Author Publications

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Number of items: 97.

Article

Beusekamp, Martin F. and Fluitman, Jan H. (1985) Significance of image-charge fields on the write performance of a pole-keeper head. IEEE Transactions on Magnetics, 21 (5). pp. 1414-1416. ISSN 0018-9464

Beusekamp, Martin F. and Fluitman, Jan H. (1986) Simulation of the perpendicular recording process including image charge effects. IEEE Transactions on Magnetics, 22 (5). pp. 364-366. ISSN 0018-9464

Blom, F.R. and Bouwstra, S. and Elwenspoek, M. and Fluitman, J.H.J. (1992) Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry. Journal of Vacuum Science and Technology B: Microelectronics, processing and phenomena, 10 (1). pp. 19-26. ISSN 0734-211X

Blom, F.R. and Bouwstra, S. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Resonating silicon beam force sensor. Sensors and Actuators, 17 (3-4). pp. 513-519. ISSN 0250-6874

Blom, F.R. and IJntema, D.J. and Pol, F.C.M. van de and Elwenspoek, M. and Fluitman, J.H.J. and Popma, Th.J.A. (1990) Thin-film ZnO as micromechanical actuator at low frequencies. Sensors and Actuators A: Physical, 21 (1-3). pp. 226-228. ISSN 0924-4247

Bouwstra, S. and Blom, F.R. and Lammerink, T.S.J. and Yntema, H. and Schrap, P. and Fluitman, J.H.J. and Elwenspoek, M. (1989) Excitation and detection of vibrations of micromechanical structures using a dielectric thin film. Sensors and Actuators, 17 (1-2). pp. 219-223. ISSN 0250-6874

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1996) High resolution shadow mask patterning in deep holes and its application to an electrical wafer feed-through. Sensors and Actuators A: Physical, 54 (1-3). pp. 669-673. ISSN 0924-4247

Druyvesteyn, W.F. and Raemaekers, E.L.M. and Verhaar, R.D.J. and Wilde, J. de and Fluitman, J.H.J. and Groenland, J.P.J. (1981) Magnetic behaviour of narrow track thin-film heads. Journal of Applied Physics, 52 (3). pp. 2462-2464. ISSN 0021-8979

Eijkel, Kees J.M. and Fluitman, Jan H.J (1990) Optimization of the response of magnetoresistive elements. IEEE Transactions on Magnetics, 26 (1). pp. 311-321. ISSN 0018-9464

Eijkel, Kees J.M. and Wieberdink, Johan W. and Fluitman, Jan H.J and Popma, Theo J.A. and Groot, Peter and Leeuwis, Henk (1989) A thin-film magnetoresistive angle detector. Sensors and Actuators A: Physical, 22 (1-3). pp. 795-798. ISSN 0924-4247

Elwenspoek, M. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Towards integrated microliquid handling systems. Journal of Micromechanics and Microengineering, 4 (4). pp. 227-245. ISSN 0960-1317

Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Silicon microstructures for fluid handling. ABB-nieuwsbrief, 1994 (9). pp. 9-12. ISSN 0925-1529

Fluitman, J. (1980) Energy considerations concerning current loops and magnetic objects. American Journal of Physics, 48 (7). pp. 558-562. ISSN 0002-9505

Fluitman, J. and Popma, Th. (1986) Optical waveguide sensors. Sensors and Actuators, 10 (1-2). pp. 25-46. ISSN 0250-6874

Fluitman, J. (1976) Effect of nonzero write field rise time in digital magnetic recording. IEEE Transactions on Magnetics, 12 (3). pp. 218-223. ISSN 0018-9464

Fluitman, J.H.J. (1978) Recording head field measurement with a magnetoresistive transducer. IEEE Transactions on Magnetics, 14 (5). pp. 433-435. ISSN 0018-9464

Fluitman, J.H.J. (1980) Hall-effect device with both voltage leads on one side of the conductor. Journal of Physics E: Scientific Instruments, 13 (7). p. 783. ISSN 0022-3735

Fluitman, J.H.J. (1973) The influence of sample geometry on the magnetoresistance of Ni- Fe films. Thin Solid Films, 16 (3). pp. 269-276. ISSN 0040-6090

Fluitman, J.H.J. (1981) On the calculation of the response of (planar) hall-effect devices to inhomogeneous magnetic fields. Sensors and Actuators, 2 . pp. 155-170. ISSN 0250-6874

Fluitman, J.H.J. and Groenland, J.P.J. (1979) Investigation of the structure of recording head fields. IEEE Transactions on Magnetics, 15 (6). pp. 1634-1636. ISSN 0018-9464

Fluitman, J.H.J. and Groenland, J.P.J. (1981) Comparison of a shielded "One-sided" planar hall-transducer with an MR-head. IEEE Transactions on Magnetics, 17 (6). pp. 2893-2895. ISSN 0018-9464

Fluitman, J.H.J. and Krabbe, H.W. (1972) Miniature sensor for two-dimensional magnetic field distributions. Journal of Physics E: Scientific Instruments, 5 (10). pp. 963-964. ISSN 0022-3735

Fluitman, J.H.J. and Uilhoorn, F.W. (1977) A mathematical model for simulating the hysteretic behaviour of magnetic materials. Journal of Applied Science and Engineering A, 2 . pp. 107-122. ISSN 0304-3851

Fluitman, J.H.J. and Marchal, J. (1973) Head fields of asymmetric recording heads. IEEE Transactions on Magnetics, 9 (2). pp. 139-140. ISSN 0018-9464

Fluitman, Jan (1996) Microsystems technology: objectives. Sensors and Actuators A: Physical, 56 (1-2). pp. 151-166. ISSN 0924-4247

Fluitman, Jan H. (1981) Applicability of the planar Hall effect. Journal of Applied Physics, 52 . pp. 2468-2470. ISSN 0021-8979

Fluitman, Jan H. and Beusekamp, Martin F. (1986) The switching criterion in perpendicular magnetic recording. IEEE Transactions on Magnetics, 22 (5). pp. 367-369. ISSN 0018-9464

Groenland, J.P.J. and Eijkel, C.J.M. and Fluitman, J.H.J. and Ridder, R.M. de (1992) Permalloy thin-film magnetic sensors. Sensors and Actuators A: Physical, 30 (1-2). pp. 89-100. ISSN 0924-4247

Groenland, J.P.J. and Fluitman, J.H.J. (1981) Measurement system for two-dimensional magnetic field distributions, applied to the investigation of recording head fields. Journal of Physics E: Scientific Instruments, 14 (4). p. 503. ISSN 0022-3735

Gui, Chengqun and Legtenberg, Rob and Elwenspoek, Miko and Fluitman, Jan H. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of Micromechanics and Microengineering, 5 (2). pp. 183-185. ISSN 0960-1317

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1998) Nonlinearity and hysteresis of resonant strain gauges. Journal of Microelectromechanical Systems, 7 (1). pp. 122-127. ISSN 1057-7157

Horsthuis, W.H.G. and Fluitman, J.H.J. (1983) The development of fibre optic microbend sensors. Sensors and Actuators, 3 . pp. 99-110. ISSN 0250-6874

Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1997) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. JSME International Journal, Series C, 40 (1). pp. 33-41. ISSN 0914-8825

Imai, S. and Tokuyama, M. and Hirose, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1995) Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction. IEEE Transactions on Magnetics, 31 (6). pp. 3009-3011. ISSN 0018-9464

Imai, Satomitsu and Burger, Gert-Jan and Lammerink, Theo S.J. and Fluitman, Jan H.J. (1996) Output characteristics of a thin-film piezoelectric AE sensor for magnetic head-disk interaction. Transactions of the Japan Society of Mechanical Engineers/Nippon Kikai Gakkai Ronbunshu, C Hen, 62 (595). pp. 928-938. ISSN 0914-8825

Jansen, H.V. and Fluitman, J.H.J. and Wesseling, P. (1978) Some problems concerning the accuracy and efficiency of self- consistent iterative calculations in magnetic recording. IEEE transactions on magnetics, MAG-14 . pp. 1141-1148. ISSN 0018-9464

Jansen, Henri and Gardeniers, Han and Boer, Meint de and Elwenspoek, Miko and Fluitman, Jan (1996) A survey on the reactive ion etching of silicon in microtechnology. Journal of Micromechanics and Microengineering, 6 (1). pp. 14-28. ISSN 0960-1317

Kuijk, J. van and Lammerink, T.S.J. and Bree, H-E. de and Elwenspoek, M. and Fluitman, J.H.J. (1995) Multi-parameter detection in fluid flows. Sensors and Actuators A: Physical, 47 (1-3). pp. 369-372. ISSN 0924-4247

Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Thermal actuation of clamped silicon microbeans. Sensors and Materials, 5 (3-4). pp. 217-238. ISSN 0914-4935

Lammerink, T.S.J. and Elwenspoek, M. and Ouwerkerk, R.H. van and Bouwstra, S. and Fluitman, J.H.J. (1990) Performance of thermally excited resonators. Sensors and Actuators A: Physical, 21 (1-3). pp. 352-356. ISSN 0924-4247

Lammerink, T.S.J. and Fluitman, J.H.J. (1984) Measuring method for optical fibre sensors. Journal of Physics E: Scientific Instruments, 17 (12). p. 1127. ISSN 0022-3735

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1991) Frequency dependence of thermal excitation of micromechanical resonators. Sensors and Actuators A: Physical, 27 (1-3). pp. 685-689. ISSN 0924-4247

Lammerink, Theo S.J. and Tas, Niels R. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Micro-liquid flow sensor. Sensors and Actuators A: Physical, 37-38 . pp. 45-50. ISSN 0924-4247

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan H. (1997) A fabrication process for electrostatic microactuators with integrated gear linkages. Journal of Microelectromechanical Systems, 6 (3). pp. 234-241. ISSN 1057-7157

Legtenberg, Rob and Bouwstra, Siebe and Fluitman, Jan H.J (1991) Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer. Sensors and Actuators A: Physical, 27 (1-3). pp. 723-727. ISSN 0924-4247

Mullem, C.J. van and Blom, F.R. and Fluitman, J.H.J. and Elwenspoek, M. (1991) Piezoelectrically driven silicon beam force sensor. Sensors and Actuators A: Physical, 26 (1-3). pp. 379-383. ISSN 0924-4247

Mullem, C.J. van and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators the resonant silicon beam force sensor. Sensors and Actuators A: Physical, 31 (1-3). pp. 168-173. ISSN 0924-4247

Pol, F.C.M. van de and Lintel, H.T.G. van and Elwenspoek, M. and Fluitman, J.H.J. (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors and Actuators A: Physical, 21 (1-3). pp. 198-202. ISSN 0924-4247

Pol, F.C.M. van de and Wonnink, D.G.J. and Elwenspoek, M. and Fluitman, J.H.J. (1989) A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices. Sensors and Actuators, 17 (1-2). pp. 139-143. ISSN 0250-6874

Prak, Albert and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Selective Mode Excitation And Detection Of Micromachined Resonators. Journal of Microelectromechanical Systems, 1 (4). pp. 179-186. ISSN 1057-7157

Prak, Albert and Fluitman, Jan H.J (1994) Application of a model for silicon resonant sensors. Sensors and Actuators A: Physical, 41-42 (1-3). pp. 251-255. ISSN 0924-4247

Ridder, René M. de and Fluitman, Jan H. (1990) A hysteresis model for an orthogonal thin-film magnetometer. IEEE Transactions on Magnetics, 26 (4). pp. 1237-1245. ISSN 0018-9464

Ridder, René M. de and Fluitman, Jan H. (1984) Orthogonal thin film magnetometer using the anisotropic magnetoresistance effect. IEEE Transactions on Magnetics, 20 (5). pp. 960-962. ISSN 0018-9464

Ridder, René M. de and Sander, A.F.M. and Driessen, A. and Fluitman, J.H.J. (1993) An integrated optic adiabatic TE/TM mode splitter on silicon. Journal of Lightwave Technology, 11 (11). pp. 1806-1811. ISSN 0733-8724

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of Micromechanics and Microengineering, 5 (2). pp. 151-157. ISSN 0960-1317

Spiering, V.L. and Bouwstra, S. and Fluitman, J.H.J. (1993) Realization of mechanical decoupling zones for package-stress reduction. Sensors and Actuators A: Physical, 37-38 . pp. 800-804. ISSN 0924-4247

Spiering, V.L. and Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. and Berg, A. van den (1996) Sistemi di microanalisi per Fluidi. Oleodinamica Pneumatica Lubrificazione (6). pp. 76-83. ISSN 0391-8645

Spiering, Vincent L. and Berenschot, J.W. and Elwenspoek, Miko and Fluitman, Jan H.J (1995) Sacrificial wafer bonding for planarization after very deep etching. Journal of Microelectromechanical Systems, 4 (3). pp. 151-157. ISSN 1057-7157

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M. and Fluitman, J.H.J. (1994) (Electro-) mechanical characateristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 41 (1). pp. 4-6. ISSN 0885-3010

Tilmans, Harrie A.C. and Bouwstra, Siebe and Fluitman, Jan H.J and Spence, Scott L. (1990) Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges. Sensors and Actuators A: Physical, 25 (1-3). pp. 79-86. ISSN 0924-4247

Tilmans, Harrie A.C. and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Micro resonant force gauges. Sensors and Actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247

Wielinga, T. and Fluitman, J.H.J. and Lodder, J.C. (1983) Perpendicular stand-still recording in Co-Cr films. IEEE Transactions on Magnetics, 19 (2). pp. 94-104. ISSN 0018-9464

Article News

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Towards position control of electrostatic comb drives.

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Electrostatic curved electrode actuators.

Conference or Workshop Item

Berg, Albert van den and Bergveld, P. and Elwenspoek, M. and Fluitman, J.H.J. (1994) Miniaturized chemical analysis systems. In: 5th International Symposium on Micro Machine and Human Science, 2-4 October 1994, Nagoya, Japan (pp. pp. 181-184).

Berg, A. van den and Lammerink, T.S.J. and Fluitman, J.H.J. (1995) Modular concept for miniature chemical systems. In: PACIFICHEM '95, December 17-22, 1995, Honolulu, Hawai.

Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. and Tokuyama, M. and Hirose, S. (1995) Piezoelectric impact force sensor array for tribological research on rigid disk storage media. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 294-299).

Burger, G.J. and Smulders, E.J.T. and Berenschot, J.W. and Lammerink, T.S.J. and Fluitman, J.H.J. and Imai, S. (1995) High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through. In: Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), 25-29 June 1995, Stockholm, Sweden (pp. pp. 573-576).

Burger, Johannes F. and Burger, Gert-Jan and Lammerink, Theo S.J. and Imai, Satomitsu and Fluitman, Jan H.J (1996) Miniaturised friction force measuring system for tribological research on magnetic storage devices. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, MEMS, February 11-15, 1996, San Diego, California, USA (pp. pp. 99-104).

Elwenspoek, M. and Blom, F.R. and Bouwstra, S. and Lammerink, T.S.J. and Pol, F.C.M. van de and Tilmans, H.A.C. and Popma, Th.J.A. and Fluitman, J.H.J. (1989) Transduction mechanisms and their applications in micromechanical devices. In: IEEE Micro Electro Mechanical Systems, MEMS, 20-22 Feb. 1989 , Salt Lake City, UT (pp. pp. 126-132).

Elwenspoek, M.C. and Lammerink, T.S.J. and Miyake, R. and Fluitman, J.H.J. (1994) Micro liquid handling systems. In: Onder de loep genomen, miniturisatie en microsysteemtechnologie, 1994, Veldhoven (pp. pp. 1-14).

Fluitman, Jan H. and Berg, Albert van den and Lammerink, Theo S. (1994) Micromechanical components for µTAS. In: MicroTAS '94 Workshop, (Invited speaker), November 21-22, 1994, Enschede, The Netherlands (pp. pp. 73-83).

Fluitman, Jan H.J (1994) Micro systems technology. In: IEEE Custom Integrated Circuits Conference, CICC, 1-4 May 1994, San Diego, CA, USA (pp. pp. 471-478).

Gui, Chengqun and Legtenberg, Rob and Tilmans, Harrie A.C. and Fluitman, Jan H.J and Elwenspoek, Miko (1995) Nonlinearity and hysteresis of resonant strain gauges. In: Micro Electro Mechanical Systems, MEMS '95, January 29 - February 2, 1995, Amsterdam, the Netherlands (pp. pp. 157-162).

Imai, S. and Burger, G.J. and Lammerink, T.S.J. and Fluitman, J.H.J. (1996) Fundamental study on a thin-film ae sensor for measurement of behavior of a multi-pad contact slider. In: 1996 IEEE International Magnetics Conference, INTERMAG '96, 9-12 April 1996, Seattle, WA, USA (pp. pp. 3675-3677).

Jansen, Henri and Gardeniers, Han and Fluitman, Jan (1995) A survey on the reactive ion etching of silicon in microtechnology. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 18-30).

Lammerink, T.S.J. and Berg, A. van den and Fluitman, J.H.J. (1994) Micro system array sensors. In: Sensor Technology Conference (pp. pp. 173-177).

Lammerink, T.S.J. and Spiering, V.L. and Elwenspoek, M. and Fluitman, J.H.J. and Berg, A. van den (1996) Modular concept for fluid handling systems: a demonstrator micro analysis system. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 389-394).

Lammerink, T.S.J. and Tas, N.R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) Micromachined hydraulic astable multivibrator. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - 2 Feb. 1995, Amsterdam, The Netherlands (pp. pp. 13-18).

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Integrated micro-liquid dosing systems. In: Micro Electro Mechanical Systems, MEMS '93, Februari 7-10, 1993, Fort Lauderdale, FL, USA (pp. pp. 254-259).

Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J. (1991) Optical Excitation of Micro-Mechanical Resonators. In: IEEE Micro Electro Mechanical Systems, MEMS 1991: 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots', 30 January 1991 - 2 February 1991, Nara, Japan (pp. pp. 160-165).

Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrostatic microactuators with integrated gear linkages for mechanical power transmission. In: Ninth Annual International Workshop on Micro Electro Mechanical Systems, San Diego 1996, MEMS, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', 11-15 Feb 1996, San Diego, CA (pp. pp. 204-209).

Legtenberg, Rob and Berenschot, Erwin and Elwenspoek, Miko and Fluitman, Jan (1995) Electrostatic curved electrode actuators. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS '95, 29 Jan. - Feb. 1995, Amsterdam, The Netherlands (pp. pp. 37-42).

Miyake, Ryo and Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Micro mixer with fast diffusion. In: Micro Electro Mechanical Systems, MEMS '93: 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems', Februari 7-10, 1993, Fort Lauderdale, FL, USA (pp. pp. 248-253).

Pol, F.C.M. van de and Elwenspoek, M.C. and Lammerink, T.S.J. and Fluitman, J.H.J. (1990) A micromechanical viewing screen: principle and feasibility. In: 5th Sensors & Actuators Symposium, November 15-16, 1990, Enschede, The Netherlands (pp. pp. 249-253).

Prak, A. and Lammerink, T.S.J. and Fluitman, J.H.J. and Elwenspoek, M.C. (1993) Dynamic response of silicon resonant sensors. In: 7th International Conference on Solid-State Sensors and Actuators, Transducers 1993, June 7-10, 1993, Yokohama, Japan (pp. pp. 206-209).

Prak, Albert and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Selective mode excitation and detection of micromachined resonators. In: Micro Electro Mechanical Systems '92, MEMS, February 4-7, 1992, Travemuende, Germany (pp. pp. 220-225).

Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) An electrochemically actuated microvalve. In: ACTUATOR 96, 5th International Conference on New Actuators, 26-28 June 1996, Bremen, Germany (pp. pp. 41-44).

Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Electrochemical microvalve. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 21-24).

Rusu, C.R. and Smith, A. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Characterisation of a planar microcoil for implantable microsystems. In: Eurosensors X, European Conference on Solid-State Transducers, 8-11 September 1996, Leuven, Belgium (pp. pp. 343-346).

Smith, A. and Rusu, C.R. and Gardeniers, J.G.E. and Elwenspoek, M.C. and Fluitman, J.H.J. (1996) Design, fabrication and characterisation of a planar microcoil inductor for power supply in and data exchange with implantable microsystems. In: 1996 National Sensor Conference, March 20-21, 1996, Delft, The Netherlands (pp. pp. 35-38).

Spiering, V.L. and Berends, H. and Elwenspoek, M.C. and Fluitman, J.H.J. (1994) Sacrificial wafer bonding: a useful tool in micromachining. In: (pp. pp. 329-334).

Spiering, V.L. and Berenschot, J.W. and Elwenspoek, M. and Fluitman, J.H.J. (1994) Low temperature sacrificial wafer bonding for planarization after very deep etching. In: IEEE Workshop on Micro Electro Mechanical Systems, MEMS, January 25-28, 1994, Oiso, Japan (pp. pp. 69-74).

Spiering, Vincent L. and Lammerink, Theo S.J. and Jansen, Henri V. and Berg, Albert van den and Fluitman, Jan H.J (1996) Technologies and microstructures for separation techniques in chemical analysis. In: Micromachining and Microfabrication 1996, 14-15 October, 1996, Austin, Texas, USA (pp. pp. 2882-2887).

Tas, N.R. and Legtenberg, R. and Berenschot, J.W. and Elwenspoek, M.C. and Fluitman, J.H.J. (1995) The electrostatic shuffle motor. In: Micromechanics Europe Workshop, MME '95, 3-5 September 1995, Copenhagen, Denmark (pp. pp. 128-131).

Tilmans, Harrie A.C. and IJntema, Dominicus .J. and Fluitman, Jan H.J (1991) Single Element Excitation and Detection of (Micro-)Mechanical Resonators. In: 1991 International Conference on Solid-State Sensors and Actuators - Transducers '91, 24-28 June 1991, San Francisco, CA, USA (pp. pp. 533-537).

Patent

Jansen, Henricus Venantius and Boer, Meint Jelle de and Legtenberg, Rob and Elders, Job and Elwenspoek, Miko Curt and Fluitman, Johannes Hermanus Josephus (1996) Process for producing micromechanical structures by means of reactieve ion etching. Patent.

This list was generated on Wed Aug 20 05:16:55 2014 CEST.