Local deposition and patterning of catalytic thin films in microsystems


Vereshchagina, E. and Bliznyuk, O. and Tiggelaar, R.M. and Altena-Schildkamp, K. and Gardeniers, J.G.E. (2012) Local deposition and patterning of catalytic thin films in microsystems. Journal of micromechanics and microengineering, 22 (4). 045023. ISSN 0960-1317

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Abstract:The local deposition of catalysts is desired in a wide range of catalytic microsystems (microreactors and sensors). In this study, we investigate technologies enabling deposition and patterning of catalyst thin films in a manner compatible with standard micromachining processes. We evaluate and compare deposition techniques based on a combination of a self-assembly, soft-lithography and conventional micromachining. Platinum (Pt) and palladium (Pd) were used as model catalysts, both as a sputtered thin film and as nanoparticles supported on γ-alumina. The thin films were characterized and tested in terms of their catalytic activity based on CO chemisorption measurements, stability and reproducibility
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Copyright:© IOP
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/81947
Official URL:https://doi.org/10.1088/0960-1317/22/4/045023
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