Novel test structures for dedicated temperature budget determination


Faber, Erik J. and Wolters, Rob A.M. and Schmitz, Jurriaan (2012) Novel test structures for dedicated temperature budget determination. IEEE Transactions on Semiconductor Manufacturing, 25 (3). pp. 339-345. ISSN 0894-6507

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Abstract:We present a novel method for determining the temperature budget of the process side of silicon substrates and chips, based on well-known silicide formation reactions of metal–Si systems and (four-point probe) resistance measurements. In this paper, we focus on the Pd–Si system that is most temperature sensitive in the range from 100 °C to 200 °C. A variety of test structures is introduced to exploit the specific properties of the diffusion-limited reaction between Pd and Si. Among others, this resulted in gap-based layouts that facilitate an extension of the temperature range to 350 °C. Designs and measurement results are presented, indicating the practicality and the robustness of the proposed technique.
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Copyright:© 2012 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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