A closed-loop large range of motion positioning system in MEMS
Krijnen, B. and Brouwer, D.M. (2012) A closed-loop large range of motion positioning system in MEMS. In: Proceedings of the Conference on Precision Mechatronics, 2012-09-04 - 2012-09-05, Deurne, the Netherlands (pp. 73 - 75).
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|Item Type:||Conference or Workshop Item|
Engineering Technology (CTW)
|Link to this item:||http://purl.utwente.nl/publications/81985|
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