Analytic theory of soft x-ray diffraction by lamellar multilayer gratings


Kozhevnikov, I.V. and Meer, R. van der and Bastiaens, H.M.J. and Boller, K.-J. and Bijkerk, F. (2011) Analytic theory of soft x-ray diffraction by lamellar multilayer gratings. Optics Express, 19 (10). pp. 9172-9184. ISSN 1094-4087

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Abstract:An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed.

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