Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides

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Ismail, N. and Chang, L. and Sengo, G. and Ridder, R.M. de and Pollnau, M. and Wörhoff, K. (2012) Polymer microlenses for collimating light from single-mode silicon oxynitride optical waveguides. In: 16th European Conference on Integrated Optics, ECIO 2012, 18-20 April 2012, Sitges-Barcelona, Spain.

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Abstract:We propose a novel technique for microlens fabrication which is compatible with silicon oxynitride technology, and enables the collimation of light exiting the waveguides into beams with divergence angles of ~0.52°.
Item Type:Conference or Workshop Item
Additional information:Paper 188
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/80169
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