Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening

Droogendijk, H. and Bruinink, C.M. and Sanders, R.G.P. and Dagamseh, A.M.K. and Wiegerink, R.J. and Krijnen, G.J.M. (2012) Improving the performance of biomimetic hair-flow sensors by electrostatic spring softening. Journal of Micromechanics and Microengineering, 22 (6). 065026. ISSN 0960-1317

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Abstract:	We report improvements in the detection limit and esponsivity of biomimetic hair-flow sensors by electrostatic spring softening. Applying a dc-bias voltage to our capacitive flow sensors results in a reduced sensory threshold, improving the mechanical transfer and flow detection limit by more than 6 dB. We further show that the sensor’s responsivity for airflows is also improved on application of high-frequency ac-bias voltages to the sensor’s capacitive structures with little sensitivity to the bias frequency.
Item Type:	Article
Copyright:	© 2012 Institute of Physics
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/80407
Official URL:	http://dx.doi.org/10.1088/0960-1317/22/6/065026
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