootwijk, J.H. and van Zeijl, H.W. and Boksteen, B.K. and Kovalgin, A.Y. and Wolters, R.A.M. (2007) Cross-bidge Kelvin resistor (CBKR) structures for measurement of low contact resistances. In: 10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), 29-30 Nov 2007, Veldhoven, The Netherlands (pp. pp. 551-554).

2006

Boogaard, A. and Kovalgin, A.Y. and Aarnink, A.A.I. and Wolters, R.A.M. and Holleman, J. and Brunets, I. and Schmitz, J. (2006) Measurement of electron temperatures of Argon Plasmas in a High-Density Inductively-Coupled Remote Plasma System by Langmuir Probe and Optical-Emission Spectroscopy. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 412-418).

Boogaard, Arjen and Kovalgin, Alexey and Aarnink, Tom and Wolters, Rob and Holleman, Jisk and Brunets, Ihor and Schmitz, Jurriaan (2006) Langmuir-probe Characterization of an Inductively-Coupled Remote Plasma System intended for CVD and ALD. ECS Transactions, 2 (7). pp. 181-191. ISSN 1938-5862

Stavitski, N. and Dal, M.J.H. van and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Specific contact resistance measurements of metal-semiconductor junctions. In: Microelectronic Test Structures, 2006 IEEE International Conference on (pp. pp. 13-17).

Stavitski, N. and van Dal, M.J.H. and Klootwijk, J.H. and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2006) Cross-Bridge Kelvin Resistor (CBKR) structures for silicide-semiconductor junctions characterization. In: Proceedings of the 9th annual workshop on Semiconductor Advances for Future Electronics and Sensors 2006, 23-24 Nov 2006, Veldhoven, The Netherlands (pp. pp. 436-438).

2005

Aarnink, A.A.I. and Boogaard, A. and Brunets, I. and Isai, I.G. and Kovalgin, A.Y. and Holleman, J. and Wolters, R.A.M. and Schmitz, J. (2005) A high-density inductively-coupled remote plasma system for the deposition of dielectrics and semiconductors. In: 8th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors 2005 (SAFE 2005), 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 67-69).

Bystrova, S. and Holleman, J. and Aarnink, A.A.I. and Wolters, R.A.M. (2005) Barrier properties of ALD1,5N thin films. In: International Conference on Advanced Metallization, 19-21 October 2004, San Diego, California, USA (pp. pp. 769-774).

Lankhorst, M.H.R. and Ketelaars, B.W.S.M.M. and Wolters, R.A.M. (2005) Low-cost and nanoscale non-volatile memory concept for future silicon chips. Nature Materials, 4 . pp. 347-352. ISSN 1476-1122

Stavitski, N. and Dal, M.J.H. van and Wolters, R.A.M. and Kovalgin, A.Y. and Schmitz, J. (2005) Specific contact resistance measurements of metal-semiconductor junctions. In: SAFE 2005, 8th Annual Workshop on Circuits, Systems and Signal Processing, 17-18 November 2005, Veldhoven, the Netherlands (pp. pp. 52-55).

2003

Bystrova, S. and Holleman, J. and Wolters, R.A.M. and Aarnink, A.A.I. (2003) Atomic layer deposition of W - based layers on SiO2. In: 6th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2003, 25-26 November 2003, Veldhoven, The Netherlands (pp. pp. 730-734).

2002

Bystrova, S. and Holleman, J. and Woerlee, P.H. and Wolters, R.A.M. (2002) Characterization of Ta-based barrier films on SiLK for Cu-metalization. In: 5th Annual Workshop on Semiconductors Advances for Future Electronics, SAFE 2002, 27-28 November 2002, Veldhoven, The Netherlands (pp. pp. 9-13).

This list was generated on Mon Apr 21 05:14:03 2014 CEST.