Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by
direct UV-lithography


Scharnweber, Tim and Truckenmüller, Roman and Schneider, Andrea M. and Welle, Alexander and Reinhardt, Martina and Giselbrecht, Stefan (2011) Rapid prototyping of microstructures in polydimethylsiloxane (PDMS) by
direct UV-lithography.
Lab on a Chip, 11 (7). pp. 1368-1371. ISSN 1473-0197

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Abstract:Microstructuring of polydimethylsiloxane (PDMS) is a key step for many lab-on-a-chip (LOC) applications. In general, the structure is generated by casting the liquid prepolymer against a master. The production of the master in turn calls for special equipment and know how. Furthermore, a given master only allows the reproduction of the defined structure. We report on a simple, cheap and practical method to produce microstructures in already cured PDMS by direct UV-lithography followed by chemical development. Due to the available options during the lithographic process like multiple exposures, the method offers a high design flexibility granting easy access to complex and stepped structures. Furthermore, no master is needed and the use of pre-cured PDMS allows processing at ambient (light) conditions. Features down to approximately 5 µm and a depth of 10 µm can be realised. As a proof of principle, we demonstrate the feasibility of the process by applying the structures to various established soft lithography techniques.
Item Type:Article
Copyright:© 2011 RSC Publishing
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/80786
Official URL:https://doi.org/10.1039/c0lc00567c
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