A closed-loop large range of motion positioning system in MEMS

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Krijnen, B. and Brouwer, D.M. (2012) A closed-loop large range of motion positioning system in MEMS. In: Proceedings of the Conference on Precision Mechatronics, 2012-09-04 - 2012-09-05, Deurne, the Netherlands (pp. 73 - 75).

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