A large-stroke planar 2-DOF flexure-based positioning stage for vacuum environments

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Folkersma, Ger and Boer, Steven and Brouwer, Dannis and Herder, Just L. (2012) A large-stroke planar 2-DOF flexure-based positioning stage for vacuum environments. In: IDECT ASME 2012, 2012-08-12 - 2012-08-15, Chicago, Il, USA (pp. 1 - 8).

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Abstract:The growing demand from industry for high-precision systems introduces new challenges for positioning mechanisms. High accuracy and repeatability down
to the sub-micron scale are not uncommon. This is often combined with extreme environments, like high UV light sources, electron beams or vacuum. This
article focuses on the flexure mechanism for a largestroke planar XY-positioning system. Applications for such a flexure mechanism can be found in for example lithography, micromachining or microscopy.
Item Type:Conference or Workshop Item
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Engineering Technology (CTW)
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Link to this item:http://purl.utwente.nl/publications/81951
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