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Position control of a MEMS stage with integrated sensor
Krijnen, B. and Brouwer, D.M. (2011) Position control of a MEMS stage with integrated sensor. In: Proceedings of the 11th Euspen international conference. EUSPEN, pp. 105-108.
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| Item Type: | Book Section |
| Faculty: | Engineering Technology (CTW) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/79999 |
| Conference URL: | http://www.como2011.euspen.eu/ |
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