Laser micro-machining of sharp edged receptor sites in pulyimide for fluid driven self-alignment

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Romer, G.R.B.E. and Arnaldo del Cerro, D. and Jorritsma, M.M.J. and Pohl, R. and Chang, B. and Liimatainen, V. and Zhou, Q. and Huis in 't Veld, A.J. (2012) Laser micro-machining of sharp edged receptor sites in pulyimide for fluid driven self-alignment. In: LPM 2012, 13th International Symposium on Laser Precision Microfabrication, 11-06-2012 - 14-06-2012, Washington, USA (pp. 1 - 7).

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Metis ID: 286894