Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides

Ismail, N. and Chang, L. and Sengo, G. and Ridder de, R.M. and Pollnau, M. and Wörhoff, K. (2012) Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides. In: 16th European Conference on Integrated Optics, ECIO 2012, 18-20 April 2012, Sitges-Barcelona, Spain.

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Abstract:	We propose a novel technique for microlens fabrication which is compatible with silicon oxynitride technology, and enables the collimation of light exiting the waveguides into beams with divergence angles of ~0.52°.
Item Type:	Conference or Workshop Item
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/80169
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