Position control of a MEMS stage with integrated sensor

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Krijnen, B. and Brouwer, D.M. (2011) Position control of a MEMS stage with integrated sensor. In: Proceedings of the 11th Euspen international conference. EUSPEN, pp. 105-108.

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Link to this item:http://purl.utwente.nl/publications/79999
Conference URL:http://www.como2011.euspen.eu/
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