Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations

Dagamseh, A.M.K. and Wiegerink, R.J. and Lammerink, T.S.J. and Krijnen, G.J.M. (2012) Towards a high-resolution flow camera using artificial hair sensor arrays for flow pattern observations. Bioinspiration & Biomimetics, 7 (4). 046009. ISSN 1748-3182

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Abstract:	Flow-sensor arrays uncover the potential to measure spatio-temporal flow patterns rather than flow measurements at just a single point. We present in this paper the developments in design, fabrication and interfacing of biomimetic flow-sensor arrays, inspired by flow-sensitive organs (cerci) of crickets. For the purpose of high-resolution flow field visualization by our artificial hair flow-sensor arrays, various array-interfacing schemes are discussed and compared. Frequency division multiplexing (FDM) is shown to be an attractive method for efficient interrogation of capacitive array sensors. Using silicon-on-insulator technology with deep trench isolation structures, hair-based flow-sensors with differential capacitive read-out, arranged in single-chip arrays, have been successfully fabricated. FDM is implemented and used to interrogate individual hair sensors providing simultaneous real-time flow measurements from multiple hairs. This powerful approach is demonstrated by reconstruction of the field of a harmonic dipole field at the position of the hairs and by localizing this dipole source relative to the array elements.
Item Type:	Article
Copyright:	© IOP
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/81502
Official URL:	http://dx.doi.org/10.1088/1748-3182/7/4/046009
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